摘要:
A manufacturing method for an electronic component includes a process of forming a lower electrode and a dummy electrode, which are electrically connected to each other, on a substrate, and a process of forming a piezoelectric thin film on the dummy electrode and the lower electrode while a predetermined bias potential is applied to the lower electrode via the dummy electrode. In this method, the piezoelectric thin film is formed on the lower electrode by stabilizing the potential of the lower electrode, thereby decreasing the surface roughness of the piezoelectric thin film. It is thus possible to manufacture an electronic component that exhibits excellent piezoelectric characteristics, in which the electromechanical coupling coefficient and the quality factor of a resonator are increased.
摘要:
An advanced containment system for containing buried waste and associated leachate. A trench is dug on either side of the zone of interest containing the buried waste so as to accommodate a micro tunnel boring machine. A series of small diameter tunnels are serially excavated underneath the buried waste. The tunnels are excavated by the micro tunnel boring machine at a consistent depth and are substantially parallel to each other. As tunneling progresses, steel casing sections are connected end to end in the excavated portion of the tunnel so that a steel tube is formed. Each casing section has complementary interlocking structure running its length that interlocks with complementary interlocking structure on the adjacent casing section. Thus, once the first tube is emplaced, placement of subsequent tubes is facilitated by the complementary interlocking structure on the adjacent, previously placed, casing sections.
摘要:
The present invention relates to a temperature regulation apparatus capable of easily regulating the temperature of a support for a substance to be treated, such as a semiconductor wafer.The temperature regulation apparatus includes a liquid nitrogen supply device for supplying liquid nitrogen into a temperature regulation space provided in the inside of a support so as to effect flashing of the liquid nitrogen. A heating device for heating the support and temperature sensors for detecting the temperature of the support are also provided. A temperature setting device sets the temperature of the support at a desired temperature and a controller controls the liquid nitrogen supply device and the heating device based on a temperature detected by the temperature sensors, so that the support reaches and is maintained at the set temperature.
摘要:
Disclosed herein is a specific cinnamic acid derivative such as methyl 4-(4-acetoxy-3-methoxycinnamanide)-1-cyclohexanecarboxylate, or a pharmaceutically acceptable salt thereof. These compounds are useful as IV-type allergic reaction-suppressive drugs.
摘要:
In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b) an additional film. The vibration unit includes a piezoelectric film sandwiched between a pair of electrodes. The piezoelectric film is overlapped with the pair of electrodes in plan view. The additional film is disposed on one of the piezoelectric film and the electrodes so as to extend along at least a portion of the periphery of the vibration unit. When x (MN·second/m3) denotes an acoustic impedance of the additional film defined by the square root of the product of the density and Young's modulus, A denotes the product of the density and the thickness of the additional film, B denotes the product of the densities and the thicknesses of the electrodes, and y=A/B, the following conditional expressions are satisfied: In the range of 9.0≦x
摘要翻译:在压电谐振器中,薄膜单元的一部分被基板支撑。 从衬底声学隔离的薄膜单元的一部分包括a)振动单元和b)附加膜。 振动单元包括夹在一对电极之间的压电薄膜。 压电膜在平面图中与该对电极重叠。 附加膜设置在压电膜和电极中的一个上,以沿着振动单元的周边的至少一部分延伸。 当x(MN.second / m3)表示由密度和杨氏模量的乘积的平方根定义的附加膜的声阻抗时,A表示附加膜的密度和厚度的乘积,B表示 电极的密度和厚度的乘积以及y = A / B,满足以下条件表达式:<?in-line-formula description =“In-line formula”end =“lead”?> 9.0 <= x <44.0,0.0092.x + 0.88 <= y <0.067.x + 0.60(1a)<?在线公式描述=“在线公式”end =“tail”?> <?in -line-formula description =“In-line Formulas”end =“lead”?>在44.0 <= x <79.0,-0.0035.x + 1.45 <= y <0.015.x + 2.9(1b)的范围内。 ?in-line-formula description =“In-line Formulas”end =“tail”?>
摘要:
Providing is a piezoelectric thin-film filter including resonators connected in a lattice pattern, which can achieve large attenuation at frequencies away from a passband and improve steepness near two ends of the passband without involving an additional special step. Second resonators C—2 or first and third resonators C—1 and Cx—1 connected in parallel form series-arm resonators or parallel-arm resonators C—1 connected in a lattice pattern. The capacitance of each second resonator C—2 is larger than the capacitance of each first resonator C—1. The capacitance of each third resonator Cx—1 is substantially equal to the difference between the capacitance of the second resonator C—2 and the capacitance of the first resonator C—1. The resonant frequency of the first resonator C—1 higher than the resonant frequency of the second resonator C—2. The anti-resonant frequency of the third resonator Cx—1 is higher than the resonant frequency of the second resonator C—2 and lower than the resonant frequency of the first resonator C—1.
摘要:
A branching filter and a communication device have excellent characteristics and an optimized configuration of a transmitting filter and a receiving filter. The branching filter includes a transmitting filter and a receiving filter wherein piezoelectric thin film resonators including a piezoelectric thin film sandwiched between opposed electrodes are arranged in a ladder type configuration on an opening or a recess of a substrate. The transmitting filter and the receiving filter connected in parallel to an antenna terminal. The piezoelectric thin film resonators defining the transmitting filter and the piezoelectric thin film resonators defining the receiving filter are different from each other.
摘要:
A piezoelectric thin film resonator having a stabilized temperature characteristic of resonant frequency, a method for manufacturing the same, and a communication apparatus using the piezoelectric thin film resonator are provided. The piezoelectric thin film resonator is provided with a substrate having an opening, first and second insulation films which are provided on one surface of the substrate while covering the opening and which primarily include SiO2 and Al2O3, respectively, Al2O3 having oxygen defect and being in an amorphous state, and a piezoelectric thin film which is provided on the second insulation film and is sandwiched between electrodes and which primarily includes ZnO.
摘要:
A piezoelectric filter includes a plurality of piezoelectric resonator portions each having a substrate, an SiO2 layer, a piezoelectric thin-film, a lower electrode, and an upper electrode. The plurality of piezoelectric resonator portions include piezoelectric resonator portions having a relatively low frequency, and the lower electrodes of the piezoelectric resonator portions having a relatively low frequency have a thickness larger than that of lower electrodes of other piezoelectric resonator portions. A ladder-type piezoelectric filter, which is one of the communication devices, includes a plurality of parallel resonators and series resonators.
摘要:
An advanced containment system for containing buried waste and associated leachate. The advanced containment system comprises a plurality of casing sections with each casing section interlocked to an adjacent casing section. Each casing section includes a complementary interlocking structure that interlocks with the complementary interlocking structure on an adjacent casing section. A barrier filler substantially fills the casing sections and may substantially fill the spaces of the complementary interlocking structure to form a substantially impermeable barrier. Some of the casing sections may include sensors so that the casing sections and the zone of interest may be remotely monitored after the casing sections are emplaced in the ground.