摘要:
Die vorliegende Erfindung betrifft eine LTCC-Substratstruktur mit mindestens einem Kontaktelement zum Anschluss eines Drahtleiters, das eine erste, auf und/oder in dem keramischen Substrat angeordnete Metallisierung (20) zur elektrischen Verbindung mit dem Drahtleiter aufweist, wobei die erste Metallisierung (20) vorzugsweise Silber oder einer Silberlegierung enthält. Zur Vermeindung von Via-Posting oder eines Plattierungsprozesses sind eine die erste Metallisierung (20) überdeckende Diffusionssperrschicht (22), welche mit einem lokal wirkenden Aufbringungsverfahren hergestellt ist, und eine auf der Diffusionssperrschicht (22) angeordnete zweite Metallschicht (24) vorgesehen, wobei die zweite Metallschicht (24) vorzugsweise Gold und/oder Platin und/oder eine Legierung enthält, die mindestens eines dieser Elemente aufweist. Die Erfindung gibt außerdem ein Herstellungsverfahren für eine derartige LTCC-Substratstruktur an.
摘要:
This invention relates to a process which produces flat, distortion-free, zero-shrink, low-temperature co-fired ceramic (LTCC) bodies, composites, modules or packages from precursor green (unfired) laminates of three or more different dielectric tape chemistries that are configured in an uniquely or pseudo-symmetrical arrangement in the z-axis of the laminate.
摘要:
The present invention is to provide a fabrication method for metallized ceramics substrate comprising the steps of: forming a first conductive paste layer containing metallic powder on a sintered ceramics substrate; forming a second conductive paste layer containing metallic powder of which average particle diameter is different from that of metallic powder constituting the first conductive paste layer; and forming a first conductive layer and a second conductive layer by firing the first conductive paste layer and the second conductive paste layer, wherein surface roughness of the first conductive layer and the second conductive layer is different. By this method, it is possible to secure airtightness of the metallized ceramics substrate even if it is a multilayered substrate having a plurality of metallized layers.
摘要:
A high-reliability ceramic substrate that does not cause a heat-cycle-induced stress concentration on a conductor and that include a glass layer partially overlaying the conductor, the glass layer having satisfactory adhesion to the main body of the ceramic substrate and having satisfactory plating resistance is provided. An electronic apparatus and a method for producing the ceramic substrate are provided. The glass layer is a glass layer 13 which is arranged to extend from part of the conductor formed on a first main surface of the main body of the ceramic substrate to the first main surface of the main body of the ceramic substrate and which has a double-layered structure including a first glass sublayer 11 composed of a first glass material; and a second glass sublayer 12 formed on the first glass sublayer and composed of a second glass material different from the second glass material constituting the first glass sublayer, the first glass material having more satisfactory adhesion to the main body of the ceramic substrate than the second glass material, and the first glass material having more satisfactory plating resistance than the first glass material.
摘要:
An object of this invention is to get a circuit board and a semiconductor module with high endurance against thermal cycles, and which is hard to be broken under thermal cycles, even if thick metal circuit board and thick metal heat sink are used, corresponding to high power operation of semiconductor chip. This circuit board comprises, a insulating-ceramics substrate, a metal circuit plate bonded to one face of said insulating-ceramics substrate, a metal heat sink bonded to another face of said insulating-ceramics substrate, wherein (t 1 2 -t 2 2 ) /t c 2 /K c , thickness of said metal circuit plate is t 1 , thickness of said metal heat sink is t 2 , and internal fracture toughness value of said insulating ceramics substrate is K.
摘要:
A metal-ceramic composite substrate having excellent heat dissipation and a method of manufacturing such a metal-ceramic composite substrate at low cost are disclosed. A metal-ceramic composite substrate (10) comprises a metal substrate (11), a ceramic layer (12) formed on the metal substrate (11), an electrode layer (13) formed on the ceramic layer (12) and a solder layer (14) formed on the electrode layer (13) wherein the ceramic layer (12) is in the form of a thin film of a ceramic. Forming the ceramic layer (12) in the form of a thin film of aluminum nitride provides a metal-ceramic composite substrate (10) of excellent heat dissipating property for an electronic circuit.
摘要:
A member for a semiconductor device of low price, capable of forming a high quality plating layer on a surface, having heat conductivity at high temperature (100°C) of more than or equal to 180 W/m·K and toughness that will not cause breaking due to screwing, and will not cause solder breaking due to heat stress when it is bonded to other member with solder, and a production method thereof are provided. A member for a semiconductor device (1) having a coefficient of thermal expansion ranging from 6.5 × 10 -6 /K to 15 × 10 -6 /K inclusive, and heat conductivity at 100°C of more than or equal to 180 W/m ·K, has: a base material (11) formed of an aluminum-silicon carbide composite material starting from powder material in which particulate silicon carbide is dispersed in aluminum or aluminum alloy, and the content of the silicon carbide is from 30% by mass to 85% by mass inclusive; and a superficial layer (12) containing aluminum or aluminum alloy starting from a melt material bonded on top and bottom faces of the base material (11).