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公开(公告)号:JP2012160739A
公开(公告)日:2012-08-23
申请号:JP2012056972
申请日:2012-03-14
发明人: AKIBA TOSHIHIKO , YASUMURA BUNJI , SATO NARIHISA , ABE HIROMI
IPC分类号: H01L23/12 , H01L21/3205 , H01L21/66 , H01L21/768 , H01L23/522
CPC分类号: H01L24/06 , H01L2224/0401 , H01L2224/04042 , H01L2224/11 , H01L2224/16225 , H01L2224/48091 , H01L2224/48465 , H01L2224/4941 , H01L2224/73265 , H01L2924/15311 , H01L2924/00014 , H01L2924/00
摘要: PROBLEM TO BE SOLVED: To provide technology for downsizing, especially for a narrow pitch of a semiconductor device.SOLUTION: A semiconductor device comprises a pad 2 provided on a semiconductor chip 1C, a passivation film 3 having an opening 11 on the pad 2 in a probe region 10A and a connection region 10B and provided on the semiconductor chip 1C, a passivation film 5 having an opening 12 on the pad 2 in the connection region 10B and provided on the pad 2 and the passivation film 3, and rewiring 7 electrically connected with the pad 2 and provided on the connection region 10B and the passivation film 5. A probe scar 100 is present on the pad 2 in the probe region 10A provided on the outer periphery side of the semiconductor chip 1C than the connection region 10B. The rewiring 7 is present extending from the connection region 10B to the center part side of the semiconductor chip 1C.
摘要翻译: 要解决的问题:提供用于小型化的技术,特别是对于半导体器件的窄间距。 解决方案:半导体器件包括设置在半导体芯片1C上的焊盘2,在探针区域10A中的焊盘2上具有开口11的钝化膜3和设置在半导体芯片1C上的连接区域10B, 钝化膜5在连接区域10B中的焊盘2上具有开口12,并且设置在焊盘2和钝化膜3上,以及与焊盘2电连接并设置在连接区域10B和钝化膜5上的重新布线7。 探针疤痕100存在于设置在半导体芯片1C的外周侧的探针区域10A中的焊盘2上,而不是连接区域10B。 存在从连接区域10B延伸到半导体芯片1C的中心部分侧的再布线7。 版权所有(C)2012,JPO&INPIT
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公开(公告)号:JP2014140074A
公开(公告)日:2014-07-31
申请号:JP2014085372
申请日:2014-04-17
申请人: Toshiba Corp , 株式会社東芝
发明人: SANO YUICHI , IMOTO TAKASHI , TAKEBE NAOTO , ISHIDA KATSUHIRO , HONDA TOMOMI , KUMAGAI YASUSHI
IPC分类号: H01L21/60 , H01L25/065 , H01L25/07 , H01L25/18
CPC分类号: H01L2224/32145 , H01L2224/48091 , H01L2224/48479 , H01L2224/4941 , H01L2224/73265 , H01L2224/78301 , H01L2224/85045 , H01L2224/85186 , H01L2924/00014 , H01L2224/48471 , H01L2224/4554
摘要: PROBLEM TO BE SOLVED: To provide a semiconductor device with a reduced amount of wires, a method of manufacturing the semiconductor device, and a manufacturing device for the semiconductor device.SOLUTION: There is provided a semiconductor device including a first semiconductor element 5, a first electrode 10, a second electrode 20, a ball portion 30, and a wire 40. The first electrode is electrically connected to the first semiconductor element 5. The ball portion is provided on the first electrode. The wire connects the ball portion and the second electrode. The thickness 41t of a folding portion 41 of the wire located on the opposite side of the second electrode is thinner than the diameter 40d of the wire.
摘要翻译: 要解决的问题:提供一种半导体器件,其数量减少,半导体器件的制造方法和半导体器件的制造装置。提供一种半导体器件,包括第一半导体元件5, 第一电极10,第二电极20,球部30和导线40.第一电极电连接到第一半导体元件5.球部设置在第一电极上。 线连接球部和第二电极。 位于第二电极相反侧的线的折叠部41的厚度41t比线的直径40d薄。
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公开(公告)号:JP2015015496A
公开(公告)日:2015-01-22
申请号:JP2014191127
申请日:2014-09-19
申请人: 株式会社東芝 , Toshiba Corp
发明人: TAKAGI KAZUTAKA
IPC分类号: H01L21/338 , H01L21/60 , H01L23/12 , H01L29/812 , H01P1/04 , H01P5/02 , H01P5/08
CPC分类号: H01L23/66 , H01L24/06 , H01L24/48 , H01L24/49 , H01L29/41758 , H01L29/42316 , H01L2223/6611 , H01L2223/6644 , H01L2223/6655 , H01L2224/05553 , H01L2224/05599 , H01L2224/0603 , H01L2224/45015 , H01L2224/48011 , H01L2224/48091 , H01L2224/48227 , H01L2224/4911 , H01L2224/49111 , H01L2224/49113 , H01L2224/49171 , H01L2224/49175 , H01L2224/4941 , H01L2224/85399 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01014 , H01L2924/01015 , H01L2924/01021 , H01L2924/01023 , H01L2924/01031 , H01L2924/01033 , H01L2924/01082 , H01L2924/014 , H01L2924/10161 , H01L2924/10329 , H01L2924/1305 , H01L2924/1306 , H01L2924/13064 , H01L2924/14 , H01L2924/1423 , H01L2924/1461 , H01L2924/15153 , H01L2924/1517 , H01L2924/19041 , H01L2924/19051 , H01L2924/19107 , H01L2924/20753 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , H03F1/565 , H03F3/211 , H03F2200/216 , H03F2200/222 , H03F2200/255 , H03F2200/387 , H03F2200/423 , H01L2224/45099 , H01L2924/00
摘要: 【課題】入出力ボンディングワイヤ若しくは入出力伝送線路のインダクタンス分布を調整して、信号位相を同相化し、利得および出力電力を向上させ、かつ各FETセルのアンバランス動作による発振を抑制する。【解決手段】ゲート端子電極G1〜G10、ソース端子電極S1〜S11およびドレイン端子電極Dを有するFET24と、FETに隣接する入力回路パターン17,出力回路パターン18と、ゲート端子電極G1〜G10と入力回路パターン17とを接続する複数の入力ボンディングワイヤ12,12Lと、ドレイン端子電極Dと出力回路パターン18とを接続する複数の出力ボンディングワイヤ14,14Lとを備え、複数の入力ボンディングワイヤ12,12Lのインダクタンス分布を調整して、入力信号の位相を同相化し、かつ複数の出力ボンディングワイヤ14,14Lのインダクタンス分布を調整して、出力信号の位相を同相化した高周波半導体装置25。【選択図】図1
摘要翻译: 要解决的问题:调整输入/输出接合线或输入/输出传输线的电感分布,匹配信号相位,增强增益和输出功率,抑制每个FET单元不平衡运行引起的振荡。解决方案: 高频半导体器件25包括:具有栅极端子电极G1〜G10的FET24,源极端子电极S1〜S11以及漏极端子电极D; 与FET相邻的输入电路图案17和输出电路图案18; 连接栅极电极G1〜G10的多个输入接合线12和12L以及输入电路图案17; 以及连接漏极端子电极D和输出电路图案18的多个输出接合线14和14L。高频半导体器件25调节多个输入接合线12和12L的电感分布,使输入的相位相匹配 信号,调整多个输出接合线14和14L的电感分布,并匹配输出信号的相位。
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公开(公告)号:JP2016048742A
公开(公告)日:2016-04-07
申请号:JP2014173454
申请日:2014-08-28
申请人: ルネサスエレクトロニクス株式会社
发明人: 矢島 明
IPC分类号: H01L21/3205 , H01L21/768 , H01L23/522 , H01L23/12
CPC分类号: H01L24/45 , H01L24/03 , H01L24/05 , H01L24/09 , H01L24/43 , H01L24/49 , H01L2224/02166 , H01L2224/02317 , H01L2224/0235 , H01L2224/0237 , H01L2224/02373 , H01L2224/0239 , H01L2224/024 , H01L2224/04042 , H01L2224/05024 , H01L2224/05082 , H01L2224/05144 , H01L2224/05155 , H01L2224/0519 , H01L2224/43985 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/48463 , H01L2224/4941 , H01L2924/01047 , H01L2924/13091
摘要: 【課題】再配線を有する半導体装置の製造コストを低減する。また、再配線を有する半導体装置の信頼性を向上する。 【解決手段】実施の形態1における特徴点は、図5に示すように、単層のポリイミド樹脂膜PIに開口部OP2と再配線溝WDとが一体的に形成されている点にある。これにより、単層のポリイミド樹脂膜PIに再配線RDLを形成することができるため、再配線RDLを構成する配線材料(銀)のマイグレーションを抑制することができる。 【選択図】図5
摘要翻译: 要解决的问题:为了降低具有重新布线的半导体器件的制造成本; 并且提高了具有重新布线的半导体器件的可靠性。解决方案:实施例1中的半导体器件具有如图所示的单层聚酰亚胺树脂膜PI一体地形成开口OP2和重新布线槽WD的特征。 由于这样可以在单层聚酰亚胺树脂膜PI中形成再布线RDL,所以可以抑制构成再布线RDL的布线材料(银)的迁移。图5
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公开(公告)号:JP2010161348A
公开(公告)日:2010-07-22
申请号:JP2009269885
申请日:2009-11-27
申请人: Toshiba Corp , 株式会社東芝
发明人: TAKAGI KAZUTAKA
IPC分类号: H01L21/338 , H01L21/822 , H01L21/8222 , H01L21/8232 , H01L23/12 , H01L27/04 , H01L27/06 , H01L27/082 , H01L27/095 , H01L29/778 , H01L29/812 , H03F3/68
CPC分类号: H01L23/66 , H01L24/06 , H01L24/48 , H01L24/49 , H01L29/41758 , H01L29/42316 , H01L2223/6611 , H01L2223/6644 , H01L2223/6655 , H01L2224/05553 , H01L2224/05599 , H01L2224/0603 , H01L2224/45015 , H01L2224/48011 , H01L2224/48091 , H01L2224/48227 , H01L2224/4911 , H01L2224/49111 , H01L2224/49113 , H01L2224/49171 , H01L2224/49175 , H01L2224/4941 , H01L2224/85399 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01014 , H01L2924/01015 , H01L2924/01021 , H01L2924/01023 , H01L2924/01031 , H01L2924/01033 , H01L2924/01082 , H01L2924/014 , H01L2924/10161 , H01L2924/10329 , H01L2924/1305 , H01L2924/1306 , H01L2924/13064 , H01L2924/14 , H01L2924/1423 , H01L2924/1461 , H01L2924/15153 , H01L2924/1517 , H01L2924/19041 , H01L2924/19051 , H01L2924/19107 , H01L2924/20753 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , H03F1/565 , H03F3/211 , H03F2200/216 , H03F2200/222 , H03F2200/255 , H03F2200/387 , H03F2200/423 , H01L2224/45099 , H01L2924/00
摘要: PROBLEM TO BE SOLVED: To improve gain and output power by matching signal phases by adjusting inductance distributions of input and output bonding wires or input and output transmission lines, and to suppress an oscillation due to unbalanced operation of each FET cell. SOLUTION: A high-frequency semiconductor device 25 includes: a field effect transistor 24 including gate terminal electrodes G1-G10, source terminal electrodes S1-S11, and a drain terminal electrode D; an input circuit pattern 17 and an output circuit pattern 18 which are disposed adjoining the field effect transistor; a plurality of input bonding wires 12, 12L configured to connect the gate terminal electrodes G1-G10 and the input circuit pattern 17; and a plurality of output bonding wires 14, 14L configured to connect the drain terminal electrode D and the output circuit pattern 18, whereby the phase of an input signal is matched by adjusting an inductance distribution of a plurality of input bonding wires 12, 12L, and whereby the phase of an output signal is matched by adjusting an inductance distribution of a plurality of output bonding wires 14, 14L. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译: 要解决的问题:通过调整输入和输出接合线或输入和输出传输线的电感分布,通过调整信号相位来提高增益和输出功率,并抑制由于每个FET单元的不平衡操作引起的振荡。 解决方案:高频半导体器件25包括:栅极端子电极G1-G10,源极电极S1-S11和漏极端子电极D的场效应晶体管24; 设置在场效应晶体管旁边的输入电路图案17和输出电路图案18; 配置为连接栅极端子电极G1-G10和输入电路图案17的多个输入接合线12,12L; 以及多个输出接合线14,14L,其被配置为连接漏极端子电极D和输出电路图案18,由此通过调节多个输入接合线12,12L的电感分布来匹配输入信号的相位, 并且由此通过调整多个输出接合线14,14L的电感分布来匹配输出信号的相位。 版权所有(C)2010,JPO&INPIT
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公开(公告)号:JP6437246B2
公开(公告)日:2018-12-12
申请号:JP2014173454
申请日:2014-08-28
申请人: ルネサスエレクトロニクス株式会社
发明人: 矢島 明
IPC分类号: H01L21/3205 , H01L21/768 , H01L23/522 , H01L23/12
CPC分类号: H01L24/45 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/09 , H01L24/43 , H01L24/48 , H01L24/49 , H01L25/0657 , H01L2224/02166 , H01L2224/02317 , H01L2224/0235 , H01L2224/0237 , H01L2224/02373 , H01L2224/0239 , H01L2224/024 , H01L2224/04042 , H01L2224/05024 , H01L2224/05082 , H01L2224/05124 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/0519 , H01L2224/05644 , H01L2224/0603 , H01L2224/43985 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48145 , H01L2224/48463 , H01L2224/49175 , H01L2224/4941 , H01L2225/06506 , H01L2225/06527 , H01L2924/01047 , H01L2924/13091 , H01L2924/00014
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公开(公告)号:JP2016167523A
公开(公告)日:2016-09-15
申请号:JP2015046517
申请日:2015-03-09
申请人: 株式会社東芝
IPC分类号: H01L25/065 , H01L25/07 , H01L25/18 , H01L25/00
CPC分类号: H01L25/0652 , H01L21/565 , H01L22/32 , H01L23/3114 , H01L24/49 , H01L25/50 , H01L2224/04042 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/48235 , H01L2224/49105 , H01L2224/4941 , H01L2224/73265 , H01L2225/0651 , H01L2225/06562 , H01L2225/06565 , H01L23/3121 , H01L24/32 , H01L24/48 , H01L24/73 , H01L25/18 , H01L2924/00014 , H01L2924/1434 , H01L2924/1436 , H01L2924/1438 , H01L2924/14511 , H01L2924/15192 , H01L2924/15311 , H01L2924/15313 , H01L2924/181 , H01L2924/19041 , H01L2924/19043 , H01L2924/19105
摘要: 【課題】設計自由度を向上させることのできる半導体装置及び電子機器を提供する。 【解決手段】実施形態の半導体装置は、基板と、前記基板の第一面に実装された半導体記 憶素子と前記基板の該第一面に、前記半導体素子と並んで実装され、前記半導体記憶素子 側に位置する縁部以外に端子を有する略矩形状のコントローラと、前記半導体記憶素子と 、前記コントローラとを纏めて封止する封止手段と、を備え、前記コントローラの該端子 はボンディングワイヤによって前記基板と電気的に接続される。 【選択図】図1
摘要翻译: 要解决的问题:提供能够提高设计灵活性的半导体器件和电子设备。解决方案:根据实施例的半导体器件包括:衬底; 安装在所述基板的第一表面上的半导体存储元件; 基本上矩形的控制器,与所述半导体元件并排地安装在所述衬底的所述第一表面上,并且在除了位于所述半导体存储元件侧的边缘部分之外的部分处具有端子; 以及用于将半导体存储元件和控制器封装为块的封装装置。 控制器的端子通过接合线与基板电连接。选择图:图1
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公开(公告)号:JP5658874B2
公开(公告)日:2015-01-28
申请号:JP2009269885
申请日:2009-11-27
申请人: 株式会社東芝
IPC分类号: H01L21/338 , H01L21/822 , H01L21/8222 , H01L21/8232 , H01L23/12 , H01L27/04 , H01L27/06 , H01L27/082 , H01L27/095 , H01L29/778 , H01L29/812 , H03F3/68
CPC分类号: H01L23/66 , H01L24/06 , H01L24/48 , H01L24/49 , H01L29/41758 , H01L29/42316 , H01L2223/6611 , H01L2223/6644 , H01L2223/6655 , H01L2224/05553 , H01L2224/05599 , H01L2224/0603 , H01L2224/45015 , H01L2224/48011 , H01L2224/48091 , H01L2224/48227 , H01L2224/4911 , H01L2224/49111 , H01L2224/49113 , H01L2224/49171 , H01L2224/49175 , H01L2224/4941 , H01L2224/85399 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01014 , H01L2924/01015 , H01L2924/01021 , H01L2924/01023 , H01L2924/01031 , H01L2924/01033 , H01L2924/01082 , H01L2924/014 , H01L2924/10161 , H01L2924/10329 , H01L2924/1305 , H01L2924/1306 , H01L2924/13064 , H01L2924/14 , H01L2924/1423 , H01L2924/1461 , H01L2924/15153 , H01L2924/1517 , H01L2924/19041 , H01L2924/19051 , H01L2924/19107 , H01L2924/20753 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , H03F1/565 , H03F3/211 , H03F2200/216 , H03F2200/222 , H03F2200/255 , H03F2200/387 , H03F2200/423 , H01L2224/45099 , H01L2924/00
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