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149 条记录 (耗时 0.028 秒)

    Microscope device
    45.
    发明授权
    Microscope device 有权

    公开(公告)号：US09606345B2

    公开(公告)日：2017-03-28

    申请号：US14346906

    申请日：2012-09-28

    申请人： FEI Company ,  TILL I.D. GMBH

    发明人： Rainer Uhl ,  Martin Schropp

    IPC分类号： G02B21/00 ,  G02B21/06 ,  G02B21/14 ,  G02B21/36 ,  G02B27/58 ,  G01N21/64

    CPC分类号： G02B21/06 ,  G01N21/6458 ,  G02B21/0032 ,  G02B21/14 ,  G02B21/367 ,  G02B27/58

    摘要： A microscope has an objective, a light source illuminating a sample over an illumination beam path, an arrangement producing a flat illumination pattern which is structured in both spatial directions on the sample, a surface detector detecting light coming over one picture beam path, an arrangement shifting the illumination pattern on the sample in one displacement direction, and a control unit taking one picture at a time of the light which was detected by the detector as phase picture in different positions of the pattern along the displacement direction and to computationally reconstruct from these phase pictures an overall picture of the illuminated sample region. The displacement direction is oblique to the main axes of symmetry of the illumination pattern and depending on the illumination pattern is chosen such that the number of phase pictures which is necessary for the picture reconstruction corresponds to the theoretically minimally required value.

    Method of studying a cryogenic sample in an optical microscope
    47.
    发明授权
    Method of studying a cryogenic sample in an optical microscope 有权
    在光学显微镜下研究低温样品的方法

    公开(公告)号：US09512460B2

    公开(公告)日：2016-12-06

    申请号：US14196178

    申请日：2014-03-04

    申请人： FEI Company

    发明人： Tobias Mayer ,  Rainer Daum ,  Matthias Geisbauer ,  Rudolf Johannes Peter Gerardus Schampers ,  Johannes Antonius Hendricus Wilhelmus Gerardus Persoon

    IPC分类号： G02B21/28 ,  C12Q1/02 ,  G02B27/00

    CPC分类号： C12Q1/02 ,  G02B21/28 ,  G02B27/0006

    摘要： The present invention relates to a method of studying a sample using an optical microscope, comprising providing the sample in a sample holder with means to maintain the sample at a temperature below 273 K; providing a microscope objective lens, in a thermally insulating jacket, having an extremal lens element proximal to the sample holder; bringing the lens into a focus position proximal to the sample, which separates the extremal lens element and sample by an intervening space, providing a transparent window in said intervening space, with a gap between the window and the extremal lens element; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow is non-laminar; and does not excite substantial acoustic vibration in a structure proximal the gap.

    摘要翻译： 本发明涉及使用光学显微镜研究样品的方法，其包括将样品提供在样品保持器中，以将样品保持在低于273K的温度; 在绝热护套中提供具有靠近样品保持器的极端透镜元件​​的显微镜物镜; 使透镜进入靠近样品的聚焦位置，其将极端透镜元件​​和样品分开中间空间，在所述中间空间中提供透明窗口，窗口与极光透镜元件之间具有间隙; 在所述间隙中提供基本干燥的气体流; 并且调整所述流的几何形状和速度，使得至少在所述间隙中，所述流是非层流的; 并且不会在靠近间隙的结构中激发大量的声振动。

    Method of using a compound particle-optical lens
    48.
    发明授权
    Method of using a compound particle-optical lens 有权
    使用复合粒子光学透镜的方法

    公开(公告)号：US09490100B2

    公开(公告)日：2016-11-08

    申请号：US14021480

    申请日：2013-09-09

    申请人： FEI Company

    发明人： Petr Syta{hacek over (r)} ,  Petr Hlavenka ,  Lubomír Tůma

    IPC分类号： H01J37/14 ,  H01J37/145 ,  H01J37/28

    CPC分类号： H01J37/14 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/248

    摘要： The invention relates to a compound objective lens for a Scanning Electron Microscope having a conventional magnetic lens excited by a first lens coil, an immersion magnetic lens excited by a second lens coil, and an immersion electrostatic lens excited by the voltage difference between the sample and the electrostatic lens electrode. For a predetermined excitation of the lens, the electron beam can be focused on the sample using combinations of excitations of the two lens coils. More BSE information can be obtained when the detector distinguishes between BSE's (202) that strike the detector close to the axis and BSE's (204) that strike the detector further removed from the axis. By tuning the ratio of the excitation of the two lens coils, the distance from the axis that the BSE's impinge on the detector can be changed, and the compound lens can be used as an energy selective detector.

    摘要翻译： 本发明涉及一种用于扫描电子显微镜的复合物镜，其具有由第一透镜线圈激发的常规磁透镜，由第二透镜线圈激发的浸没磁透镜，以及由样品和 静电透镜电极。 对于透镜的预定激发，可以使用两个透镜线圈的激发的组合将电子束聚焦在样品上。 当检测器区分击穿靠近轴的检测器的BSE（202）和撞击检测器进一步从轴移除的BSE（204）之后，可以获得更多的BSE信息。 通过调整两个透镜线圈的激励的比率，可以改变从BSE撞击在检测器上的轴线的距离，并且复合透镜可以用作能量选择检测器。

    Integrated light optics and gas delivery in a charged particle lens
    49.
    发明授权
    Integrated light optics and gas delivery in a charged particle lens 有权
    在带电粒子透镜中集成光学元件和气体输送

    公开(公告)号：US09478390B2

    公开(公告)日：2016-10-25

    申请号：US14320560

    申请日：2014-06-30

    申请人： FEI Company

    发明人： N. William Parker ,  Marcus Straw ,  Jorge Filevich ,  Aurelien Philippe Jean Maclou Botman ,  Steven Randolph ,  Clive Chandler ,  Mark Utlaut

    IPC分类号： H01J37/12 ,  H01J37/22

    CPC分类号： H01J37/12 ,  H01J37/228 ,  H01J2237/006 ,  H01J2237/31749

    摘要： A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column. The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.

    摘要翻译： 一种用于将光或气体或两者引导到位于距离带电粒子束柱的下端约2mm的样本的方法和装置。 带电粒子束柱组件包括限定样品保持位置的平台，并且具有一组静电透镜，每个静电透镜包括一组电极。 组件包括最终静电透镜，其包括最靠近样品保持位置的最终电极。 该最终电极限定至少一个内部通道，其具有靠近并指向试样保持位置的终端。

    Mono-material divider block assembly
    50.
    发明授权
    Mono-material divider block assembly 有权
    单体分隔块组件

    公开(公告)号：US09470363B2

    公开(公告)日：2016-10-18

    申请号：US14171434

    申请日：2014-02-03

    申请人： Curtis Roys

    发明人： Curtis Roys

    IPC分类号： F16N25/02

    CPC分类号： F16N25/00 ,  F16N25/02 ,  Y10T29/49236 ,  Y10T29/49238 ,  Y10T137/86002 ,  Y10T137/86163 ,  Y10T137/87885

    摘要： The invention is directed to a divider block assembly made from one piece of material. Traditional divider blocks require modular sections so that piston alignment can be calibrated precisely. The current invention uses replaceable pistons and sleeves that are suitable for use at high fluid pressures. The use of these pistons also allows for a single, bodied, one-piece, metal divider body, rather than the conventional multiple block divider blocks, which allows for a more efficient manufacturing method and stronger, more reliable, and more efficient lubricant dispensing system. The use of any of these aspects separately can improve performance, and not all are required in every embodiment.

    摘要翻译： 本发明涉及一种由一块材料制成的分隔块组件。 传统的分隔块需要模块化部件，以便精确校准活塞对准。 本发明使用适于在高流体压力下使用的可更换的活塞和套筒。 这些活塞的使用也允许单个，体积一体的金属分隔体，而不是常规的多块分隔块，其允许更有效的制造方法和更强，更可靠和更有效的润滑剂分配系统 。 单独使用这些方面中的任何一个可以提高性能，而不是在每个实施例中都是必需的。