公开(公告)号：US10649003B2

公开(公告)日：2020-05-12

申请号：US15994616

申请日：2018-05-31

申请人： Board of Regents, The University of Texas System

发明人： Michael A. Cullinan ,  Liam Glazer Connolly

IPC分类号： G01Q10/02 ,  G01Q10/04 ,  G01Q60/24 ,  G01Q70/06 ,  G01Q60/34

摘要： Disclosed herein are devices, systems and methods for in-line, nanoscale metrology. One system comprises monolithic flexure mechanisms with integrated actuators that allow movement and positioning in two axes, with an extremely high degree of accuracy, of a structure comprising one or more scanning probes. This structure is suspended to prevent any destructive interference from a sample, which can be stationary or moving at a nonzero rate, and rigid or flexible in mechanical behavior. This system can be activated at startup and quickly actuate the structure to approach the surface of the sample. Once the system achieves the desired proximity between the one or more probes and the sample, the system maintains that position of the structure to a high degree of accuracy regardless of any disturbances. This array can be moved at varying speeds laterally to match the velocity of any continually moving substrates, thus enabling scanning of moving substrates.

公开(公告)号：US09709598B2

公开(公告)日：2017-07-18

申请号：US15167666

申请日：2016-05-27

申请人： IMPERIAL INNOVATIONS LIMITED

发明人： Pavel Novak ,  Chao Li ,  Andrew Shevchuk ,  Victor Petrovich Ostanin ,  David Klenerman ,  Yuri Evgenievich Korchev ,  Gregory Frolenkov ,  Richard Clarke

IPC分类号： G01Q10/00 ,  G01Q60/44 ,  G01Q10/02 ,  B82Y35/00 ,  G01Q10/06

CPC分类号： G01Q60/44 ,  B82Y35/00 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/065

摘要： A method for interrogating a surface using scanning ion conductance microscopy (SICM), comprising the steps of: a) repeatedly bringing a SICM probe into proximity with the surface at discrete, spaced locations in a region of the surface and measuring surface height at each location; b) estimating surface roughness or other characteristic for the region based upon the surface height measurements; and c) repeatedly bringing the probe into proximity with the surface at discrete, spaced locations in the region, the number and location of which is based upon the estimated surface roughness or other characteristic in the region, and obtaining an image of the region with a resolution adapted to the surface roughness or other characteristic.

公开(公告)号：US20110055982A1

公开(公告)日：2011-03-03

申请号：US12828590

申请日：2010-07-01

申请人： Masahiro WATANABE ,  Shuichi Baba ,  Toshihiko Nakata

发明人： Masahiro WATANABE ,  Shuichi Baba ,  Toshihiko Nakata

IPC分类号： G01Q10/02 ,  G01Q10/00 ,  G01Q10/04

CPC分类号： G01Q10/02 ,  G01Q10/04

摘要： It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range.

摘要翻译： 根据传统技术的扫描探针显微镜难以在宽范围内操作用于扫描和定位的探针并且在窄范围内进行高精度扫描。 根据本发明的扫描探针显微镜使用探头驱动致动器进行粗调和微调。 对于广泛的扫描和定位，粗调执行器切换到快速响应。 为了在窄范围内进行扫描，粗调调节执行器被切换为响应速度慢。 相反，位置噪声减小，微调致动器主要用于窄范围的扫描。 该探头不仅可以在很宽的范围内进行扫描和定位，还可以在窄范围内进行高精度扫描。

公开(公告)号：US06950179B2

公开(公告)日：2005-09-27

申请号：US10156921

申请日：2002-05-30

申请人： Hideki Ina ,  Koichi Sentoku ,  Takahiro Matsumoto

发明人： Hideki Ina ,  Koichi Sentoku ,  Takahiro Matsumoto

IPC分类号： G01B11/22 ,  B24B49/10 ,  B24B49/12 ,  G01B11/24 ,  G01B21/00 ,  G01B21/02 ,  G01B21/20 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q60/00 ,  G01Q60/24 ,  G01Q60/34 ,  G01Q60/38 ,  G01Q80/00 ,  G03F9/00 ,  G01N21/00 ,  G01N23/00

CPC分类号： G01Q30/02 ,  B24B37/005 ,  B24B37/042 ,  B24B49/10 ,  B24B49/12 ,  G01B11/2441 ,  G01B21/20 ,  Y10S977/868

摘要： A shape measuring method for measuring a shape of a surface of an object. The method includes a first measuring step for measuring the surface of the object by detecting light from the object, and a second measuring step for measuring the surface of the object by relatively scanning a probe and the object. A scanning speed changes on the basis of the result of the first measurement step.

摘要翻译： 一种用于测量物体表面形状的形状测量方法。 该方法包括：第一测量步骤，用于通过检测来自物体的光来测量物体的表面;以及第二测量步骤，用于通过相对扫描探针和物体来测量物体的表面。 基于第一测量步骤的结果，扫描速度改变。

公开(公告)号：US06861648B2

公开(公告)日：2005-03-01

申请号：US09919780

申请日：2001-07-31

申请人： Victor B. Kley

发明人： Victor B. Kley

IPC分类号： G01B7/31 ,  G01B7/34 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q30/00 ,  G01Q30/02 ,  G01Q40/00 ,  G01Q40/02 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q60/18 ,  G01Q60/24 ,  G01Q60/58 ,  G01Q70/02 ,  G01Q70/16 ,  G01Q80/00 ,  G02B21/00 ,  G03F1/72 ,  G03F1/84 ,  G03F7/20 ,  G11B5/00 ,  G11B5/23 ,  G11B5/31 ,  G11B9/00 ,  G11B11/12 ,  G11B11/16 ,  H02N1/00 ,  G01N23/00 ,  G01B5/28 ,  G01N13/16

CPC分类号： G01Q60/58 ,  G01B7/31 ,  G01N23/225 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q30/04 ,  G01Q40/00 ,  G01Q60/04 ,  G01Q60/16 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q70/02 ,  G01Q70/06 ,  G01Q80/00 ,  G02B21/002 ,  G03F1/72 ,  G03F1/84 ,  G03F7/2049 ,  G03F7/704 ,  G03F7/70616 ,  G11B5/232 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3166 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  G11B9/1427 ,  G11B9/1436 ,  G11B9/1445 ,  G11B9/1454 ,  G11B9/149 ,  G11B11/12 ,  G11B11/16 ,  G11B2005/0002 ,  G11B2005/0021 ,  H02N1/006 ,  Y10S977/855 ,  Y10S977/871

摘要： A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.

公开(公告)号：US5978326A

公开(公告)日：1999-11-02

申请号：US565897

申请日：1995-12-01

申请人： Shunichi Shido

发明人： Shunichi Shido

IPC分类号： G01R1/06 ,  G01B7/34 ,  G01N27/00 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q80/00 ,  G01Q90/00 ,  G02B21/00 ,  G11B5/40 ,  G11B7/095 ,  G11B9/00 ,  G11B9/14 ,  G11B19/04

CPC分类号： G11B9/1436 ,  B82Y10/00 ,  G01Q80/00 ,  G11B19/04 ,  G11B5/40 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/861 ,  Y10S977/872 ,  Y10S977/947 ,  Y10S977/953

摘要： An information processing apparatus, which utilizes a physical phenomenon occurring between a probe and a sample to detect information from the sample, includes a device for moving the probe in order to adjust a clearance between the probe and the sample, a device for detecting a physical phenomenon occurring between the probe and the sample, a device for generating a control signal for the moving device to change the clearance between the probe and the sample to a desired clearance, based on a result of detection of the detecting device, and a device for applying an offset signal to the control signal in order that the probe can move with respect to a reference located at a position deviated from a center position of a movable range of the probe by means of the moving device.

摘要翻译： 利用在探针和样本之间发生的物理现象来检测来自样品的信息的信息处理设备包括用于移动探针以调节探针与样品之间的间隙的装置，用于检测物理 基于检测装置的检测结果，产生用于移动装置的控制信号的装置，用于将探针和样品之间的间隙改变到所需的间隙的装置;以及用于 将偏移信号施加到控制信号，以便探针可以通过移动装置相对于位于偏离探头的可移动范围的中心位置的位置的基准移动。

公开(公告)号：US5672816A

公开(公告)日：1997-09-30

申请号：US448004

申请日：1995-05-23

申请人： Sang-il Park ,  Ian R. Smith ,  Michael D. Kirk

发明人： Sang-il Park ,  Ian R. Smith ,  Michael D. Kirk

IPC分类号： G01Q10/02 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q30/18 ,  G01Q70/04 ,  G02B21/00 ,  G02B21/26 ,  G02B21/06 ,  G01B9/04 ,  G01N21/01 ,  G01N21/84

CPC分类号： G01Q10/02 ,  B82Y35/00 ,  G01Q30/025 ,  G02B21/002 ,  G02B21/26 ,  Y10S977/87

摘要： A large scale horizontal translation stage for a microscope or other instrument particularly a scanning probe microscope is disclosed. The translation stage is provided with air bearings which allow it to float over a planar surface. The translation stage is kinematically mounted on a guiding member such that the horizontal position of the translation stage is defined by the guiding member but the translation stage is free to move in a direction perpendicular to the planar surface. To position a sample, the air bearings are actuated and the guiding member moves the translation stage to a desired position. An attractive force, preferably suction in the air bearings, is then applied to hold the translation stage firmly against the supporting surface while the sample is analyzed. The preferred embodiment includes two optical microscopes. The first optical microscope is directed substantially perpendicular to the plane of the sample and has a focal point which coincides with the surface of the sample when it is being positioned by the translation stage. The second optical microscope is directed obliquely and focused on the probe.

摘要翻译： 公开了用于显微镜或其他仪器，特别是扫描探针显微镜的大型水平平移平台。 平移台设有空气轴承，允许其浮在平面上。 平移台被运动地安装在引导构件上，使得平移台的水平位置由引导构件限定，但是平移台可以在垂直于平面的方向上自由移动。 为了定位样品，空气轴承被致动并且引导构件将平移台移动到期望的位置。 然后施加吸引力，优选在空气轴承中的吸力，以在分析样品时将平移台牢固地保持在支撑表面上。 优选实施例包括两个光学显微镜。 第一光学显微镜被定向为基本上垂直于样品的平面，并且具有当通过平移台定位时与样品表面重合的焦点。 第二光学显微镜倾斜地定向并聚焦在探头上。

公开(公告)号：US5371365A

公开(公告)日：1994-12-06

申请号：US11906

申请日：1993-02-01

申请人： Miyoko Watanabe ,  Koichi Mizushima ,  Tomio Ono ,  Tsuyoshi Kobayashi ,  Satoshi Itoh

发明人： Miyoko Watanabe ,  Koichi Mizushima ,  Tomio Ono ,  Tsuyoshi Kobayashi ,  Satoshi Itoh

IPC分类号： G01B7/34 ,  G01Q10/00 ,  G01B21/30 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/10 ,  G01Q60/16 ,  G01Q70/04 ,  G01Q70/14 ,  G01Q70/16 ,  H01J37/252 ,  H01L41/18

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q10/04 ,  Y10S977/879

摘要： There is provided a scanning probe microscopy comprising a probe 6 situated to face the surface of an sample 1, a first piezoelectric element 8 for moving the sample 1 and the probe 6 relative to each other in a first direction perpendicular to the surface of the sample, and second and third piezoelectric elements 3 and 4 for moving the probe and the sample relative to each other in second and third directions perpendicular to the first direction, thereby enabling the probe to scan the surface of the sample, wherein at least one of the first to third piezoelectric elements 8, 3 and 4, which is closest to the sample 1, is formed of a single crystal.

摘要翻译： 提供了扫描探针显微镜，其包括位于样品1的表面上的探针6，用于在垂直于样品表面的第一方向上相对于彼此移动样品1和探针6的第一压电元件8 以及用于在与第一方向垂直的第二和第三方向上相对于彼此移动探针和样品的第二和第三压电元件3和4，从而使得探针能够扫描样品的表面，其中至少一个 最靠近样品1的第一至第三压电元件8,3和4由单晶形成。

公开(公告)号：US5325010A

公开(公告)日：1994-06-28

申请号：US108400

申请日：1993-08-18

申请人： Karl-Heinz Besocke ,  Martin Teske ,  Josef Frohn ,  Francis J. Wolf

发明人： Karl-Heinz Besocke ,  Martin Teske ,  Josef Frohn ,  Francis J. Wolf

IPC分类号： B25J7/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q60/16 ,  G02B21/32 ,  G12B1/00 ,  H01J37/20 ,  H01L41/09 ,  H01L41/08

CPC分类号： G01Q10/04 ,  B25J7/00 ,  B82Y35/00 ,  G01Q60/16 ,  H01J37/20 ,  H02N2/025 ,  H02N2/046 ,  H02N2/067

摘要： A micromanipulator for the movement of an object relative to a treatment or analyzing position so that at least a part of the surface of the object can be treated or analyzed. The micromanipulator possesses a plurality of kinematic elements which support the object or an object holder and which, for this purpose, are equipped with a support for the object or the object holder. For the implementation of micromovements, the kinematic elements are piezo-electrically displaceable. The object is supported on at least one of the kinematic elements in such a manner that there can also be concurrently implemented micromovement and macromovements normal to the treatment or analysis plane of the object.

摘要翻译： 一种用于物体相对于处理或分析位置移动以使物体表面的至少一部分能被处理或分析的显微操纵器。 微操纵器具有多个运动元件，其支撑物体或物体保持器，并且为此目的，配备有用于物体或物体保持器的支撑件。 为了实现微移动，运动学元件是压电可位移的。 该物体以至少一个运动学元件被支撑，使得可以同时实现与物体的处理或分析平面垂直的微运动和大运动。

公开(公告)号：US5142145A

公开(公告)日：1992-08-25

申请号：US548671

申请日：1990-07-05

申请人： Masatoshi Yasutake

发明人： Masatoshi Yasutake

IPC分类号： H01J37/20 ,  G01B7/34 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/02 ,  G01Q30/20 ,  G01Q60/10 ,  H01J37/22 ,  H01J37/28

CPC分类号： H01J37/28 ,  B82Y35/00 ,  G01Q30/025 ,  G01Q60/16 ,  Y10S977/861

摘要： A composite apparatus including a scanning tunneling microscope linked to an optical microscope or electron microscope, wherein the focal length obtained while observing the surface of a sample with the optical or electron microscope or SEM sample is recorded, and, based on this length, the speed (hereinafter referred to as the Z crude drive) at which the gap between the STM needle and the sample approaches the tunneling region (approximately 10.ANG.) is controlled and the calibration throughput is improved.

摘要翻译： 一种复合装置，包括与光学显微镜或电子显微镜连接的扫描隧道显微镜，其中记录用光学或电子显微镜或SEM样本观察样品表面时获得的焦距，并且基于该长度，速度 （以下称为Z原油驱动），STM针和样品之间的间隙接近隧道区（约10安培），并且校准通过量得到改善。