3D semiconductor device and structure

    公开(公告)号:US10515935B2

    公开(公告)日:2019-12-24

    申请号:US16409840

    申请日:2019-05-12

    Abstract: A 3D semiconductor device, the device including: a first single crystal layer; at least one first metal layer above the first single crystal layer; a second metal layer above the first metal layer; a plurality of first transistors atop the second metal layer; a plurality of second transistors atop the second transistors; a plurality of third transistors atop the second transistors; a third metal layer above the plurality of third transistors: a fourth metal layer above the third metal layer; and a second single crystal layer above the fourth metal layer; and a plurality of connecting metal paths from the fourth metal layer to the second metal layer, where at least one of the plurality of third transistors is aligned to at least one of the plurality of first transistors with less than 40 nm alignment error, where the fourth metal layer is providing global power distribution to the device.

    SEMICONDUCTOR DEVICE AND STRUCTURE
    682.
    发明申请

    公开(公告)号:US20190312014A1

    公开(公告)日:2019-10-10

    申请号:US16450728

    申请日:2019-06-24

    Inventor: Zvi Or-Bach

    Abstract: A 3D semiconductor device and structure, including: a first die including first transistors and first interconnect, overlaid by a second die including second transistors and second interconnect, where the first die has a first die area and the second die has a second die area, where the first die area is at least 10% larger than the second die area, where the second die is aligned to the first die with less than 400 nm alignment error, and where the second die has a thickness of less than four microns.

    3D semiconductor device and structure

    公开(公告)号:US10366970B2

    公开(公告)日:2019-07-30

    申请号:US16024911

    申请日:2018-07-02

    Abstract: A 3D semiconductor device, the device comprising: a first single crystal layer comprising a plurality of first transistors; at least one metal layer interconnecting said first transistors, a portion of said first transistors forming a plurality of logic gates; a plurality of second transistors overlaying said first single crystal layer; a plurality of third transistors overlaying said plurality of second transistors; a top metal layer overlying said third transistors; first circuits underlying said first single crystal layer; second circuits overlying said top metal layer; a first set of connections underlying said at least one metal layer, wherein said first set of connections connects said first transistors to said first circuits; a second set of connections overlying said top metal layer, wherein said second set of connections connects said first transistors to said second circuits, and wherein said first set of connections comprises a through silicon via (TSV).

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