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    Suspended moving channels and channel actuators for microfluidic applications and method for making
    31.
    发明授权
    Suspended moving channels and channel actuators for microfluidic applications and method for making 失效
    用于微流控应用的悬挂移动通道和通道执行器和制造方法

    公开(公告)号：US06180536B2

    公开(公告)日：2001-01-30

    申请号：US09090840

    申请日：1998-06-04

    Applicant: John M. Chong ,  Noel C. MacDonald

    Inventor： John M. Chong ,  Noel C. MacDonald

    IPC: H01L21306

    CPC classification number: B81C1/00587 ,  B81B2201/051 ,  Y10S366/03

    Abstract: A microfabrication process for making enclosed, subsurface microfluidic tunnels, cavities, channels, and the like within suspended beams includes etching a single crystal silicon wafer to produce trenches defining a beam. The trench walls are oxidized, and the interior of the beam is etched through a channel via on the top of the beam to form a hollow beam with oxide sidewalls. The beam is released, and the via is then sealed to form an enclosed released channel beam,

    Abstract translation: 用于在悬挂梁内制造封闭的，地下微流体通道，空腔，通道等的微加工方法包括蚀刻单晶硅晶片以产生限定光束的沟槽。 沟槽壁被氧化，并且梁的内部通过在梁的顶部上的通道蚀刻而形成具有氧化物侧壁的中空梁。 将光束释放，然后将通孔密封以形成封闭释放的通道光束，

    High aspect ratio probes with self-aligned control electrodes
    34.
    发明授权
    High aspect ratio probes with self-aligned control electrodes 失效
    具有自对准控制电极的高纵横比探针

    公开(公告)号：US5844251A

    公开(公告)日：1998-12-01

    申请号：US573308

    申请日：1995-12-15

    Applicant: Noel C. MacDonald ,  Z. Lisa Zhang

    Inventor： Noel C. MacDonald ,  Z. Lisa Zhang

    IPC: B81B1/00 ,  H01L21/00 ,  H01L29/06

    CPC classification number: G01Q60/04 ,  B82Y35/00 ,  G01Q60/16 ,  G01Q60/38 ,  G01Q70/10 ,  Y10S977/878

    Abstract: A high aspect ratio field emission or tunnelling probe is fabricated utilizing a single crystal reactive etching and metallization process. The resulting field emission probes have self-aligned single crystal silicon sharp tips, high aspect ratio supporting posts for the tips, and integrated, self-aligned gate electrodes surrounding an electrically isolated from the tips. The gate electrodes are spaced from the tips by between 200 and 800 nm and metal silicide or metal can be applied on the tips to achieve emitter turn on at low operational gate voltages. The resulting tips have a high aspect ratio for use in probing various surface phenomena, and for this purpose, the probes can be mounted on or integrated in a three-dimensional translator for mechanical scanning across the surface and for focusing by adjusting the height of the emitter above the surface.

    Abstract translation: 使用单晶反应蚀刻和金属化工艺制造高纵横比场致发射或隧道探针。 所产生的场致发射探针具有自对准单晶硅尖尖，用于尖端的高纵横比支撑柱，以及围绕与尖端电隔离的集成的自对准栅电极。 栅电极与尖端间隔200至800nm，并且金属硅化物或金属可以施加在尖端上，以在低操作栅极电压下实现发射极导通。 所得到的尖端具有高的纵横比用于探测各种表面现象，并且为此目的，探针可以安装在三维平移机上或集成在三维平移机中，用于穿过表面进行机械扫描，并通过调整高度来进行聚焦 发射体在表面以上。

    Method of forming compound stage MEM actuator suspended for multidimensional motion
    37.
    发明授权
    Method of forming compound stage MEM actuator suspended for multidimensional motion 失效
    形成用于多维运动的复合级MEM致动器的形成方法

    公开(公告)号：US5506175A

    公开(公告)日：1996-04-09

    申请号：US443331

    申请日：1995-05-17

    Applicant: Z. Lisa Zhang ,  Noel C. MacDonald

    Inventor： Z. Lisa Zhang ,  Noel C. MacDonald

    IPC: B81B1/00 ,  B81B3/00 ,  H02N1/00 ,  H01L21/465

    CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0062 ,  B81C1/0019 ,  B82Y15/00 ,  B81B2201/11 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2207/07

    Abstract: A microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams. The microactuator incorporates an interconnect system for mechanically supporting a central stage and for providing electrical connections to componants of the microactuator and to devices carried thereby. The microactuator is fabricated using a modified single crystal reactive etching and metallization process which incorporates an isolation process utilizing thermal oxidation of selected regions of the device to provide insulating segments which define conductive paths from external circuitry to the actuator components and to microelectronic devices such as gated field emitters carried by the actuator.

    Abstract translation: 由亚微米悬浮单晶硅光束制造能够沿x，y和z轴运动的微机电复合级微致动器组件，用于定位和扫描集成的机电传感器和致动器。 该微型致动器包括用于机械地支撑中央级并用于提供与微型致动器的部件的电连接以及由此承载的装置的互连系统。 使用改进的单晶反应蚀刻和金属化工艺制造微致动器，其包括利用设备的选定区域的热氧化的隔离工艺，以提供绝缘段，其限定从外部电路到致动器部件的导电路径以及限定门控的微电子器件 由致动器承载的场致发射体。

    Methods of fabricating integrated, aligned tunneling tip pairs
    39.
    发明授权
    Methods of fabricating integrated, aligned tunneling tip pairs 失效
    整合，对齐的隧道提花对的方法

    公开(公告)号：US5235187A

    公开(公告)日：1993-08-10

    申请号：US868138

    申请日：1992-04-14

    Applicant: Susanne C. Arney ,  Noel C. MacDonald ,  Jun J. Yao

    Inventor： Susanne C. Arney ,  Noel C. MacDonald ,  Jun J. Yao

    IPC: G01B7/34 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00

    CPC classification number: H02N1/008 ,  B82Y35/00 ,  G01Q20/04 ,  G01Q60/16 ,  Y10S977/874

    Abstract: Self-aligned, opposed, nanometer dimension tips are fabricated in pairs, one of each pair being located on a movable, single crystal beam, with the beam being movable in three dimensions with respect to a substrate carrying the other tip of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers formed on the supporting beams. Spring means in each beam allow axial motion of the beam. The tips and beams are fabricated from single crystal silicon substrate, and the tips may be electrically isolated from the substrate by fabricating insulating segments in the beam structure.

    Abstract translation: 自对准的，相对的，纳米尺寸的尖端成对制造，每对中的一个位于可移动的单晶束上，其中光束可相对于承载一对的另一个尖端的基板在三维空间中移动。 一个尖端相对于另一个尖端的运动由形成在支撑梁上的换能器控制或感测。 每个梁中的弹簧装置允许梁的轴向运动。 尖端和光束由单晶硅衬底制成，并且尖端可以通过在梁结构中制造绝缘段而与衬底电隔离。

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