公开(公告)号：US20240206194A1

公开(公告)日：2024-06-20

申请号：US18431177

申请日：2024-02-02

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Brian Cronquist

IPC: H10B80/00 ,  H01L23/00 ,  H01L25/00 ,  H01L25/18

CPC classification number: H10B80/00 ,  H01L24/08 ,  H01L25/18 ,  H01L25/50 ,  H01L2224/08145

Abstract: A semiconductor device including: a first level including a plurality of first memory arrays, a plurality of first transistors, and a plurality of first metal layers; a second level disposed on top of the first level, where the second level includes a plurality of second memory arrays; and a third level disposed on top of the second level, where the third level includes a plurality of third transistors and a plurality of third metal layers, the third level is bonded to the second level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, where the first level includes first filled holes (FFHs), where the second level includes second filled holes (SFHs), where the SFHs are aligned to the FFHs with a more than 1 nm but less than 40 nm alignment error, where the third level includes a plurality of Look-Up-Table circuits.

公开(公告)号：US12016181B2

公开(公告)日：2024-06-18

申请号：US17665560

申请日：2022-02-06

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H10B43/27 ,  H01L23/528 ,  H01L27/02 ,  H01L29/167 ,  H01L29/47 ,  H01L29/78 ,  H01L29/792 ,  H10B41/10 ,  H10B41/20 ,  H10B43/10 ,  H10B43/20 ,  H10B53/20

CPC classification number: H10B43/27 ,  H01L23/5283 ,  H01L27/0207 ,  H01L29/167 ,  H01L29/47 ,  H01L29/7827 ,  H01L29/792 ,  H10B43/10 ,  H10B43/20 ,  H10B41/10 ,  H10B41/20 ,  H10B53/20

Abstract: A 3D device, the device including: a first level including logic circuits; a second level including a plurality of memory circuits, where the first level is bonded to the second level, where the bonded includes oxide to oxide bonds, and where the first level includes at least one voltage regulator circuit.

公开(公告)号：US11991884B1

公开(公告)日：2024-05-21

申请号：US18515255

申请日：2023-11-21

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H10B43/27 ,  H01L23/528 ,  H01L27/02 ,  H01L29/167 ,  H01L29/47 ,  H01L29/78 ,  H01L29/792 ,  H10B41/10 ,  H10B41/20 ,  H10B43/10 ,  H10B43/20 ,  H10B53/20

CPC classification number: H10B43/27 ,  H01L23/5283 ,  H01L27/0207 ,  H01L29/167 ,  H01L29/47 ,  H01L29/7827 ,  H01L29/792 ,  H10B43/10 ,  H10B43/20 ,  H10B41/10 ,  H10B41/20 ,  H10B53/20

Abstract: A 3D semiconductor device including: a first level including a single crystal layer, a memory control circuit which includes a plurality of first transistors; a first metal layer overlaying the single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors which include a metal gate are disposed atop the third metal layer; third transistors disposed atop the second transistors; a fourth metal layer disposed atop the third transistors; and a memory array including word-lines, the memory array includes at least four memory mini arrays, each including at least four rows by at least four columns of memory cells, where each of the memory cells includes at least one of the second transistors or at least one of the third transistors, the memory control circuit includes at least one digital to analog converter circuit.

公开(公告)号：US11984445B2

公开(公告)日：2024-05-14

申请号：US18128505

申请日：2023-03-30

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist

IPC: H01L27/06 ,  G03F9/00 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/367 ,  H01L23/48 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  H01L23/544 ,  H01L27/02 ,  H01L27/092 ,  H01L27/105 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/45 ,  H01L29/66 ,  H01L29/732 ,  H01L29/786 ,  H01L29/808 ,  H01L29/812 ,  H10B10/00 ,  H10B12/00 ,  H10B20/00 ,  H10B41/20 ,  H10B43/20 ,  H01L21/268 ,  H01L23/00 ,  H01L27/088

CPC classification number: H01L27/0688 ,  G03F9/7076 ,  G03F9/7084 ,  H01L21/76254 ,  H01L21/76898 ,  H01L21/8221 ,  H01L21/823871 ,  H01L21/84 ,  H01L23/367 ,  H01L23/481 ,  H01L23/5226 ,  H01L23/528 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/092 ,  H01L27/105 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L29/42392 ,  H01L29/458 ,  H01L29/66272 ,  H01L29/66621 ,  H01L29/66848 ,  H01L29/66901 ,  H01L29/732 ,  H01L29/78639 ,  H01L29/78642 ,  H01L29/78645 ,  H01L29/808 ,  H01L29/812 ,  H10B10/00 ,  H10B10/125 ,  H10B12/053 ,  H10B12/09 ,  H10B12/50 ,  H10B20/00 ,  H10B41/20 ,  H10B43/20 ,  H01L21/268 ,  H01L24/73 ,  H01L27/088 ,  H01L29/66545 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2924/00011 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/3011 ,  H01L2924/3025

Abstract: A semiconductor device, the semiconductor device including: a first silicon level including a first single crystal silicon layer and a plurality of first transistors; a first metal layer disposed over the first silicon level; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 240 nm alignment error; where the fifth metal layer includes global power delivery; and a via disposed through the second level, where a typical thickness of the second metal layer is greater than a typical thickness of the third metal layer by at least 50%.

公开(公告)号：US20240121968A1

公开(公告)日：2024-04-11

申请号：US18389769

申请日：2023-12-19

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Brian Cronquist ,  Eli Lusky

IPC: H10B80/00 ,  H01L23/00 ,  H01L25/00 ,  H01L25/065 ,  H01L25/18

CPC classification number: H10B80/00 ,  H01L24/08 ,  H01L24/80 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2224/08145 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2924/1431 ,  H01L2924/1434

Abstract: A 3D semiconductor device including: a first level including a single crystal layer, and a memory control circuit which includes at least one temperature sensor circuit and first transistors; a first metal layer overlaying the first single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors—which may include a metal gate—disposed atop the third metal layer; third transistors disposed atop the second transistors; a fourth metal layer disposed atop the third transistors; a memory array including word-lines and at least four memory mini arrays (each mini array includes at least four rows by four columns of memory cells), each memory cell includes at least one second transistor or at least one third transistor; and a connection path from fourth metal to third metal, the path includes a via disposed through the memory array.

公开(公告)号：US20240120332A1

公开(公告)日：2024-04-11

申请号：US18128505

申请日：2023-03-30

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist

IPC: H01L27/06 ,  G03F9/00 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/367 ,  H01L23/48 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  H01L23/544 ,  H01L27/02 ,  H01L27/092 ,  H01L27/105 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/45 ,  H01L29/66 ,  H01L29/732 ,  H01L29/786 ,  H01L29/808 ,  H01L29/812 ,  H10B10/00 ,  H10B12/00 ,  H10B20/00 ,  H10B41/20 ,  H10B43/20

CPC classification number: H01L27/0688 ,  G03F9/7076 ,  G03F9/7084 ,  H01L21/76254 ,  H01L21/76898 ,  H01L21/8221 ,  H01L21/823871 ,  H01L21/84 ,  H01L23/367 ,  H01L23/481 ,  H01L23/5226 ,  H01L23/528 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/092 ,  H01L27/105 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L29/42392 ,  H01L29/458 ,  H01L29/66272 ,  H01L29/66621 ,  H01L29/66848 ,  H01L29/66901 ,  H01L29/732 ,  H01L29/78639 ,  H01L29/78642 ,  H01L29/78645 ,  H01L29/808 ,  H01L29/812 ,  H10B10/00 ,  H10B10/125 ,  H10B12/053 ,  H10B12/09 ,  H10B12/50 ,  H10B20/00 ,  H10B41/20 ,  H10B43/20 ,  H01L24/73 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2924/00011 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/3011 ,  H01L2924/3025

Abstract: A semiconductor device, the semiconductor device including: a first silicon level including a first single crystal silicon layer and a plurality of first transistors; a first metal layer disposed over the first silicon level; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 240 nm alignment error; where the fifth metal layer includes global power delivery; and a via disposed through the second level, where a typical thickness of the second metal layer is greater than a typical thickness of the third metal layer by at least 50%.

公开(公告)号：US11956952B2

公开(公告)日：2024-04-09

申请号：US15243941

申请日：2016-08-22

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H10B43/20 ,  H01L27/102 ,  H10B12/00 ,  H10B41/20 ,  H10B41/50 ,  H10B43/50

CPC classification number: H10B43/20 ,  H01L27/1027 ,  H10B12/20 ,  H10B41/20 ,  H10B41/50 ,  H10B43/50

Abstract: A device, including: a first structure including first memory cells, the first memory cells including first transistors; and a second structure including second memory cells, the second memory cells including second transistors, where the second transistors overlay the first transistors, and a plurality of memory cells control lines, where the first transistors are self-aligned to the second transistors, where a second transistor channel of the second transistors is aligned to a first transistor channel of the first transistors, the aligned is at an atomic level as would have been resulted from an epitaxial growth process.

公开(公告)号：US20240105490A1

公开(公告)日：2024-03-28

申请号：US18534475

申请日：2023-12-08

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  G11C8/16 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  H10B10/00 ,  H10B12/00 ,  H10B20/00 ,  H10B41/20 ,  H10B41/40 ,  H10B41/41 ,  H10B43/20 ,  H10B43/40

CPC classification number: H01L21/6835 ,  G11C8/16 ,  H01L21/743 ,  H01L21/76254 ,  H01L21/76898 ,  H01L21/8221 ,  H01L21/823828 ,  H01L21/84 ,  H01L23/481 ,  H01L23/5252 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L29/4236 ,  H01L29/66272 ,  H01L29/66621 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/66901 ,  H01L29/78 ,  H01L29/7841 ,  H01L29/7843 ,  H01L29/7881 ,  H01L29/792 ,  H10B10/00 ,  H10B10/125 ,  H10B12/053 ,  H10B12/09 ,  H10B12/20 ,  H10B12/50 ,  H10B20/00 ,  H10B41/20 ,  H10B41/40 ,  H10B41/41 ,  H10B43/20 ,  H10B43/40 ,  H01L23/3677 ,  H01L2924/13062

Abstract: 3D semiconductor device including: a first level including first single-crystal transistors; a plurality of memory control circuits formed from at least a portion of the first single-crystal transistors; a first metal layer disposed atop the first single-crystal transistors; a second metal layer disposed atop the first metal layer; a second level disposed atop the second metal layer includes second transistors and a memory array of first memory cells; a third level including second memory cells which include some third transistors, which themselves include a metal gate and is disposed above the second level; a third metal layer disposed above the third level; a fourth metal layer disposed above the third metal layer; a connective path from the third metal layer to the second metal layer with a thru second level via of a diameter less than 800 nm which also passes thru the memory array, memory control circuits for wear leveling.

公开(公告)号：US11935949B1

公开(公告)日：2024-03-19

申请号：US18388852

申请日：2023-11-12

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach

IPC: H01L29/78 ,  G11C11/404 ,  G11C11/4097 ,  G11C11/412 ,  G11C16/02 ,  G11C16/04 ,  H10B10/00 ,  H10B12/00 ,  H10B43/20 ,  H10B63/00 ,  H10B69/00

CPC classification number: H01L29/78 ,  G11C11/404 ,  G11C11/4097 ,  G11C16/02 ,  H01L29/7841 ,  H10B10/12 ,  H10B12/20 ,  H10B43/20 ,  H10B63/30 ,  H10B69/00 ,  G11C11/412 ,  G11C16/0483 ,  G11C2213/71

Abstract: 3D semiconductor device including: a first level including a first single crystal layer and first transistors, and at least one first metal layer-which includes interconnects between the first transistors forming control circuits-which overlays the first single crystal layer; second metal layer overlaying first metal layer; a second level including second transistors, first memory cells (each including at least one second transistor) and overlaying second metal layer; a third level including third transistors (at least one includes a polysilicon channel), second memory cells (each including at least one third transistor and cell is partially disposed atop control circuits) and overlaying the second level; control circuits control data written to second memory cells; third metal layer disposed above third level; fourth metal layer includes global power distribution grid, has a thickness at least twice the second metal layer, disposed above third metal layer; fourth level includes single-crystal silicon, atop fourth metal layer.

公开(公告)号：US11929372B2

公开(公告)日：2024-03-12

申请号：US18382463

申请日：2023-10-20

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L27/146 ,  H01L23/00 ,  H04N25/77 ,  H04N25/78

CPC classification number: H01L27/14601 ,  H01L24/08 ,  H01L24/09 ,  H01L27/14616 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/14647 ,  H04N25/77 ,  H04N25/78

Abstract: An integrated device, the device including: a first level including a first mono-crystal layer, the first mono-crystal layer including a plurality of single crystal transistors; an overlying oxide disposed on top of the first level; a second level including a second mono-crystal layer, the second level overlaying the oxide, where the second mono-crystal layer includes a plurality of image sensors, where the second level is bonded to the first level with an oxide to oxide bond; a plurality of pixel control circuits; a plurality of memory circuits; and a third level disposed underneath the first level, where the third level includes a plurality of third transistors.