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    LPP EUV drive laser input system
    12.
    发明授权
    LPP EUV drive laser input system 失效
    LPP EUV驱动激光输入系统

    公开(公告)号：US07402825B2

    公开(公告)日：2008-07-22

    申请号：US11168785

    申请日：2005-06-28

    Applicant: Rodney D. Simmons ,  John W. Viatella ,  Jerzy R. Hoffman ,  R. Kyle Webb ,  Alexander N. Bykanov ,  Oleh Khodykin

    Inventor： Rodney D. Simmons ,  John W. Viatella ,  Jerzy R. Hoffman ,  R. Kyle Webb ,  Alexander N. Bykanov ,  Oleh Khodykin

    IPC: G21G4/00

    CPC classification number: H05G2/001

    Abstract: A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source and method of operating same is disclosed which may comprise an EUV plasma production chamber having a chamber wall; a drive laser entrance window in the chamber wall; a drive laser entrance enclosure intermediate the entrance window and a plasma initiation site within the chamber and comprising an entrance enclosure distal end opening; at least one aperture plate intermediate the distal opening and the entrance window comprising at least one drive laser passage aperture. The at least one aperture plate may comprise at least two aperture plates comprising a first aperture plate and a second aperture plate defining an aperture plate interim space. The at least one drive laser aperture passage may comprise at least two drive laser aperture passages. The laser passage aperture may define an opening large enough to let the drive laser beam pass without attenuation and small enough to substantially reduce debris passing through the laser passage aperture in the direction of the entrance window.

    Abstract translation: 公开了一种激光产生的等离子体（“LPP”）极紫外（“EUV”）光源及其操作方法，其可以包括具有室壁的EUV等离子体生产室; 在室壁中的驱动激光入口窗口; 在入口窗口中间的驱动激光入口外壳和腔室内的等离子体起始位置，并且包括入口外壳远端开口; 在远端开口和入口窗之间的至少一个孔板包括至少一个驱动激光通道孔。 至少一个孔板可以包括至少两个孔板，其包括限定孔板中间空间的第一孔板和第二孔板。 至少一个驱动激光孔通道可以包括至少两个驱动激光孔通道。 激光通道孔可以限定足够大的开口，使得驱动激光束通过而不衰减，并且足够小以基本上减少通过入口窗口方向的穿过激光通道孔的碎屑。

    Miniature cryogenic shutter assembly
    13.
    发明授权
    Miniature cryogenic shutter assembly 有权
    微型低温快门组件

    公开(公告)号：US06995359B1

    公开(公告)日：2006-02-07

    申请号：US10457035

    申请日：2003-06-11

    Applicant: Eric A. Hillenbrand ,  Roy Luoma ,  R. Kyle Webb

    Inventor： Eric A. Hillenbrand ,  Roy Luoma ,  R. Kyle Webb

    IPC: G01N21/35

    CPC classification number: G01J5/522 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/0286 ,  G01J5/62

    Abstract: A calibration method for radiometric imaging systems that relies on an absolute measurement of scene radiance (thereby requiring a baseline measurement of zero radiance), and a shutter assembly for taking the baseline measurement of zero radiance which is operable under cryogenic temperatures as low as 80.5K (−192.65° C.) in vacuums measuring

    Abstract translation: 用于放射成像系统的校准方法，其依赖于场景辐射的绝对测量（从而需要零辐射的基线测量），以及用于进行零辐射基线测量的快门组件，该低温可在低于80.5K的低温 （-192.65℃）在测量<10 -6乇（mm Hg）的真空中。 快门组件通常包括致动器和快门机构。 致动器优选地是能够在极端环境（例如，<10 -6托的真空度，低于90K的温度）下操作的微型螺线管组件。 快门机构优选地包括单个快门叶片，并且当经受极端环境时也能够操作。 使用快门组件的方法为红外成像系统提供零辐射参考测量，从而提供可以确定绝对场景辐射的基础。

    Long delay and high TIS pulse stretcher
    14.
    发明授权
    Long delay and high TIS pulse stretcher 有权

    公开(公告)号：US06928093B2

    公开(公告)日：2005-08-09

    申请号：US10712545

    申请日：2003-11-13

    Applicant: R. Kyle Webb ,  Scot T. Smith ,  Roy Luoma

    Inventor： R. Kyle Webb ,  Scot T. Smith ,  Roy Luoma

    IPC: H01S3/00 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/23 ,  H01S3/10

    CPC classification number: G03F7/7055 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

    Abstract: A method and apparatus for laser light pulse stretching is disclosed which may comprise a beam splitter in the path of a laser output light pulse beam; selected to pass a first percent of the energy of a first input pulse of the laser output light pulse beam along a laser output light pulse beam output path as a first output pulse and to reflect a second percent of the energy of the laser output light pulse beam into a first delayed beam; an optical delay path receiving the first delayed beam and returning the first delayed beam to the beam splitter in an orientation such that a third percent of the first delayed beam is reflected into the output path as a second output pulse and a fourth percent is passed into the optical delay path as a second delayed beam; the optical delay path receiving the second delayed beam and returning the second delayed beam to the beam splitter in an orientation such that the third percent of the second delayed beam is reflected into the output path as a third output pulse and the fourth percent of the second delayed beam is passed into the optical delay path as a third delayed beam; the optical delay path receiving the third delayed beam and returning the third delayed beam to the beam splitter in an orientation such that the third percent of the third delayed beam is reflected into the output path as a fourth output pulse; the first input pulse being a first pulse in a plurality of pulses output from a prior pulse stretcher, each of a plurality of succeeding input pulses comprising the output of the prior pulse stretcher resulting from the stretching of a narrow band laser light output pulse, forming successive first, second, third and fourth output pulses, the combination of which forms a pulse stretcher having an output with TIS of at least 200 ns. The optical delay path may be formed of a plurality of at least eight reflecting mirrors and contained in an elongated enclosure having first and second end plates mounting a first group of at least four of the at least eight reflecting mirrors mounted on the first mounting surface symmetrically about a center axis of the optical delay path and a second group of at least four of the at least eight reflecting mirrors mounted on the second mounting surface symmetrically about the center axis. The mirrors may be staggered in a predefined pattern, e.g., a circular pattern. The delay path may lie in a plurality of planes. The apparatus may be part of a laser system, part of a beam delivery system or an interface between the two.

    Closed-loop focal positioning system and method
    15.
    发明授权
    Closed-loop focal positioning system and method 有权
    闭环焦点定位系统及方法

    公开(公告)号：US06751033B2

    公开(公告)日：2004-06-15

    申请号：US09976555

    申请日：2001-10-12

    Applicant: Peter Goldstein ,  Carlos G. Suarez ,  Scott A. DeLong ,  R. Kyle Webb ,  Tibor Juhasz

    Inventor： Peter Goldstein ,  Carlos G. Suarez ,  Scott A. DeLong ,  R. Kyle Webb ,  Tibor Juhasz

    IPC: G02B702

    CPC classification number: G02B7/28 ,  A61F9/008 ,  A61F9/00802 ,  A61F9/00825 ,  A61F9/009 ,  A61F2009/00844 ,  A61F2009/00855 ,  A61F2009/00872 ,  A61F2009/00891

    Abstract: A closed-loop focusing system and method positions a focusing assembly to a desired positioned. A feedback positioning device, such as a linear encoder, provides an actual or “read” value for the linear movement of the focusing assembly. The desired position is compared to the actual position of the focusing assembly. If the two values are outside of a predetermined tolerance or valid range, then an audible or visual warning will be given. Furthermore, when a laser source is utilized with the focusing system, then laser operation will be prevented where the two values are outside of tolerance.

    Abstract translation: 闭环聚焦系统和方法将聚焦组件定位到期望的位置。 诸如线性编码器的反馈定位装置为聚焦组件的线性运动提供实际或“读取”值。 将所需位置与聚焦组件的实际位置进行比较。 如果两个值超出了预定的公差或有效范围，则会发出声音或视觉警告。 此外，当与聚焦系统一起使用激光源时，在两个值超出公差的情况下，将防止激光操作。

    Blower assembly for a pulsed laser system incorporating ceramic bearings
    16.
    发明授权
    Blower assembly for a pulsed laser system incorporating ceramic bearings 有权
    鼓风机组件，用于包含陶瓷轴承的脉冲激光系统

    公开(公告)号：US06208675B1

    公开(公告)日：2001-03-27

    申请号：US09141068

    申请日：1998-08-27

    Applicant: R. Kyle Webb

    Inventor： R. Kyle Webb

    IPC: H01S336

    CPC classification number: H01S3/036 ,  H01S3/225

    Abstract: A blower assembly for circulating gases in a laser chamber. The blower assembly includes a driving assembly operatively engaged to a drive side shaft for rotating a fan assembly. A first bearing assembly supports the drive side shaft. The blower assembly may further include an idle side shaft for supporting the fan assembly and a second bearing assembly circumscribing the idle side shaft. The driving assembly includes a motor disposed over a rotor. The fan assembly includes a pair of hubs supporting a plurality of blades. The first and second bearing assemblies comprise a ceramic compound, such as silicon nitride (Si3N4), and are lubricated with a synthetic oil, such as perfluoropolyalkylether (PFPE).

    Abstract translation: 用于在激光室中循环气体的鼓风机组件。 鼓风机组件包括可操作地接合到驱动侧轴的驱动组件，用于旋转风扇组件。 第一轴承组件支撑驱动侧轴。 鼓风机组件还可以包括用于支撑风扇组件的空转侧轴和围绕空转侧轴的第二轴承组件。 驱动组件包括设置在转子上方的电动机。 风扇组件包括支撑多个叶片的一对轮毂。 第一和第二轴承组件包括诸如氮化硅（Si 3 N 4）的陶瓷化合物，并用合成油例如全氟聚烷基醚（PFPE）润滑。

    Ocular fixation and stabilization device for ophthalmic surgical applications
    17.
    发明授权
    Ocular fixation and stabilization device for ophthalmic surgical applications 有权
    用于眼科手术应用的眼固定和稳定装置

    公开(公告)号：US07018376B2

    公开(公告)日：2006-03-28

    申请号：US10865165

    申请日：2004-06-10

    Applicant: R. Kyle Webb ,  Michael F. Brownell ,  Christopher Horvath ,  Tibor Juhasz ,  Ronald M. Kurtz ,  Laszlo I. Nagy ,  Mark W. Ross ,  Carlos G. Suarez

    Inventor： R. Kyle Webb ,  Michael F. Brownell ,  Christopher Horvath ,  Tibor Juhasz ,  Ronald M. Kurtz ,  Laszlo I. Nagy ,  Mark W. Ross ,  Carlos G. Suarez

    IPC: A61B18/18

    CPC classification number: A61F9/009 ,  A61B2017/306 ,  A61F9/008 ,  A61F2009/00846

    Abstract: A method for applanating an anterior surface of a cornea and coupling the eye to a surgical laser is disclosed. A interface is provided which has a central orifice and top and bottom surfaces. A suction ring is removably coupled to the bottom surface of the interface. The interface is positioned over an operative area of an eye, such that the suction ring comes into proximate contact with the surface of the eye. A suction is applied to the suction ring to stabilize the position of the interface relative to the operative area of the eye. An applanation lens is positioned in proximate contact with the operative area of the eye. Finally, the applanation lens is coupled to the interface to stabilize the position of the lens relative to the operative area of the eye.

    Abstract translation: 公开了一种用于压平角膜的前表面并将眼睛联接到手术激光的方法。 提供了一个具有中心孔和顶部和底部表面的界面。 吸入环可拆卸地联接到界面的底表面。 界面定位在眼睛的操作区域上方，使得吸入环与眼睛的表面接近接触。 吸力被施加到吸入环，以稳定界面相对于眼睛的操作区域的位置。 压平透镜被定位成与眼睛的操作区域紧密接触。 最后，扁平透镜耦合到界面以稳定透镜相对于眼睛的操作区域的位置。

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