公开(公告)号：US10418369B2

公开(公告)日：2019-09-17

申请号：US15990611

申请日：2018-05-26

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H01L27/115 ,  H01L27/112 ,  H01L27/11556 ,  H01L23/48 ,  H01L27/11529 ,  H01L27/11573 ,  H01L27/11582 ,  G11C5/02 ,  G11C13/00 ,  G11C16/04 ,  G11C16/08 ,  G11C16/10 ,  G11C16/16 ,  G11C16/26 ,  G11C17/16 ,  H01L27/108 ,  H01L27/11 ,  H01L27/11519 ,  H01L27/11548 ,  H01L27/11565 ,  H01L27/1157 ,  H01L27/11575 ,  H01L27/11578 ,  H01L27/24

Abstract: A multilevel semiconductor device including: a first level including a first array of first memory cells and first control line; a second level including a second array of second memory cells and second control line; a third level including a third array of third memory cells and third control line, where the second level overlays the first, and where the third level overlays the second; a first, second and third access pillar; memory control circuits designed to individually control cells of the first, second and third memory cells, where the device includes an array of units, where each of the units includes a plurality of the first, second and third memory cells, and a portion of the memory control circuits, where the array of units include at least eight rows and eight columns of units, and where the memory control is designed to control independently each of the units.

公开(公告)号：US10355121B2

公开(公告)日：2019-07-16

申请号：US15727592

申请日：2017-10-07

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Yuniarto Widjaja

IPC: H01L29/78 ,  G11C16/02 ,  H01L27/115 ,  G11C11/404 ,  G11C11/4097 ,  H01L27/108 ,  H01L27/11 ,  H01L27/11578 ,  H01L27/24 ,  G11C11/412 ,  G11C16/04

Abstract: A semiconductor device, the device including: a first stratum including memory periphery circuits; a second stratum including an array of first memory cells, where the first stratum is overlaid by the second stratum; a third stratum including an array of second memory cells, where the second stratum is overlaid by the third stratum, where the first memory cells include a plurality of first polysilicon structures and the second memory cells include a plurality of second polysilicon structures, and where at least one of the first memory cells is self-aligned to at least one of the second memory cells.

公开(公告)号：US20190067109A1

公开(公告)日：2019-02-28

申请号：US16169969

申请日：2018-10-24

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

Abstract: A 3D semiconductor device, the device including: a first level including a plurality of first single crystal transistors; contact plugs; a first metal layer, where a portion of the contact plugs provide connections from the plurality of first single crystal transistors to the first metal layer, and where connections include forming memory control circuits; a second level including a plurality of second transistors; a third level including a plurality of third transistors, where the second level overlays the first level, the third level overlays the second level; a second metal layer overlaying the third level; and a third metal layer overlaying the second metal layer, where second transistors are aligned to first transistors with less than 40 nm alignment error, where the second level includes first memory cells, where the third level includes second memory cells, and where the memory control circuits are designed to adjust a memory write voltage according to the device specific process parameters.

公开(公告)号：US20190057903A1

公开(公告)日：2019-02-21

申请号：US16166636

申请日：2018-10-22

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

Abstract: A 3D semiconductor device, the device including: a first layer including a first single crystal transistor; a second layer including second transistors; a third layer including third transistors; a fourth layer including fourth transistors, where the first layer is overlaid by the second layer, where the second layer is overlaid by the third layer, and where the third layer is overlaid by the fourth layer; where a plurality of the fourth transistors are aligned to the plurality of the first single crystal transistor with less than 40 nm alignment error, where the third transistors are junction-less transistors (JLT), where each of the fourth transistors include a transistor channel, a drain and a source, and where the transistor channel is significantly narrower than the drain or the source.

公开(公告)号：US20190027409A1

公开(公告)日：2019-01-24

申请号：US16128891

申请日：2018-09-12

Applicant: MonolithIC 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

Abstract: A 3D semiconductor device, the device including: a first crystalline silicon layer including a plurality of first transistors; a first metal layer interconnecting the first transistors, a portion of the first transistors forming a plurality of first logic gates; a first array of memory cells including second transistors; a second metal layer overlying the first and second transistors; a second crystalline silicon layer overlaying the second metal layer and the second crystalline silicon layer including a plurality of third transistors; a third metal layer interconnecting the third transistors, a portion of the third transistors forming a plurality of second logic gates; a second array of memory cells including fourth transistors and overlaying the second crystalline silicon layer; a fourth metal layer overlying the third and fourth transistors, where at least one of the fourth transistors is overlaying at least another one of the fourth transistors such that they are self-aligned, having been processed following the same lithography step, where the second array of memory cells include NAND flash type memory cells.

公开(公告)号：US10157909B2

公开(公告)日：2018-12-18

申请号：US15862616

申请日：2018-01-04

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L27/06 ,  H01L29/78

Abstract: A 3D semiconductor device, the device including: a first layer including first transistors each including a silicon channel; a second layer including second transistors each including a silicon channel, the second layer overlaying the first transistors, where at least one of the second transistors is at least partially self-aligned to at least one of the first transistors; and a third layer including third transistors each including a single crystal silicon channel, the third layer underlying the first transistors, where a plurality of the third transistors form a logic circuit, and where the logic circuit is aligned to the second transistors with less than 200 nm alignment error, where the first layer thickness is less than one micron, and where the first transistor is a junction-less transistor.

公开(公告)号：US20180301380A1

公开(公告)日：2018-10-18

申请号：US15950169

申请日：2018-04-11

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

CPC classification number: H01L21/8221 ,  G11C5/025 ,  G11C5/063 ,  G11C8/10 ,  G11C13/003 ,  G11C16/0483 ,  G11C17/06 ,  G11C17/14 ,  G11C17/16 ,  G11C29/021 ,  G11C29/028 ,  G11C29/82 ,  G11C2213/71 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/8238 ,  H01L21/823871 ,  H01L21/823885 ,  H01L21/84 ,  H01L21/845 ,  H01L23/36 ,  H01L23/367 ,  H01L23/3677 ,  H01L23/481 ,  H01L23/49827 ,  H01L23/5252 ,  H01L23/544 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/105 ,  H01L27/10873 ,  H01L27/10876 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1104 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11206 ,  H01L27/1157 ,  H01L27/11578 ,  H01L27/11803 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/785 ,  H01L29/78696 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45015 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1436 ,  H01L2924/1437 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/207 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K17/687 ,  H03K19/0016 ,  H03K19/0948 ,  H03K19/17704 ,  H03K19/17756 ,  H03K19/17764 ,  H03K19/17796

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one first metal layer interconnecting the plurality of first transistors, where the interconnecting includes forming memory peripheral circuits; a plurality of second transistors overlaying the at least one first metal layer; a second metal layer overlaying the plurality of second transistors; a first memory cell overlaying the memory peripheral circuits; and a second memory cell overlaying the first memory cell, where the first memory cell includes at least one of the second transistors, where at least one of the second transistors includes a source, channel and drain, where the source, the channel and the drain have the same dopant type.

公开(公告)号：US20180277521A1

公开(公告)日：2018-09-27

申请号：US15990684

申请日：2018-05-28

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist

IPC: H01L25/065 ,  H01L29/66 ,  H01L21/768 ,  H01L23/48 ,  H01L23/485 ,  H01L23/522 ,  H01L23/00 ,  H01L25/00 ,  H01L27/06 ,  H01L27/088 ,  H01L21/74 ,  H01L29/78 ,  H01L27/092 ,  H01L29/423

CPC classification number: H01L25/0657 ,  H01L21/743 ,  H01L21/76898 ,  H01L23/36 ,  H01L23/481 ,  H01L23/485 ,  H01L23/522 ,  H01L23/5225 ,  H01L24/25 ,  H01L25/50 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/092 ,  H01L29/4236 ,  H01L29/66621 ,  H01L29/78 ,  H01L2224/24146 ,  H01L2225/06544 ,  H01L2924/00 ,  H01L2924/0002 ,  H01L2924/01104 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/13091 ,  H01L2924/2064 ,  H01L2924/351

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one first metal layer interconnecting the plurality of first transistors, where the interconnecting includes forming a plurality of logic gates; a plurality of second transistors overlaying the first single crystal layer; a second metal layer overlaying the plurality of second transistors; a plurality of third transistors overlaying the second transistors; a third metal layer overlaying the plurality of third transistors; and a connective metal path between the third metal layer and at least one of the first transistors, where at least one of the plurality of third transistors is aligned to at least one of the plurality of first transistors with less than 40 nm alignment error, where the first metal layer is powered by a first voltage and the second metal layer is powered by a second voltage.

公开(公告)号：US20180269229A1

公开(公告)日：2018-09-20

申请号：US15761426

申请日：2016-09-21

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H01L27/118

Abstract: A multilevel semiconductor device, the device including: a first level including a first array of first programmable cells and a first control line; a second level including a second array of second programmable cells and a second control line; and a third level including a third array of third programmable cells and a third control line, where the second level overlays the first level, where the third level overlays the second level, where the first programmable cells are self-aligned to the second programmable cells, and where a programmable logic cell includes a plurality of the first programmable cells and a plurality of the second programmable cells.

公开(公告)号：US20180261600A1

公开(公告)日：2018-09-13

申请号：US15911071

申请日：2018-03-02

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H01L27/108 ,  H01L27/11573 ,  H01L27/11578 ,  G11C16/10 ,  G11C16/04

CPC classification number: H01L27/10802 ,  G11C16/0416 ,  G11C16/0458 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/10897 ,  H01L27/11565 ,  H01L27/11568 ,  H01L27/11573 ,  H01L27/11578 ,  H01L29/7831 ,  H01L29/792 ,  H01L29/7923

Abstract: A semiconductor device, including: a plurality of non-volatile memory cells including a first memory cell and a second memory cell, where the plurality of non-volatile memory cells includes source diffusion lines and drain diffusion lines, at least one of the source diffusion lines and drain diffusion lines are shared by the first memory cell and the second memory cell, where the first memory cell includes a thin tunneling oxide of less than 1 nm thickness, and where the second memory cell includes a thick tunneling oxide of greater than 2 nm thickness.