公开(公告)号：US11719652B2

公开(公告)日：2023-08-08

申请号：US17160006

申请日：2021-01-27

Applicant: KLA Corporation

Inventor： Yung-Ho Alex Chuang ,  John Fielden

IPC: G01N23/20008 ,  G01N23/201 ,  H01J35/06 ,  H01J35/14 ,  H01J35/18 ,  H01J3/02 ,  H05G1/02 ,  G03F7/20 ,  G03F7/00

CPC classification number: G01N23/20008 ,  G01N23/201 ,  G03F7/70633 ,  H01J3/022 ,  H01J35/065 ,  H01J35/066 ,  H01J35/147 ,  H01J35/18 ,  H05G1/02 ,  G01N2223/03 ,  G01N2223/054 ,  G01N2223/1016 ,  G01N2223/204 ,  G01N2223/6116 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/16 ,  H01J2235/18

Abstract: Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

公开(公告)号：US20230243765A1

公开(公告)日：2023-08-03

申请号：US18295761

申请日：2023-04-04

Applicant: Alexandra Ros ,  Daihyun Kim ,  Diandra Doppler ,  Jorvani Cruz Villarreal ,  Richard Kirian ,  Reza Nazari ,  Sahir Gandhi

Inventor： Alexandra Ros ,  Daihyun Kim ,  Diandra Doppler ,  Jorvani Cruz Villarreal ,  Richard Kirian ,  Reza Nazari ,  Sahir Gandhi

IPC: G01N23/20025 ,  G01N23/201 ,  B01L3/02 ,  G01N35/10 ,  B01L3/00

CPC classification number: G01N23/20025 ,  G01N23/201 ,  B01L3/0241 ,  G01N35/1016 ,  B01L3/502715 ,  G01N2223/30 ,  G01N2223/604 ,  G01N2223/612 ,  G01N2223/637 ,  G01N2223/1016 ,  G01N2223/203 ,  G01N2223/054 ,  G01N2035/1034 ,  B01L2300/0645

Abstract: A single-piece hybrid droplet generator and nozzle component for serial crystallography. The single-piece hybrid droplet generator component including an internally-formed droplet-generation channel, an internally-formed sample channel, a nozzle, and a pair of electrode chambers. The droplet-generation channel extends from a first fluid inlet opening to the nozzle. The sample channel extends from a second fluid inlet opening to the droplet-generation channel and joins the droplet-generation channel at a junction. The nozzle is configured to eject a stream of segmented aqueous droplets in a carrier fluid from the droplet-generation channel through a nozzle opening of the single-piece component. The pair of electrode chambers are positioned adjacent to the droplet-generation channel near the junction between the droplet-generation channel and the sample channel. The timing of sample droplets in the stream of fluid ejected through the nozzle is controlled by applying a triggering signal to electrodes positioned in the electrode chambers of the single-piece component.

公开(公告)号：US20180246046A1

公开(公告)日：2018-08-30

申请号：US15755215

申请日：2016-07-20

Applicant: PAUL SCHERRER INSTITUT

Inventor： MATIAS KAGIAS ,  MARCO STAMPANONI ,  ZHENTIAN WANG

IPC: G01N23/041 ,  G01N23/20 ,  G01N23/201 ,  G21K1/06 ,  A61B6/03 ,  A61B6/00 ,  G02B5/18

CPC classification number: G01N23/041 ,  A61B6/032 ,  A61B6/4035 ,  A61B6/4092 ,  A61B6/4233 ,  A61B6/4291 ,  A61B6/484 ,  G01N23/04 ,  G01N23/20075 ,  G01N23/201 ,  G02B5/1838 ,  G02B5/1871 ,  G21K1/06 ,  G21K2207/005

Abstract: X-ray scattering imaging can provide complementary information about the unresolved microstructures of a sample. The scattering signal can be accessed with various methods based on coherent illumination, which span from self-imaging to speckle scanning. The directional sensitivity of the existing methods is limited to a few directions on the imaging plane and it requires the scanning of the optical components, or the rotation of either the sample or the imaging setup, if the full range of possible scattering directions is desired. A new arrangement is provided that allows the simultaneous acquisition of the scattering images in all possible directions in a single shot. This is achieved by a specialized phase grating and a device for recording the generated interference fringe with sufficient spatial resolution. The technique decouples the sample dark-field signal with the sample orientation, which can be crucial for medical and industrial applications.

公开(公告)号：US09784697B2

公开(公告)日：2017-10-10

申请号：US14424682

申请日：2012-12-06

Applicant: KOREA ATOMIC ENERGY RESEARCH INSTITUTE

Inventor： Jang Ho Ha ,  Young Soo Kim ,  Han Soo Kim ,  Sun Mog Yeo

IPC: G01N23/04 ,  G01N23/08 ,  G01N23/083 ,  G01N23/087 ,  G01N23/201 ,  G01N23/20 ,  G01N23/202

CPC classification number: G01N23/201 ,  G01N23/04 ,  G01N23/06 ,  G01N23/083 ,  G01N23/087 ,  G01N23/20 ,  G01N23/202

Abstract: A radiation imaging device capable of matter-element information acquisition and image based selection comprises: a radiation source generating radiation; at least one scattering device receiving radiation which includes radiation transmitting a subject and scattered radiation and scattering the received radiation; and an imaging device receiving the radiation which includes the radiation transmitting the subject and the scattered radiation to measure energy and positional information so as to calculate a two-dimensional image.

公开(公告)号：US09778213B2

公开(公告)日：2017-10-03

申请号：US14461416

申请日：2014-08-17

Applicant: KLA-Tencor Corporation

Inventor： Michael S. Bakeman ,  Andrei V. Shchegrov ,  Kevin Peterlinz ,  Thaddeus Gerard Dziura

IPC: G06F17/50 ,  G01N23/223 ,  G01N23/201

CPC classification number: G01N23/223 ,  G01N23/201 ,  G01N2223/6116

Abstract: Methods and systems for performing simultaneous X-ray Fluorescence (XRF) and small angle x-ray scattering (SAXS) measurements over a desired inspection area of a specimen are presented. SAXS measurements combined with XRF measurements enables a high throughput metrology tool with increased measurement capabilities. The high energy nature of x-ray radiation penetrates optically opaque thin films, buried structures, high aspect ratio structures, and devices including many thin film layers. SAXS measurements of a particular location of a planar specimen are performed at a number of different out of plane orientations. This increases measurement sensitivity, reduces correlations among parameters, and improves measurement accuracy. In addition, specimen parameter values are resolved with greater accuracy by fitting data sets derived from both SAXS and XRF measurements based on models that share at least one material parameter. The fitting can be performed sequentially or in parallel.

公开(公告)号：US09771380B2

公开(公告)日：2017-09-26

申请号：US14634676

申请日：2015-02-27

Applicant: University of Oregon

Inventor： James E. Hutchison ,  Edward W. Elliott, III ,  Zachary Kennedy ,  Patrick Haben

IPC: G01N21/00 ,  C07F1/00 ,  G01N33/543 ,  G01N33/551 ,  G01N33/58 ,  G01N23/201 ,  G01N15/02 ,  C07F5/00

CPC classification number: C07F1/005 ,  C07F5/003 ,  G01N15/0227 ,  G01N23/04 ,  G01N23/201 ,  G01N33/54346 ,  G01N33/54353 ,  G01N33/551 ,  G01N33/587

Abstract: Disclosed herein are embodiments of gold nanoparticles and methods of making and using the gold nanoparticles. The disclosed gold nanoparticles have core sizes and polydispersities controlled by the methods of making the gold nanoparticles. In some embodiments, the methods of making the gold nanoparticles can concern using flow reactors and reaction conditions controlled to make gold nanoparticles having a desired core size. The gold nanoparticles disclosed herein also comprise various ligands that can be used to facilitate the use of the gold nanoparticles in a variety of applications.

公开(公告)号：US09761021B2

公开(公告)日：2017-09-12

申请号：US14397878

申请日：2013-05-13

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： Thomas Koehler ,  Bernhard Johannes Brendel ,  Ewald Roessl ,  Udo van Stevendaal

IPC: G06T11/00 ,  G01T1/29 ,  G01N23/20 ,  G01N23/201 ,  A61B6/00 ,  G01N21/88 ,  G01N23/04

CPC classification number: G06T11/005 ,  A61B6/42 ,  A61B6/48 ,  G01N23/046 ,  G01N23/20083 ,  G01N23/201 ,  G01N2021/8822 ,  G01N2021/8825 ,  G01N2223/054 ,  G01T1/2907 ,  G06T11/006 ,  G06T2207/10081

Abstract: A method includes obtaining a dark-field signal generated from a dark-field CT scan of an object, wherein the dark-field CT scan is at least a 360 degree scan. The method further includes weighting the dark-field signal. The method further includes performing a cone beam reconstruction of the weighted dark-field signal over the 360 degree scan, thereby generating volumetric image data. For an axial cone-beam CT scan, in one non-limiting instance, the cone-beam reconstruction is a full scan FDK cone beam reconstruction. For a helical cone-beam CT scan, in one non-limiting instance, the dark-field signal is rebinned to wedge geometry and the cone-beam reconstruction is a full scan aperture weighted wedge reconstruction. For a helical cone-beam CT scan, in another non-limiting instance, the dark-field signal is rebinned to wedge geometry and the cone-beam reconstruction is a full scan angular weighted wedge reconstruction.

公开(公告)号：US20170167862A1

公开(公告)日：2017-06-15

申请号：US15230336

申请日：2016-08-05

Applicant: KLA-Tencor Corporation

Inventor： Thaddeus Gerard Dziura ,  Antonio Arion Gellineau ,  Andrei V. Shchegrov

IPC: G01B15/02 ,  G01N23/201 ,  G01N23/205

CPC classification number: G01B15/02 ,  G01B2210/56 ,  G01N23/201 ,  G01N23/2055

Abstract: Methods and systems for characterizing dimensions and material properties of high aspect ratio, vertically manufactured devices using transmission, small-angle x-ray scattering (T-SAXS) techniques are described herein. Exemplary structures include spin transfer torque random access memory (STT-RAM), vertical NAND memory (V-NAND), dynamic random access memory (DRAM), three dimensional FLASH memory (3D-FLASH), resistive random access memory (Re-RAM), and PC-RAM. In one aspect, T-SAXS measurements are performed at a number of different orientations that are more densely concentrated near the normal incidence angle and less densely concentrated at orientations that are further from the normal incidence angle. In a further aspect, T-SAXS measurement data is used to generate an image of a measured structure based on the measured intensities of the detected diffraction orders. In another further aspect, a metrology system is configured to generate models for combined x-ray and optical measurement analysis.

公开(公告)号：US20170131224A1

公开(公告)日：2017-05-11

申请号：US15322542

申请日：2015-06-25

Applicant: Commissariat A L'Energie Atomique et Aux Energies Alternatives

Inventor： Caroline PAULUS ,  Joachim TABARY

IPC: G01N23/20 ,  G01N23/087 ,  G01N23/201

CPC classification number: G01N23/20083 ,  G01N23/087 ,  G01N23/201 ,  G01N2223/03 ,  G01N2223/04 ,  G01N2223/045 ,  G01N2223/054 ,  G01N2223/304 ,  G01N2223/50

Abstract: A method for analyzing an object, includes irradiating the object with incident photon radiation, acquiring a spectrum transmitted by the object using a spectrometric transmission detector, determining at least one first property of the object from the transmission spectrum, verifying that at least one doubt criterion relating to the first property of the object is met, and translating the fact that the object contains a material that is potentially dubious for the application under consideration. A second part, carried out only when the doubt criterion is met, includes acquiring an energy spectrum scattered by the object using a spectrometric scattering detector at an angle of 1° to 15°, and determining a second property of the object from at least the scatter spectrum and comparing at least the second property of the object with properties of standard materials stored in a database to identify the objects composition material.

公开(公告)号：US09640292B2

公开(公告)日：2017-05-02

申请号：US14547976

申请日：2014-11-19

Applicant: PANalytical B.V.

Inventor： Detlef Beckers ,  Stjepan Prugovecki

IPC: G01T1/36 ,  G21K1/04 ,  G01N23/201 ,  G01N23/207

CPC classification number: G21K1/046 ,  G01N23/201 ,  G01N23/207

Abstract: X-ray diffraction apparatus includes a flat graded multilayer 8 which may be used in a SAXS configuration for a sample 6. The apparatus may be adapted for Bragg-Brentano measurements by a collimator 16 without the need for alternate beam paths or complex arrangements.