CONFOCAL MEASURING APPARATUS
    337.
    发明申请

    公开(公告)号:US20180252582A1

    公开(公告)日:2018-09-06

    申请号:US15846204

    申请日:2017-12-19

    Abstract: A confocal measuring apparatus (1) includes a light source (10), an optical system (30) configured to receive reflected light from a measurement surface, a light guide part (20) into which a plurality of cores including a first core (26) and a second core (28) is built and configured to propagate the reflected light by the plurality of cores, a displacement amount measurement part (40) including a spectroscope (42) configured to separate the reflected light propagated by the first core into each wavelength components and a detector (44) having a plurality of light receiving elements arranged to correspond to a spectral direction by the spectroscope, and a peripheral image measurement part (60) configured to form an image of the reflected light propagated by the second core on the plurality of image pickup elements and to generate a peripheral image with respect to a measurement position of the measurement surface.

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