Abstract:
Described herein are methods of forming dielectric films comprising silicon, oxide, and optionally nitrogen, carbon, hydrogen, and boron. Also disclosed herein are the methods to form dielectric films or coatings on an object to be processed, such as, for example, a semiconductor wafer.
Abstract:
This invention discloses the method of forming silicon nitride, silicon oxynitride, silicon oxide, carbon-doped silicon nitride, carbon-doped silicon oxide and carbon-doped oxynitride films at low deposition temperatures. The silicon containing precursors used for the deposition are monochlorosilane (MCS) and monochloroalkylsilanes. The method is preferably carried out by using plasma enhanced atomic layer deposition, plasma enhanced chemical vapor deposition, and plasma enhanced cyclic chemical vapor deposition.
Abstract:
Described herein are methods of forming dielectric films comprising silicon, such as, but not limited to, silicon oxide, silicon oxycarbide, silicon carbide, and combinations thereof, that exhibit at least one of the following characteristics: low wet etch resistance, a dielectric constant of 6.0 or below, and/or can withstand a high temperature rapid thermal anneal process. Also disclosed herein are the methods to form dielectric films or coatings on an object to be processed, such as, for example, a semiconductor wafer.
Abstract:
A scanner includes a main body, a cover, a back plate and a positioning mechanism. The cover is pivoted to the main body. The back plate is disposed between the main body and the cover with one end pivoted to the main body and another end connected to the cover. The positioning mechanism is disposed on the cover and connecting the back plate and the cover, whereby the back plate is maintained at a predetermined position on the cover at an angle with respect to the main body.
Abstract:
A kind of method and system for preventing rear end collision of vehicles are intended to apply to the vehicles equipped with the electric fuel injection system. By using a fuel-decreasing pre-warning electric control unit standing for PW-ECU, the throttle value D of the engine can be obtained through sampling from the throttle sensor 1 of the electric fuel injection system in real time. Do time differential operation to the throttle value D to get the throttle speed value Rt, then comparing the throttle speed value Rt with a preset fuel-decreasing pre-warning value Rp. If Rt equal to or exceed the preset value Rp when the engine decreases the fuel, the pre-warning devices 7 driven by PW-ECU will send out the pre-warning signals to the following vehicles. Therefore we can realize preventing rear end collision of the vehicles by the fuel-decreasing pre-warning method. At same time we provide a system for preventing rear end collision of the vehicles by the fuel-decreasing pre-warning method.
Abstract:
A three-dimensional (3D) communication device includes a 3D stereoscopic camera for capturing video and photos in 3D. The device also includes a 3D display, which enables the display of video and photos in 3D that have been captured by a local user's communication device or that have been received from a remote 3D communication device. The 3D communication device may be configured as a handheld standalone device or may alternatively be configured as a modular device, a case, or a dock that can be interfaced with a portable computing device, such as a smart phone, which lacks the capability to capture and view 3D video/photo content. As such, the 3D communication device enables 3D chat or communication between a local user and one or more remote users of the 3D communication device or any other computing device that is configured with suitable communication or chat software.
Abstract:
A method for compensating for a wavelength shift in a wavelength selective switch (WSS), and a device therefor. The device comprises a fixed seat (301) as well as a rotation beam (304) and a compensation block (302) that have different thermal expansion amounts, the rotation beam (304) and the compensation block (302) being fixedly adhered to the fixed seat (301). In the method, a combined structure of the rotation beam (304) and the compensation block (302) with different thermal expansion amounts is adopted; the combined structure rotates by means of different expansion amounts generated by the rotation beam (304) and the compensation block (302) at the same external temperature, and further drives an optical element of the WSS to rotate, hence compensating for a wavelength shift of the WSS. The method is safe and reliable; the device has a simple structure, and is convenient to encapsulate, is applicable to various WSS optical paths, and does not affect advantages of the optical path structure of the WSS.
Abstract:
This invention discloses the method of forming silicon nitride, silicon oxynitride, silicon oxide, carbon-doped silicon nitride, carbon-doped silicon oxide and carbon-doped oxynitride films at low deposition temperatures. The silicon containing precursors used for the deposition are monochlorosilane (MCS) and monochloroalkylsilanes. The method is preferably carried out by using plasma enhanced atomic layer deposition, plasma enhanced chemical vapor deposition, and plasma enhanced cyclic chemical vapor deposition.
Abstract:
This invention discloses the synthesis of metal chalcogenides using chemical vapor deposition (CVD) process, atomic layer deposition (ALD) process, or wet solution process. Ligand exchange reactions of organosilyltellurium or organosilylselenium with a series of metal compounds having neucleophilic substituents generate metal chalcogenides. This chemistry is used to deposit germanium-antimony-tellurium (GeSbTe) and germanium-antimony-selenium (GeSbSe) films or other tellurium and selenium based metal compounds for phase change memory and photovoltaic devices.
Abstract:
Antimicrobial silicone-based dressings, such as wound dressings, are disclosed. An example dressing comprises a transparent and self-adhesive gel sheet cured from a liquid containing silicone, the sheet having dispersed therein (i) particulates of a chlorhexidine compound that is not soluble in the liquid; and (ii) at least one other antimicrobial. Methods of making the silicone-based dressings and methods of use are also disclosed.