摘要:
In order to achieve both a reduction in thermal resistance and an improvement in thermal deformation absorbing property of a semiconductor device having a packaging structure in which a semiconductor chip 1 is electrically connected to conductive members 3a and 3b via bonding members 2a and 2b, the bonding members 2a and 2b each includes a stacked structure provided with, in the order from the side close to the semiconductor chip 1, a nanospring layer 4 configured from a plurality of springs having a nano-order size, a planar layer 5 supporting the plurality of springs, and a bonding layer 6. The thickness of the nanospring layer 4 is larger than the thickness of the bonding layer 6, and the thickness of the bonding layer 6 is larger than the thickness of the planar layer 5.
摘要:
A semiconductor device according to the present invention, having an Au-based solder layer (3) sandwiched between a semiconductor element (1) and a Cu substrate (2) made mainly of Cu, in which the semiconductor device includes: a dense metal film (23) which is arranged between the Cu substrate (2) and the Au-based solder layer (3), and has fine slits (24) patterned to have a predetermined shape in a plan view; and fine structures (4) with dumbbell-like cross section, which have Cu and Au as main elements, and are each buried in the Cu substrate (2), the Au-based solder layer (3), and the fine slits (24) of the dense metal film (23).
摘要:
The bonding apparatus comprises: a substrate supporting section (5) for supporting a substrate (1), on which semiconductor devices (3) have been adhered, in a state where the substrate (1) is separated from a clamping face (6a, 17a) of a second die (6, 17); and a heating/pressing section (10, 28) for heating and pressing the substrate (1) supported by the substrate supporting section (5) onto a clamping face (10a, 28b) of a first die (8, 24). The heating/pressing section (10, 28) moves the substrate (1) toward the clamping face (10a, 28b) of the first die (8, 24) so as to preheat the substrate (1) and the semiconductor devices (3). The semiconductor devices (3) are pressed onto the clamping face (10a, 28b) so as to cure the non-conductive adhesive (2) and bond the bumps (3a) of the semiconductor devices (3) to terminal sections (1a) of the substrate (1).
摘要:
In a heat insulating load jig 11 of the present invention, a solder material 14 having a melting point or a solidus temperature in a range between a thermal resistance temperature of a semiconductor chip 13 and a temperature 100°C below the thermal resistance temperature is interposed between a circuit board 12 and the semiconductor chip 13; a heat insulating body 17 is placed on an upper side of the semiconductor chip 13 in this state; a metal weight 16 is disposed on the heat insulating body 17; and load is applied to the semiconductor chip 13 while the solder material 14 is melted and solidified.
摘要:
A compression bonding device capable of packaging electric components on both sides of a substrate is provided. A compression bonding device 1 includes first and second pressing rubbers 15, 25. Electric components 32, 33 can be simultaneously packaged on the front face and the rear face of a substrate 31 by sandwiching the substrate 31 between the first and second pressing rubbers 15, 25. The electric components 32, 33 are not subjected to a force for horizontally moving them because the first and second pressing rubbers 15, 25 are prevented from horizontal extension by a first dam member 16. Thus, the electric components 32, 33 are connected to the substrate 31 without misalignment, thereby obtaining a highly reliable electric device 30a.
摘要:
In a method for producing an electronic part mounting substrate wherein a heat sinking metal base plate 12 is bonded to one side of a ceramic substrate 10, and one side of a circuit forming metal plate 14 is bonded to the other side thereof, an electronic part 16 being mounted on the other side of the circuit forming metal plate 14, the ceramic substrate 10 and the electronic part 16 are arranged in a mold so that the ceramic substrate 10 is spaced from the electronic part 16, and then, a molten metal is injected into the mold so that the molten metal contacts both sides of the ceramic substrate 10 and the electronic part 16. Then, the mold is cooled to solidify the molten metal, to form a heat sinking metal base plate on one side of the ceramic substrate 10 so that the heat sinking metal base plate is bonded directly to the one side of the ceramic substrate 10, and to form a circuit forming metal plate on the other side of the ceramic substrate 10 so that one side of the circuit forming metal plate is bonded directly to the other side of the ceramic substrate 10. When the circuit forming metal plate is formed, the electronic part is bonded directly to the other side of the circuit forming metal plate.
摘要:
A compression bonding device capable of packaging electric components on both sides of a substrate is provided. A compression bonding device includes pressing rubbers (85,95). Electric components can be simultaneously packaged on the front face and the rear face of a substrate by sandwiching the substrate between the pressing rubbers (85,95). The electric components are not subjected to a force for horizontally moving them because the pressing rubbers (85,95) are prevented from horizontal extension by a dam member (86). Thus, the electric components are connected to the substrate without misalignment, thereby obtaining a highly reliable electric device.
摘要:
In a method for producing an electronic part mounting substrate wherein a heat sinking metal base plate 12 is bonded to one side of a ceramic substrate 10, and one side of a circuit forming metal plate 14 is bonded to the other side thereof, an electronic part 16 being mounted on the other side of the circuit forming metal plate 14, the ceramic substrate 10 and the electronic part 16 are arranged in a mold so that the ceramic substrate 10 is spaced from the electronic part 16, and then, a molten metal is injected into the mold so that the molten metal contacts both sides of the ceramic substrate 10 and the electronic part 16. Then, the mold is cooled to solidify the molten metal, to form a heat sinking metal base plate on one side of the ceramic substrate 10 so that the heat sinking metal base plate is bonded directly to the one side of the ceramic substrate 10, and to form a circuit forming metal plate on the other side of the ceramic substrate 10 so that one side of the circuit forming metal plate is bonded directly to the other side of the ceramic substrate 10. When the circuit forming metal plate is formed, the electronic part is bonded directly to the other side of the circuit forming metal plate.
摘要:
L'appareil ci-décrit permet de réaliser des interconnexions microélectroniques intra-puces et puce-puce dans une configuration de circuit intégré ultra-dense. Des socles de compression (20) sont utilisés pour former des interconnexions mécaniques et électriques sous l'action d'un ressort avec des bornes conductrices sur un assemblage (28) de puces et d'interfaces de puces mésa afin d'obtenir un vaste réseau multipuces (23) sur un substrat d'interconnexions (24). Des procédés sont également décrits pour fabriquer les socles de compression (20).