Gamepad controller mapping
    21.
    发明申请
    Gamepad controller mapping 审中-公开
    游戏手柄控制器映射

    公开(公告)号:US20060250351A1

    公开(公告)日:2006-11-09

    申请号:US10947621

    申请日:2004-09-21

    Applicant: Peng Fu

    Inventor: Peng Fu

    Abstract: Embodiments of the inventions include a gamepad that supports an internal mapping system. A user may remap functions associated with any input mechanism of the gamepad to any other input mechanism. The gamepad may include extra, non-standard, input mechanisms. Mapping may be stored internal to the gamepad.

    Abstract translation: 本发明的实施例包括支持内部映射系统的游戏手柄。 用户可以将与游戏手柄的任何输入机构相关联的功能重新映射到任何其它输入机构。 游戏手柄可能包括额外的非标准输入机制。 映射可以存储在游戏手柄的内部。

    Contact hole structures and contact structures and fabrication methods thereof
    22.
    发明申请
    Contact hole structures and contact structures and fabrication methods thereof 有权
    接触孔结构及接触结构及其制造方法

    公开(公告)号:US20060154478A1

    公开(公告)日:2006-07-13

    申请号:US11035325

    申请日:2005-01-12

    CPC classification number: H01L21/76802 H01L21/76835

    Abstract: Methods and structures for forming a contact hole structure are disclosed. These methods first form a substantially silicon-free material layer over a substrate. A material layer is formed over the substantially silicon-free material layer. A contact hole is formed within the substantially silicon-free material layer and the material layer without substantially damaging the substrate. In addition, a conductive layer is formed in the contact hole so as to form a contact structure.

    Abstract translation: 公开了形成接触孔结构的方法和结构。 这些方法首先在衬底上形成基本上无硅的材料层。 在基本无硅材料层上形成材料层。 在基本无硅的材料层和材料层内形成接触孔,而基本上不损坏衬底。 此外,在接触孔中形成导电层以形成接触结构。

    Zirconium oxide and hafnium oxide etching using halogen containing chemicals
    24.
    发明申请
    Zirconium oxide and hafnium oxide etching using halogen containing chemicals 有权
    使用含卤素化学品的氧化锆和氧化铪蚀刻

    公开(公告)号:US20050164479A1

    公开(公告)日:2005-07-28

    申请号:US10766596

    申请日:2004-01-27

    Abstract: A method is described for selectively etching a high k dielectric layer that is preferably a hafnium or zirconium oxide, silicate, nitride, or oxynitride with a selectivity of greater than 2:1 relative to silicon oxide, polysilicon, or silicon. The plasma etch chemistry is comprised of one or more halogen containing gases such as CF4, CHF3, CH2F2, CH3F, C4F8, C4F6, C5F6, BCl3, Br2, HF, HCl, HBr, HI, and NF3 and leaves no etch residues. An inert gas or an inert gas and oxidant gas may be added to the halogen containing gas. In one embodiment, a high k gate dielectric layer is removed on portions of an active area in a MOS transistor. Alternatively, the high k dielectric layer is used in a capacitor between two conducting layers and is selectively removed from portions of an ILD layer.

    Abstract translation: 描述了一种相对于氧化硅,多晶硅或硅选择性地蚀刻优选为铪或氧化锆,硅酸盐,氮化物或氮氧化物的高k电介质层的方法,其选择性大于2:1。 等离子体蚀刻化学性质由一种或多种含卤素气体组成,例如CF 4,CH 3 3,CH 2 F 2, CH 3,CH 3,CH 3,CH 3,CH 3,CH 3,CH 3, C 5,C 5,F 5,BCl 3,Br 2,HF,HCl,HBr,HI, 和NF 3,并且不留下蚀刻残留物。 可以向含卤素的气体中加入惰性气体或惰性气体和氧化剂气体。 在一个实施例中,在MOS晶体管的有源区域的部分上去除高k栅极电介质层。 或者,高k电介质层用于两个导电层之间的电容器中,并且从ILD层的部分选择性地去除。

    Metal silicide etch resistant plasma etch method
    26.
    发明授权
    Metal silicide etch resistant plasma etch method 失效
    金属硅化物抗蚀刻等离子体蚀刻方法

    公开(公告)号:US06706640B1

    公开(公告)日:2004-03-16

    申请号:US10292355

    申请日:2002-11-12

    CPC classification number: H01L21/28518 H01L21/31116 H01L21/76802

    Abstract: A plasma etch method for etching a dielectric layer and an etch stop layer to reach a metal silicide layer formed thereunder employs for etching the etch stop layer an etchant gas composition comprising a fluorine containing gas and a nitrogen containing gas, preferably with a carrier gas such as argon or helium, but without an oxygen containing gas or a carbon and oxygen containing gas. The plasma etch method is selective for the etch stop layer with respect to the metal silicide layer, thus maintaining the physical and electrical integrity of the metal silicide layer.

    Abstract translation: 用于蚀刻介电层和蚀刻停止层以达到其下形成的金属硅化物层的等离子体蚀刻方法用于蚀刻蚀刻停止层包括含氟气体和含氮气体的蚀刻剂气体组合物,优选地使用载气如 作为氩或氦,但不含含氧气体或含碳和氧的气体。 等离子体蚀刻方法对于蚀刻停止层相对于金属硅化物层是选择性的,从而保持金属硅化物层的物理和电气完整性。

    Self-reducible copper(II) source reagents for chemical vapor deposition of copper metal
    27.
    发明授权
    Self-reducible copper(II) source reagents for chemical vapor deposition of copper metal 失效
    用于铜金属化学气相沉积的自还原铜(II)源试剂

    公开(公告)号:US06369256B1

    公开(公告)日:2002-04-09

    申请号:US09589757

    申请日:2000-06-09

    CPC classification number: C23C16/18 C07C215/08 C07C217/08

    Abstract: Volatile low melting solid Cu(II) metal complexes are provided which are capable of depositing a copper film on various substrates under CVD conditions in the absence of reducing carrier gas H2. These CU(II) metal complexes are represented by the structure formula: Cu(OCCF3R1CH2NHR2)2 wherein R1 is selected from hydrogen, C1-C4 lower-alkyl or perfluorinated C1-C4 lower-alkyl groups, e.g., CH3, and CF3, etc., and wherein R2 is C1-C6 lower-alkyl or C1-C6 lower-alkene, which may be substituted by one or more fluorine atoms, by a C1-C6 lower-alkoxy group or by a C1-C6 di-lower-alkyl amino group, provided that when R1 is CF3, R2 is other than hydrogen or methyl. A process for depositing copper film using these Cu(II) metal complexes is also provided.

    Abstract translation: 提供挥发性低熔点固体Cu(II)金属络合物,其能够在不存在还原载气H2的CVD条件下在各种基材上沉积铜膜。 这些CU(II)金属络合物由结构式表示:其中R1选自氢,C1-C4低级烷基或全氟化C1-C4低级烷基,例如CH3和CF3等,其中R2 是可被C1-C6低级烷氧基或C1-C6二低级烷基氨基取代的可被一个或多个氟原子取代的C 1 -C 6低级烷基或C 1 -C 6低级烯 当R1是CF3时,R2不是氢或甲基。 还提供了使用这些Cu(II)金属络合物沉积铜膜的方法。

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