公开(公告)号：US06452276B1

公开(公告)日：2002-09-17

申请号：US09070394

申请日：1998-04-30

申请人： Stephan A. Cohen ,  Fenton R. McFeely ,  Cevdet I. Noyan ,  Kenneth P. Rodbell ,  John J. Yurkas ,  Robert Rosenberg

发明人： Stephan A. Cohen ,  Fenton R. McFeely ,  Cevdet I. Noyan ,  Kenneth P. Rodbell ,  John J. Yurkas ,  Robert Rosenberg

IPC分类号： H01L2348

CPC分类号： H01L21/7687 ,  H01L21/76843 ,  H01L23/53223 ,  H01L23/53238 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention is directed to an alpha-W layer which is employed in interconnect structures such as trench capacitors or damascene wiring levels as a diffusion barrier layer. The alpha-W layer is a single phased material that is formed by a low temperature/pressure chemical vapor deposition process using tungsten hexacarbonyl, W(CO)6, as the source material.

公开(公告)号：US20130062769A1

公开(公告)日：2013-03-14

申请号：US13232085

申请日：2011-09-14

申请人： Cyril Cabral, JR. ,  Takeshi Nogami ,  Jeffrey P. Gambino ,  Qiang Huang ,  Kenneth P. Rodbell

发明人： Cyril Cabral, JR. ,  Takeshi Nogami ,  Jeffrey P. Gambino ,  Qiang Huang ,  Kenneth P. Rodbell

IPC分类号： H01L23/535 ,  H01L21/768

CPC分类号： H01L21/7684 ,  H01L21/2885 ,  H01L21/76841 ,  H01L21/76873 ,  H01L21/76877 ,  H01L21/76883 ,  H01L23/53233 ,  H01L23/53238 ,  H01L23/535 ,  H01L2924/0002 ,  H01L2924/00

摘要： A metal interconnect structure and a method of manufacturing the metal interconnect structure. Manganese (Mn) is incorporated into a copper (Cu) interconnect structure in order to modify the microstructure to achieve bamboo-style grain boundaries in sub-90 nm technologies. Preferably, bamboo grains are separated at distances less than the “Blech” length so that copper (Cu) diffusion through grain boundaries is avoided. The added Mn also triggers the growth of Cu grains down to the bottom surface of the metal line so that a true bamboo microstructure reaching to the bottom surface is formed and the Cu diffusion mechanism along grain boundaries oriented along the length of the metal line is eliminated.

摘要翻译： 金属互连结构和金属互连结构的制造方法。 锰（Mn）被掺入到铜（Cu）互连结构中，以便在90nm以下的技术中改变微观结构以实现竹型晶界。 优选地，竹颗粒在小于Blech长度的距离处分离，使得避免通过晶界的铜（Cu）扩散。 添加的Mn还触发Cu颗粒向金属线底部的生长，从而形成达到底面的真正的竹结构，消除沿着金属线长度取向的晶界的Cu扩散机理 。

公开(公告)号：US20130001784A1

公开(公告)日：2013-01-03

申请号：US13611363

申请日：2012-09-12

申请人： Cyril Cabral, JR. ,  John M. Cotte ,  Kathryn C. Fisher ,  Laura L. Kosbar ,  Christian Lavoie ,  Zhu Liu ,  Kenneth P. Rodbell ,  Xiaoyan Shao

发明人： Cyril Cabral, JR. ,  John M. Cotte ,  Kathryn C. Fisher ,  Laura L. Kosbar ,  Christian Lavoie ,  Zhu Liu ,  Kenneth P. Rodbell ,  Xiaoyan Shao

IPC分类号： H01L23/48

CPC分类号： H01L21/28518 ,  H01L21/76841 ,  H01L23/53238 ,  H01L31/022408 ,  H01L31/022425 ,  H01L2924/0002 ,  Y02E10/50 ,  H01L2924/00

摘要： A semiconductor device or a photovoltaic cell having a contact structure, which includes a silicon (Si) substrate; a metal alloy layer deposited on the silicon substrate; a metal silicide layer and a diffusion layer formed simultaneously from thermal annealing the metal alloy layer; and a metal layer deposited on the metal silicide and barrier layers.

摘要翻译： 具有接触结构的半导体器件或光电池，其包括硅（Si）衬底; 沉积在硅衬底上的金属合金层; 金属硅化物层和由金属合金层热退火同时形成的扩散层; 以及沉积在金属硅化物和阻挡层上的金属层。

公开(公告)号：US08247271B2

公开(公告)日：2012-08-21

申请号：US12200352

申请日：2008-08-28

申请人： Paul Stephen Andry ,  Cyril Cabral, Jr. ,  Kenneth P. Rodbell ,  Robert L. Wisnieff

发明人： Paul Stephen Andry ,  Cyril Cabral, Jr. ,  Kenneth P. Rodbell ,  Robert L. Wisnieff

IPC分类号： H01L21/30

CPC分类号： H01L23/556 ,  H01L21/304 ,  H01L21/481 ,  H01L24/11 ,  H01L24/29 ,  H01L24/81 ,  H01L24/83 ,  H01L2224/16 ,  H01L2224/16113 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/29111 ,  H01L2224/73204 ,  H01L2224/81801 ,  H01L2224/83801 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01072 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/0132 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/15787 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/2064 ,  H01L2924/3025 ,  H01L2224/13111 ,  H01L2924/00014

摘要： A structure fabrication method. First, an integrated circuit including N chip electric pads is provided electrically connected to a plurality of devices on the integrated circuit. Then, an interposing shield having a top side and a bottom side and having N electric conductors in the interposing shield is provided being exposed to a surrounding ambient at the top side but not at the bottom side. Next, the integrated circuit is bonded to the top side of the interposing shield such that the N chip electric pads are in electrical contact with the N electric conductors. Next, the bottom side of the interposing shield is polished so as to expose the N electric conductors to the surrounding ambient at the bottom side of the interposing shield. Then, N solder bumps are formed on the polished bottom side of the interposing shield and in electrical contact with the N electric conductors.

摘要翻译： 一种结构制造方法。 首先，将包括N个芯片电焊盘的集成电路电连接到集成电路上的多个器件。 然后，设置具有顶侧和底侧并且在中间屏蔽中具有N个电导体的插入式屏蔽件，其暴露于顶侧周围的环境而不是在底侧。 接下来，集成电路接合到中间屏蔽的顶侧，使得N个芯片电极焊盘与N个导电体电接触。 接下来，对中介屏蔽的底面进行抛光，以将N根电导体暴露于插入式屏蔽的底侧周围环境。 然后，在中间屏蔽的抛光底面上形成N个焊料凸块，并与N个导电体电接触。

公开(公告)号：US08212218B2

公开(公告)日：2012-07-03

申请号：US12627076

申请日：2009-11-30

申请人： Cyril Cabral, Jr. ,  Michael S. Gordon ,  Steven J. Koester ,  Conal E. Murray ,  Kenneth P. Rodbell ,  Stephen M. Rossnagel ,  Robert L. Wisnieff ,  Jeng-bang Yau

发明人： Cyril Cabral, Jr. ,  Michael S. Gordon ,  Steven J. Koester ,  Conal E. Murray ,  Kenneth P. Rodbell ,  Stephen M. Rossnagel ,  Robert L. Wisnieff ,  Jeng-bang Yau

IPC分类号： G01T1/02

CPC分类号： G01T1/026

摘要： A system for determining an amount of radiation includes a dosimeter configured to receive the amount of radiation, the dosimeter comprising a circuit having a resonant frequency, such that the resonant frequency of the circuit changes according to the amount of radiation received by the dosimeter, the dosimeter further configured to absorb RF energy at the resonant frequency of the circuit; a radio frequency (RF) transmitter configured to transmit the RF energy at the resonant frequency to the dosimeter; and a receiver configured to determine the resonant frequency of the dosimeter based on the absorbed RF energy, wherein the amount of radiation is determined based on the resonant frequency.

摘要翻译： 用于确定辐射量的系统包括配置成接收辐射量的剂量计，该剂量计包括具有谐振频率的电路，使得电路的谐振频率根据剂量计接收的辐射量而改变， 剂量计还被配置为吸收电路的谐振频率处的RF能量; 射频（RF）发射器，被配置为以共振频率将所述RF能量传输到所述剂量计; 以及接收器，被配置为基于所吸收的RF能量来确定所述剂量计的谐振频率，其中所述辐射量基于所述谐振频率来确定。

公开(公告)号：US20110309508A1

公开(公告)日：2011-12-22

申请号：US12819634

申请日：2010-06-21

申请人： Cyril Cabral, JR. ,  John M. Cotte ,  Kathryn C. Fisher ,  Laura L. Kosbar ,  Christian Lavoie ,  Zhu Liu ,  Kenneth P. Rodbell ,  Xiaoyan Shao

发明人： Cyril Cabral, JR. ,  John M. Cotte ,  Kathryn C. Fisher ,  Laura L. Kosbar ,  Christian Lavoie ,  Zhu Liu ,  Kenneth P. Rodbell ,  Xiaoyan Shao

IPC分类号： H01L23/485 ,  H01L21/768

CPC分类号： H01L21/28518 ,  H01L21/76841 ,  H01L23/53238 ,  H01L31/022408 ,  H01L31/022425 ,  H01L2924/0002 ,  Y02E10/50 ,  H01L2924/00

摘要： A semiconductor device or a photovoltaic cell having a contact structure, which includes a silicon (Si) substrate; a metal alloy layer deposited on the silicon substrate; a metal silicide layer and a diffusion layer formed simultaneously from thermal annealing the metal alloy layer; and a metal layer deposited on the metal silicide and barrier layers.

摘要翻译： 具有接触结构的半导体器件或光电池，其包括硅（Si）衬底; 沉积在硅衬底上的金属合金层; 金属硅化物层和由金属合金层热退火同时形成的扩散层; 以及沉积在金属硅化物和阻挡层上的金属层。

公开(公告)号：US07749898B2

公开(公告)日：2010-07-06

申请号：US12145163

申请日：2008-06-24

申请人： Paul R. Besser ,  Christian Lavoie ,  Cyril Cabral, Jr. ,  Stephen M. Rossnagel ,  Kenneth P. Rodbell

发明人： Paul R. Besser ,  Christian Lavoie ,  Cyril Cabral, Jr. ,  Stephen M. Rossnagel ,  Kenneth P. Rodbell

IPC分类号： H01L21/477

CPC分类号： H01L21/76889 ,  H01L21/76846 ,  H01L21/76855 ,  H01L21/76879 ,  H01L21/76883 ,  H01L23/485 ,  H01L23/5226 ,  H01L23/53271 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method for forming an interconnect structure includes forming a dielectric layer above a first layer having a conductive region defined therein. An opening is defined in the dielectric layer to expose at least a portion of the conductive region. A metal silicide is formed in the opening to define the interconnect structure. A semiconductor device includes a first layer having a conductive region defined therein, a dielectric layer formed above the first layer, and a metal silicide interconnect structure extending through the dielectric layer to communicate with the conductive region.

摘要翻译： 形成互连结构的方法包括在其中限定有导电区域的第一层之上形成介电层。 在电介质层中限定开口以暴露导电区域的至少一部分。 在开口中形成金属硅化物以限定互连结构。 半导体器件包括其中限定有导电区域的第一层，形成在第一层之上的电介质层和延伸穿过介电层以与导电区域连通的金属硅化物互连结构。

公开(公告)号：US07719887B2

公开(公告)日：2010-05-18

申请号：US11845170

申请日：2007-08-27

申请人： Ethan H. Cannon ,  Michael S. Gordon ,  Christopher D. LeBlanc ,  Kenneth P. Rodbell

发明人： Ethan H. Cannon ,  Michael S. Gordon ,  Christopher D. LeBlanc ,  Kenneth P. Rodbell

IPC分类号： G11C11/00

CPC分类号： G11C11/4125 ,  G11C13/0004

摘要： A radiation tolerant circuit, structure of the circuit and method of autonomic radiation event device protection. The circuit includes a charge storage node connected to a resistor, the resistor comprising a material having an amorphous state and a crystalline state, the amorphous state having a higher resistance than the crystalline state, the material reversibly convertible between the amorphous state and the crystalline state by application of heat; an optional resistive heating element proximate to the resistor; and means for writing data to the charge storage node and means for reading data from the charge storage node.

摘要翻译： 辐射耐受电路，电路结构及自主辐射事件装置保护方法。 电路包括连接到电阻器的电荷存储节点，该电阻器包括具有非晶状态和结晶状态的材料，非晶状态具有比结晶状态更高的电阻，该材料可在非晶状态和结晶态之间可逆地转换 通过应用热量; 靠近电阻器的可选电阻加热元件; 以及用于向电荷存储节点写入数据的装置和用于从电荷存储节点读取数据的装置。

公开(公告)号：US20090315182A1

公开(公告)日：2009-12-24

申请号：US12145163

申请日：2008-06-24

申请人： Paul R. Besser ,  Christian Lavoie ,  Cyril Cabral, JR. ,  Stephen M. Rossnagel ,  Kenneth P. Rodbell

发明人： Paul R. Besser ,  Christian Lavoie ,  Cyril Cabral, JR. ,  Stephen M. Rossnagel ,  Kenneth P. Rodbell

IPC分类号： H01L23/48 ,  H01L21/44

CPC分类号： H01L21/76889 ,  H01L21/76846 ,  H01L21/76855 ,  H01L21/76879 ,  H01L21/76883 ,  H01L23/485 ,  H01L23/5226 ,  H01L23/53271 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method for forming an interconnect structure includes forming a dielectric layer above a first layer having a conductive region defined therein. An opening is defined in the dielectric layer to expose at least a portion of the conductive region. A metal silicide is formed in the opening to define the interconnect structure. A semiconductor device includes a first layer having a conductive region defined therein, a dielectric layer formed above the first layer, and a metal silicide interconnect structure extending through the dielectric layer to communicate with the conductive region.

摘要翻译： 形成互连结构的方法包括在其中限定有导电区域的第一层之上形成介电层。 在电介质层中限定开口以暴露导电区域的至少一部分。 在开口中形成金属硅化物以限定互连结构。 半导体器件包括其中限定有导电区域的第一层，形成在第一层之上的电介质层和延伸穿过介电层以与导电区域连通的金属硅化物互连结构。

公开(公告)号：US07601627B2

公开(公告)日：2009-10-13

申请号：US12051040

申请日：2008-03-19

申请人： Cyril Cabral, Jr. ,  Michael S. Gordon ,  Kenneth P. Rodbell

发明人： Cyril Cabral, Jr. ,  Michael S. Gordon ,  Kenneth P. Rodbell

IPC分类号： H01L21/44

CPC分类号： H01L23/556 ,  H01L21/76801 ,  H01L21/76834 ,  H01L21/76838 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/585 ,  H01L24/03 ,  H01L24/05 ,  H01L24/12 ,  H01L24/16 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05006 ,  H01L2224/05554 ,  H01L2224/05572 ,  H01L2224/05599 ,  H01L2224/13007 ,  H01L2224/13022 ,  H01L2224/131 ,  H01L2224/13111 ,  H01L2224/16 ,  H01L2224/451 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2224/85399 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01044 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01055 ,  H01L2924/01057 ,  H01L2924/01063 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/01092 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/10253 ,  H01L2924/1305 ,  H01L2924/1306 ,  H01L2924/14 ,  H01L2924/15174 ,  H01L2924/15312 ,  H01L2924/15787 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/30107 ,  H01L2924/3025 ,  H01L2224/45099 ,  H01L2924/00 ,  H01L2224/05552

摘要： A method for reduction of soft error rates in integrated circuits. The method including: providing a test device, the test device comprising: a semiconductor substrate; and a stack of one or more wiring levels stacked from a lowermost wiring level to an uppermost wiring level, the lowermost wiring level on a top surface of the substrate; selecting an energy of alpha particles of a given energy to be stopped from penetrating through the stack of one or more wiring levels; bombarding the semiconductor substrate with a flux of the alpha particles of the selected energy; and determining a combination of a thickness of a blocking layer and a volume percent of metal wires in the blocking layer sufficient to stop a predetermined percentage of alpha particles of the maximum energy striking a top surface of the blocking layer from penetrating through the stack of one or more wiring levels.

摘要翻译： 降低集成电路中软错误率的方法。 所述方法包括：提供测试装置，所述测试装置包括：半导体衬底; 以及从最下层布线层到最上布线层叠的一层或多层布线层的堆叠，在基板的上表面上的最下布线层; 选择要停止的给定能量的α粒子的能量穿透一个或多个布线层的堆叠; 用所选能量的α粒子的通量轰击半导体衬底; 并且确定阻挡层的厚度和阻挡层中的金属线的体积百分比的组合足以阻止撞击阻挡层的顶表面的最大能量的预定百分比的α粒子穿过一个 或更多的布线级别。