MICRO-EJECTOR AND METHOD OF MANUFACTURING THE SAME
    92.
    发明申请
    MICRO-EJECTOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
    微喷射器及其制造方法

    公开(公告)号:US20120147097A1

    公开(公告)日:2012-06-14

    申请号:US13116493

    申请日:2011-05-26

    CPC classification number: B41J2/14233 B41J2002/14403 Y10T29/49401

    Abstract: There are provided a micro-ejector and a method of manufacturing the same. The micro-ejector includes an upper substrate including an inlet into which a fluid is drawn from the outside and a chamber groove; a lower substrate including a reservoir groove to provide a reservoir storing the fluid drawn through the inlet; a piezoelectric actuator formed on the upper substrate and supplying a driving force for fluid ejection to a chamber; and at least one support protruding from a bottom of the reservoir groove so as to support the upper substrate.

    Abstract translation: 提供了微型喷射器及其制造方法。 微型喷射器包括:上部基板,其包括从外部引入流体的入口和腔室槽; 下部基板,包括储存槽,以提供储存通过所述入口抽出的流体的储存器; 压电致动器,其形成在所述上基板上并向腔室供给流体喷射的驱动力; 以及至少一个支撑件,其从所述储存器槽的底部突出以支撑所述上基板。

    Method of manufacturing ink-jet head
    93.
    发明授权
    Method of manufacturing ink-jet head 有权
    制造喷墨头的方法

    公开(公告)号:US08192640B2

    公开(公告)日:2012-06-05

    申请号:US12504221

    申请日:2009-07-16

    Abstract: A method of manufacturing an ink-jet head is disclosed. The method in accordance with an embodiment of the present invention includes: forming a dividing groove such that one surface of a piezoelectric element is divided corresponding to the position of the chamber; filling the dividing groove with a filler; bonding one surface of the piezoelectric element to one surface of the ink-jet head in which the chamber is formed; and polishing the other surface of the piezoelectric element such that the filler is exposed.

    Abstract translation: 公开了一种制造喷墨头的方法。 根据本发明的实施例的方法包括:形成分隔槽,使得压电元件的一个表面相应于腔室的位置被分开; 用填料填充分隔槽; 将压电元件的一个表面粘合到其中形成该腔室的喷墨头的一个表面; 并抛光压电元件的另一表面,使得填料被暴露。

    METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE
    94.
    发明申请
    METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号:US20120122286A1

    公开(公告)日:2012-05-17

    申请号:US13290285

    申请日:2011-11-07

    Abstract: In a method of manufacturing a semiconductor device, a first etching mask and a second etching mask are formed sequentially on a metal gate structure on a substrate and a first insulating interlayer covering a sidewall of the metal gate structure respectively. An opening is formed to expose a top surface of the substrate by removing a portion of the first insulating interlayer not overlapped with the first etching mask or the second etching mask. A metal silicide pattern is formed on the exposed top surface of the substrate. A plug on the metal silicide pattern is formed to fill a remaining portion of the opening. Further, a planarization layer may be used as the second etching mask.

    Abstract translation: 在制造半导体器件的方法中,依次在基板上的金属栅极结构和覆盖金属栅极结构的侧壁的第一绝缘夹层上形成第一蚀刻掩模和第二蚀刻掩模。 通过除去与第一蚀刻掩模或第二蚀刻掩模不重叠的第一绝缘夹层的一部分,形成开口以暴露基板的顶表面。 在衬底的暴露的顶表面上形成金属硅化物图案。 形成金属硅化物图案上的塞子以填充开口的剩余部分。 此外,可以使用平坦化层作为第二蚀刻掩模。

    Method of manufacturing ceramic probe card
    95.
    发明授权
    Method of manufacturing ceramic probe card 失效
    陶瓷探针卡的制造方法

    公开(公告)号:US08114303B2

    公开(公告)日:2012-02-14

    申请号:US12397923

    申请日:2009-03-04

    CPC classification number: G01R3/00 G01R1/06727

    Abstract: Provided is a method of manufacturing a ceramic probe card. A ceramic laminated body having a plurality of ceramic green sheets and an interlayer circuit including a conductive via and a conductive line formed in the plurality of ceramic green sheets is prepared. Then, at least one probe pin structure connected to the interlayer circuit is formed by selectively removing the plurality of photosensitive ceramic sheets having a ceramic powder and a photosensitive organic component on the ceramic laminated body necessarily, and by filling a metal material in a region from which the plurality of photosensitive ceramic sheets have been removed. Then, a ceramic substrate having the at least one probe pin structure is provided by simultaneously firing the ceramic laminated body and the photosensitive ceramic sheets, and by removing the photosensitive ceramic sheets.

    Abstract translation: 提供一种制造陶瓷探针卡的方法。 制备具有多个陶瓷生片的陶瓷层叠体和形成在多个陶瓷生片中的导电通孔和导电线的层间电路。 然后,通过在陶瓷层叠体上选择性地除去多个具有陶瓷粉末和感光性有机成分的感光陶瓷片而形成与层间电路连接的至少一个探针插脚结构,并且通过在 多个感光陶瓷片已被去除。 然后,通过同时烧制陶瓷层叠体和感光陶瓷片,并且通过除去感光陶瓷片来提供具有至少一个探针引脚结构的陶瓷基片。

    Inkjet head actuator and manufacturing method of the same
    96.
    发明授权
    Inkjet head actuator and manufacturing method of the same 有权
    喷墨头致动器及其制造方法相同

    公开(公告)号:US08100514B2

    公开(公告)日:2012-01-24

    申请号:US12314620

    申请日:2008-12-12

    Abstract: There are provided an inkjet head actuator and a manufacturing method of the same. The inkjet head actuator includes: a vibration plate having a recess formed in a top surface thereof; a first electrode formed to cover a bottom surface and a side wall of the recess; a piezoelectric body formed on the first electrode to fill the recess; and a second electrode formed on the piezoelectric body. The inkjet head actuator having the thin film piezoelectric body and the vibration plate ensures large vibration displacement.

    Abstract translation: 提供了一种喷墨头致动器及其制造方法。 喷墨头致动器包括:振动板,其具有形成在其顶表面中的凹部; 形成为覆盖所述凹部的底面和侧壁的第一电极; 形成在所述第一电极上以填充所述凹部的压电体; 以及形成在所述压电体上的第二电极。 具有薄膜压电体和振动板的喷墨头致动器确保了大的振动位移。

    Micro-ejector
    97.
    发明申请
    Micro-ejector 有权
    微型喷射器

    公开(公告)号:US20110316939A1

    公开(公告)日:2011-12-29

    申请号:US12926625

    申请日:2010-11-30

    CPC classification number: B41J2/14233 B41J2002/14362

    Abstract: There is provided a micro-ejector. The micro-ejector according to an exemplary embodiment of the present invention may include an ejection device including a passage for ejecting fluid contained therein, and a piezoelectric actuator providing a driving force for ejecting fluid, a mounting plate including a passage for providing fluid to the ejection device formed therein, and a mounting groove on which the ejection device is mounted, and a connection member formed on the mounting plate, and adopted for connecting the piezoelectric actuator to an external power source.

    Abstract translation: 提供了微型喷射器。 根据本发明的示例性实施例的微型喷射器可以包括:喷射装置,其包括用于喷射其中包含的流体的通道;以及提供用于喷射流体的驱动力的压电致动器;安装板,包括用于向 形成在其中的喷射装置和安装有喷射装置的安装槽以及形成在安装板上的连接构件,并用于将压电致动器连接到外部电源。

    Fabrication method of thin film device
    100.
    发明授权
    Fabrication method of thin film device 失效
    薄膜器件制造方法

    公开(公告)号:US07943440B2

    公开(公告)日:2011-05-17

    申请号:US12503004

    申请日:2009-07-14

    CPC classification number: H01L27/1266 H01L27/1214 H01L27/1218 H01L29/78603

    Abstract: A method for fabricating a thin film device includes the step of forming a sacrificial layer on a first substrate. A portion other than a region of the sacrificial layer is selectively removed. A material film is formed on the sacrificial layer to be connected to the first substrate via the selectively removed region. The material film portion filled in the selectively removed region is provided as an anchor. A thin film lamination is formed on the material film. The desired thin film device is formed by using a selective etching process. After removing the sacrificial layer, the thin film device floats over the first substrate with being supported by the anchor. A support body is temporarily attached on the thin film lamination. The thin film device is transferred to the support body onto a second substrate.

    Abstract translation: 制造薄膜器件的方法包括在第一衬底上形成牺牲层的步骤。 选择性地除去除了牺牲层的区域之外的部分。 在牺牲层上形成材料膜,以经由选择性去除的区域连接到第一衬底。 填充在选择性去除区域中的材料膜部分被设置为锚固件。 在材料膜上形成薄膜层压体。 通过使用选择性蚀刻工艺形成所需的薄膜器件。 在去除牺牲层之后,薄膜装置在被锚固件支撑的情况下漂浮在第一基板上。 支撑体临时附着在薄膜层压板上。 薄膜器件被转移到支撑体上到第二衬底上。

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