Abstract:
A method of void-less metal filling of recessed features in a substrate is provided. The method includes providing a substrate containing recessed features therein, and filling the recessed features with a metal, where the metal is deposited in the recessed features by gas phase deposition at substrate temperature and a gas pressure that promotes bottom-up void-less filling. According to one embodiment, the metal is selected from the group consisting of Ru, Rh, Os, Pd, Ir, Pt, Ni, Co, W, and a combination thereof.
Abstract:
A method of manufacturing a structure includes forming an alternating stack of insulating layers (42) and spacer material layers (32) over a substrate (9), dividing the alternating stack into a first alternating stack (100, 300) and a second alternating stack (200), the first alternating stack having first stepped surfaces and the second alternating stack having second stepped surfaces, forming at least one memory stack structure through the first alternating stack (100), each of the at least one memory stack structure including charge storage regions, a tunneling dielectric, and a semiconductor channel, replacing portions of the insulating layers in the first alternating stack with electrically conductive layers (46) while leaving intact portions of the insulating layers (42) in the second alternating stack, and forming a contact via structure (84) through the second alternating stack to contact a peripheral semiconductor device under the second stack.
Abstract:
A semiconductor device includes a substrate, a III- nitride buffer layer on the substrate, an N-channel transistor including a Ill-nitride N-channel layer on one portion of the buffer layer, and a Ill-nitride N-barrier layer for providing electrons on top of the N-channel layer, wherein the N-barrier layer has a wider bandgap than the N-channel layer, a P-channel transistor including a Ill-nitride P-barrier layer on another portion of the buffer layer for assisting accumulation of holes, a III- nitride P-channel layer on top of the P-barrier layer, wherein the P-barrier layer has a wider bandgap than the P- channel layer, and a Ill-nitride cap layer doped with P- type dopants on top of the P-channel layer.
Abstract:
A multi-layer semiconductor device includes two or more semiconductor sections, each of the semiconductor sections including at least at least one device layer having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The electrical connections correspond to first conductive structures. The multi-layer semiconductor device also includes one or more second conductive structures which are provided as through oxide via (TOV) or through insulator via (TIV) structures. The multi-layer semiconductor device additionally includes one or more silicon layers. At least a first one of the silicon layers includes at least one third conductive structure which is provided as a through silicon via (TSV) structure. The multi-layer semiconductor device further includes one or more via joining layers including at least one fourth conductive structure. A corresponding method for fabricating a multi-layer semiconductor device is also provided.
Abstract:
A multi-layer semiconductor device includes two or more semiconductor sections, each of the semiconductor sections including at least at least one device layer having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The electrical connections correspond to first conductive structures. The multi-layer semiconductor device also includes one or more second conductive structures which are provided as through oxide via (TOV) or through insulator via (TIV) structures. The multi-layer semiconductor device additionally includes one or more silicon layers. At least a first one of the silicon layers includes at least one third conductive structure which is provided as a through silicon via (TSV) structure. The multi-layer semiconductor device further includes one or more via joining layers including at least one fourth conductive structure. A corresponding method for fabricating a multi-layer semiconductor device is also provided.
Abstract:
실시 예의 발광 소자는 기판과, 기판 위에 서로 이격되어 배치된 제1 내지 제M(여기서, M은 2 이상의 양의 정수) 발광 셀 및 제1 내지 제M 발광 셀을 전기적으로 직렬 연결하는 제1 내지 제M-1 연결 배선을 포함하고, 제m (여기서, 1 ≤ m ≤ M) 발광 셀은 기판 위에 순차적으로 배치된 제1 도전형 반도체층, 활성층 및 제2 도전형 반도체층을 포함하고, 제n (여기서, 1 ≤ n ≤ M-1) 연결 배선은 제n 발광 셀의 제1 도전형 반도체층과 제n+1 발광 셀의 제2 도전형 반도체층을 연결하며, 서로 이격된 복수의 제1 가지 배선을 포함한다.
Abstract:
Methods of forming microelectronic interconnect under device structures are described. Those methods and structures may include forming a device layer in a first substrate, forming at least one routing layer in a second substrate, and then coupling the first substrate with the second substrate, wherein the first substrate is bonded to the second substrate.
Abstract:
Es wird ein organisches optoelektronisches Bauelement angegeben, das ein organisches Licht emittierende Element (100) und ein organisches Schutzdiodenelement (200) aufweist, wobei das organische Licht emittierende Element (100) einen organischen funktionellen Schichtenstapel (103) mit zumindest einer organischen Licht emittierenden Schicht zwischen zwei Elektroden (102, 104) aufweist und das organische Schutzdiodenelement (200) einen organischen funktionellen Schichtenstapel (203) mit einem organischen pn-Übergang zwischen zwei Elektroden (202, 204) aufweist und mit dem organischen Licht emittierenden Element (100) auf einem gemeinsamen Substrat (101) in lateral benachbarten Flächenbereichen angeordnet ist.