Method of manufacturing a multilayer interconnect substrate
    103.
    发明授权
    Method of manufacturing a multilayer interconnect substrate 失效
    多层互连基板的制造方法

    公开(公告)号:US06593224B1

    公开(公告)日:2003-07-15

    申请号:US10091683

    申请日:2002-03-05

    Abstract: A method of manufacturing a multilayer interconnect substrate includes providing a first interconnect layer that includes a first conductive trace, wherein the first conductive trace includes a first pillar and a first routing line, and the first pillar protrudes vertically from and is electrically connected to the first routing line, providing a second interconnect layer that includes a second conductive trace, wherein the second conductive trace includes a second pillar and a second routing line, and the second pillar protrudes vertically from and is electrically connected to the second routing line, forming an opening in a dielectric layer between the first and second interconnect layers that exposes portions of the first pillar and the second routing line that were previously covered by the dielectric layer, and forming a connection joint in the opening that contacts and electrically connects the first pillar and the second routing line.

    Abstract translation: 一种制造多层互连衬底的方法包括提供包括第一导电迹线的第一互连层,其中所述第一导电迹线包括第一柱和第一布线线,并且所述第一柱垂直地突出并且与所述第一导电迹线电连接 提供包括第二导电迹线的第二互连层,其中所述第二导电迹线包括第二支柱和第二路由线,并且所述第二支柱垂直地突出并与所述第二路由线电连接,形成开口 在第一和第二互连层之间的电介质层中,暴露出先前被介电层覆盖的第一柱和第二布线线的部分,并且在开口中形成接触和电连接第一柱和第二柱的连接接头 第二路由线路。

    Flip chip assembly with via interconnection
    107.
    发明授权
    Flip chip assembly with via interconnection 失效
    带通孔互连的倒装芯片组件

    公开(公告)号:US06448644B1

    公开(公告)日:2002-09-10

    申请号:US09120408

    申请日:1998-07-22

    Abstract: A flip chip assembly, and methods of forming the same, including a single layer or multilayer substrate in which via holes serve as connections between a semiconductor chip and the substrate. The assembling steps comprise attaching an integrated circuit chip to a rigid or flexible dielectric substrate having a plurality of via holes for connecting respective traces on the substrate with respective input/output terminal pads of the integrated circuit chip. The via holes are aligned and placed on top of the pads so that the pads are totally or partially exposed through the opposite side of the substrate. Electrically conductive material is subsequently deposited in the via holes as well as on the surface of the pads to provide electrical connections between the integrated circuit chip and the traces of the dielectric circuitry. After the connections are made, the attachment between the chip and substrate can be removed or left as an integral part of the assembly since the connections also provide mechanical support. The contacting materials include electroless plated metals, electrochemical plated metals, solders, epoxies and conductive polymers.

    Abstract translation: 倒装芯片组件及其形成方法,包括其中通孔用作半导体芯片和衬底之间的连接的单层或多层衬底。 组装步骤包括将集成电路芯片附接到具有多个通孔的刚性或柔性电介质基板,该通孔用于将基板上的各个迹线与集成电路芯片的相应输入/输出端子焊盘连接。 通孔对齐并放置在焊盘的顶部,使得焊盘完全或部分地暴露通过衬底的相对侧。 导电材料随后沉积在通孔以及焊盘的表面上,以提供集成电路芯片和电介质电路迹线之间的电连接。 在制造连接之后,芯片和基板之间的连接可以被移除或者作为组件的整体部分留下,因为连接也提供机械支撑。 接触材料包括无电镀金属,电化学电镀金属,焊料,环氧树脂和导电聚合物。

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