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公开(公告)号:US20250006677A1
公开(公告)日:2025-01-02
申请号:US18342231
申请日:2023-06-27
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ming-Tsu Chung , Yung-Chi Lin , Yan-Zuo Tsai
IPC: H01L23/00
Abstract: A method includes depositing a first dielectric layer as a first surface layer of a first package component, forming a plurality of metal pads in the first dielectric layer, depositing a second dielectric layer as a second surface layer of a second package component, and bonding the second package component to the first package component. The first dielectric layer is bonded to the second dielectric layer. At a time after the bonding, a metal pad in the plurality of metal pads has a top surface contacting a bottom surface of the second dielectric layer.
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公开(公告)号:US20240312952A1
公开(公告)日:2024-09-19
申请号:US18326316
申请日:2023-05-31
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Yung-Chi Lin , Ming-Tsu Chung
CPC classification number: H01L24/80 , H01L21/78 , H01L23/481 , H01L24/08 , H01L24/94 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2224/94
Abstract: A method comprises bonding a first wafer with a second wafer through wafer-on-wafer bonding, wherein the second wafer includes a first plurality of device dies therein. A second plurality of device dies are bonded on the second wafer through chip-on-wafer bonding. A gap-filling process is performed to fill the gaps between the second plurality of device dies with gap-filling regions. The gap-filling regions and the second plurality of device dies collectively form a reconstructed wafer.
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公开(公告)号:US20240222292A1
公开(公告)日:2024-07-04
申请号:US18152626
申请日:2023-01-10
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsien-Ju Tsou , Yung-Chi Lin , Yi-Hsiu Chen , Tsang-Jiuh Wu
IPC: H01L23/00 , H01L21/304 , H01L21/3065
CPC classification number: H01L23/562 , H01L21/3043 , H01L21/3065
Abstract: In an embodiment, a device includes an integrated circuit die including a first sidewall, a second sidewall, and a third sidewall, wherein the third sidewall of the integrated circuit die is connected to the first sidewall of the integrated circuit die and the second sidewall of the integrated circuit die, wherein the third sidewall of the integrated circuit die forms a chamfered corner of the integrated circuit die; a first dielectric surrounding the integrated circuit die; a semiconductor feature disposed over the integrated circuit die, wherein the semiconductor feature includes a first sidewall, a second sidewall, and a third sidewall, wherein the third sidewall of the semiconductor feature is connected to the first sidewall of the semiconductor feature and the second sidewall of the semiconductor feature and forms a chamfered corner of the semiconductor feature; and a second dielectric surrounding the semiconductor feature.
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公开(公告)号:US11756883B2
公开(公告)日:2023-09-12
申请号:US16927249
申请日:2020-07-13
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Yung-Chi Lin , Hsin-Yu Chen , Lin-Chih Huang , Tsang-Jiuh Wu , Wen-Chih Chiou
IPC: H01L23/528 , H01L27/088 , H01L23/31 , H01L23/48 , H01L23/532 , H01L23/00 , H01L21/768 , H01L23/525
CPC classification number: H01L23/528 , H01L21/76898 , H01L23/3114 , H01L23/3171 , H01L23/481 , H01L23/53238 , H01L24/13 , H01L27/088 , H01L23/525 , H01L23/53223 , H01L23/53252 , H01L23/53266 , H01L23/53271 , H01L24/05 , H01L2224/0401 , H01L2224/05024 , H01L2224/0557 , H01L2224/05552 , H01L2224/05567 , H01L2224/05572 , H01L2224/06181 , H01L2224/13022 , H01L2224/13025 , H01L2224/13111 , H01L2924/00014 , H01L2924/12042 , H01L2924/13091 , H01L2224/05572 , H01L2924/00014 , H01L2224/13111 , H01L2924/01047 , H01L2924/01029 , H01L2924/00012 , H01L2924/00014 , H01L2224/05552 , H01L2924/13091 , H01L2924/00 , H01L2924/12042 , H01L2924/00
Abstract: A method comprises forming a trench extending through an interlayer dielectric layer over a substrate and partially through the substrate, depositing a photoresist layer over the trench, wherein the photoresist layer partially fills the trench, patterning the photoresist layer to remove the photoresist layer in the trench and form a metal line trench over the interlayer dielectric layer, filling the trench and the metal line trench with a conductive material to form a via and a metal line, wherein an upper portion of the trench is free of the conductive material and depositing a dielectric material over the substrate, wherein the dielectric material is in the upper portion of the trench.
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公开(公告)号:US11728296B2
公开(公告)日:2023-08-15
申请号:US17073533
申请日:2020-10-19
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsiao Yun Lo , Lin-Chih Huang , Tasi-Jung Wu , Hsin-Yu Chen , Yung-Chi Lin , Ku-Feng Yang , Tsang-Jiuh Wu , Wen-Chih Chiou
CPC classification number: H01L24/05 , H01L23/481 , H01L24/03 , H01L24/11 , H01L24/13 , H01L2224/0345 , H01L2224/0346 , H01L2224/0391 , H01L2224/03462 , H01L2224/03602 , H01L2224/03614 , H01L2224/03616 , H01L2224/0401 , H01L2224/05008 , H01L2224/05012 , H01L2224/05017 , H01L2224/05025 , H01L2224/05026 , H01L2224/05082 , H01L2224/05083 , H01L2224/05124 , H01L2224/05139 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05181 , H01L2224/05184 , H01L2224/05187 , H01L2224/05565 , H01L2224/05571 , H01L2224/05624 , H01L2224/05639 , H01L2224/05647 , H01L2224/05655 , H01L2224/05684 , H01L2224/1145 , H01L2224/11334 , H01L2224/11462 , H01L2224/131 , H01L2224/13023 , H01L2224/13026 , H01L2224/13111 , H01L2224/13147 , H01L2924/00012 , H01L2924/00014 , H01L2924/013 , H01L2924/01029 , H01L2924/01047 , H01L2924/13091 , H01L2924/00014 , H01L2224/05187 , H01L2924/04941 , H01L2224/05187 , H01L2924/04953 , H01L2224/0345 , H01L2924/00014 , H01L2224/05181 , H01L2924/00014 , H01L2224/05124 , H01L2924/00014 , H01L2224/05184 , H01L2924/00014 , H01L2224/05139 , H01L2924/00014 , H01L2224/05647 , H01L2924/013 , H01L2224/05624 , H01L2924/00014 , H01L2224/05684 , H01L2924/00014 , H01L2224/05639 , H01L2924/00014 , H01L2224/03602 , H01L2924/00014 , H01L2224/03614 , H01L2924/00014 , H01L2224/13111 , H01L2924/01047 , H01L2924/01029 , H01L2224/13147 , H01L2924/00014 , H01L2224/1145 , H01L2924/00014 , H01L2224/11462 , H01L2924/00014 , H01L2224/131 , H01L2924/014
Abstract: A device includes a first side interconnect structure over a first side of a substrate, wherein active circuits are in the substrate and adjacent to the first side of the substrate, a dielectric layer over a second side of the substrate, a pad embedded in the dielectric layer, the pad comprising an upper portion and a bottom portion formed of two different materials and a passivation layer over the dielectric layer.
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公开(公告)号:US11721666B2
公开(公告)日:2023-08-08
申请号:US17408662
申请日:2021-08-23
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ming-Tsu Chung , Ku-Feng Yang , Yung-Chi Lin , Wen-Chih Chiou , Chen-Hua Yu
IPC: H01L25/065 , H01L23/48 , H01L23/00 , H01L25/00 , H01L21/683 , H01L21/82
CPC classification number: H01L25/0652 , H01L21/6836 , H01L21/82 , H01L23/481 , H01L24/08 , H01L24/80 , H01L25/50 , H01L2221/68327 , H01L2224/08146 , H01L2224/80895 , H01L2224/80896 , H01L2225/06524 , H01L2225/06541 , H01L2225/06568 , H01L2225/06582
Abstract: A semiconductor package including an improved isolation bonding film and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a first die bonded to a package substrate, the first die including vias extending through a substrate, the vias extending above a top surface of the substrate; a first dielectric film extending along a top surface of the package substrate, along the top surface of the substrate, and along sidewalls of the first die, the vias extending through the first dielectric film; a second die bonded to the first dielectric film and the vias; and an encapsulant over the package substrate, the first die, the first dielectric film, and the second die.
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公开(公告)号:US11502072B2
公开(公告)日:2022-11-15
申请号:US16934870
申请日:2020-07-21
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chen-Hua Yu , Yung-Chi Lin , Wen-Chih Chiou
IPC: H01L25/00 , H01L25/18 , H01L23/00 , H01L25/065
Abstract: A device package includes a first die directly bonded to a second die at an interface, wherein the interface comprises a conductor-to-conductor bond. The device package further includes an encapsulant surrounding the first die and the second die and a plurality of through vias extending through the encapsulant. The plurality of through vias are disposed adjacent the first die and the second die. The device package further includes a plurality of thermal vias extending through the encapsulant and a redistribution structure electrically connected to the first die, the second die, and the plurality of through vias. The plurality of thermal vias is disposed on a surface of the second die and adjacent the first die.
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公开(公告)号:US20210384158A1
公开(公告)日:2021-12-09
申请号:US17408662
申请日:2021-08-23
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ming-Tsu Chung , Ku-Feng Yang , Yung-Chi Lin , Wen-Chih Chiou , Chen-Hua Yu
IPC: H01L25/065 , H01L23/48 , H01L23/00 , H01L25/00 , H01L21/683 , H01L21/82
Abstract: A semiconductor package including an improved isolation bonding film and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a first die bonded to a package substrate, the first die including vias extending through a substrate, the vias extending above a top surface of the substrate; a first dielectric film extending along a top surface of the package substrate, along the top surface of the substrate, and along sidewalls of the first die, the vias extending through the first dielectric film; a second die bonded to the first dielectric film and the vias; and an encapsulant over the package substrate, the first die, the first dielectric film, and the second die.
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公开(公告)号:US11145623B2
公开(公告)日:2021-10-12
申请号:US16441013
申请日:2019-06-14
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chia-Hao Hsu , Yung-Chi Lin , Wen-Chih Chiou
IPC: H01L29/40 , H01L25/065 , H01L23/00 , H01L23/48 , H01L25/00
Abstract: Provided are integrated circuit packages and methods of forming the same. An integrated circuit package includes at least one first die, a plurality of bumps, a second die and a dielectric layer. The bumps are electrically connected to the at least one first die at a first side of the at least one first die. The second die is electrically connected to the at least one first die at a second side of the at least one first die. The second side is opposite to the first side of the at least one first die. The dielectric layer is disposed between the at least one first die and the second die and covers a sidewall of the at least one first die.
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公开(公告)号:US20210305200A1
公开(公告)日:2021-09-30
申请号:US17019913
申请日:2020-09-14
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Yung-Chi Lin , Tsang-Jiuh Wu , Wen-Chih Chiou , Chen-Hua Yu
IPC: H01L23/00 , H01L21/3213 , H01L25/00 , H01L25/065
Abstract: In an embodiment, a device includes: a first wafer including a first substrate and a first interconnect structure, a sidewall of the first interconnect structure forming an obtuse angle with a sidewall of the first substrate; and a second wafer bonded to the first wafer, the second wafer including a second substrate and a second interconnect structure, the sidewall of the first substrate being laterally offset from a sidewall of the second substrate and a sidewall of the second interconnect structure.
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