公开(公告)号：US20120187509A1

公开(公告)日：2012-07-26

申请号：US13120994

申请日：2009-09-15

申请人： Knut Gottfried ,  Maik Wiemer ,  Axel Franke ,  Achim Trautmann ,  Ando Feyh ,  Sonja Knies ,  Joerg Froemel

发明人： Knut Gottfried ,  Maik Wiemer ,  Axel Franke ,  Achim Trautmann ,  Ando Feyh ,  Sonja Knies ,  Joerg Froemel

IPC分类号： H01L29/84 ,  H01L21/768 ,  H01L23/48

CPC分类号： B81C1/00238 ,  B81B2207/012 ,  B81C2203/0118 ,  B81C2203/019 ,  B81C2203/038 ,  H01L24/94 ,  H01L2224/81801 ,  H01L2924/00013 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01049 ,  H01L2924/01058 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/01327 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2224/13099 ,  H01L2224/13599 ,  H01L2224/05599 ,  H01L2224/05099 ,  H01L2224/29099 ,  H01L2224/29599 ,  H01L2924/00

摘要： A contact arrangement for establishing a spaced, electrically conducting connection between a first wafer and a second wafer includes an electrical connection contact, a passivation layer on the electrical connection contact, and a dielectric spacer layer arranged on the passivation layer, wherein the contact arrangement is arranged at least on one of the first wafer and the second wafer, wherein the contact arrangement comprises trenches at least partly filled with a first material capable of forming a metal-metal connection, wherein the trenches are continuous trenches from the dielectric spacer layer through the passivation layer as far as the electrical connection contact, and wherein the first material is arranged in the trenches from the electrical connection contact as far as the upper edge of the trenches.

摘要翻译： 用于在第一晶片和第二晶片之间建立间隔的导电连接的接触装置包括电连接触点，电连接触点上的钝化层以及布置在钝化层上的电介质间隔层，其中触点布置是 布置在所述第一晶片和所述第二晶片中的至少一个上，其中所述接触装置包括至少部分地填充有能够形成金属 - 金属连接的第一材料的沟槽，其中所述沟槽是来自所述电介质间隔层的连续沟槽， 钝化层直到电连接接触，并且其中第一材料从电连接触点设置在沟槽中，直到沟槽的上边缘。

公开(公告)号：US20120060604A1

公开(公告)日：2012-03-15

申请号：US12734228

申请日：2008-10-02

申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC分类号： G01P3/44 ,  F16F3/00

CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20110140692A1

公开(公告)日：2011-06-16

申请号：US12927259

申请日：2010-11-09

申请人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

发明人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC分类号： G01R33/02 ,  G01P15/105

CPC分类号： G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

摘要： A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

摘要翻译： 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US20110120208A1

公开(公告)日：2011-05-26

申请号：US12927345

申请日：2010-11-12

申请人： Torsten Ohms ,  Axel Franke

发明人： Torsten Ohms ,  Axel Franke

IPC分类号： G01P21/00 ,  G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

摘要： A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

摘要翻译： 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

公开(公告)号：US20110060543A1

公开(公告)日：2011-03-10

申请号：US12806316

申请日：2010-08-09

申请人： Axel Franke ,  Alexander Buhmann

发明人： Axel Franke ,  Alexander Buhmann

IPC分类号： G01P21/00

CPC分类号： G01P21/00

摘要： A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

摘要翻译： 在运行过程中三轴加速度传感器的自调节方法包括：校准传感器; 通过测量方程和灵敏度和偏移的估计值来检查干扰加速度的自调整; 如果识别到干扰加速度则重复该调整; 并且如果不识别到干扰加速度，则接受灵敏度和偏移的估计值作为校准值。 检查自我调整的步骤包括：估计灵敏度和/或偏移及其方差; 将创新确定为测量方程的测量值与测量方程式的估计值之差; 测试创新正常分配; 并且在偏离正态分布的情况下识别干扰加速度。

公开(公告)号：US20110048132A1

公开(公告)日：2011-03-03

申请号：US12806135

申请日：2010-08-06

申请人： Christian Rettig ,  Axel Franke ,  Ando Feyh

发明人： Christian Rettig ,  Axel Franke ,  Ando Feyh

IPC分类号： G01P15/08 ,  B81C3/00

CPC分类号： G01C19/56 ,  B81B7/0041 ,  B81B7/02 ,  B81C2203/0109 ,  G01P15/0802 ,  Y10T29/49144 ,  Y10T29/49146 ,  Y10T428/13

摘要： A microsystem, e.g., a micromechanical sensor, has a first cavity which is sealed off from the surroundings and a second cavity which is sealed off from the surroundings. The first cavity is bounded by a first bond joint and the second cavity is bounded by a second bond joint. Either the first bond joint or the second bond joint is a eutectic bond joint or a diffusion-soldered joint.

摘要翻译： 微系统，例如微机械传感器，具有与周围环境密封的第一空腔和与周围环境密封的第二空腔。 第一腔体由第一接合接头限定，第二腔体由第二接合接头限定。 第一接合接头或第二接合接头是共晶接合接头或扩散焊接接头。

公开(公告)号：US20080053837A1

公开(公告)日：2008-03-06

申请号：US11575187

申请日：2005-09-13

申请人： Gunther Huber ,  Michael Lutz ,  Michael Wille ,  Holger Friedrich ,  Josef Guth ,  Uwe Behling ,  Axel Franke ,  Elisabeth Gunkel

发明人： Gunther Huber ,  Michael Lutz ,  Michael Wille ,  Holger Friedrich ,  Josef Guth ,  Uwe Behling ,  Axel Franke ,  Elisabeth Gunkel

IPC分类号： C25C1/22 ,  C25D17/00

CPC分类号： C25C7/005 ,  C25C3/02 ,  C25C7/007

摘要： An electrolysis device producing alkali metals from a liquid alkali metal heavy metal alloy, including at least two connected tubes forming an electrolysis unit. Two solid electrolyte tubes are arranged concentrically in each tube and oriented with openings towards one end of each tube such that a first annular gap for guiding a liquid alkali metal forming an anode is located between the inside of the tube and the outside of the solid electrolyte tubes. An alloy inlet and outlet for the liquid alkali metal in each of the tubes leads into the first annular gap of a tube. An inner chamber sealed off from the alloy inlet, first annular gap, and alloy outlet in each solid electrolyte tube receives liquid alkali metal that can be used as a cathode connected to the alkali metal outlet. Two respective closure devices are arranged at the two ends of each tube.

摘要翻译： 一种从液态碱金属重金属合金制造碱金属的电解装置，包括形成电解单元的至少两个连接管。 两个固体电解质管同心地布置在每个管中并且朝向每个管的一端定向开口，使得用于引导形成阳极的液态碱金属的第一环形间隙位于管的内部和固体电解质的外部之间 管。 每个管中的液态碱金属的合金入口和出口通向管的第一环形间隙。 在每个固体电解质管中的合金入口，第一环形间隙和合金出口密封的内室容纳可用作连接到碱金属出口的阴极的液态碱金属。 两个相应的闭合装置布置在每个管的两端。

公开(公告)号：US06617047B1

公开(公告)日：2003-09-09

申请号：US09869139

申请日：2001-06-26

申请人： Stephan Hüffer ,  Thilo Krebs ,  Wolfgang Loth ,  Bernd Rumpf ,  Jürgen Sturm ,  Bernd Diebold ,  Juergen Korkhaus ,  Joachim Nilges ,  Axel Franke

发明人： Stephan Hüffer ,  Thilo Krebs ,  Wolfgang Loth ,  Bernd Rumpf ,  Jürgen Sturm ,  Bernd Diebold ,  Juergen Korkhaus ,  Joachim Nilges ,  Axel Franke

IPC分类号： B05D136

CPC分类号： F28F19/02 ,  C23C18/1616 ,  C23C18/1662 ,  C23C18/36 ,  Y10T428/12556 ,  Y10T428/12944 ,  Y10T428/31678

摘要： The present invention relates to a process for coating apparatuses and apparatus parts for chemical plant construction—which are taken to mean, for example, apparatus, tank and reactor walls, discharge devices, valves, pumps, filters, compressors, centrifuges, columns, dryers, comminution machines, internals, packing elements and mixing elements—wherein a metal layer or a metal/polymer dispersion layer is deposited in an electroless manner on the apparatus(es) or apparatus part(s) to be coated by bringing the parts into contact with a metal electrolyte solution which, in addition to the metal electrolyte, comprises a reducing agent and optionally the polymer or polymer mixture to be deposited in dispersed form, where at least one polymer is halogenated.

摘要翻译： 本发明涉及一种用于化工厂建设的涂布设备和设备部件的方法，其被认为是指例如设备，罐和反应器壁，排放装置，阀，泵，过滤器，压缩机，离心机，柱，干燥器 粉碎机，内部构件，填料元件和混合元件，其中金属层或金属/聚合物分散层以无电解的方式沉积在待涂覆的设备或设备部分上，使部件接触 与除了金属电解质之外的金属电解质溶液包含还原剂和任选的待分散形式沉积的聚合物或聚合物混合物，其中至少一种聚合物被卤化。

公开(公告)号：US09829357B2

公开(公告)日：2017-11-28

申请号：US13992136

申请日：2011-10-14

申请人： Tjalf Pirk ,  Thomas Wagner ,  Ando Feyh ,  Georg Bischopink ,  Axel Franke

发明人： Tjalf Pirk ,  Thomas Wagner ,  Ando Feyh ,  Georg Bischopink ,  Axel Franke

IPC分类号： G01D21/02 ,  G01C19/5783 ,  H01L25/065 ,  G01P1/02

CPC分类号： G01D21/02 ,  G01C19/5783 ,  G01P1/023 ,  H01L25/0657 ,  H01L2224/16145 ,  H01L2224/16245 ,  H01L2224/48145 ,  H01L2224/48245 ,  H01L2224/48247 ,  H01L2224/73257 ,  H01L2225/06506 ,  H01L2225/06513 ,  Y10T29/49128 ,  H01L2924/00012

摘要： A microelectromechanical sensor module includes a sensing mechanism for measuring an acceleration, pressure, air humidity or the like, a control mechanism for controlling the sensing mechanism, an energy supply mechanism for supplying the sensor module with energy, and a transmission mechanism for transmitting signals of the sensing mechanism. At least three of the mechanisms are integrated at the chip level in at least one chip in each case. A corresponding method is implemented to produce the microelectromechanical sensor module.

公开(公告)号：US09266720B2

公开(公告)日：2016-02-23

申请号：US14059202

申请日：2013-10-21

申请人： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

发明人： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC分类号： B81C1/00

CPC分类号： B81C1/00246 ,  B81C1/0023 ,  B81C2203/075 ,  B81C2203/0771 ,  H01L2224/48463

摘要： A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.

摘要翻译： 元件具有至少一个MEMS元件和由半导体材料制成的至少一个盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。