带双扩散的条形栅隧穿场效应晶体管及其制备方法

    公开(公告)号:WO2014082451A1

    公开(公告)日:2014-06-05

    申请号:PCT/CN2013/079013

    申请日:2013-07-08

    Applicant: 北京大学

    Abstract: 一种带双扩散的条形栅调制型隧穿场效应晶体管(TFET)及其制备方法,属于CMOS场效应晶体管逻辑器件与电路领域。隧穿场效应晶体管包括一个半导体衬底(1)、一个高掺杂源区(7)、一个高掺杂漏区(6),一个双扩散源区(5)、一个栅介质层(2)和一个控制栅(3),控制栅(3)为栅长大于栅宽的条形结构,控制栅(3)的一侧与高掺杂漏区(6)连接,控制栅(3)的另一侧向高掺杂源区(7)横向延伸,位于控制栅(3)下的区域为沟道区,控制栅(3)的栅宽小于2倍的源耗尽层宽度,双扩散源区(5)和高掺杂源区(7)的掺杂区域一致,双扩散源区(5)和高掺杂漏区(6)的掺杂类型一致,位于高掺杂源区(7)部分的控制栅下的沟道区有双扩散源掺杂杂质。这种TFET器件的性能得到提高且制备方法简单。

    APPLICATIONS FOR AND TUNNELING DEVICE
    6.
    发明申请
    APPLICATIONS FOR AND TUNNELING DEVICE 审中-公开
    应用和隧道装置

    公开(公告)号:WO02095832A3

    公开(公告)日:2003-10-16

    申请号:PCT/US0215461

    申请日:2002-05-16

    Abstract: A detector (10A) for detecting electromagnetic radiation incident thereon over a desired range of frequencies exhibits a given responsivity and includes an output and first and second non-insulating layers (14), which layers are spaced apart such that a given voltage can be applied thereacross. The first non-insulating layer (12) is formed of a metal, and the first and second non-insulating layers are configured to form an antenna structure for receiving electromagnetic radiation over the desired range of frequencies. The detector further includes an arrangement disposed between the first and second non-insulating layers and configured to serve as a transport of electrons between the first and second non-insulating layers as a result of the electromagnetic radiation being received at the antenna structure. The arrangement includes at least a first layer of an amorphous material (16) such that the transport of electrons includes, at least in part, transport by means of resonant tunneling, and such that at least a portion of the electromagnetic radiation incident on the antenna is converted at the output to an electrical signal having an intensity which depends on the given responsivity.

    Abstract translation: 用于检测在期望频率范围内入射到其上的电磁辐射的检测器(10A)具有给定的响应度,并且包括输出和第一和第二非绝缘层(14),这些层间隔开以使得可以施加给定的电压 跨过。 第一非绝缘层(12)由金属形成,并且第一和第二非绝缘层被配置为形成用于在期望的频率范围上接收电磁辐射的天线结构。 检测器还包括设置在第一和第二非绝缘层之间并且被配置为作为电磁辐射在天线结构处被接收的结果而在第一和第二非绝缘层之间的电子传输的布置。 该布置包括至少第一层非晶材料(16),使得电子的传输至少部分地通过谐振隧道传输,并且使得入射在天线上的至少一部分电磁辐射 在输出端被转换成具有取决于给定响应度的强度的电信号。

    HETEROJUNCTION BIPOLAR TRANSISTOR WITH TUNNELLING MIS EMITTER JUNCTION
    8.
    发明申请
    HETEROJUNCTION BIPOLAR TRANSISTOR WITH TUNNELLING MIS EMITTER JUNCTION 审中-公开
    具有隧道式发射体结的异相双极晶体管

    公开(公告)号:WO2005022580A8

    公开(公告)日:2005-06-09

    申请号:PCT/AU2004001184

    申请日:2004-09-02

    Abstract: A method and structure are provided for a high performance heterojunction bipolar transistor which is suited to compound semiconductor systems such as gallium arsenide (GaAs) and which utilises an emitter junction formed from a plurality of metal layers and a plurality of ultra-thin insulating layers. The metal layers chosen have work functions which form a tunnelling Metal-Insulator-Semiconductor Junction when deposited on top of an ultra-thin insulating layer. The insulating layer may be made from a rare-earth oxide such as gadolinium oxide (Gd2O3) which is epitaxially grown on a compound semiconductor substrate and possibly covered with a second ultra-thin insulating layer.

    Abstract translation: 提供了适用于化合物半导体系统如砷化镓(GaAs)并利用由多个金属层和多个超薄绝缘层形成的发射极结的高性能异质结双极晶体管的方法和结构。 选择的金属层具有在沉积在超薄绝缘层顶上时形成隧道金属 - 绝缘体 - 半导体结的工作功能。 绝缘层可以由诸如氧化钆(Gd 2 O 3)的稀土氧化物制成,其在化合物半导体衬底上外延生长并且可能被第二超薄绝缘层覆盖。

    APPLICATIONS FOR AND TUNNELING DEVICE
    9.
    发明申请
    APPLICATIONS FOR AND TUNNELING DEVICE 审中-公开
    应用和隧道装置

    公开(公告)号:WO2002095832A2

    公开(公告)日:2002-11-28

    申请号:PCT/US2002/015461

    申请日:2002-05-16

    Abstract: A detector for detecting electromagnetic radiation incident thereon over a desired range of frequencies exhibits a given responsivity and includes an output and first and second non-insulating layers, which layers are spaced apart such that a given voltage can be applied there across. The first non-insulating layer is formed of a metal, and the first and second non-insulating layers are configured to form an antenna structure for receiving electromagnetic radiation over the desired range of frequencies. The detector further includes an arrangement disposed between the first and second non-insulating layers and configured to serve as a transport of electrons between the first and second non-insulating layers as a result of the electromagnetic radiation being received at the antenna structure. The arrangement includes at least a first layer of an amorphous material such that the transport of electrons includes, at least in part, transport by means of resonant tunneling, and such that at least a portion of the electromagnetic radiation incident on the antenna is converted at the output to an electrical signal having an intensity which depends on the give responsivity.

    Abstract translation: 用于检测在期望频率范围上入射到其上的电磁辐射的检测器具有给定的响应性,并且包括输出和第一和第二非绝缘层,这些层被间隔开,使得可以在其上施加给定的电压。 第一非绝缘层由金属形成,并且第一和第二非绝缘层被配置为形成用于在期望的频率范围上接收电磁辐射的天线结构。 检测器还包括设置在第一和第二非绝缘层之间并且被配置为作为电磁辐射在天线结构处被接收的结果而在第一和第二非绝缘层之间的电子传输的布置。 该装置包括至少第一层非晶材料,使得电子的传输至少部分地通过谐振隧道传输,并且使得入射在天线上的至少一部分电磁辐射被转换为 输出到具有取决于给出响应度的强度的电信号。

    GRAPHENE DOUBLE-BARRIER RESONANT TUNNELING DEVICE
    10.
    发明申请
    GRAPHENE DOUBLE-BARRIER RESONANT TUNNELING DEVICE 审中-公开
    GRAPHENE双重障碍物共鸣隧道装置

    公开(公告)号:WO2016102751A1

    公开(公告)日:2016-06-30

    申请号:PCT/FI2015/050838

    申请日:2015-12-01

    Inventor: ASTLEY, Michael

    Abstract: An apparatus comprising: a fermion source nanolayer (90); a first insulating nanolayer (92); a fermion transport nanolayer (94); a second insulating nanolayer (96); a fermion sink nanolayer (98); a first contact for applying a first voltage to the fermion source nanolayer; a second contact for applying a second voltage to the fermion sink nanolayer; and a transport contact for enabling an electric current via the fermion transport nanolayer. In a particular example, the apparatus comprises three graphene sheets (90, 94, 98) interleaved with two-dimensional Boron-Nitride (hBN) layers (92, 96).

    Abstract translation: 一种装置,包括:费米子源纳米层(90); 第一绝缘纳米层(92); 费米子运输纳米层(94); 第二绝缘纳米层(96); 费米子槽纳米层(98); 用于将第一电压施加到费米籽源纳米层的第一接触; 用于向所述费米子槽纳米层施加第二电压的第二接触; 以及用于通过费米子运输纳米层实现电流的运输接触件。 在具体实例中,该装置包括与二维硼氮化物(hBN)层(92,96)交错的三个石墨烯片(90,94,98)。

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