PLASMA ETCHING METHOD AND COMPUTER READABLE STORAGE MEDIUM
    12.
    发明申请
    PLASMA ETCHING METHOD AND COMPUTER READABLE STORAGE MEDIUM 有权
    等离子体蚀刻方法和计算机可读存储介质

    公开(公告)号:US20090242516A1

    公开(公告)日:2009-10-01

    申请号:US12413999

    申请日:2009-03-30

    IPC分类号: C23F1/02 H01L21/3065

    摘要: A plasma etching method includes disposing a first electrode and a second electrode to face each other; preparing a part in the processing chamber; supporting a substrate; vacuum-evacuating the processing chamber; supplying an etching gas into a processing space between the first electrode and the second electrode; generating a plasma of the etching gas in the processing space by applying a radio wave power to the first electrode or the second electrode; and etching a film to be processed on a surface of the substrate by using the plasma. Further, a DC voltage is applied to the part during the etching process, the part being disposed away from the substrate and being etched by reaction with reactant species in the plasma.

    摘要翻译: 等离子体蚀刻方法包括:将第一电极和第二电极相对配置; 在处理室中准备一部分; 支撑底物; 真空抽真空处理室; 向第一电极和第二电极之间的处理空间提供蚀刻气体; 通过向所述第一电极或所述第二电极施加无线电波来在所述处理空间中产生蚀刻气体的等离子体; 并且通过使用等离子体在基板的表面上蚀刻待处理的膜。 此外,在蚀刻工艺期间,将DC电压施加到该部件,该部分被设置为远离衬底并且通过与等离子体中的反应物物质的反应进行蚀刻。

    Recorder/reproducer
    15.
    发明授权
    Recorder/reproducer 失效
    记录器/再现器

    公开(公告)号:US07365946B2

    公开(公告)日:2008-04-29

    申请号:US10502941

    申请日:2003-11-07

    IPC分类号: G11B5/54

    摘要: A recording/reproducing apparatus includes a cartridge holder which is rotatably provided on a chassis, into which a disc cartridge enclosing a magneto-optical disc is inserted, and which holds the inserted disc cartridge, an optical pickup that irradiates laser light onto the magneto-optical disc, a magnetic head that is provided on the upper surface side of the cartridge holder facing the optical pickup and that is moved between a lowered position close to the optical disc and a raised position away from the magneto-optical disc, at least one first sliding member that is movably provided on the cartridge holder, a head raising/lowering mechanism that moves the magnetic head between the upper position and the lower position by moving the first sliding member, and a driving mechanism that is disposed on a lower surface side of the chassis, engages the sliding member, and moves the first sliding member.

    摘要翻译: 一种记录/再现装置,包括一个可旋转地设置在一个底盘上的盒保持器,一个包含磁光盘的盘盒被插入到其中,并保持插入的盘盒;一个光学拾取器,将激光照射到磁光盘上, 光盘,设置在盒保持器的面向光学拾取器的上表面侧并且在靠近光盘的降低位置和远离磁光盘的升高位置之间移动的磁头,至少一个 可移动地设置在盒保持器上的第一滑动构件,通过移动第一滑动构件而将磁头移动在上部位置和下部位置之间的头部升高/降低机构,以及设置在下表面侧的驱动机构 使滑动构件接合,并使第一滑动构件移动。

    Capacitor and method for manufacturing the same
    18.
    发明授权
    Capacitor and method for manufacturing the same 有权
    电容器及其制造方法

    公开(公告)号:US07233480B2

    公开(公告)日:2007-06-19

    申请号:US11475891

    申请日:2006-06-28

    IPC分类号: H01G4/228

    CPC分类号: H01G4/30 H01G4/12

    摘要: A laminated ceramic capacitor (10) divided into a first laminate (11), a second laminate (12), a third laminate (13), and a fourth laminate (14). The first laminate (11) includes a ceramic layer (15) serving as a dielectric layer. The ceramic layer (15) is thicker than a ceramic layer (17) sandwiched between internal electrodes (16a) in the second laminate (12) or the fourth laminate (14), and thinner than 20 times the thickness of the ceramic layer (17). The third laminate (13) includes dielectric layers, which serve as the ceramic layers (17), and has a thickness of 5% of the total thickness of the second laminate (12) and the fourth laminate (14). Accordingly, the third laminate (13) achieves the function of absorbing an electrode-induced thickness differential. Also, by means of regulating the thickness of the first laminate (11), portions of via electrodes (18) that extend without being electrically connected to the internal electrodes (16b) can be shortened.

    摘要翻译: 分为第一层压体(11),第二层压板(12),第三层压板(13)和第四层压板(14)的层压陶瓷电容器(10)。 第一层压体(11)包括用作电介质层的陶瓷层(15)。 陶瓷层(15)比夹在第二层叠体(12)或第四层叠体(14)的内部电极(16a)之间的陶瓷层(17)厚,比陶瓷层(15)的厚度薄 17)。 第三层压体(13)包括作为陶瓷层(17)的电介质层,其厚度为第二层叠体(12)和第四层叠体(14)的总厚度的5%。 因此,第三层压体(13)实现吸收电极引起的厚度差的功能。 此外,通过调整第一层压体(11)的厚度,能够缩短在不与内部电极(16b)电连接的情况下延伸的通孔电极(18)的部分。

    Wireless communication method, wireless comunication system using the same, and wireless terminal therrof
    19.
    发明申请
    Wireless communication method, wireless comunication system using the same, and wireless terminal therrof 有权
    无线通信方式,使用无线通信系统,无线终端热线

    公开(公告)号:US20070086407A1

    公开(公告)日:2007-04-19

    申请号:US10586146

    申请日:2005-01-13

    申请人: Manabu Sato

    发明人: Manabu Sato

    IPC分类号: H04B7/208

    CPC分类号: H04W68/12 H04W88/04 H04W88/06

    摘要: A business wireless communication system, which includes both a repeater relay station of a wireless network using a repeater system and an FDMA relay station of a wireless network using FDMA system, comprises means for ensuring that the repeater relay station, when receiving a call signal from a repeater wireless terminal of the wireless communication network of the repeater system, is communication-line-connected to the FDMA relay station so as to forward the call signal to the FDMA relay station, which sets the forwarded call signal to a control signal and transmits it to an FDMA wireless terminal of the wireless communication network of the FDMA system; and means for ensuring that the FDMA wireless terminal receives the control signal to communicate with the repeater wireless terminal via the repeater relay station. In this way, there can be provided a wireless communication method, a system using the same, and a wireless terminal thereof, wherein a single reception frequency is used to attend to call signals of two different wireless communication systems.

    摘要翻译: 包括使用中继器系统的无线网络的中继站中继站和使用FDMA系统的无线网络的FDMA中继站的业务无线通信系统包括用于确保中继器中继站在接收到来自 中继器系统的无线通信网络的中继器无线终端通信线路连接到FDMA中继站,以将呼叫信号转发到FDMA中继站,FDMA中继站将转发的呼叫信号设置为控制信号,并发送 它到FDMA系统的无线通信网络的FDMA无线终端; 以及用于确保FDMA无线终端经由中继器中继站接收到与中继器无线终端通信的控制信号的装置。 以这种方式,可以提供一种无线通信方法,使用该无线通信方法的系统及其无线终端,其中使用单个接收频率来接收两个不同无线通信系统的呼叫信号。