Nonvolatile memory device using two-dimensional material and method of manufacturing the same
    47.
    发明授权
    Nonvolatile memory device using two-dimensional material and method of manufacturing the same 有权
    使用二维材料的非易失性存储器件及其制造方法

    公开(公告)号:US09583639B2

    公开(公告)日:2017-02-28

    申请号:US15015307

    申请日:2016-02-04

    Abstract: Example embodiments relate to nonvolatile memory devices using a 2D material, and methods of manufacturing the nonvolatile memory device. The nonvolatile memory device includes a channel layer formed on a substrate, a gate stack that includes a gate electrode, source and drain electrodes. The channel layer has a threshold voltage greater than that of a graphene layer, and the gate stack includes a 2D material floating gate that is not in contact with the channel layer. The channel layer includes first and second material layers and a first barrier layer disposed between the first and second material layers, and the first and second material layers may contact the first barrier layer.

    Abstract translation: 示例性实施例涉及使用2D材料的非易失性存储器件以及制造非易失性存储器件的方法。 非易失性存储器件包括形成在衬底上的沟道层,栅堆叠,其包括栅电极,源电极和漏电极。 沟道层具有大于石墨烯层的阈值电压的阈值电压,并且栅极堆叠包括不与沟道层接触的2D材料浮动栅极。 沟道层包括第一和第二材料层和设置在第一和第二材料层之间的第一阻挡层,并且第一和第二材料层可以接触第一阻挡层。

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