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    Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population
    22.
    发明授权
    Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population 有权
    通过抑制瞬态颜色中心的形成和控制声子的数量来减轻光学材料中的激光损伤

    公开(公告)号：US09059560B2

    公开(公告)日：2015-06-16

    申请号：US14213835

    申请日：2014-03-14

    Applicant: KLA-Tencor Corporation

    Inventor： Vladimir Dribinski ,  Yung-Ho Chuang

    IPC: H01S3/091 ,  G02F1/35 ,  H01S3/00

    CPC classification number: H01S3/10 ,  G02F1/3525 ,  H01S3/005 ,  H01S3/091

    Abstract: Laser-induced damage in an optical material can be mitigated by creating conditions at which light absorption is minimized. Specifically, electrons populating defect energy levels of a band gap in an optical material can be promoted to the conduction band—a process commonly referred to as bleaching. Such bleaching can be accomplished using a predetermined wavelength that ensures minimum energy deposition into the material, ideally promoting electron to just inside the conduction band. In some cases phonon (i.e. thermal) excitation can also be used to achieve higher depopulation rates. In one embodiment, a bleaching light beam having a wavelength longer than that of the laser beam can be combined with the laser beam to depopulate the defect energy levels in the band gap. The bleaching light beam can be propagated in the same direction or intersect the laser beam.

    Abstract translation: 可以通过产生光吸收最小化的条件来减轻光学材料中的激光诱导的损伤。 具体地说，填充光学材料中的带隙的缺陷能级的电子能够促进通常被称为漂白的传导带。 这样的漂白可以使用确保最小能量沉积到材料中的预定波长来实现，理想地促进电子刚好在导带内部。 在某些情况下，也可以使用声子（即热）激发来实现更高的人口流动率。 在一个实施例中，具有比激光束长的波长的波长的漂白光束可以与激光束组合以对带隙中的缺陷能级进行衰减。 漂白光束可以沿相同方向传播或与激光束相交。

    Flexible and stable supercontinuum source
    24.
    发明授权
    Flexible and stable supercontinuum source 有权
    灵活稳定的超连续谱源

    公开(公告)号：US09020000B2

    公开(公告)日：2015-04-28

    申请号：US13792184

    申请日：2013-03-10

    Applicant: Fianium Ltd.

    Inventor： John Redvers Clowes ,  Anatoly Borisovich Grudinin ,  Ian Michael Godfrey

    IPC: H01S3/10 ,  H01S3/11 ,  G02F1/35 ,  H01S3/23 ,  G02B21/16 ,  G02F1/365 ,  G01N21/64

    CPC classification number: H01S3/11 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2201/0697 ,  G02B21/16 ,  G02F1/353 ,  G02F1/365 ,  G02F2001/3528 ,  H01S3/10 ,  H01S3/10046 ,  H01S3/1024 ,  H01S3/108 ,  H01S3/2308

    Abstract: Optical pulse source comprising optical pump laser for generating optical pump pulses at repetition rate Rf; a nonlinear optical element comprising an optical fiber for generating supercontinuum pulses; a gating device provided operable to selectively control the launch of pump pulses into the optical fiber at a reduced, lower repetition rate Rr=Rf/N in order to generate supercontinuum pulses at different user selectable repetition rates lower than the pump pulse repetition rate; first and second optical amplifiers; wavelength tunable optical bandpass filter; wherein the optical fiber can generate supercontinuum pulses having a supercontinuum spanning from below 450 nm to greater than 2000 nm; and wherein said optical pulse source comprises an all-fiber source wherein said optical pump laser comprises a fiber oscillator, said gating device comprises a fiber coupled optical modulator, and the optical pump pulses are launched into the optical fiber without the use of free space optics.

    Abstract translation: 光脉冲源包括用于以重复率Rf产生光泵浦脉冲的光泵浦激光器; 包括用于产生超连续谱脉冲的光纤的非线性光学元件; 选通装置，其可操作以选择性地控制泵浦脉冲以减少的较低重复率Rr = Rf / N发射到光纤中，以便以低于泵浦脉冲重复率的不同用户可选重复频率产生超连续谱脉冲; 第一和第二光放大器; 波长可调光带通滤波器; 其中所述光纤可以产生超连续谱从超过450nm到大于2000nm的超连续谱脉冲; 并且其中所述光脉冲源包括全光纤源，其中所述光泵激光器包括光纤振荡器，所述选通装置包括光纤耦合光调制器，并且所述光泵浦脉冲被发射到光纤中，而不使用自由空间光学器件 。

    Compact high energy mid wave OPCPA laser
    25.
    发明授权
    Compact high energy mid wave OPCPA laser 有权
    紧凑型高能中波OPCPA激光器

    公开(公告)号：US09014223B2

    公开(公告)日：2015-04-21

    申请号：US13976652

    申请日：2011-12-28

    Applicant: Edward J. Miesak

    Inventor： Edward J. Miesak

    IPC: H01S3/10 ,  H01S3/00

    CPC classification number: H01S3/10 ,  H01S3/0057

    Abstract: Systems and methods of optical parametric chirped pulse amplification for laser pulses are provided. Techniques and components include replacing pulse stretcher and/or pulse compressors with chirped volume Bragg gratings (CVBGs) to reduce size, weight, cost, and environmental sensitivity of the laser system.

    Abstract translation: 提供激光脉冲光学参量啁啾脉冲放大的系统和方法。 技术和组件包括用啁啾体积布拉格光栅（CVBG）代替脉冲拉伸器和/或脉冲压缩器，以减小激光系统的尺寸，重量，成本和环境灵敏度。

    TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE
    26.
    发明申请
    TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE 审中-公开
    极光超紫外光源的目标

    公开(公告)号：US20150076374A1

    公开(公告)日：2015-03-19

    申请号：US14550421

    申请日：2014-11-21

    Applicant: ASML Netherlands B.V.

    Inventor： Yezheng Tao ,  Robert J. Rafac ,  Igor V. Fomenkov ,  Daniel J.W. Brown ,  Daniel J. Golich

    IPC: H05G2/00

    CPC classification number: H05G2/008 ,  G21K5/02 ,  H01S3/10 ,  H05G2/005

    Abstract: Techniques for forming a target and for producing extreme ultraviolet light include releasing an initial target material toward a target location, the target material including a material that emits extreme ultraviolet (EUV) light when converted to plasma; directing a first amplified light beam toward the initial target material, the first amplified light beam having an energy sufficient to form a collection of pieces of target material from the initial target material, each of the pieces being smaller than the initial target material and being spatially distributed throughout a hemisphere shaped volume; and directing a second amplified light beam toward the collection of pieces to convert the pieces of target material to plasma that emits EUV light.

    Abstract translation: 用于形成靶和用于产生极紫外光的技术包括向目标位置释放初始目标材料，目标材料包括当转换成等离子体时发射极紫外（EUV）光的材料; 将第一放大光束引向初始目标材料，第一放大光束具有足以从初始目标材料形成目标材料的集合的能量，每个片段小于初始靶材料并且在空间上 分布在整个半球形体积上; 以及将第二放大光束引导到所述收集件，以将所述目标材料片转换成发射EUV光的等离子体。

    Precise Broadband Frequency Modulated Laser
    27.
    发明申请
    Precise Broadband Frequency Modulated Laser 有权
    精密宽带调频激光器

    公开(公告)号：US20150071315A1

    公开(公告)日：2015-03-12

    申请号：US14538789

    申请日：2014-11-11

    Applicant: Peter A. Roos ,  Randy R. Reibel ,  Brant Kaylor ,  Zeb Barber ,  William Randall Babbitt

    Inventor： Peter A. Roos ,  Randy R. Reibel ,  Brant Kaylor ,  Zeb Barber ,  William Randall Babbitt

    IPC: H01S3/10 ,  H01S3/13

    CPC classification number: H01S3/10 ,  G01S7/4814 ,  G01S7/4911 ,  H01S3/1305 ,  H01S5/0683 ,  H01S5/06837 ,  H01S5/141 ,  H01S5/143

    Abstract: A method and apparatus are described including a laser with a plurality of internal or external actuators for affecting an optical frequency of light output by the laser, wherein the plurality of actuators have a corresponding plurality of different frequency response bands for changing optical properties of the laser and a corresponding plurality of actuation ranges of optical frequencies affected. Also included is an optical detector, and a plurality of optical paths configured to direct light output by the laser onto the detector. A laser controller is configured to provide a plurality of inputs to the plurality of actuators based on a detector signal output from the optical detector and the corresponding frequency response bands and actuation ranges.

    Abstract translation: 描述了一种方法和装置，其包括具有多个内部或外部致动器的激光器，用于影响由激光器输出的光的光频率，其中多个致动器具有对应的多个不同的频率响应带，用于改变激光器的光学特性 并且受影响的光频率的相应的多个致动范围。 还包括光学检测器，以及多个光路，被配置为将由激光器输出的光引导到检测器上。 激光控制器被配置为基于从光学检测器输出的检测器信号和相应的频率响应带和致动范围向多个致动器提供多个输入。

    LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    29.
    发明申请
    LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 有权
    激光装置和极光超紫外光发生系统

    公开(公告)号：US20140348188A1

    公开(公告)日：2014-11-27

    申请号：US14454494

    申请日：2014-08-07

    Applicant: GIGAPHOTON INC.

    Inventor： Takashi SUGANUMA ,  Hidenobu KAMEDA ,  Masato MORIYA ,  Osamu WAKABAYASHI

    IPC: H01S3/10

    CPC classification number: H01S3/10 ,  H01S3/005 ,  H01S3/0971 ,  H01S3/10007 ,  H01S3/10023 ,  H01S3/1003 ,  H01S3/104 ,  H01S3/13 ,  H01S3/1301 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/2308 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2391 ,  H05G2/008

    Abstract: A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and configured for adjusting at least one of a beam path and a wavefront of the laser beam, a first detection unit provided between the beam adjusting unit and the optical unit in a beam path of the laser beam and configured for detecting the laser beam, a second detection unit provided downstream from the optical unit in a beam path of the laser beam and configured for detecting the laser beam, and a controller configured for controlling the beam adjusting unit based on outputs from the first and second detection units.

    Abstract translation: 激光装置可以包括主振荡器，设置在来自主振荡器的激光束的光束路径中的光学单元，光束调节单元，其设置在激光束的光束路径中的光学单元的上游，并被配置为至少调节 激光束的光束路径和波前的一个;第一检测单元，设置在激光束的光束路径中的光束调整单元和光学单元之间，并且被配置为检测激光束;第二检测单元， 激光束的光束路径中的光学单元，被配置为检测激光束;以及控制器，被配置为基于来自第一和第二检测单元的输出来控制光束调整单元。

    LASER PROCESSING METHOD
    30.
    发明申请
    LASER PROCESSING METHOD 有权
    激光加工方法

    公开(公告)号：US20140334511A1

    公开(公告)日：2014-11-13

    申请号：US14276571

    申请日：2014-05-13

    Applicant: DISCO CORPORATION

    Inventor： Noboru Takeda ,  Hiroshi Morikazu

    IPC: H01S3/10

    CPC classification number: H01S3/10 ,  H01L21/00 ,  H01L21/78 ,  H01L23/00 ,  H01L2924/0002 ,  H01S5/0201 ,  H01S5/021 ,  H01S5/0213 ,  H01S5/32341 ,  H01L2924/00

    Abstract: A laser processing method of applying a pulsed laser beam to a single crystal substrate to thereby process the single crystal substrate. The laser processing method includes a numerical aperture setting step of setting the numerical aperture (NA) of a focusing lens for focusing the pulsed laser beam so that the value obtained by dividing the numerical aperture (NA) of the focusing lens by the refractive index (N) of the single crystal substrate falls within the range of 0.05 to 0.2, a positioning step of relatively positioning the focusing lens and the single crystal substrate in the direction along the optical axis of the focusing lens so that the focal point of the pulsed laser beam is set at a desired position in the direction along the thickness of the single crystal substrate, and a shield tunnel forming step of applying the pulsed laser beam to the single crystal substrate so as to focus the pulsed laser beam at the focal point set in the single crystal substrate thereby forming a shield tunnel extending between the focal point and a beam incident surface to which the pulsed laser beam is applied.

    Abstract translation: 一种将脉冲激光束施加到单晶衬底从而处理单晶衬底的激光加工方法。 激光加工方法包括数值孔径设定步骤，设定用于聚焦脉冲激光束的聚焦透镜的数值孔径（NA），使得通过将聚焦透镜的数值孔径（NA）除以折射率（ N）在0.05〜0.2的范围内，将聚焦透镜和单晶基板沿着聚焦透镜的光轴的方向相对定位的定位步骤，使得脉冲激光的焦点 光束被设置在沿着单晶衬底的厚度的方向上的期望位置处，以及屏蔽隧道形成步骤，将脉冲激光束施加到单晶衬底，以将脉冲激光束聚焦在设置在 单晶衬底由此形成在焦点和施加脉冲激光束的光束入射表面之间延伸的屏蔽隧道。

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