Method and apparatus for irradiation of a pulse laser beam
    11.
    发明授权
    Method and apparatus for irradiation of a pulse laser beam 有权
    用于照射脉冲激光束的方法和装置

    公开(公告)号:US06372039B1

    公开(公告)日:2002-04-16

    申请号:US09273489

    申请日:1999-03-22

    IPC分类号: C30B2802

    摘要: A method and device for irradiating a pulse laser beam having a linear shape and a rectangular shape beam spot onto a non-single crystal semiconductor thin film. The method includes scanning the pulse laser beam so that previous and next beam spots are partially overlapped. The laser beam has a profile which includes: a first beam profile region having a first energy density which is lower than a micro-crystallization threshold value Ea of an amorphous semiconductor for forming a polycrystallization region; a second beam profile region having a second energy density which is not lower than the micro-crystallization threshold value Ea and is lower than a micro-crystallization threshold value Ep of a polycrystalline semiconductor for forming a first micro-polycrystallization region from an amorphous semiconductor region; and a third beam profile region having a third energy density which is not lower than the micro-crystallization threshold value Ep for forming a second micro-polycrystallization region from a polycrystalline semiconductor region.

    摘要翻译: 一种用于将具有线性形状和矩形形状的光斑的脉冲激光束照射到非单晶半导体薄膜上的方法和装置。 该方法包括扫描脉冲激光束,使得前一个和下一个光束点部分重叠。 激光束具有轮廓,该轮廓包括:具有低于用于形成多晶化区域的非晶半导体的微结晶阈值Ea的第一能量密度的第一光束轮廓区域; 第二光束轮廓区域,其具有不低于微结晶阈值Ea的第二能量密度,并且低于用于从非晶半导体区域形成第一微多晶结晶区域的多晶半导体的微结晶阈值Ep ; 以及具有不低于用于形成来自多晶半导体区域的第二微多晶结晶区域的微结晶阈值Ep的第三能量密度的第三光束轮廓区域。

    Thin film transistor
    12.
    发明授权
    Thin film transistor 失效
    薄膜晶体管

    公开(公告)号:US05998838A

    公开(公告)日:1999-12-07

    申请号:US33609

    申请日:1998-03-03

    摘要: In a thin film transistor, a first insulating film on a silicon layer formed in an island on a substrate is smaller in thickness than the silicon layer so that the stepped island edges is gentle in slope to facilitate covering the island with a second insulating film. This reduces occurrence of gate leak considerably. Since the peripheral region of the stepped island is smaller in thickness than the central region above the channel, it is possible to minimize occurrence of gate electrode breakage. The silicon layer contains two or more inert gas atoms, and the atoms smaller in mass number (e.g., He) are contained in and near an interface with a silicon active layer while the atoms larger in mass number (e.g., Ar) than those smaller in mass number are contained in and near a second interface with a gate electrode.

    摘要翻译: 在薄膜晶体管中,形成在基板上的岛上的硅层上的第一绝缘膜的厚度比硅层的厚度小,使得台阶状的岛边缘倾斜平缓以便于用第二绝缘膜覆盖岛。 这可以大大减少闸门泄漏的发生。 由于阶梯状岛的周边区域的厚度比通道上方的中心区域的厚度小,所以能够最小化栅电极断裂的发生。 硅层含有两个或更多个惰性气体原子,质量数较小的原子(例如,He)包含在与硅有源层的界面中和附近,而质量数(例如Ar)的原子比较小 质量数量被包含在与栅电极的第二界面中和附近。

    Method for starting hydraulic turbine generator
    15.
    发明授权
    Method for starting hydraulic turbine generator 失效
    起动水轮发电机的方法

    公开(公告)号:US4201925A

    公开(公告)日:1980-05-06

    申请号:US818594

    申请日:1977-07-25

    CPC分类号: F03B15/005 Y02E10/226

    摘要: A method for improving the starting phase of the running of a hydraulic turbine or pump turbine. According to this method, an opening of wicket gates is increased as a function of an increase in r.p.m. of a runner, so that the flow rate of water running into a runner may be maintained constant throughout acceleration and synchronizing process to the rated speed once attained said constant value at an early stage of starting.

    摘要翻译: 一种用于改善水轮机或泵​​式水轮机运行起动阶段的方法。 根据这种方法,门口的开口作为r.p.m的增加的函数而增加。 的流道,使得在加速和同步过程中流入流道的水的流量可以在启动的早期达到所述恒定值时保持恒定。

    Laser crystallization apparatus and laser crystallization method using the apparatus
    17.
    发明授权
    Laser crystallization apparatus and laser crystallization method using the apparatus 有权
    激光结晶装置和激光结晶法使用该装置

    公开(公告)号:US08853062B2

    公开(公告)日:2014-10-07

    申请号:US13411276

    申请日:2012-03-02

    申请人: Hiroshi Okumura

    发明人: Hiroshi Okumura

    IPC分类号: H01S3/10 B23K26/00 H01L31/18

    摘要: A laser crystallization device includes a first light source providing a first light and a second light source providing a second light. The device further includes a first lens set receiving the first light to generate a first transmitted light, the first transmitted light having a first profile, the first profile having a first profile error portion and a first non-error portion. The device further includes a second lens set receiving the second light to generate a second transmitted light, the second transmitted light having a second profile, the second profile having a second profile error portion and a second non-error portion, the second profile error portion corresponding to the first non-error portion, the second non-error portion corresponding to the first profile error portion. The device further includes an optical system combining the first transmitted light with the second transmitted light.

    摘要翻译: 激光结晶装置包括提供第一光的第一光源和提供第二光的第二光源。 该装置还包括接收第一光以产生第一透射光的第一透镜组,第一透射光具有第一轮廓,第一轮廓具有第一轮廓误差部分和第一无误差部分。 该装置还包括接收第二光以产生第二透射光的第二透镜组,第二透射光具有第二分布,第二分布具有第二分布误差部分和第二非误差部分,第二分布误差部分 对应于第一非错误部分,第二非错误部分对应于第一轮廓误差部分。 该装置还包括将第一透射光与第二透射光组合的光学系统。

    Liquid crystal display panel and manufacturing method thereof
    18.
    发明授权
    Liquid crystal display panel and manufacturing method thereof 有权
    液晶显示面板及其制造方法

    公开(公告)号:US08488072B2

    公开(公告)日:2013-07-16

    申请号:US12418052

    申请日:2009-04-03

    摘要: To provide a structure and a manufacturing method which can manufacture, at a low cost and with good yield, a liquid crystal display panel having a lenticular lens and a substrate formed in a unified manner. When forming a lenticular lens onto a mother CF substrate by using a wet etching method, substrates are dipped into an etching solution while being raised up in such a manner that the length direction of slit openings of a mask is aligned with a vertical direction and an area having no mask pattern comes on a bottom side. With this, the residuals generated due to glass impurities can be drained towards the lower side along the lenticular lens shape to be discharged to the flat area, which makes it possible to suppress deterioration in the etching processed shape.

    摘要翻译: 为了提供能够以低成本,高成品率制造具有双凸透镜的液晶显示面板和以统一的方式形成的基板的结构和制造方法。 当通过使用湿式蚀刻方法将母体CF基板形成双凸透镜时,将衬底浸入蚀刻溶液中,同时以使得掩模的狭缝开口的长度方向与垂直方向对准的方式升高,并且 没有掩模图案的区域在底面。 由此,由玻璃杂质产生的残留物可以沿着双凸透镜形状向下侧排出,以排出到平坦区域,这样可以抑制蚀刻加工形状的劣化。