公开(公告)号：US12062735B2

公开(公告)日：2024-08-13

申请号：US17691091

申请日：2022-03-09

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Daihua Zhang ,  Nag B. Patibandla

IPC: H01L33/00 ,  B08B3/08 ,  B41M3/00 ,  B41M5/00 ,  B41M7/00 ,  H01L21/66 ,  H01L21/67 ,  H01L21/677 ,  H01L25/075 ,  H01L25/16

CPC classification number: H01L33/0095 ,  B08B3/08 ,  B41M3/003 ,  B41M3/006 ,  B41M5/0047 ,  B41M7/00 ,  H01L21/67034 ,  H01L21/67051 ,  H01L21/6715 ,  H01L21/67236 ,  H01L21/67288 ,  H01L21/67715 ,  H01L22/20 ,  H01L25/0753 ,  H01L21/67167 ,  H01L21/67173 ,  H01L25/167 ,  H01L2933/0041

Abstract: An LED display fabrication tool includes a plurality of process chambers and a plurality of transfer chambers. The plurality of process chambers include first and second dispensing chambers to deliver first and second color conversion precursors onto a workpiece for fabrication of a light emitting diode (LED) displays, and first and second washing/drying chambers to remove uncured portions of the first and second color conversion precursors from the workpiece and then dries the workpiece. The plurality of transfer chambers are coupled to two process chambers by two respective sealable ports. First and second curing stations cure the precursors to form the first and second color conversion layers over a first set of LEDs on the workpiece.

公开(公告)号：US11965103B2

公开(公告)日：2024-04-23

申请号：US16996744

申请日：2020-08-18

Applicant: Applied Materials, Inc.

Inventor： Yingdong Luo ,  Sivapackia Ganapathiappan ,  Ashwin Murugappan Chockalingam ,  Daihua Zhang ,  Uma Sridhar ,  Daniel Redfield ,  Rajeev Bajaj ,  Nag B. Patibandla ,  Hou T. Ng ,  Sudhakar Madhusoodhanan

IPC: C09D11/107 ,  B24B37/24 ,  B29C64/112 ,  B29K33/00 ,  B29K509/02 ,  B29L31/00 ,  B33Y10/00 ,  B33Y40/10 ,  B33Y70/10 ,  B33Y80/00 ,  C09K3/14

CPC classification number: C09D11/107 ,  B24B37/245 ,  B29C64/112 ,  B33Y10/00 ,  B33Y40/10 ,  B33Y70/10 ,  B33Y80/00 ,  C09K3/1409 ,  B29K2033/08 ,  B29K2509/02 ,  B29L2031/736

Abstract: A formulation, system, and method for additive manufacturing of a polishing pad. The formulation includes monomer, dispersant, and nanoparticles. A method of preparing the formulation includes adding a dispersant that is a polyester derivative to monomer, adding metal-oxide nanoparticles to the monomer, and subjecting the monomer having the nanoparticles and dispersant to sonication to disperse the nanoparticles in the monomer.

公开(公告)号：US11942456B2

公开(公告)日：2024-03-26

申请号：US17587524

申请日：2022-01-28

Applicant: Applied Materials, Inc.

Inventor： Daihua Zhang ,  Yingdong Luo ,  Mingwei Zhu ,  Hou T. Ng ,  Sivapackia Ganapathiappan ,  Nag B. Patibandla

IPC: H01L25/075 ,  H01L33/00 ,  H01L33/32 ,  H01L33/50

CPC classification number: H01L25/0753 ,  H01L33/0075 ,  H01L33/32 ,  H01L33/504 ,  H01L2933/0033 ,  H01L2933/0041 ,  H01L2933/0058

Abstract: A method of fabricating a multi-color display includes dispensing a photo-curable fluid over a display having an array of light emitting diodes (micro-LEDs) disposed below a cover layer. The cover has an outer surface with a plurality of recesses, and the photo-curable fluid fills the recesses. The photo-curable fluid includes a color conversion agent. A plurality of LEDs in the array are activated to illuminate and cure the photo-curable fluid to form a color conversion layer in the recesses over the activated LEDs. This layer will convert light from these LEDs to light of a first color. An uncured remainder of the photo-curable fluid is removed. Then the process is repeated with a different photo-curable fluid having a different color conversion agent and a different plurality of LEDs. This forms a second color conversion layer in different plurality of recesses to convert light from these LEDs to light of a second color.

公开(公告)号：US20240088116A1

公开(公告)日：2024-03-14

申请号：US18511865

申请日：2023-11-16

Applicant: Applied Materials, Inc.

Inventor： Lisong Xu ,  Byung Sung Kwak ,  Mingwei Zhu ,  Hou T. Ng ,  Nag B. Patibandla ,  Christopher Dennis Bencher

IPC: H01L25/16 ,  H01L25/075 ,  H01L33/00 ,  H01L33/48 ,  H01L33/58 ,  H01L33/60

CPC classification number: H01L25/167 ,  H01L25/0753 ,  H01L33/0095 ,  H01L33/483 ,  H01L33/58 ,  H01L33/60 ,  H01L33/44 ,  H01L2933/005 ,  H01L2933/0058

Abstract: A display screen includes a backplane, an array of light-emitting diodes electrically integrated with the backplane, the array of light-emitting diodes configured to emit UV light in a first wavelength range, and a plurality of isolation walls formed on the backplane between adjacent light-emitting diodes of the array of light-emitting diodes with the isolation walls spaced apart from the light-emitting diodes and extending above the light-emitting diodes. The plurality of isolation walls include a core of a first material and a coating covering at least a portion of the core extending above the light-emitting diodes. The coating is an opaque second material having transmittance less than 1% of light in the first wavelength range.

公开(公告)号：US20220406960A1

公开(公告)日：2022-12-22

申请号：US17350523

申请日：2021-06-17

Applicant: Applied Materials, Inc.

Inventor： Fabio Pieralisi ,  Mingwei Zhu ,  Zihao Yang ,  Liang Zhao ,  Jeffrey L. Franklin ,  Hou T. Ng ,  Nag Patibandla

IPC: H01L33/00 ,  H01L25/075 ,  H01L33/06 ,  H01L33/32 ,  H01L33/46 ,  H01L33/50 ,  H01L33/62

Abstract: Exemplary processing methods include forming a group of LED structures on a substrate layer to form a patterned LED substrate. A light absorption barrier may be deposited on the patterned LED substrate. The methods may further include exposing the patterned LED substrate to light. The light may be absorbed by surfaces of the LED structures that are in contact with the substrate layer, and the light absorption barrier. The methods may still further include separating the LED structures for the substrate layer. The bonding between the LED structures and the substrate layer may be weakened by the absorption of the light by the surfaces of the LED structures in contact with the substrate layer.

公开(公告)号：US11518097B2

公开(公告)日：2022-12-06

申请号：US16694243

申请日：2019-11-25

Applicant: Applied Materials, Inc.

Inventor： Raanan Zehavi ,  Hou T. Ng ,  Nag B. Patibandla ,  Ajey M. Joshi

IPC: B29C64/255 ,  B29C64/209 ,  B29C64/25 ,  B29C64/321 ,  B29C64/245 ,  B33Y40/00 ,  B33Y30/00

Abstract: A dispensing system for an additive manufacturing apparatus includes a frame, a powder reservoir, an agitator and an array of dispensing units positioned below the powder reservoir. The powder reservoir has a first width along a primary axis, and includes a lower portion and an upper portion that is wider than the lower portion along a second axis perpendicular to the primary axis. The agitator is positioned in the upper portion of the powder reservoir. Each dispensing unit includes a nozzle block that has a passage therethrough that defines a nozzle and provides a respective path for the powder to flow from the powder reservoir to the nozzle, and a valve positioned in the passage in the nozzle block to controllably release powder through the nozzle.

公开(公告)号：US20220310575A1

公开(公告)日：2022-09-29

申请号：US17701607

申请日：2022-03-22

Applicant: Applied Materials, Inc.

Inventor： Lisong Xu ,  Byung Sung Kwak ,  Mingwei Zhu ,  Hou T. Ng ,  Nag B. Patibandla ,  Christopher Dennis Bencher

IPC: H01L25/16 ,  H01L33/60

Abstract: A display screen includes a backplane, an array of light-emitting diodes electrically integrated with the backplane, the array of light-emitting diodes configured to emit UV light in a first wavelength range, and a plurality of isolation walls formed on the backplane between adjacent light-emitting diodes of the array of light-emitting diodes with the isolation walls spaced apart from the light-emitting diodes and extending above the light-emitting diodes. The plurality of isolation walls include a core of a first material and a coating covering at least a portion of the core extending above the light-emitting diodes. The coating is an opaque second material having transmittance less than 1% of light in the first wavelength range.

公开(公告)号：US20220293441A1

公开(公告)日：2022-09-15

申请号：US17691089

申请日：2022-03-09

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Daihua Zhang ,  Nag B. Patibandla

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/66 ,  B41M3/00 ,  B41M7/00 ,  B08B3/08

Abstract: A LED display fabrication tool includes a plurality of chambers including an initial chamber, a final chamber, and a plurality of intermediate chambers, and the plurality of chambers are arranged to form a transfer line from the initial chamber to the final chamber with each intermediate chamber coupled by a first sealable port to a prior chamber in the transfer line and by a second sealable port to a subsequent chamber in the transfer line. The plurality of chambers include first and second dispensing chambers to deliver first and second color conversion precursors onto a workpiece for fabrication of a light emitting diode (LED) displays, and first and second washing/drying chambers to remove uncured portions of the first and second color conversion precursors. First and second curing stations cure the precursors.

公开(公告)号：US20220016712A1

公开(公告)日：2022-01-20

申请号：US17491332

申请日：2021-09-30

Applicant: Applied Materials, Inc.

Inventor： Bahubali S. Upadhye ,  Sumedh Acharya ,  Sandip Desai ,  David Masayuki Ishikawa ,  Eric Ng ,  Hou T. Ng

IPC: B22F12/00 ,  B33Y30/00 ,  B23K26/342 ,  B33Y40/00

Abstract: An additive manufacturing apparatus includes a platform, a dispenser to deliver a layers of feed material onto the platform, one or more light sources to generate a first light beam and a plurality of second light beams, a galvo mirror scanner to scan the first light beam on a layer of feed material on the platform, and a plurality of polygon mirror scanners. The galvo mirror scanner has a first field of view that spans a width of a build area of the platform, whereas, each of the plurality of polygon mirror scanners having a second field of view with the plurality of polygon mirror scanners providing a plurality of second fields of view. Each second field of view is a portion of the first field of view, and the plurality of polygon mirror scanners are positioned such that the plurality of second fields of view span the width of the build area of the platform.

公开(公告)号：US11154961B2

公开(公告)日：2021-10-26

申请号：US16737818

申请日：2020-01-08

Applicant: Applied Materials, Inc.

Inventor： Mayu Felicia Yamamura ,  Jason Garcheung Fung ,  Daniel Redfield ,  Rajeev Bajaj ,  Hou T. Ng

IPC: B24B37/26 ,  B24D18/00 ,  B29C64/393 ,  B29C64/112 ,  B29C64/165 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y80/00 ,  B24B37/20 ,  B29L31/00

Abstract: A method of fabricating a polishing pad using an additive manufacturing system includes receiving data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection. The desired shape defines a profile including a polishing surface and one or more grooves on the polishing pad. Data indicative of a modified pattern of dispensing feed material is generated to at least partially compensate for distortions of the profile caused by the additive manufacturing system, and a plurality of layers of the feed material are dispensed by droplet ejection in accordance to the modified pattern.