摘要:
The present invention aims to provide a compact and lightweight piezoelectric actuator, a driving method involving the piezoelectric actuator that can provide a large displacement at a low voltage, and a compact and lightweight information storage device with a high recording density that incorporates such a piezoelectric actuator and has a small moment of inertia of a head when the head is driven. The piezoelectric actuator according to the present invention has four rod-shaped driving sections. Of the four rod-shaped driving sections, a voltage is applied to the two driving sections located along a diagonal line at a time, and the voltage is applied to the two driving sections located along the other diagonal line at a different time from the time for the first two driving sections, whereby two central sections are rotationally driven relative to two end sections.
摘要:
A piezoelectric actuator set includes a pair of elongated piezoelectric actuators. The elongated piezoelectric actuators establish the standard attitude of a head slider when no electric signal is supplied to the piezoelectric actuator set. When the electric signal is applied to the piezoelectric actuator set, the tip ends are pulled back toward the base ends in the elongated piezoelectric actuators. The piezoelectric actuator set generates a couple for driving the head slider for rotation around the rotational axis only in a predetermined direction from the standard attitude. The moment of inertia can be reduced in the head slider during rotation as compared with the case where the head slider is moved based on a swinging movement. The natural frequency can be raised in the vibration system comprising the head slider and the piezoelectric actuator set. The frequency of the electric signal or servo signal can be set over a wider frequency range.
摘要:
A piezoelectric actuator includes a single-crystal piezoelectric thin film having a crystal orientation aligned with the crystal orientation of a single-crystal Si substrate, and first and second electrode films formed on first and second sides of the single-crystal piezoelectric thin film, respectively.
摘要:
Provided is a turbocompressor (4) having a drive part (12) generating rotational power, an impeller (22a) to which the rotational power of the drive part (12) is transmitted to rotate, a plurality of gears (31, 32) transmitting the rotational power of the drive part (12) to the impeller (22a), and a drive part casing (13) in which the drive part (12) is installed. This turbocompressor (4) includes an impeller casing (22e) installed around the impeller (22a), and a gear casing (33) configured to be formed independently of the impeller casing (22e) and the drive part casing (13), to couple the impeller casing (22e) and the drive part casing (13), and to form an accommodation space (33a) in which the plurality of gears (31, 32) are accommodated. With this configuration, in manufacturing the turbocompressor, a working process can be simplified and working labor and cost can be reduced.
摘要:
A method of manufacturing a rotor assembly in which a first impeller and a second impeller are fixed to a rotation shaft which is supported by a bearing so as to be rotatable, the method including: fixing the second impeller to the rotation shaft; fitting and fixing a sleeve to the rotation shaft after fixing the second impeller; fitting and fixing the bearing to the sleeve after fitting and fixing the sleeve; and fixing the first impeller after fitting and fixing the bearing.
摘要:
Provided is a turbocompressor (4) having a drive part (12) generating rotational power, an impeller (22a) to which the rotational power of the drive part (12) is transmitted to rotate, a plurality of gears (31, 32) transmitting the rotational power of the drive part (12) to the impeller (22a), and a drive part casing (13) in which the drive part (12) is installed. This turbocompressor (4) includes an impeller casing (22e) installed around the impeller (22a), and a gear casing (33) configured to be formed independently of the impeller casing (22e) and the drive part casing (13), to couple the impeller casing (22e) and the drive part casing (13), and to form an accommodation space (33a) in which the plurality of gears (31, 32) are accommodated. With this configuration, in manufacturing the turbocompressor, a working process can be simplified and working labor and cost can be reduced.
摘要:
A gas generator includes a processing vessel defining a processing space and holding a support body therein, an evacuation system evacuating the processing space; a metal oxide film of a perovskite structure containing oxygen defects formed on the support body, a source gas supplying port supplying a source gas containing molecules of a source compound of carbon dioxide or water into the processing space, a gas outlet port for extracting a product gas containing molecules of a product compound in which oxygen atoms are removed from said source compound, and a heating part heating the support body.
摘要:
The plating method comprises the step of forming a resin layer 10 over a substrate 16; the step of cutting the surface part of the resin layer 10 with a cutting tool 12; the step of forming a seed layer 36 on the resin layer 10 by electroless plating; and the step of forming a plating film 44 on the seed layer 36 by electroplating. Suitable roughness can be give to the surface of the resin layer 10, whereby the adhesion between the seed layer 36 and the resin layer 10 can be sufficiently ensured. Excessively deep pores are not formed in the surface of the resin layer 10 as are by desmearing treatment, whereby a micronized pattern of a photoresist film 40 can be formed on the resin layer 10. Thus, interconnections 44, etc. can be formed over the resin layer 10 at a narrow pitch with high reliability ensured.
摘要:
A capacitor device includes a capacitor Q constituted by a lower electrode (12) formed on a substrate (10), a dielectric film (14), and an upper electrode (16); an insulating film (18) covering the capacitor Q; a first contact hole (18a) formed in the insulating film (18) on a connection portion (16a) of the upper electrode (16); an electrode pad (20) for preventing a diffusion of solder, formed in the first contact hole (18a); and a solder bump (22) electrically connected to the electrode pad (20), and the upper electrode (16) has a protrusion portion (16a) protruding from the dielectric film (14), and is connected to the first contact hole (18a) on the protrusion portion (16a).
摘要:
The plating method comprises the step of forming a resin layer 10 over a substrate 16; the step of cutting the surface part of the resin layer 10 with a cutting tool 12; the step of forming a seed layer 36 on the resin layer 10 by electroless plating; and the step of forming a plating film 44 on the seed layer 36 by electroplating. Suitable roughness can be give to the surface of the resin layer 10, whereby the adhesion between the seed layer 36 and the resin layer 10 can be sufficiently ensured. Excessively deep pores are not formed in the surface of the resin layer 10, as are by desmearing treatment, whereby a micronized pattern of a photoresist film 40 can be formed on the resin layer 10. Thus, interconnections 44, etc. can be formed over the resin layer 10 at a narrow pitch with high reliability ensured.