SEMICONDUCTOR DEVICE AND METHOD OF FORMING INSULATING LAYERS AROUND SEMICONDUCTOR DIE
    3.
    发明公开
    SEMICONDUCTOR DEVICE AND METHOD OF FORMING INSULATING LAYERS AROUND SEMICONDUCTOR DIE 审中-公开
    半导体器件和在半导体模片周围形成绝缘层的方法

    公开(公告)号:EP3211670A1

    公开(公告)日:2017-08-30

    申请号:EP17152948.0

    申请日:2017-01-25

    IPC分类号: H01L25/00

    摘要: A semiconductor device has a semiconductor wafer including a plurality of semiconductor die and a plurality of contact pads formed over a first surface of the semiconductor wafer. A trench is formed partially through the first surface of the semiconductor wafer. An insulating material is disposed over the first surface of the semiconductor wafer and into the trench. A conductive layer is formed over the contact pads. The conductive layer can be printed to extend over the insulating material in the trench between adjacent contact pads. A portion of the semiconductor wafer opposite the first surface of the semiconductor wafer is removed to the insulating material in the trench. An insulating layer is formed over a second surface of the semiconductor wafer and side surfaces of the semiconductor wafer. The semiconductor wafer is singulated through the insulating material in the first trench to separate the semiconductor die.

    摘要翻译: 一种半导体器件具有半导体晶片,该半导体晶片包括多个半导体管芯和形成在该半导体晶片的第一表面上的多个接触焊盘。 沟槽部分穿过半导体晶片的第一表面形成。 绝缘材料设置在半导体晶片的第一表面上并进入沟槽。 导电层形成在接触垫上。 导电层可以被印刷以在相邻接触垫之间的沟槽中的绝缘材料上延伸。 与半导体晶片的第一表面相对的半导体晶片的一部分被去除到沟槽中的绝缘材料。 绝缘层形成在半导体晶片的第二表面和半导体晶片的侧表面上。 半导体晶片通过第一沟槽中的绝缘材料被分离以分离半导体管芯。