-
公开(公告)号:US20240310741A1
公开(公告)日:2024-09-19
申请号:US18673669
申请日:2024-05-24
发明人: Yu-Fu Lin , Shih-Chang Shih , Chia-Chen Chen
CPC分类号: G03F7/70858 , B01D53/0407 , B01D53/30 , C23C16/4412 , B01D2257/108 , B01D2257/553 , B01D2257/93 , B01D2258/0216
摘要: An exhaust system for discharging from semiconductor manufacturing equipment a hazardous gas includes: a main exhaust pipe above the semiconductor manufacturing equipment and having a top surface on a first side and a bottom surface on a second side, a first branch pipe connected to a source of a gas mixture containing the hazardous gas on the second side and connected to the main exhaust pipe through the top surface, a second branch pipe connected to a gas box on the second side and connected to the main exhaust pipe through the bottom surface, and a detector on the second branch pipe configured to detect presence of the hazardous gas and downstream to the gas box. The first and the second branch pipes are connected to the main exhaust pipe at a first location and a second location, respectively. The first location is more upstream than the second location.
-
公开(公告)号:US12012423B1
公开(公告)日:2024-06-18
申请号:US17957234
申请日:2022-09-30
CPC分类号: C07F1/08 , B01D53/58 , B01D53/62 , B01D67/0079 , B01D69/12 , B01D71/022 , B01D71/82 , B01D2257/406 , B01D2257/504 , B01D2257/93 , B01D2258/0283 , B01D2323/39
摘要: A composition having the structure of formula I:
[R—Ar—(COOH)2]x[Ar—(COOH)3]2-xM32+ (I)
is provided where M is Mn, Cu, Co, Fe, Zn, Cd, Ni, or Pt; R is a bromine, nitro, a primary amine, C1-C4 alkyl secondary amine, C1-C4 alkyl oxy, Br—(C1-C4 alkyl), NO2—(C1-C4 alkyl), a mercaptan, and reaction products of any of the aforementioned with acyl chlorides of the formulas: CH3(CH2)mC(O)Cl, or CH3(CH(C1-C4 alkyl)CH2)mC(O)Cl, or CH3(CH2)m-Ph-(CH2)pC(O)Cl, where Ph is a C6 phenyl or C6 phenyl with one or more hydrogens replaced with F, C1-C4 fluoroalkyl, or C1-C4 perfluoroalkyl; m is independently in each occurrence an integer of 0 to 12 inclusive; p is an integer of 0 to 36 inclusive, to form an amide, a thioamide, or an ester; Ar is a 1,3,5-modified phenyl, and 1.4>x>0. A process of synthesis thereof and the use to chemically modify a gaseous reactant are also provided.-
公开(公告)号:US20230346012A1
公开(公告)日:2023-11-02
申请号:US17926363
申请日:2020-05-20
IPC分类号: A24F7/04 , A24F1/30 , A24F7/02 , B01D53/04 , B01J20/08 , B01J20/10 , B01J20/16 , B01J20/28 , A61L9/014
CPC分类号: A24F7/04 , A24F1/30 , A24F7/02 , B01D53/0415 , B01D53/0446 , B01J20/08 , B01J20/103 , B01J20/165 , B01J20/28016 , A61L9/014 , B01D2253/104 , B01D2253/106 , B01D2253/102 , B01D2253/20 , B01D2257/80 , B01D2257/90 , B01D2257/93 , B01D2259/4541 , A61L2209/22
摘要: A “MINITOX FAN” mouthpiece with a ventilated air flow for a smoking article comprises a housing, a smoking pipe, said housing being configured from two hollow conical detachable parts for connection to one another and to cylindrical appendices at opposite ends for connection to the smoking pipe and to a hose, respectively; a cylindrical cartridge with a cap, which is disposed inside the housing and has a closed bottom with a lip and through slots across the entire surface of the housing; an insert in the form of a hollow cylinder of smaller diameter for placement inside the cartridge, said insert having a closed bottom, a tightly sealing cap and through slots on the cylindrical surface, at each end of which are appendices, having a diameter that is not greater than the diameter of granules of aluminum oxide and silica gel, for suspended placement of the insert inside the cartridge, wherein the cartridge comprises segments containing a moisture-retaining sorbent and an odor-absorbing sorbent in the form of particles or granules, and the insert contains a detoxifying sorbent; and a fan in the form of a wheel with a shaft.
-
公开(公告)号:US11681232B2
公开(公告)日:2023-06-20
申请号:US17233203
申请日:2021-04-16
发明人: Yu-Fu Lin , Shih-Chang Shih , Chia-Chen Chen
CPC分类号: G03F7/70858 , B01D53/0407 , B01D53/30 , C23C16/4412 , B01D2257/108 , B01D2257/553 , B01D2257/93 , B01D2258/0216
摘要: The present disclosure provides an exhaust system for discharging from semiconductor manufacturing equipment a hazardous gas. The exhaust system includes: a main exhaust pipe having a top surface and a bottom surface; a first branch pipe including an upstream end coupled to a source of a gas mixture containing the hazardous gas and a downstream end connected to the main exhaust pipe through the top surface; a second branch pipe including a downstream end connected to the main exhaust pipe through the bottom surface; and a detector configured to detect presence of the hazardous gas in the second branch pipe.
-
公开(公告)号:US20180050920A1
公开(公告)日:2018-02-22
申请号:US15680397
申请日:2017-08-18
CPC分类号: C01F17/0043 , B01D53/00 , B01D53/02 , B01D2253/116 , B01D2257/93 , B01J20/226 , C01F17/0068 , C07C55/07 , C07C69/36 , G21F9/12
摘要: To provide a new compound with pores finely tunable in size so as to take up a specific element and release the specific element taken up in the pores as necessary, a synthesis method of the new compound, and a separation and recovery agent. The new compound represented by the following molecular formula: (NH4)[Ln(C2O4)2(H2O)] wherein Ln represents a lanthanide selected from Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb, and Lu.
-
公开(公告)号:US09815023B2
公开(公告)日:2017-11-14
申请号:US14430159
申请日:2013-09-20
发明人: Margit Schuschke , Frank Klose , Andane Stein , Arno Tissler , Olaf Buettner , Grigory Reznikov
CPC分类号: B01D53/8671 , B01D53/86 , B01D53/864 , B01D53/96 , B01D2251/2062 , B01D2251/2067 , B01D2255/1021 , B01D2255/1023 , B01D2255/2061 , B01D2255/2063 , B01D2255/2065 , B01D2255/20707 , B01D2255/20776 , B01D2255/2092 , B01D2255/30 , B01D2255/502 , B01D2257/93 , B01D2258/0233 , B01D2258/025 , B01D2258/0283 , B01D2258/0291 , B01J23/10 , B01J23/30 , B01J23/44 , B01J29/7415 , B01J38/02
摘要: The invention relates to a method for purifying exhaust gas and for regenerating an oxidation catalytic converter, comprising treating the exhaust gas in an oxidation catalytic converter, which comprises a catalytically active material, which contains at least one noble metal and/or at least one base transition metal, wherein the oxidation catalytic converter is operated continuously or at times at a temperature that causes the oxidation of soot particles and/or carbon particles, and/or wherein the oxidation catalytic converter is periodically heated to a temperature that causes the oxidation of soot particles and/or carbon particles.
-
公开(公告)号:US09808756B2
公开(公告)日:2017-11-07
申请号:US15248537
申请日:2016-08-26
CPC分类号: B01D53/1493 , B01D53/025 , B01D53/46 , B01D53/80 , B01D53/82 , B01D2251/304 , B01D2251/604 , B01D2252/10 , B01D2253/1128 , B01D2255/20738 , B01D2257/00 , B01D2257/60 , B01D2257/93
摘要: A liquid suspension comprised of ferrous sulfide particles and method of using the same for the removal of selenium from industrial gas. Said liquid suspension may be (1) directly injected, or (2) coated onto or into a substrate and then injected into an industrial gas containing selenium to remove said selenium from the industrial gas stream in a dry scrubber system. Said liquid suspension of ferrous sulfide particles may also be used to remove selenium contained in industrial gases in a wet scrubber system.
-
公开(公告)号:US20170266642A1
公开(公告)日:2017-09-21
申请号:US15453056
申请日:2017-03-08
发明人: Manohara Gudiyor Veerabhadrappa , Hugh Christopher Greenwell , Gasan Selman Alabedi , John Adrian Hall , Andrew Whiting
CPC分类号: B01J23/02 , B01D53/02 , B01D53/62 , B01D53/81 , B01D53/8659 , B01D53/8671 , B01D2253/1124 , B01D2255/2045 , B01D2255/2047 , B01D2255/20746 , B01D2255/20753 , B01D2255/20761 , B01D2255/20792 , B01D2255/2092 , B01D2255/40 , B01D2255/702 , B01D2257/2042 , B01D2257/304 , B01D2257/504 , B01D2257/55 , B01D2257/60 , B01D2257/93 , B01J20/041 , B01J20/08 , B01J20/205 , B01J20/28028 , B01J20/3078 , B01J21/10 , B01J21/18 , B01J23/002 , B01J23/007 , B01J31/069 , B01J37/086 , B01J37/088 , B01J2220/46 , C02F1/281 , C02F1/283 , C02F2101/101 , C02F2101/103 , C02F2101/105 , C02F2101/12 , C02F2101/22 , Y02C10/08
摘要: Embodiments of the present disclosure are directed towards methods for preparing mixed-metal oxide particles by heating adamantane-intercalated layered double-hydroxide (LDH) particles at a reaction temperature of from 400° C. to 800° C. to form mixed-metal oxide particles. The adamantane-intercalated LDH particles have a general formula [M1-xAlx(OH)2](A)x.mH2O, where x is from 0.14 to 0.33, m is from 0.33 to 0.50, M is chosen from Mg, Ca, Co, Ni, Cu, or Zn, and A is adamantane carboxylate, and an aspect ratio greater than 100. The aspect ratio is defined by the width of an adamantane-intercalated LDH particle divided by the thickness of the adamantane-intercalated LDH particle. The mixed-metal oxide particles comprise a mixed-metal oxide phase containing M, Al or Fe, and carbon.
-
公开(公告)号:US09751768B2
公开(公告)日:2017-09-05
申请号:US15116252
申请日:2015-02-10
IPC分类号: C01B31/28 , B01D53/22 , C07C263/10 , B01D61/24 , B01D71/26 , B01D71/34 , B01D71/36 , B01D71/70 , C07C263/20
CPC分类号: C01B32/80 , B01D53/228 , B01D61/246 , B01D71/26 , B01D71/34 , B01D71/36 , B01D71/70 , B01D2257/93 , B01D2311/25 , B01D2325/38 , C07C263/10 , C07C263/20 , C07C2601/14 , Y02P20/582 , C07C265/14
摘要: A process for extracting a phosgene compound, comprising providing a membrane extracting unit comprising at least one extracting cell that comprises at least one membrane contactor module having at least two sides, a gas side and a liquid side; letting an initial gas stream comprising a phosgene compound flow on the gas side of the membrane contactor module; and letting an extractant liquid stream, suitable for dissolving a phosgene compound, flow on the liquid side of the membrane contactor module so that the extractant liquid stream absorbs the phosgene compound from the initial gas stream and provides a second extractant liquid stream enriched with the phosgene compound.
-
公开(公告)号:US20170216767A1
公开(公告)日:2017-08-03
申请号:US15486938
申请日:2017-04-13
发明人: Michael S. COX , Monique MCINTOSH , Colin John DICKINSON , Paul E. FISHER , Yutaka TANAKA , Zheng YUAN
CPC分类号: B01D53/32 , B01D53/54 , B01D53/64 , B01D53/70 , B01D53/76 , B01D2251/00 , B01D2251/10 , B01D2251/102 , B01D2251/104 , B01D2251/108 , B01D2251/20 , B01D2251/202 , B01D2251/204 , B01D2251/2062 , B01D2251/208 , B01D2251/502 , B01D2252/103 , B01D2257/55 , B01D2257/553 , B01D2257/556 , B01D2257/60 , B01D2257/7025 , B01D2257/93 , B01D2258/0216 , B01D2259/818 , B01J19/088 , B01J2219/0815 , B01J2219/0875 , B01J2219/0894 , H01J37/32091 , H01J37/321 , H01J37/3244 , H01J37/32522 , H01J37/32669 , H01J2237/002 , H01J2237/335 , Y02C20/20 , Y02C20/30
摘要: A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH4, H2O, H2, NF3, SF6, F2, HCl, HF, Cl2, and HBr. Representative condensing abating reagents include, for example, H2, H2O, O2, N2, O3, CO, CO2, NH3, N2O, CH4, and combinations thereof.
-
-
-
-
-
-
-
-
-