Method for producing electronic device and electronic device
    73.
    发明公开
    Method for producing electronic device and electronic device 有权
    一种用于制备电器的过程,和电器

    公开(公告)号:EP1883101A3

    公开(公告)日:2012-05-30

    申请号:EP07119863.4

    申请日:2005-05-31

    申请人: Nikon Corporation

    IPC分类号: H01L21/00 H01L51/10

    摘要: Upon fixing fine particulate active element members AE1 to AE3, which are carbon nanotube, rod-shaped semiconductor crystal, or the like, in an electronic device at predetermined positions thereof respectively, a method for producing an electronic device includes: dispersing the fine particulate active element members in a dielectric liquid 12 and filling the liquid in a space between a process-objective substrate 20 and a mask 1 which is placed opposite to the substrate and which has predetermined pattern electrodes P1C, P1L, P1R formed therein; and applying a predetermined voltage to the predetermined electrodes to concentrate the fine particulate active element members at positions which correspond to positions of the pattern electrodes, respectively. In this state, a light is irradiated to the substrate and the fine particulate active element members in the liquid so as to fix the fine particulate active element members to the substrate by a photochemical reaction. Thus, a high-performance electronic device using carbon nanotubes or rod-shaped semiconductor crystal can be manufactured at low cost.