Semiconductor optical modulator integrated resistor for impedance matching using semiconductor doped layer and method of fabricating the same
    141.
    发明授权
    Semiconductor optical modulator integrated resistor for impedance matching using semiconductor doped layer and method of fabricating the same 失效
    用于使用半导体掺杂层的阻抗匹配的半导体光调制器集成电阻器及其制造方法

    公开(公告)号:US07324258B2

    公开(公告)日:2008-01-29

    申请号:US11151217

    申请日:2005-06-13

    Abstract: Provided is a semiconductor optical modulator device in which a resistor for impedance matching is integrated in a device in order to improve performance and to reduce cost during the fabrication of an ultra high speed optical modulator module. A doped layer in an epitaxial layer of the optical modulator device is used as a resistor for impedance matching. According to this method, it is possible to more easily realize an optical device compared with optical device fabrication processes in which additional resistors are used in the outside and the inside of the device for impedance matching.

    Abstract translation: 提供了一种半导体光调制器件,其中用于阻抗匹配的电阻器集成在器件中,以便在超高速光调制器模块的制造期间提高性能并降低成本。 光调制器件的外延层中的掺杂层用作阻抗匹配的电阻器。 根据该方法,与用于阻抗匹配的装置的外部和内部使用附加电阻器的光学器件制造工艺相比,可以更容易地实现光学器件。

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