Advanced containment system
    12.
    发明授权
    Advanced containment system 失效
    高级遏制系统

    公开(公告)号:US06896446B2

    公开(公告)日:2005-05-24

    申请号:US10411534

    申请日:2003-04-04

    摘要: An advanced containment system for containing buried waste and associated leachate. A trench is dug on either side of the zone of interest containing the buried waste so as to accommodate a micro tunnel boring machine. A series of small diameter tunnels are serially excavated underneath the buried waste. The tunnels are excavated by the micro tunnel boring machine at a consistent depth and are substantially parallel to each other. As tunneling progresses, steel casing sections are connected end to end in the excavated portion of the tunnel so that a steel tube is formed. Each casing section has complementary interlocking structure running its length that interlocks with complementary interlocking structure on the adjacent casing section. Thus, once the first tube is emplaced, placement of subsequent tubes is facilitated by the complementary interlocking structure on the adjacent, previously placed, casing sections.

    摘要翻译: 一个包含埋藏废物和相关渗滤液的先进遏制系统。 在包含埋藏废物的感兴趣区域的任一侧上挖掘沟槽,以容纳微型隧道掘进机。 一系列小直径的隧道在埋藏的废物下方串联挖掘。 隧道由微通道掘进机以一致的深度挖掘,并且彼此基本平行。 随着隧道的进行,钢管套管段在隧道的挖掘部分端对端连接,形成钢管。 每个壳体部分具有互补的互锁结构,其长度与相邻壳体部分上的互补互锁结构互锁。 因此,一旦第一管被放置,随后的管的放置由相邻的,预先放置的套管部分上的互补互锁结构来促进。

    Heating and cooling apparatus for reaction chamber
    13.
    发明授权
    Heating and cooling apparatus for reaction chamber 失效
    反应室加热冷却装置

    公开(公告)号:US5892207A

    公开(公告)日:1999-04-06

    申请号:US758246

    申请日:1996-11-27

    摘要: The present invention relates to a temperature regulation apparatus capable of easily regulating the temperature of a support for a substance to be treated, such as a semiconductor wafer.The temperature regulation apparatus includes a liquid nitrogen supply device for supplying liquid nitrogen into a temperature regulation space provided in the inside of a support so as to effect flashing of the liquid nitrogen. A heating device for heating the support and temperature sensors for detecting the temperature of the support are also provided. A temperature setting device sets the temperature of the support at a desired temperature and a controller controls the liquid nitrogen supply device and the heating device based on a temperature detected by the temperature sensors, so that the support reaches and is maintained at the set temperature.

    摘要翻译: 本发明涉及一种温度调节装置,其能够容易地调节诸如半导体晶片的待处理物质的载体的温度。 温度调节装置包括用于将液氮供应到设置在支撑体内部的温度调节空间中的液氮供给装置,以实现液氮的闪蒸。 还提供了用于加热支撑件的加热装置和用于检测支撑件的温度的温度传感器。 温度设定装置将支撑体的温度设定在期望的温度,并且控制器基于由温度传感器检测到的温度来控制液氮供应装置和加热装置,使得支撑件达到并保持在设定温度。

    Piezoelectric thin-film resonator
    15.
    发明授权
    Piezoelectric thin-film resonator 有权
    压电薄膜谐振器

    公开(公告)号:US07535154B2

    公开(公告)日:2009-05-19

    申请号:US12099880

    申请日:2008-04-09

    IPC分类号: H03H9/17 H01L41/047

    摘要: In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b) an additional film. The vibration unit includes a piezoelectric film sandwiched between a pair of electrodes. The piezoelectric film is overlapped with the pair of electrodes in plan view. The additional film is disposed on one of the piezoelectric film and the electrodes so as to extend along at least a portion of the periphery of the vibration unit. When x (MN·second/m3) denotes an acoustic impedance of the additional film defined by the square root of the product of the density and Young's modulus, A denotes the product of the density and the thickness of the additional film, B denotes the product of the densities and the thicknesses of the electrodes, and y=A/B, the following conditional expressions are satisfied: In the range of 9.0≦x

    摘要翻译: 在压电谐振器中,薄膜单元的一部分被基板支撑。 从衬底声学隔离的薄膜单元的一部分包括a)振动单元和b)附加膜。 振动单元包括夹在一对电极之间的压电薄膜。 压电膜在平面图中与该对电极重叠。 附加膜设置在压电膜和电极中的一个上,以沿着振动单元的周边的至少一部分延伸。 当x(MN.second / m3)表示由密度和杨氏模量的乘积的平方根定义的附加膜的声阻抗时,A表示附加膜的密度和厚度的乘积,B表示 电极的密度和厚度的乘积以及y = A / B,满足以下条件表达式:<?in-line-formula description =“In-line formula”end =“lead”?> 9.0 <= x <44.0,0.0092.x + 0.88 <= y <0.067.x + 0.60(1a)<?在线公式描述=“在线公式”end =“tail”?> <?in -line-formula description =“In-line Formulas”end =“lead”?>在44.0 <= x <79.0,-0.0035.x + 1.45 <= y <0.015.x + 2.9(1b)的范围内。 ?in-line-formula description =“In-line Formulas”end =“tail”?>

    Piezoelectric Thin-Film Filter
    16.
    发明申请
    Piezoelectric Thin-Film Filter 有权
    压电薄膜过滤器

    公开(公告)号:US20080048803A1

    公开(公告)日:2008-02-28

    申请号:US11933720

    申请日:2007-11-01

    IPC分类号: H03H9/58

    摘要: Providing is a piezoelectric thin-film filter including resonators connected in a lattice pattern, which can achieve large attenuation at frequencies away from a passband and improve steepness near two ends of the passband without involving an additional special step. Second resonators C—2 or first and third resonators C—1 and Cx—1 connected in parallel form series-arm resonators or parallel-arm resonators C—1 connected in a lattice pattern. The capacitance of each second resonator C—2 is larger than the capacitance of each first resonator C—1. The capacitance of each third resonator Cx—1 is substantially equal to the difference between the capacitance of the second resonator C—2 and the capacitance of the first resonator C—1. The resonant frequency of the first resonator C—1 higher than the resonant frequency of the second resonator C—2. The anti-resonant frequency of the third resonator Cx—1 is higher than the resonant frequency of the second resonator C—2 and lower than the resonant frequency of the first resonator C—1.

    摘要翻译: 提供一种包括以格子图案连接的谐振器的压电薄膜滤波器,其可以在远离通带的频率处获得大的衰减,并且改善通带两端附近的陡度,而不需要额外的特殊步骤。 并联连接的第二谐振器C 2 - 2或第一和第三谐振器C 1 - 1和C x - 1串联臂谐振器或并联臂 以晶格图案连接的谐振器C 1 - 1。 每个第二谐振器C 2 - 2的电容大于每个第一谐振器C 1 - 1的电容。每个第三谐振器C x的电容 - 1基本上等于第二谐振器C 2 - 2的电容和第一谐振器C 1 - 1的电容之间的差。第一谐振器的谐振频率 高于第二谐振器C 2的谐振频率。第三谐振器Cx1的反谐振频率为 高于第二谐振器C 2 - 2的谐振频率并且低于第一谐振器C 1 - 2的谐振频率。

    Branching filter and communication device
    17.
    发明申请
    Branching filter and communication device 有权
    分支过滤器和通讯装置

    公开(公告)号:US20050237129A1

    公开(公告)日:2005-10-27

    申请号:US10520015

    申请日:2003-10-10

    申请人: Hideki Kawamura

    发明人: Hideki Kawamura

    IPC分类号: H03H9/58 H03H9/70 H03H9/56

    CPC分类号: H03H9/02133 H03H9/706

    摘要: A branching filter and a communication device have excellent characteristics and an optimized configuration of a transmitting filter and a receiving filter. The branching filter includes a transmitting filter and a receiving filter wherein piezoelectric thin film resonators including a piezoelectric thin film sandwiched between opposed electrodes are arranged in a ladder type configuration on an opening or a recess of a substrate. The transmitting filter and the receiving filter connected in parallel to an antenna terminal. The piezoelectric thin film resonators defining the transmitting filter and the piezoelectric thin film resonators defining the receiving filter are different from each other.

    摘要翻译: 分路滤波器和通信装置具有优异的特性和发射滤波器和接收滤波器的优化配置。 分路滤波器包括发射滤波器和接收滤波器,其中包括夹在相对电极之间的压电薄膜的压电薄膜谐振器以梯形结构布置在基板的开口或凹槽上。 发射滤波器和接收滤波器与天线端子并联连接。 限定发射滤波器的压电薄膜谐振器和限定接收滤波器的压电薄膜谐振器彼此不同。

    Advanced containment system
    20.
    发明授权
    Advanced containment system 失效
    高级遏制系统

    公开(公告)号:US06851890B2

    公开(公告)日:2005-02-08

    申请号:US10412491

    申请日:2003-04-03

    摘要: An advanced containment system for containing buried waste and associated leachate. The advanced containment system comprises a plurality of casing sections with each casing section interlocked to an adjacent casing section. Each casing section includes a complementary interlocking structure that interlocks with the complementary interlocking structure on an adjacent casing section. A barrier filler substantially fills the casing sections and may substantially fill the spaces of the complementary interlocking structure to form a substantially impermeable barrier. Some of the casing sections may include sensors so that the casing sections and the zone of interest may be remotely monitored after the casing sections are emplaced in the ground.

    摘要翻译: 一个包含埋藏废物和相关渗滤液的先进遏制系统。 先进的封闭系统包括多个壳体部分,每个壳体部分互锁到相邻的壳体部分。 每个壳体部分包括互补的互锁结构,其在相邻的壳体部分上与互补的互锁结构互锁。 阻挡填料基本上填充壳体部分,并且可以基本上填充互补互锁结构的空间以形成基本上不可渗透的屏障。 一些套管部分可以包括传感器,使得在壳体部分被放置在地面中之后,可以远程监视壳体部分和感兴趣区域。