Use of a capping layer to reduce particle evolution during sputter pre-clean procedures
    15.
    发明授权
    Use of a capping layer to reduce particle evolution during sputter pre-clean procedures 有权
    在溅射预清洁过程中使用覆盖层来减少颗粒的发生

    公开(公告)号:US06531382B1

    公开(公告)日:2003-03-11

    申请号:US10140662

    申请日:2002-05-08

    IPC分类号: H01L213205

    CPC分类号: H01L21/76802 H01L21/76838

    摘要: A process for preparing a surface of a lower level metal structure, exposed at the bottom of a sub-micron diameter opening, to allow a low resistance interface to be obtained when overlaid with an upper level metal structure, has been developed. A disposable, capping insulator layer is first deposited on the composite insulator layer in which the sub-micron diameter opening will be defined in, to protect underlying components of the composite insulator from a subsequent metal pre-metal procedure. After anisotropically defining the sub-micron diameter opening in the capping insulator, and composite insulator layers, and after removal of the defining photoresist shape, an argon sputtering procedure is used to remove native oxide from the surface of the lower level metal structure. In addition to native oxide removal the argon sputtering procedure, featuring a negative DC bias applied to the substrate, also removes the capping insulator layer from the top surface of the composite insulator layer. An in situ metal deposition then allows a clean interface to result between the overlying metal layer, and the underlying plasma treated, metal surface.

    摘要翻译: 已经开发了制备在亚微米直径开口的底部露出的下层金属结构的表面以允许在与上层金属结构重叠时获得低电阻界面的方法。 首先将一次性封盖绝缘体层沉积在复合绝缘体层上,在该复合绝缘层上将限定亚微米直径的开口,以保护复合绝缘子的下面的部件免于后续的金属预金属工艺。 在各向异性地限定封盖绝缘体中的亚微米直径开口和复合绝缘体层之后,并且在去除限定的光致抗蚀剂形状之后,使用氩溅射方法从下层金属结构的表面去除自然氧化物。 除了自然氧化物除去之外,具有施加到衬底的负DC偏压的氩溅射工艺也从复合绝缘体层的顶表面去除封盖绝缘体层。 原位金属沉积然后允许在上覆的金属层和下面的等离子体处理的金属表面之间产生干净的界面。

    HEART RATE ALARM SYSTEM
    18.
    发明申请
    HEART RATE ALARM SYSTEM 审中-公开
    心率报警系统

    公开(公告)号:US20130131483A1

    公开(公告)日:2013-05-23

    申请号:US13431999

    申请日:2012-03-28

    IPC分类号: A61B5/0408

    摘要: A heart rate alarm system includes an article of clothing, at least two conductive units, at least one alarm device, a heart rate measurement unit, a first transmission unit, a second transmission unit, and an operation unit. The at least two conductive units are coupled to each other through at least one conductive fibric. The heart rate measurement unit measures a heart rate through the at least two conductive units, and generates a control signal and a heart rate value according to the heart rate. The first transmission unit transmits the control signal to the at least one alarm device and transmits the heart rate value. The at least one alarm device generates at least one alarm signal according to the control signal. The operation unit calculates a heart beat period, a heart physiological age, indicators of autonomic nervous system, and/or a calorie consumption indicator.

    摘要翻译: 心率报警系统包括服装,至少两个导电单元,至少一个报警装置,心率测量单元,第一传输单元,第二传输单元和操作单元。 至少两个导电单元通过至少一个导电纤维彼此连接。 心率测量单元通过至少两个导电单元测量心率,并根据心率产生控制信号和心率值。 第一发送单元将控制信号发送到至少一个报警装置,并发送心率值。 至少一个报警装置根据控制信号产生至少一个报警信号。 操作单元计算心跳周期,心脏生理年龄,自主神经系统指标和/或卡路里消耗指标。

    Backlight module having independent light source
    19.
    发明授权
    Backlight module having independent light source 有权
    具有独立光源的背光模组

    公开(公告)号:US07168841B2

    公开(公告)日:2007-01-30

    申请号:US11158408

    申请日:2005-06-21

    IPC分类号: F21V8/00

    摘要: A backlight module including an independent light source is provided. The backlight module includes a light generation device, a light transmission device, a light mixing device and a planar light generation device. The light generation device may include one or more light emitting components. The light transmission device may be adopted for receiving and transmitting the light emitted by the light generation device. The light mixing device may be adopted for mixing the light emitted by the light transmission device to generate a mixed linear light. The planar light generation device may comprise a light distributing portion for receiving the mixed linear light to generate a planar light.

    摘要翻译: 提供了包括独立光源的背光模块。 背光模块包括发光装置,光传输装置,光混合装置和平面光产生装置。 光产生装置可以包括一个或多个发光部件。 光传输装置可以用于接收和发送由光产生装置发射的光。 光混合装置可以用于混合由光传输装置发射的光以产生混合线性光。 平面光产生装置可以包括用于接收混合线性光以产生平面光的光分配部分。