System and method to reduce pre-back-grinding process defects
    4.
    发明授权
    System and method to reduce pre-back-grinding process defects 有权
    减少前后磨削过程缺陷的系统和方法

    公开(公告)号:US08571699B2

    公开(公告)日:2013-10-29

    申请号:US12879278

    申请日:2010-09-10

    CPC classification number: G05B19/41875 B24B37/005

    Abstract: Processing defects arising during processing of a semiconductor wafer prior to back-grinding are reduced with systems and methods of sensor placement. One or more holes are bored into a chuck table for receiving semiconductor wafers, or a support table next to the chuck table. One or more sensors are disposed in the holes for monitoring parameters during a pre-back-grinding (PBG) process. A control box converts a set of signals received from the sensors. A computer-implemented process control tool receives the converted set of signals from the control box and determines whether the PBG process will continue.

    Abstract translation: 通过传感器放置的系统和方法,减少了在后研磨之前处理半导体晶片期间产生的加工缺陷。 将一个或多个孔钻入用于接收半导体晶片的卡盘台,或者在卡盘台旁边的支撑台。 一个或多个传感器设置在孔中,用于在前置后研磨(PBG)过程期间监测参数。 控制箱转换从传感器接收的一组信号。 计算机实现的过程控制工具从控制箱接收转换的信号集,并确定PBG过程是否继续。

    Safety helmet inner lining adjustable for suitable wearing

    公开(公告)号:US11517064B2

    公开(公告)日:2022-12-06

    申请号:US17039882

    申请日:2020-09-30

    Inventor: Cheng-Ting Chen

    Abstract: The present invention provides a safety helmet inner lining adjustable for suitable wearing, consisting of: a covering body, which has an inner side surface that contacts a user's head and an outer side surface relative to the inner side surface; at least one interlayer pocket, which is disposed on the outer side surface of the covering body; and at least one cushiony pad, which is suitable for placement inside the interlayer pocket. A user is able to place the cushiony pads of suitable thickness into the interlayer pockets at preset positions according to the user's to head shape and dimensions. The inner lining is then put onto the head and a safety helmet put on top. The cushiony pads enable correcting the interspace between the user's head and the safety helmet, thereby allowing suitable and perfect fitting of the safety helmet that ensures safety of the wearer.

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