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    Microsystem switches
    11.
    发明授权
    Microsystem switches 有权

    公开(公告)号：US07146067B2

    公开(公告)日：2006-12-05

    申请号：US10482828

    申请日：2002-06-07

    申请人： Michel Despont ,  Ute Drechsler ,  Hugo E. Rothuizen ,  Peter Vettiger ,  Roland W. Widmer

    发明人： Michel Despont ,  Ute Drechsler ,  Hugo E. Rothuizen ,  Peter Vettiger ,  Roland W. Widmer

    IPC分类号： G02B6/26 ,  G02B6/42

    CPC分类号： G11C23/00 ,  G02B6/122 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3576 ,  G02B6/358 ,  H01H1/0036 ,  H01H61/02 ,  H01H2001/0042 ,  H01H2001/0084 ,  H01H2061/006

    摘要： A microsystem switch (1, 20, 25, 30, 33) has a support (2) defining a recess (3), and a flexible bridge (6) is mounted on the support (2) bridging the recess (3). The bridge (6) is shaped so as to hold selectively a concave stable state, in which the bridge bulges into the recess (3), and a convex stable state in which the bridge bulges out of the recess (3). The switch includes an actuator (8, 9; 26, 27) for effecting flexing of the bridge (6) between the stable states, and a switching element (7, 31, 34) is mounted on the bridge (6) such that movement of the bridge between the stable states moves the switching element between an on position and an off position. According to another design, a microsystem switch (40, 55) has a support (41) defining a recess (42), and an elongate torsion member (44) is mounted on the support (41) bridging the recess (42). A flexible bridge (43, 56) is mounted on the support (41) bridging the recess (42) in a direction substantially perpendicular to the torsion member (44). The bridge (43, 56) is connected to the torsion member (44) at the cross-point thereof so that a first section of the bridge extends between the cross-point and one side of the recess (42) and a second section of the bridge extends between the cross-point and the opposite side of the recess (42). The bridge (43, 56) is shaped so as to hold selectively a first stable state, in which the first section of the bridge bulges into the recess and the second section of the bridge bulges out of the recess, and a second stable state in which this configuration is reversed. A switching element (45) is mounted at the cross-point of the bridge (43, 56) and torsion member (44), and an actuator (46a, 46b; 58a, 58b) is again provided for effecting flexing of the bridge (43, 56) between the stable states. Here, movement of the bridge (43, 56) between the stable states effects twisting of the torsion member (44) and rotation of the switching element (45) between an on position and an off position. Switching devices incorporating these switches, and switching apparatus comprising arrays of such switching devices, are also provided.

    METHOD FOR PRODUCING AN INTEGRATED DEVICE AND A DEVICE PRODUCED THEREBY
    13.
    发明申请
    METHOD FOR PRODUCING AN INTEGRATED DEVICE AND A DEVICE PRODUCED THEREBY 有权
    用于生产集成装置的方法及其生产的装置

    公开(公告)号：US20090133914A1

    公开(公告)日：2009-05-28

    申请号：US12275276

    申请日：2008-11-21

    申请人： Laurent A. Dellmann ,  Michel Despont ,  Ute Drechsler ,  Roland M. Guerre

    发明人： Laurent A. Dellmann ,  Michel Despont ,  Ute Drechsler ,  Roland M. Guerre

    IPC分类号： H05K1/18 ,  H05K3/36

    CPC分类号： B81C1/00373 ,  B81C3/008 ,  B81C2201/0185 ,  H01L24/95 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/4913 ,  Y10T29/49144 ,  Y10T29/5313

    摘要： A method for producing an integrated device. A source substrate is provided, the source substrate carrying one or more components to be attached to a receiver surface having a uneven topography. The source substrate includes a deformable layer on a surface on which the one or more components are carried. The source substrate is aligned such that said one or more components carried thereon are associated with contact areas of the receiver surface. The source substrate and the receiver surface are moved towards each other such that the one or more components are brought into contact with the contact areas wherein the deformable layer is at least partially deformed. The source substrate is removed such that the one or more of the components remain located on the contact areas of the receiver surface.

    摘要翻译： 一种集成装置的制造方法。 提供源极衬底，源极衬底承载要附接到具有不平坦的形貌的接收器表面的一个或多个部件。 源极基板在其上承载有一个或多个部件的表面上包括可变形层。 源极衬底被对准，使得其上承载的所述一个或多个部件与接收器表面的接触区域相关联。 源极基板和接收器表面朝向彼此移动，使得一个或多个部件与可变形层至少部分变形的接触区域接触。 去除源极衬底，使得一个或多个部件保持位于接收器表面的接触区域上。

    Selective filling of electrically conductive vias for three dimensional device structures
    14.
    发明授权
    Selective filling of electrically conductive vias for three dimensional device structures 有权
    选择性填充三维器件结构的导电通孔

    公开(公告)号：US06770558B2

    公开(公告)日：2004-08-03

    申请号：US10371466

    申请日：2003-02-21

    申请人： Emmanuel Delamarche ,  Michel Despont ,  Ute Drechsler ,  Matthias Geissler

    发明人： Emmanuel Delamarche ,  Michel Despont ,  Ute Drechsler ,  Matthias Geissler

    IPC分类号： H01L214763

    CPC分类号： H01L21/76843 ,  H01L21/76874 ,  H01L21/76879 ,  H01L2221/1089

    摘要： Methods and apparatus for forming and/or enabling interconnection in a substrate. An example embodiment of a method comprises forming a via in the substrate. A preconditioning layer is deposited on the substrate. A catalyst layer is then bound to the preconditioning layer. A conductive material is deposited on the catalyst layer by electro-less deposition to fill the via with the conductive material. Deposition of the conductive material is selectively disabled from coating surfaces of the substrate outside the via. Advantageous alternatives are presented.

    摘要翻译： 用于在衬底中形成和/或实现互连的方法和装置。 方法的示例性实施例包括在衬底中形成通孔。 预处理层沉积在衬底上。 然后将催化剂层结合到预处理层。 通过无电沉积将导电材料沉积在催化剂层上，以用导电材料填充通孔。 选择性地禁止导电材料的沉积，以从通孔外部的基板的涂层表面去除。 提出了有利的替代方案。

    High-speed scanning probe microscope
    18.
    发明授权
    High-speed scanning probe microscope 有权
    高速扫描探针显微镜

    公开(公告)号：US08327461B2

    公开(公告)日：2012-12-04

    申请号：US13146355

    申请日：2010-01-15

    申请人： Harish Bhaskaran ,  Michel Despont ,  Abu Sebastian

    发明人： Harish Bhaskaran ,  Michel Despont ,  Abu Sebastian

    IPC分类号： G01Q60/14 ,  G01N13/16 ,  G01N13/10

    CPC分类号： G01Q60/16

    摘要： The invention is directed to a probe for scanning probe microscopy. The probe 20 comprises a tunnel-current conducting part 30 and a tunnel-current insulating part 40. The said parts are configured such that the insulating part determines a minimal distance between the conducting part 30 and the sample surface. The invention may further concern a scanning probe microscope having such a probe, and a corresponding scanning probe microscopy method. Since the distance to the sample surface 100 is actually determined by the insulating part 40, controlling the vertical position of the probe 20 relative to the sample surface is easily and rapidly achieved. The configuration of the parts allows for a fast scan of the sample surface, whereby high-speed imaging can be achieved. Further, embodiments allow for topographical variations to be accurately captured through tunneling effect.

    摘要翻译： 本发明涉及用于扫描探针显微镜的探针。 探针20包括隧道电流传导部分30和隧道电流绝缘部分40.所述部分被构造成使得绝缘部分确定导电部分30和样品表面之间的最小距离。 本发明还可以涉及具有这种探针的扫描探针显微镜和相应的扫描探针显微镜方法。 由于到达样品表面100的距离实际上由绝缘部件40确定，因此容易且快速地实现了探针20相对于样品表面的垂直位置的控制。 部件的构造允许对样品表面进行快速扫描，由此可以实现高速成像。 此外，实施例允许通过隧道效应准确地捕获地形变化。

    RESISTOR WITH IMPROVED SWITCHABLE RESISTANCE AND NON-VOLATILE MEMORY DEVICE
    19.
    发明申请
    RESISTOR WITH IMPROVED SWITCHABLE RESISTANCE AND NON-VOLATILE MEMORY DEVICE 失效
    具有改进的可切换电阻和非易失性存储器件的电阻器

    公开(公告)号：US20120164813A1

    公开(公告)日：2012-06-28

    申请号：US13411610

    申请日：2012-03-04

    申请人： Christophe P. Rossel ,  Michel Despont

    发明人： Christophe P. Rossel ,  Michel Despont

    IPC分类号： H01L21/02

    CPC分类号： H01L45/04 ,  H01L27/20 ,  H01L27/2463 ,  H01L45/1233 ,  H01L45/1273 ,  H01L45/147 ,  H01L45/16

    摘要： A resistor with improved switchable resistance includes a first electrode, a second electrode, and an insulating dielectric structure between the first and second electrodes. The insulating dielectric structure includes a confined conductive region providing a first resistance state and a second resistance state; the resistance state of the confined conductive region being switchable between the first and second resistance states by a control signal.

    摘要翻译： 具有改善的可切换电阻的电阻器包括在第一和第二电极之间的第一电极，第二电极和绝缘电介质结构。 绝缘电介质结构包括提供第一电阻状态和第二电阻状态的限制导电区域; 受限导电区域的电阻状态可通过控制信号在第一和第二电阻状态之间切换。

    Data storage device
    20.
    发明授权
    Data storage device 失效
    数据存储设备

    公开(公告)号：US07848213B2

    公开(公告)日：2010-12-07

    申请号：US12185530

    申请日：2008-08-04

    申请人： Peter Baechtold ,  Johannes G. Bednorz ,  Gerd K. Binnig ,  Giovanni Cherubini ,  Evangelos S. Eleftheriou ,  Michel Despont

    发明人： Peter Baechtold ,  Johannes G. Bednorz ,  Gerd K. Binnig ,  Giovanni Cherubini ,  Evangelos S. Eleftheriou ,  Michel Despont

    IPC分类号： G11B9/00

    CPC分类号： G11B11/007 ,  B82Y10/00 ,  G11B9/1472

    摘要： A storage device including a storage medium for storing data in the form of topographic or magnetic marks. At least one probe is mounted on a common frame, the common frame and the storage medium designed for moving relative to each other for creating or detecting said marks. Each probe includes a tip facing the storage medium, a read sensing element, a write element and a capacitive platform, that forms a first electrode and is designed for a voltage potential applied to it independent from a control signal for said read sensing element and for said voltage potential applied to said capacitive platform being independent from a control signal for said write heating element. It further comprises a second electrode arranged in a fixed position relative to the storage medium forming a first capacitor together wherein said first electrode and a medium between the first and second electrode.

    摘要翻译： 一种存储装置，包括用于以地形或磁标记的形式存储数据的存储介质。 至少一个探针安装在公共框架上，公共框架和存储介质被设计用于相对于彼此移动以创建或检测所述标记。 每个探针包括面向存储介质的尖端，读取感测元件，写入元件和电容平台，其形成第一电极，并被设计用于独立于用于所述读取感测元件的控制信号的施加于其的电压电位，并且为 施加到所述电容平台的所述电压电位独立于用于所述写入加热元件的控制信号。 它还包括布置在相对于存储介质固定位置的第二电极，形成第一电容器，其中所述第一电极和第一和第二电极之间的介质。