公开(公告)号：US07312453B2

公开(公告)日：2007-12-25

申请号：US11535025

申请日：2006-09-25

Applicant: Bruce R. Davis ,  Paul H. Shelley

Inventor： Bruce R. Davis ,  Paul H. Shelley

IPC: G01J5/02

CPC classification number: G01N25/00 ,  G01N21/3563 ,  G01N21/55 ,  G01N33/20 ,  G01N2021/8887 ,  G01N2021/95615 ,  G01N2201/103

Abstract: Methods for determining corrosion products on a substrate are disclosed. In one embodiment, a non-destructive method for determining an amount of corrosion product on a metallic substrate includes non-destructively determining a value Ia of infrared energy absorbed in a corrosion product on a metallic substrate; and correlating the value Ia of the infrared energy absorbed to an amount of the corrosion product.

Abstract translation: 公开了用于确定基板上的腐蚀产物的方法。 在一个实施例中，用于确定金属基底上的腐蚀产物量的非破坏性方法包括非破坏性地确定在金属基底上的腐蚀产物中吸收的红外能量的值Ia; 并将吸收的红外能量的值Ia与腐蚀产物的量相关联。

公开(公告)号：US06992758B2

公开(公告)日：2006-01-31

申请号：US10359529

申请日：2003-02-05

Applicant: Andrew D. Kaplan ,  James C. Mansfield ,  Douglas C. Mark

Inventor： Andrew D. Kaplan ,  James C. Mansfield ,  Douglas C. Mark

IPC: G01N21/01

CPC classification number: G01N21/23 ,  G01N2021/9513 ,  G01N2201/101 ,  G01N2201/103

Abstract: The disclosure is directed to systems and methods for precisely measuring birefringence properties of large-format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.

Abstract translation: 本公开涉及用于精确测量大幅面光学元件样品的双折射性质的系统和方法。 双折射测量系统部件相对于样品的精确运动采用了龙门式结构。 还提供了一种有效的大幅面样品保持器，其充分地支撑样品以防止其中引起的双折射，同时仍然将大面积的样品提供给无阻碍的光通过。

公开(公告)号：US20040217290A1

公开(公告)日：2004-11-04

申请号：US10427006

申请日：2003-04-29

Inventor： Bruce R. Davis ,  Paul H. Shelley

IPC: G01N021/35

CPC classification number: G01N25/00 ,  G01N21/3563 ,  G01N21/55 ,  G01N33/20 ,  G01N2021/8887 ,  G01N2021/95615 ,  G01N2201/103

Abstract: A non-destructive method is provided for determining amount and distribution of a corrosion product on a metallic substrate. A value of infrared energy reflected from the metallic substrate without corrosion is determined. A value of infrared energy reflected from the metallic substrate with the corrosion product is determined. A value of infrared energy absorbed in the corrosion product is determined, and the value of the infrared energy absorbed in the corrosion product is correlated to an amount of the corrosion product.

Abstract translation: 提供了用于确定金属基底上的腐蚀产物的量和分布的非破坏性方法。 确定从没有腐蚀的金属基材反射的红外能量的值。 确定从具有腐蚀产物的金属基底反射的红外能量的值。 确定在腐蚀产物中吸收的红外能量的值，并且腐蚀产物中吸收的红外能量的值与腐蚀产物的量相关。

公开(公告)号：US20040075834A1

公开(公告)日：2004-04-22

申请号：US10359529

申请日：2003-02-05

Applicant: Hinds Instruments, Inc.

Inventor： Andrew D. Kaplan ,  James C. Mansfield ,  Douglas C. Mark

IPC: G01J004/00

CPC classification number: G01N21/23 ,  G01N2021/9513 ,  G01N2201/101 ,  G01N2201/103

Abstract: The disclosure is directed to systems and methods for precisely measuring birefringence properties of large-format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.

Abstract translation: 本公开涉及用于精确测量大幅面光学元件样品的双折射性质的系统和方法。 双折射测量系统部件相对于样品的精确运动采用了龙门式结构。 还提供了一种有效的大幅面样品保持器，其充分地支撑样品以防止其中引起的双折射，同时仍然将大面积的样品呈现给无阻碍的光通过。

公开(公告)号：US5689109A

公开(公告)日：1997-11-18

申请号：US295740

申请日：1994-08-30

Applicant: Raimund Schutze

Inventor： Raimund Schutze

IPC: G01N33/483 ,  C12M1/34 ,  G01N1/28 ,  G01N15/02 ,  G01N15/10 ,  G01N15/14 ,  G01N21/27 ,  G02B21/32 ,  H05H3/04

CPC classification number: G01N15/0205 ,  C12M41/46 ,  G01N2201/103 ,  G01N2201/1087

Abstract: Apparatus for the manipulation, processing and observation of small particles, in particular biological particles, is disclosed. A first laser (4) generates light beams in a first wavelength range, which are focused with a first optical device (12, 13; 14, 15) and form an optical trap. A object holder (22) serves to contain the relevant particles. In addition a light source (17) for observation light is provided, whereas observation and recording devices serve to observe particles and record their behavior. A second laser (3) generates light beams in a second wavelength range, which are focused in order to manipulate particles in the object holder. The optical devices for the individual light beams can be positioned and focused independently of one another, and at the beginning of manipulation and observation the beams are focused in the same object plane of the object holder independently of their wavelengths.

Abstract translation: PCT No.PCT / EP94 / 00090 Sec。 371日期1994年8月30日 102（e）日期1994年8月30日PCT 1994年1月13日PCT PCT。 公开号WO94 / 16543 日期：1994年7月21日公开了用于操作，加工和观察小颗粒，特别是生物颗粒的装置。 第一激光器（4）产生第一波长范围内的光束，它们与第一光学装置（12,13; 14,15）聚焦并形成光阱。 物体保持器（22）用于容纳相关颗粒。 此外，提供用于观察光的光源（17），而观察和记录装置用于观察颗粒并记录其行为。 第二激光器（3）产生在第二波长范围内的光束，其被聚焦以便操纵物体保持器中的颗粒。 用于各个光束的光学装置可以彼此独立地定位和聚焦，并且在操纵和观察开始时，光束被聚焦在物体保持器的相同物体平面中，而与其波长无关。

公开(公告)号：US5376804A

公开(公告)日：1994-12-27

申请号：US90071

申请日：1993-07-19

Applicant: Clive I. Coleman

Inventor： Clive I. Coleman

IPC: G01B11/00 ,  G01B11/26 ,  G01N21/59 ,  G01N21/64 ,  G01N21/86 ,  G02B21/26

CPC classification number: G01N21/5911 ,  G01N2021/177 ,  G01N21/4738 ,  G01N21/6445 ,  G01N21/8483 ,  G01N2201/103

Abstract: An optical analysis or processing system for use, for example, in the analysis of microscopic spots of material by their effect on a very fine polarized beam of light (e.g., FPIA). For multiple "spot" analysis the spot samples are disposed on a substrate in predetermined relation with an optical pattern, bars, chevrons, etc. The substrate is mounted in the path of the fixed and focused beam with three degrees of freedom of movement. A video camera records the optical pattern very accurately and controls the substrate mounting to position a selected sample spot at the beam focus. Multiple and rapid sample analysis can thus be performed.

Abstract translation: PCT No.PCT / GB92 / 02239 Sec。 371日期：1993年7月19日 102（e）日期1993年7月19日PCT提交1992年12月2日PCT公布。 公开号WO93 / 11469 日期：1993年6月10日。一种光学分析或处理系统，例如用于通过对非常精细的偏振光束（例如，FPIA）的影响来分析材料的微观斑点。 对于多个“斑点”分析，光斑样品以与光学图案，条，人字纹等预定的关系设置在基板上。基板被安装在具有三个自由度的固定聚焦光束的路径中。 摄像机非常精确地记录光学图案，并控制基板安装以将选定的样品点放置在光束焦点处。 因此可以进行多次和快速的样品分析。

公开(公告)号：US4966457A

公开(公告)日：1990-10-30

申请号：US298920

申请日：1989-01-19

Applicant: Fuminori Hayano ,  Kazunori Imamura ,  Sunao Murata

Inventor： Fuminori Hayano ,  Kazunori Imamura ,  Sunao Murata

IPC: G01N21/88 ,  G01N21/31 ,  G01N21/94 ,  G01N21/956 ,  G01N21/958 ,  G03F1/84

CPC classification number: G03F1/84 ,  G01N21/94 ,  G03F1/62 ,  G01N2021/556 ,  G01N21/314 ,  G01N2201/103

Abstract: A defect inspecting apparatus for determining the presence of a defect element adhering to either of the front and back surfaces of a thin film-like object to be inspected (the object having a light-transmitting property) applies two light beams of different wavelengths to a surface of the object and varies the incident angle of the light beams. A first photoelectric detector receives light of the two light beams reflected by or transmitted by the object, and a second photoelectric detector receives light of the two light beams scattered by the defect element. A discriminator determines the surface of the object to which the defect element adheres based on detection outputs of the photoelectric detectors.

Abstract translation: 用于确定粘附在待检查的薄膜状物体（具有透光性的物体）的前表面和后表面中的任一个的缺陷元件的存在的缺陷检查装置将两个不同波长的光束施加到 物体的表面并改变光束的入射角。 第一光电检测器接收被物体反射或透射的两个光束的光，第二光电检测器接收由缺陷元件散射的两个光束的光。 鉴别器基于光电检测器的检测输出来确定缺陷元件粘附到的物体的表面。

公开(公告)号：US4874956A

公开(公告)日：1989-10-17

申请号：US177412

申请日：1988-04-04

Applicant: Toshihiro Kato ,  Masamichi Shindo ,  Yoshihito Fukasawa

Inventor： Toshihiro Kato ,  Masamichi Shindo ,  Yoshihito Fukasawa

IPC: H01L21/66 ,  G01N21/88 ,  G01N21/956 ,  G01R31/265 ,  G01R31/28 ,  H01L21/60

CPC classification number: H01L24/85 ,  G01N21/88 ,  G01R31/2656 ,  G01R31/2853 ,  H01L24/78 ,  G01N2201/103 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/49171 ,  H01L2224/78 ,  H01L2224/859 ,  H01L2924/00014 ,  H01L2924/01006 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01082 ,  H01L2924/12042 ,  H01L2924/181

Abstract: An apparatus and a method for inspecting semiconductor devices, where a focused laser beam scans the semiconductor device, and the reflected beam thereof indicating height information of the reflection positions on the semiconductor device is detected for producing detected signals. The detected signals are compared with predetermined acceptance levels of height and distance.

Abstract translation: 检测半导体器件的装置和方法，其中聚焦的激光束扫描半导体器件，并且检测其表示半导体器件上的反射位置的高度信息的反射光束，以产生检测信号。 将检测到的信号与高度和距离的预定接受水平进行比较。

公开(公告)号：US4748335A

公开(公告)日：1988-05-31

申请号：US752160

申请日：1985-07-03

Applicant: James T. Lindow ,  Simon D. Bennett ,  Ian R. Smith

Inventor： James T. Lindow ,  Simon D. Bennett ,  Ian R. Smith

IPC: H01L21/66 ,  G01B11/02 ,  G01B11/24 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G02B21/00 ,  H01L21/027 ,  H01L21/30

CPC classification number: G01N21/956 ,  G01B11/02 ,  G01B11/24 ,  G02B21/0052 ,  G02B21/006 ,  G01N21/9501 ,  G01N2201/103

Abstract: A system for determining surface profiles of specimens such as semiconductor wafers includes a drive for mounting the wafer for oscillatory movement along a line and an optical imaging system overlying the wafer for focusing a beam on a small sport on the wafer and including a photodetector for detecting the reflected sport from the wafer. The spot is scanned along the line on the wafer while the focal depth of the imaging system is progressively changed while the photodetector and connected digital circuitry generate a plurality of spaced output signals for each scan along the line so that data comprised of a series of spaced signals are provided at a plurality of focus levels extending through the surface profile of the wafer. Computer means are provided for analyzing the data and providing a graphical output of the surface profile.

Abstract translation: 用于确定诸如半导体晶片的样品的表面轮廓的系统包括用于沿着线安装用于振荡运动的晶片的驱动器和覆盖晶片的光学成像系统，用于将光束聚焦在晶片上的小型运动上，并且包括用于检测的光电检测器 从晶圆反射的运动。 沿着晶片上的线扫描点，同时成像系统的焦深逐渐改变，同时光电检测器和连接的数字电路为沿着该线的每次扫描产生多个间隔的输出信号，使得由一系列间隔开的数据组成 信号被提供在延伸穿过晶片的表面轮廓的多个聚焦水平。 提供计算机装置用于分析数据并提供表面轮廓的图形输出。

公开(公告)号：US4691106A

公开(公告)日：1987-09-01

申请号：US775749

申请日：1985-09-13

Applicant: Choi J. Hyun ,  Lee J. Chul ,  Choi W. Bum

Inventor： Choi J. Hyun ,  Lee J. Chul ,  Choi W. Bum

IPC: G01J1/16 ,  G01M11/00 ,  G01N21/55 ,  G01N21/88

CPC classification number: G01N21/88 ,  G01M11/005 ,  G01J1/1626 ,  G01N21/35 ,  G01N21/55 ,  G01N2201/103

Abstract: An apparatus for detecting defects in a laser mirror by using a laser beam in order to detect any possible changes in reflectivity over the surface of the mirror. A laser beam is split by a beam splitter into one portion for scanning the mirror to be inspected and which is reflected therefrom to produce a reflection signal, the remaining portion of the beam providing a reference signal. A computer receives both signals and on the basis of comparison thereof determines the condition of the mirror because there will be incorrect reflection of the laser beam from any region of the mirror which is defective.

Abstract translation: 一种用于通过使用激光束来检测激光反射镜中的缺陷的装置，以便检测反射镜表面上的任何可能的反射率变化。 激光束被分束器分裂成一部分，用于扫描要检查的反射镜，并且由其反射以产生反射信号，光束的剩余部分提供参考信号。 计算机接收两个信号，并且在比较的基础上，确定反射镜的状态，因为激光束将会从反射镜的任何有缺陷的区域反射出来。