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41.发明授权Process for fabricating layered superlattice materials and making electronic devices including same 失效用于制造分层超晶格材料并制造包括其的电子器件的方法
公开(公告)号：US06072207A
公开(公告)日：2000-06-06
申请号：US405953
申请日：1995-03-17
申请人： Hiroyuki Yoshimori , Carlos A. Paz De Araujo , Takeshi Ito , Michael C. Scott , Larry D. McMillan
发明人： Hiroyuki Yoshimori , Carlos A. Paz De Araujo , Takeshi Ito , Michael C. Scott , Larry D. McMillan
IPC分类号： H01L21/8247 , B05D1/00 , B05D3/04 , B05D7/24 , C23C16/44 , C23C16/448 , C23C16/455 , C23C16/46 , C23C16/48 , C23C16/52 , C23C18/12 , C23C26/02 , C30B7/00 , H01C7/10 , H01L21/02 , H01L21/314 , H01L21/316 , H01L21/8242 , H01L27/108 , H01L27/115 , H01L29/788 , H01L29/792 , H01L41/24 , H05K3/10 , H01L29/12
CPC分类号： C23C18/1216 , B05D1/00 , B05D1/60 , B05D3/0493 , C23C16/4412 , C23C16/4486 , C23C16/45561 , C23C16/4558 , C23C16/46 , C23C16/482 , C23C16/52 , C23C18/1279 , C23C18/1283 , C23C18/1295 , C23C26/02 , C30B29/68 , C30B7/00 , C30B7/005 , H01C7/1013 , H01L21/314 , H01L21/31691 , H01L27/10805 , H01L27/11502 , H01L28/56 , H01L28/60 , H01L41/318 , H01L28/55 , H01L41/257 , H05K3/105
摘要： A liquid precursor containing a metal is applied to a substrate, RTP baked, and annealed to form a layered superlattice material. Special polyoxyalkylated precursor solutions are designed to optimize polarizability of the corresponding metal oxide materials by adding dopants including stoichiometric excess amounts of bismuth and tantalum. The RTP baking process is especially beneficial in optimizing the polarizability of the resultant metal oxide.
摘要翻译： 将含有金属的液体前体施加到基材上，进行RTP烘焙并退火以形成层状超晶格材料。 设计特殊的聚氧化烷基化前体溶液通过添加包括化学计量过量的铋和钽的掺杂剂来优化相应的金属氧化物材料的极化率。 RTP烘焙过程对于优化所得金属氧化物的极化率是特别有利的。
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42.发明授权Composition and process using ester solvents for fabricating metal oxide films and electronic devices including the same 失效使用用于制造金属氧化物膜的酯溶剂和包括其的电子器件的组合物和方法
公开(公告)号：US5788757A
公开(公告)日：1998-08-04
申请号：US770991
申请日：1996-12-23
申请人： Hiroto Uchida , Nobuyuki Soyama , Kensuke Kageyama , Katsumi Ogi , Jeffrey W. Bacon , Michael C. Scott , Larry D. McMillan , Carlos A. Paz de Araujo
发明人： Hiroto Uchida , Nobuyuki Soyama , Kensuke Kageyama , Katsumi Ogi , Jeffrey W. Bacon , Michael C. Scott , Larry D. McMillan , Carlos A. Paz de Araujo
IPC分类号： C01B13/32 , C01G33/00 , C01G35/00 , C23C18/12 , H01L21/8242 , H01L27/10 , H01L27/108 , C07F19/00 , C07F3/00 , C07F9/00 , C07F9/94
CPC分类号： C23C18/1216 , C23C18/1279
摘要： A metal organic liquid precursor solution includes metal organic complexes dispersed in an ester solvent. The ester solvent has medium length carbon chains to prevent the precipitation of strongly electropositive metals in solution. A liquid precursor solution is used to make thin film metal oxides of uniform thickness and consistent quality.
摘要翻译： 金属有机液体前体溶液包括分散在酯溶剂中的金属有机配合物。 酯溶剂具有中等长度的碳链以防止溶液中强正电性金属的沉淀。 使用液体前体溶液制备厚度均匀且品质一致的薄膜金属氧化物。
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公开(公告)号：US5699035A
公开(公告)日：1997-12-16
申请号：US408723
申请日：1995-03-22
IPC分类号： C23C18/12 , C30B7/00 , H01C7/10 , H01C7/112 , H01C17/075 , H01L21/02 , H01L21/314 , H01L21/316 , H01L27/108
CPC分类号： C23C18/1216 , C23C16/45561 , C23C18/1225 , C23C18/1295 , C30B29/68 , C30B7/00 , C30B7/005 , H01C17/075 , H01C7/1013 , H01C7/112 , H01L21/31691 , H01L27/10805 , H01L28/55
摘要： A thin-film zinc oxide varistor (10) for use in integrated circuits and the like is produced by applying a polyoxyalkylated metal complex, such as a metal alkoxycarboxylate, to a substrate (12, 14, and 16) for the formation of a dried nonohmic layer (18). The method of production includes the steps of providing a substrate and a precursor solution including a polyoxyalkylated zinc complex (P22, P24), coating a portion of the substrate with the precursor solution (P26), drying the coated substrate (P32), and crystallizing the dried thin-film zinc oxide layer (P30). The resultant crystalline zinc oxide varistor layer (18) may be doped with bismuth, yttrium, praseodymium, cobalt, antimony, manganese, silicon, chromium, titanium, potassium, dysprosium, cesium, cerium, and iron to provide a non-ohmic varistor. The varistor layer (10) is annealed at a temperature ranging from about 400 to about 1000.degree. C. to provide a layer having a thickness ranging from about 50 nanometers to about 500 nanometers and an average grain size diameter less than about 200 nanometers.
摘要翻译： 用于集成电路等的薄膜氧化锌变阻器（10）通过将诸如金属烷氧基羧酸盐的聚氧化烷基化金属络合物施加到基底（12,14和16）上来制备，以形成干燥 非欧姆层（18）。 制造方法包括以下步骤：提供包含聚氧化烷基化锌络合物（P22，P24）的基材和前体溶液，用前体溶液（P26）涂布基材的一部分，干燥涂布的基材（P32），使结晶 干燥的薄膜氧化锌层（P30）。 所得结晶氧化锌变阻器层（18）可掺杂铋，钇，镨，钴，锑，锰，硅，铬，钛，钾，镝，铯，铈和铁，以提供非欧姆变阻器。 压敏电阻层（10）在约400至约1000℃的温度下退火，以提供厚度范围为约50纳米至约500纳米，平均粒径直径小于约200纳米的层。
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44.发明授权Chemical vapor deposition process for fabricating layered superlattice materials 失效用于制造层状超晶格材料的化学气相沉积工艺
公开(公告)号：US5648114A
公开(公告)日：1997-07-15
申请号：US90767
申请日：1993-07-12
IPC分类号： C30B29/10 , C23C16/02 , C23C16/40 , C23C16/56 , C23C18/12 , C30B7/00 , C30B25/02 , C30B29/68 , C30B31/22 , C30B33/02 , H01C7/10 , H01L21/02 , H01L21/314 , H01L21/316 , H01L21/822 , H01L21/8242 , H01L21/8247 , H01L27/04 , H01L27/108 , H01L27/115 , H01L29/788 , H01L29/792 , B05D5/12 , C23C16/00 , C30B28/14
CPC分类号： C23C16/45561 , C23C16/0218 , C23C16/40 , C23C16/56 , C30B25/02 , C30B29/68 , C30B7/00 , C30B7/005 , H01C7/1013 , H01L21/02197 , H01L21/02271 , H01L21/02337 , H01L21/02356 , H01L21/31691 , H01L27/10805 , H01L27/11502 , H01L28/56 , H01L28/60 , H01L28/55
摘要： A substrate is prebaked in an oxygen furnace. A thin film of layered superlattice oxide is formed on the substrate by a chemical vapor deposition process. The film is RTP baked to provide grains with a mixed phase of A-axis and C-axis orientation. The film may be treated by ion implantation prior to the RTP bake and oxygen furnace annealed after the RTP bake. An electrode is deposited on the layered superlattice thin film and then the film and electrode are oxygen furnace annealed.
摘要翻译： 将基材在氧气炉中预烘烤。 通过化学气相沉积工艺在衬底上形成层状超晶格氧化物薄膜。 该膜经RTP烘焙以提供具有A轴和C轴取向的混合相的晶粒。 在RTP烘烤之前可以通过离子注入处理该膜，并且在RTP烘烤之后退火氧炉。 将电极沉积在层状超晶格薄膜上，然后将膜和电极进行氧炉退火。
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公开(公告)号：US5559260A
公开(公告)日：1996-09-24
申请号：US477068
申请日：1995-06-07
IPC分类号： C23C16/44 , C23C16/448 , C23C16/455 , C23C16/46 , C23C16/48 , C23C16/52 , C23C18/12 , C23C18/14 , C30B7/00 , H01C7/10 , H01L21/02 , H01L21/314 , H01L21/316 , H01L27/108 , H01L27/115 , C07F5/00 , C07F7/22
CPC分类号： C04B35/4682 , C04B35/6264 , C23C16/4412 , C23C16/448 , C23C16/4486 , C23C16/45561 , C23C16/4558 , C23C16/46 , C23C16/482 , C23C16/52 , C23C18/1216 , C23C18/1275 , C23C18/14 , C30B29/68 , C30B7/00 , H01C7/1013 , H01L21/314 , H01L21/31691 , H01L27/10805 , H01L27/11502 , H01L28/56 , H01L28/60 , C04B2235/3213 , C04B2235/3224 , C04B2235/3227 , C04B2235/3229 , C04B2235/3243 , C04B2235/3268 , C04B2235/441 , C04B2235/449 , C04B2235/72 , H01L28/55
摘要： A precursor is made by mixing a metal alkoxycarboxylate-containing liquid with a 2-ethylhexanoic acid in an effective amount for shelf-stabilizing said liquid by substituting 2-ethylhexanoate ligands for alkoxide ligands, thereby forming a mixture, and heating said mixture to substitute said carboxylate ligands for said alkoxide ligands. Specficially, a barium strontium titanate precursor and a strontium bismuth tantalate precursor are made by combining polyoxyalkylated metal moieties to form a liquid solution in which the metal atoms bond with an oxygen atom in a ligand selected from a ligand group consisting of alkoxides and carboxylates, then then heating the liquid solution.
摘要翻译： 通过将2-乙基己酸配体取代醇盐配体，通过将有效量的含有金属烷氧基羧酸盐的液体与2-乙基己酸混合，使所述液体稳定化，从而形成混合物，并加热所述混合物以代替所述 所述醇盐配体的羧酸盐配体。 具体地说，通过将聚氧烷基化金属部分组合形成液态溶液，其中金属原子与选自由醇盐和羧酸盐构成的配体组成的配位体中的氧原子键合的液体溶液制成钛酸锶钡前体和钽酸锶钡前体，然后 然后加热液体溶液。
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公开(公告)号：US08600290B2
公开(公告)日：2013-12-03
申请号：US11758455
申请日：2007-06-05
CPC分类号： H04B1/04 , F41H13/0075 , H04B15/00
摘要： A technique for disrupting the operation of a target containing nonlinear electronic devices generally includes generating a high frequency signal; generating a low frequency signal; modulating the high frequency signal with the low frequency signal; and emitting the modulated high frequency signal at the target.
摘要翻译： 一种用于中断包含非线性电子设备的目标的操作的技术通常包括产生高频信号; 产生低频信号; 用低频信号调制高频信号; 并且在目标处发射调制的高频信号。
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公开(公告)号：USH481H
公开(公告)日：1988-06-07
申请号：US793811
申请日：1985-11-01
IPC分类号： G01S7/40
CPC分类号： G01S7/4052 , G01S2007/4082
摘要： The microprocessor-controlled RF modulator apparatus will provide repeatable, controlled scintillation on a test bench generated low-power RF target waveforms for the purpose of providing a target returns with realistic radar cross section characteristics during testing of the F-16 (or any other) fire control radar. The microprocessor-controlled RF modulator apparatus is utilized in line between an RF target signal generator and the target horn to provide a variety of target situations for testing radar hardware and software.
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公开(公告)号：US08564385B2
公开(公告)日：2013-10-22
申请号：US12192290
申请日：2008-08-15
CPC分类号： H01P3/06
摘要： A radio frequency source includes a coaxial non-linear transmission line. The coaxial non-linear transmission line may include a closed, non-magnetic, cylindrical outer conductor defining a cavity therein; and a plurality of stages enclosed by the outer conductor. Each stage may then includes an axial field solenoid wound about the outer conductor; a non-magnetic, cylindrical inner conductor disposed within the cavity and coaxially aligned with the outer conductor; a plurality of cylindrical ferrite switch elements, each defining a respective bore through which the inner conductor runs; and a plurality of inner and outer cups coaxially aligned with the inner and outer conductors, each defining a respective bore through which the inner conductor runs.
摘要翻译： 射频源包括同轴非线性传输线。 同轴非线性传输线可以包括在其中限定空腔的封闭的，非磁性的圆柱形外部导体; 以及由外导体包围的多个台阶。 然后每个阶段可以包括围绕外部导体缠绕的轴向磁场电磁阀; 一个非磁性的，圆柱形的内部导体，设置在腔体内并与外部导体同轴对准; 多个圆柱形铁氧体开关元件，每个圆柱形铁氧体开关元件限定内部导体穿过的相应的孔; 以及与内导体和外导体同轴对准的多个内杯和外杯，每个限定了内导体穿过的孔。
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公开(公告)号：US20090051468A1
公开(公告)日：2009-02-26
申请号：US12192290
申请日：2008-08-15
IPC分类号： H01P3/00
CPC分类号： H01P3/06
摘要： A radio frequency source includes a coaxial non-linear transmission line. The coaxial non-linear transmission line may include a closed, non-magnetic, cylindrical outer conductor defining a cavity therein; and a plurality of stages enclosed by the outer conductor. Each stage may then includes an axial field solenoid wound about the outer conductor; a non-magnetic, cylindrical inner conductor disposed within the cavity and coaxially aligned with the outer conductor; a plurality of cylindrical ferrite switch elements, each defining a respective bore through which the inner conductor runs; and a plurality of inner and outer cups coaxially aligned with the inner and outer conductors, each defining a respective bore through which the inner conductor runs.
摘要翻译： 射频源包括同轴非线性传输线。 同轴非线性传输线可以包括在其中限定空腔的封闭的，非磁性的圆柱形外部导体; 以及由外导体包围的多个台阶。 然后每个阶段可以包括围绕外部导体缠绕的轴向磁场电磁阀; 一个非磁性的，圆柱形的内部导体，设置在腔体内并与外部导体同轴对准; 多个圆柱形铁氧体开关元件，每个圆柱形铁氧体开关元件限定内部导体穿过的相应的孔; 以及与内导体和外导体同轴对准的多个内杯和外杯，每个限定了内导体穿过的孔。
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公开(公告)号：US07724098B2
公开(公告)日：2010-05-25
申请号：US12192311
申请日：2008-08-15
CPC分类号： H03B5/40
摘要： The present invention is, in one aspect, a radio frequency source, comprising a gyromagnetic precession oscillator. In a second aspect, the gyromagnetic precession oscillator comprises a closed, non-magnetic, cylindrical outer conductor defining a cavity therein; an axial field solenoid wound about the outer conductor; a non-magnetic, cylindrical inner conductor disposed within the cavity and coaxially aligned with the outer conductor; a plurality of cylindrical ferrite precessors, each defining a respective bore through which the inner conductor runs; a plurality of dividers disposed within and defining a resonant chamber in the cavity; and a dielectric material filling the cavity. In a third aspect, the radio frequency source is actively tunable. In a fourth aspect, the radio frequency source that is tunable pulse-to-pulse.
摘要翻译： 本发明在一个方面是一种射频源，包括一个回旋振动进动振荡器。 在第二方面，回旋振动进动振荡器包括在其中限定空腔的封闭的非磁性的圆柱形外部导体; 围绕外部导体缠绕的轴向磁场电磁阀; 一个非磁性的，圆柱形的内部导体，设置在腔体内并与外部导体同轴对准; 多个圆柱形铁氧体进给器，每个圆柱形铁氧体进给器限定内部导体穿过的孔; 设置在所述空腔内并在所述空腔中限定谐振室的多个分隔件; 以及填充空腔的电介质材料。 在第三方面，射频源是可主动调谐的。 在第四方面中，可调脉冲脉冲的射频源。
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