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    Laser unit management system
    32.
    发明授权
    Laser unit management system 有权

    公开(公告)号：US10394133B2

    公开(公告)日：2019-08-27

    申请号：US15914299

    申请日：2018-03-07

    Applicant: GIGAPHOTON INC.

    Inventor： Yuji Minegishi ,  Yutaka Igarashi ,  Takeshi Ohta

    IPC: G03B27/54 ,  G03F7/20 ,  G06F21/62 ,  H01S3/08 ,  H01S3/137 ,  H01S3/225 ,  H01S3/036

    Abstract: A laser unit management system may include a server configured to hold first information provided with access limitation that allows an access with a first access authorization, second information provided with access limitation that allows an access with a second access authorization, and third information provided with access limitation that allows both an access with the first access authorization and an access with the second access authorization; and a laser unit including a laser output section and a controller, the laser output section being configured to output pulsed laser light toward an exposure unit that is configured to perform wafer exposure, the controller being configured to store the first information, the second information, and the third information in the server. The second information may include wafer-exposure-related information on the exposure unit and laser-control-related information on the laser unit that are in association with each other.

    LASER GAS REGENERATION SYSTEM AND LASER SYSTEM
    33.
    发明申请
    LASER GAS REGENERATION SYSTEM AND LASER SYSTEM 审中-公开

    公开(公告)号：US20190237928A1

    公开(公告)日：2019-08-01

    申请号：US16375591

    申请日：2019-04-04

    Applicant: Gigaphoton Inc.

    Inventor： Masanori YASHIRO ,  Hiroaki TSUSHIMA ,  Osamu WAKABAYASHI

    IPC: H01S3/036 ,  H01S3/097 ,  H01S3/225 ,  H01S3/104 ,  C01B7/20

    CPC classification number: H01S3/036 ,  C01B7/20 ,  H01S3/03 ,  H01S3/09705 ,  H01S3/104 ,  H01S3/2258

    Abstract: A laser gas regeneration system for an excimer laser includes a first pipe capable of supplying a laser chamber with a first laser gas, a second pipe capable of supplying the laser chamber with a second laser gas having a halogen gas concentration higher than that of the first laser gas, a third pipe allowing a gas exhausted from the laser chamber to pass therethrough, a gas refiner that refines the gas having passed through the third pipe, a branch that causes the refined gas to divide and flow into a fourth pipe and a fifth pipe, a first regenerated gas supplier that supplies the first pipe with a gas having divided and flowed into the fourth pipe, and a second regenerated gas supplier that adds a halogen gas to a gas having divided and flowed into the fifth pipe and supplies the second pipe with the halogen-added gas.

    Method for direct compression of laser pulses with large temporal ratios
    36.
    发明授权
    Method for direct compression of laser pulses with large temporal ratios 有权

    公开(公告)号：US10170883B1

    公开(公告)日：2019-01-01

    申请号：US15851484

    申请日：2017-12-21

    Applicant: Robert O. Hunter, Jr.

    Inventor： Robert O. Hunter, Jr.

    IPC: H01S3/10 ,  H01S3/00 ,  H01S3/102 ,  H01S3/30 ,  H01S3/22 ,  H01S3/094 ,  H01S3/0943 ,  H01S3/23 ,  H01S3/108 ,  H01S3/225

    Abstract: The present architecture utilizes a Nonlinear Scattering Aperture Combiner that does not need to be optically multiplexed and then drives a Direct Compressor stage that produces a large temporal compression ratio to pump a Fast Compressor. This eliminates the need for a separate array of ATDMs, multiplexing optical elements, and, at the approximate 107 joule energy output required for ICF, reduces the number of mechanical elements and gas interfaces from the order of 103 to about 10. In addition, this provides a large reduction of the volume of the gas containment region. In order to accomplish this, a technique for transversely segmenting by color and/or polarization of the optical extraction beams of the Direct Compressor has been invented. In particular, it emphasizes the simplicity and uniqueness of design of the Direct Compressor. The Direct Compressor is unique in terms of high fluence, high temporal compression ratios, and high stage gain, leading to a very large reduction in laser costs. It may separately have many other applications than ICF.

    Excimer laser device
    37.
    发明授权
    Excimer laser device 有权

    公开(公告)号：US10103509B2

    公开(公告)日：2018-10-16

    申请号：US15836878

    申请日：2017-12-10

    Applicant: Gigaphoton, Inc.

    Inventor： Kouji Kakizaki ,  Akira Suwa ,  Osamu Wakabayashi ,  Hiroshi Umeda

    IPC: H01S3/13 ,  H01S3/23 ,  H01S3/097 ,  H01S3/225 ,  H01S3/10 ,  H01S3/22

    Abstract: The excimer laser device receives data on a target value of pulse energy from an external device and outputs a pulse laser beam. The excimer laser device includes a master oscillator, at least one power amplifier including a chamber provided in an optical path of the pulse laser beam outputted from the master oscillator, a pair of electrodes provided in the chamber, and an electric power source configured to apply voltage to the pair of electrodes, and a controller configured to control the electric power source of one power amplifier of the at least one power amplifier to stop applying the voltage to the pair of electrodes based on the target value of the pulse energy.

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