-
公开(公告)号：US20090080467A1
公开(公告)日：2009-03-26
申请号：US11903638
申请日：2007-09-24
IPC分类号： H01S3/067
CPC分类号： H01S3/06754 , G02B6/29352 , H01S3/005
摘要： MOPA laser apparatus includes a master oscillator and a preamplifier providing a train of optical pulses. The pulse train is input to a fiber optic device arranged to multiply the pulse-repetition frequency (PRF) of the input pulse train. The PRF multiplying device divides each pulse in the into train into two pulses and delays one pulse relative to the other, some portion of one of the pulses and a portion of the other are delivered by the fiber optic PRF multiplying device as an output pulse-train having a PRF equal to twice the PRF of the input pulse train.
摘要翻译： MOPA激光装置包括主振荡器和提供一列光脉冲的前置放大器。 脉冲串被输入到布置成乘以输入脉冲序列的脉冲重复频率（PRF）的光纤装置。 PRF乘法装置将串列中的每个脉冲分成两个脉冲并相对于另一个脉冲延迟一个脉冲，一个脉冲的一部分和另一个的一部分由光纤PRF乘法装置输出作为输出脉冲 - 列车的PRF等于输入脉冲串PRF的两倍。
-
公开(公告)号：US07403550B1
公开(公告)日：2008-07-22
申请号：US11715630
申请日：2007-03-08
CPC分类号： H01S3/0057 , Y10S372/70
摘要： An in vivo screening assay for identifying an agent that interferes with T cell activation and/or -differentiation and/or modulation of other inflammatory effector cells.
摘要翻译： 用于鉴定干扰T细胞活化和/或其他炎症效应细胞的分化和/或调节的药剂的体内筛选测定。
-
公开(公告)号：US07245420B2
公开(公告)日：2007-07-17
申请号：US11654780
申请日：2007-01-18
申请人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.
-
公开(公告)号：US07244028B2
公开(公告)日：2007-07-17
申请号：US11011736
申请日：2004-12-14
IPC分类号： G03B21/14
CPC分类号： G03B21/62 , G02B26/101 , G02B27/48 , G03B21/10 , G03B21/56 , H04N9/3152 , H04N9/3161
摘要： A projection video display includes at least one laser for delivering a light beam. The display includes a beam homogenizer and a condenser lens. A scanning arrangement is provided for scanning the light in beam in a particular pattern over the condenser lens in a manner that effectively increases the beam divergence. The scanned beam is homogenized by a beam homogenizer and a spatial light modulator is arranged to receive the homogenized scanned light beam and spatially modulate the beam in accordance with a component of an image to be displayed. Projection optics are projecting the homogenized scanned light beam onto a screen. The scanning provides that the homogenized scanned light beam at the screen has a coherence radius less than the original coherence radius of the beam. The reduced coherence radius contributes to minimizing speckle contrast in the image displayed on the screen. The screen includes one or more features providing a further contribution to minimizing speckle contrast in the displayed image. In one example, the screen includes a transparent cell containing a liquid having light scattering particles in suspension.
摘要翻译： 投影视频显示器包括用于传送光束的至少一个激光器。 显示器包括光束均化器和聚光透镜。 提供了一种扫描装置，用于以有效地增加光束发散的方式在聚光透镜上以特定图案扫描光束中的光。 扫描的光束通过光束均化器均质化，并且空间光调制器被布置成接收均匀化的扫描光束，并且根据要显示的图像的分量对光束进行空间调制。 投影光学器件将均匀化的扫描光束投影到屏幕上。 扫描提供了屏幕上的均匀化扫描光束的相干半径小于光束的原始相干半径。 减小的相干半径有助于最小化屏幕上显示的图像中的斑点对比度。 屏幕包括一个或多个特征，为减少显示图像中的散斑对比度提供进一步的贡献。 在一个示例中，屏幕包括含有悬浮液中具有光散射颗粒的液体的透明单元。
-
公开(公告)号：US06987790B2
公开(公告)日：2006-01-17
申请号：US10776137
申请日：2004-02-11
申请人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
发明人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
CPC分类号： H01S3/225 , H01S3/09713 , H01S3/2366
摘要： Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.
摘要翻译： 使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。 代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲 的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。 由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。 触发电离也可用于同步MOPA配置中双室的时序。 在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。
-
公开(公告)号：US06970492B2
公开(公告)日：2005-11-29
申请号：US10438240
申请日：2003-05-14
申请人： Sergei V. Govorkov , Gongxue Hua
发明人： Sergei V. Govorkov , Gongxue Hua
CPC分类号： H01S3/225 , H01S3/0014 , H01S3/034 , H01S3/2258
摘要： A beam parameter monitoring unit for coupling with an excimer or molecular fluorine (F2) laser resonator that produces an output beam having a wavelength below 200 nm includes an on-line laser pulse energy detector. This, in turn, allows output pulse energy stabilization to the same degree of accuracy, which is crucial for stability of exposure dose and other process parameters in microlithography and industrial applications.
摘要翻译： 用于与产生具有低于200nm的波长的输出光束的准分子或分子氟（F 2 N 2）激光谐振器耦合的光束参数监测单元包括在线激光脉冲能量检测器。 这反过来又允许输出脉冲能量稳定达到相同的准确度，这对于微光刻和工业应用中的曝光剂量和其它工艺参数的稳定性至关重要。
-
公开(公告)号：US06614828B1
公开(公告)日：2003-09-02
申请号：US09920008
申请日：2001-07-31
申请人： Dirk Basting , Sergei V. Govorkov
发明人： Dirk Basting , Sergei V. Govorkov
IPC分类号： H01S310
CPC分类号： H01S3/08009 , H01S3/08004 , H01S3/106 , H01S3/1305 , H01S3/137 , H01S5/0687 , H01S5/141
摘要： A tunable laser is provided having a gain medium and a resonator for generating a laser beam, and an angular dispersion element. The laser further includes a beam expander with adjustable magnification for adjusting an angular dispersion provided by the dispersion element. The adjustable beam expander preferably includes one or two rotatable prisms. When two prisms are used, the prisms are preferably synchronously rotatable according to a preset ratio such that any changes in refraction angle due to the rotation of the first prism are automatically compensated by the rotation of the second prism. A single prism may serve both as a dispersion element and as a beam expansion element. A processor preferably monitors the linewidth and wavelength of the output beam and adjusts an orientation of the prism or prisms of the expansion unit, and the tilt of either a reflection grating or a highly reflective mirror of the resonator in a feedback loop.
-
公开(公告)号：US06487229B2
公开(公告)日：2002-11-26
申请号：US09965492
申请日：2001-09-26
IPC分类号： H01S322
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/05 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.
-
公开(公告)号：US06463084B1
公开(公告)日：2002-10-08
申请号：US09971796
申请日：2001-10-03
申请人： Sergei V. Govorkov , Gongxue Hua
发明人： Sergei V. Govorkov , Gongxue Hua
IPC分类号： H01S310
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/04 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A beam delivery system for a laser emitting at a relevant wavelength of less than 200 nm is provided. The system includes a sealed enclosure connected to the laser and surrounding the path of the beam as it exits the laser resonator. The enclosure extends between the laser output coupler and a photodetector sensitive at the wavelength of the relevant laser emission. The interior of the enclosure, and thus the beam path between the output coupler and the detector, is substantially free of species that strongly photoabsorb radiation at the relevant laser emission wavelength. A beam splitting element diverts at least a portion of the beam for measurement by the detector. The beam splitting element preferably includes a beam splitting mirror, holographic beam sampler or diffraction grating. In addition, optics are preferably provided for filtering a visible portion of the diverted beam, so that substantially only a VUV portion of the diverted beam is received at the detector. The filtering optics preferably include a diffraction grating, holographic beam sampler or one or more dichroic mirrors.
摘要翻译： 提供了用于在小于200nm的相关波长处发射的激光束的光束传送系统。 该系统包括连接到激光器的密封外壳，并且当离开激光谐振器时围绕光束的路径。 外壳在激光输出耦合器和在相关激光发射波长下敏感的光电探测器之间延伸。 外壳的内部以及因此输出耦合器和检测器之间的光束路径基本上不含在相关的激光发射波长下强吸收辐射的物质。 分束元件将至少一部分光束转移到检测器进行测量。 分束元件优选地包括分束镜，全息光束采样器或衍射光栅。 此外，优选地提供光学器件用于过滤转向光束的可见部分，使得在检测器处基本上只接收转向光束的VUV部分。 滤光光学器件优选地包括衍射光栅，全息光束取样器或一个或多个二向色镜。
-
30.发明授权
公开(公告)号：US6002697A
公开(公告)日：1999-12-14
申请号：US139214
申请日：1998-08-24
CPC分类号： G02F1/3501 , G02F1/37 , G02F2001/3505 , G02F2001/354 , G02F2001/3546 , H01S3/11 , H01S3/1603 , H01S3/1643
摘要： A solid state laser is provided including a rare earth-doped YAG, YLF, YVO, GSGG, YALO or GdVO oscillator crystal, at least one laser diode pumping source, a Q-switch short pulse generator, a frequency doubling stage and frequency quadrupling or quintupling stages. The frequency quadrupling or quintupling stages include a nonlinear optical crystal such as CLBO, BBO or LBO built into a housing. The housing is sealed off to prevent external moisture and other atmospheric impurities from accessing the crystal at its interior. The housing interior is configured for purging with one or more external inert gases or dry air through valve controls. The housing is equipped with a mechanism for controlling the temperature of the interior of the housing, and consequently for controlling the temperature of the crystal. The temperature controlling mechanism enables heating and cooling of the crystal, as well as maintaining the crystal at a constant selected temperature. The housing includes optical windows transparent for input and output radiation.
摘要翻译： 提供固体激光器，其包括稀土掺杂YAG，YLF，YVO，GSGG，YALO或GdVO振荡晶体，至少一个激光二极管泵浦源，Q开关短脉冲发生器，倍频级和倍频四倍或 五倍的阶段 频率四倍或五倍级包括内置在外壳中的非线性光学晶体，例如CLBO，BBO或LBO。 外壳被密封以防止外部水分和其他大气杂质进入其内部的水晶。 外壳内部配置为通过一个或多个外部惰性气体或干燥空气通过阀门控制进行清洗。 壳体配备有用于控制壳体内部的温度的机构，并且因此用于控制晶体的温度。 温度控制机构能够对晶体进行加热和冷却，并且将晶体保持在恒定的选定温度。 外壳包括透明的输入和输出辐射的光学窗口。
-
-
-
-
-
-
-
-
-
搜索结果
78 条记录 (耗时 0.03 秒)
