公开(公告)号：US20030116085A1

公开(公告)日：2003-06-26

申请号：US10361240

申请日：2003-02-10

Inventor： Walter L. Moden ,  Syed S. Ahmad ,  Gregory M. Chapman ,  Tongbi Jiang

IPC: B05C003/00

CPC classification number: H01L24/06 ,  H01L21/67132 ,  H01L23/4951 ,  H01L24/27 ,  H01L24/45 ,  H01L24/48 ,  H01L24/743 ,  H01L2224/04042 ,  H01L2224/05599 ,  H01L2224/06136 ,  H01L2224/32245 ,  H01L2224/45014 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/4826 ,  H01L2224/73215 ,  H01L2224/83192 ,  H01L2224/83856 ,  H01L2224/85399 ,  H01L2924/00014 ,  H01L2924/00015 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01082 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A method and apparatus for achieving a level exposed surface of a viscous material pool for applying viscous material to at least one semiconductor component by contacting at least a portion of the semiconductor component with viscous material within a reservoir. A level viscous material exposed surface is achieved by using at least one mechanism in association with the reservoir. The mechanism is configured to level the exposed surface of viscous material and maintain the exposed surface at a substantially constant level. The reservoir may be shaped such that the exposed surface of viscous material is supplied to a precise location.

Abstract translation: 一种用于通过使至少一部分半导体部件与储存器内的粘性材料相接触来实现用于将粘性材料施加到至少一个半导体部件的粘性材料池的水平暴露表面的方法和装置。 通过使用与储存器相关联的至少一个机构来实现水平的粘性材料暴露表面。 该机构构造成使暴露的粘性材料表面平坦化并将暴露的表面保持在基本恒定的水平。 储存器可以被成形为使得粘性材料的暴露表面被供应到精确位置。

公开(公告)号：US20030113420A1

公开(公告)日：2003-06-19

申请号：US10305807

申请日：2002-11-27

Inventor： Jeffrey Wes Martin ,  Mark Joseph Fiteny

IPC: A23L001/00 ,  B05C003/00

CPC classification number: A21C15/002 ,  A21C9/04

Abstract: An apparatus and method for depositing flowable solids onto articles located on a moving conveyor. A flowable solid is placed on a vibrating trough and dispensed to an article on the moving conveyor through a slot in the trough. A third planar surface placed beneath the slot receives the flowable solid from the slot and provides an even dispersing pattern of the flowable solid onto the articles.

Abstract translation: 一种用于将可流动固体沉积在位于移动输送机上的物品上的装置和方法。 将可流动的固体放置在振动槽上，并通过槽中的狭槽分配到移动的输送机上的物品上。 位于狭​​槽下方的第三平面表面从槽接收可流动的固体，并将可流动固体的均匀分散图案提供到制品上。

公开(公告)号：US20030084842A1

公开(公告)日：2003-05-08

申请号：US10233162

申请日：2002-08-30

Inventor： Bernd Martens ,  Sadan Deral ,  Wolfram Szczepaniak ,  Nils Hansen

IPC: B05C003/00

CPC classification number: B05C1/0813

Abstract: The invention pertains to a pressure chamber scraper for application of a liquid medium onto a rotating drum, said pressure chamber scraper having an axially extending scraper head, that together with an axially extending dosing scraper touching the mantle surface of the drum and with a sealing scraper forms a chamber in the circumferential direction, in said chamber there is an axially extending displacement element to form a pressure compartment and an outlet compartment and leaving an application gap to the mantle surface of the drum, and the liquid medium for wetting of the mantle surface flows through said gap, wherein the medium is supplied through an inlet opening into the pressure compartment. According to the invention, it is proposed that the displacement element and scraper head have mutually facing contact surfaces which bound at least one gap between them which opens into the pressure compartment and connects it to the inlet opening, so that the medium can move into the pressure compartment. With this kind of design it is possible to configure the gap as narrow as desired.

Abstract translation: 本发明涉及一种用于将液体介质施加到旋转滚筒上的压力室刮刀，所述压力室刮刀具有轴向延伸的刮刀头，其与轴向延伸的剂量刮刀接触滚筒的外壳表面和密封刮刀 在圆周方向上形成一个腔室，在所述腔室中有一个轴向延伸的位移元件，以形成一个压力隔室和一个出口隔室，并留下与滚筒的外套表面的应用间隙，以及用于润湿地幔表面的液体介质 流过所述间隙，其中介质通过入口进入压力室。 根据本发明，提出了位移元件和刮刀头具有相互面对的接触表面，该接触表面将它们之间的至少一个间隙结合到开口的压力室中，并将其连接到入口开口，使得介质可以移动到 压力室。 通过这种设计，可以根据需要将间隙配置成窄。

公开(公告)号：US20030005884A1

公开(公告)日：2003-01-09

申请号：US10031651

申请日：2001-11-09

Inventor： Katsuyoshi Makimura ,  Kazutoshi Tsugawa ,  Masanori Fujihara

IPC: B05C003/00

CPC classification number: B61B10/04 ,  B23Q1/50 ,  B23Q7/005

Abstract: A transport object support means (40) is rotated about an anteroposterior axis (39) by a rotary control means (30), whereby a transport object (85) supported by the transport object support means (40) can be displaced in the vertical direction and the orientation of the transport object (85) can be varied during the vertical displacement without moving the carriage (10). As a result, the distance needed to displace the transport object (85) in the vertical direction can be dispensed with, the section (apparatus) for treating the transport object (85) can be shortened and made more compact, and the varying orientation of the transport object (85) can be utilized to perform a variety of treatments smoothly and efficiently without affecting the environment.

Abstract translation: 运输对象支撑装置（40）通过旋转控制装置（30）围绕前后轴线（39）旋转，由运输对象支撑装置（40）支撑的运输物体（85）可沿竖直方向移位 并且可以在垂直位移期间改变运输对象（85）的方向，而不移动托架（10）。 结果，可以省略在垂直方向上移动运输物体（85）所需的距离，用于处理运输物体（85）的部分（设备）可以被缩短并且变得更紧凑，并且改变方向 可以利用运输对象（85）来平滑有效地执行各种处理而不影响环境。

公开(公告)号：US20030003232A1

公开(公告)日：2003-01-02

申请号：US10228754

申请日：2002-08-27

Applicant: Engelhard Corporation

Inventor： VIctor Rosynsky ,  Kenneth W. Blamble ,  Brent C. Bibbee ,  Jerry D. Cornelius ,  Ralph A. Quigley ,  Gary A. Gramiccioni ,  Masaki Funabiki ,  Tunehisa Kawauchi ,  Tomoya Takahashi

IPC: B05C003/00

CPC classification number: B05D7/22 ,  B01J37/0215 ,  B05C3/09 ,  B05C11/06 ,  B05D1/002 ,  B05D3/042

Abstract: A catalyst composition is applied to an interior of a hollow substrate. The composition is coated on the substrate by immersing the substrate into a vessel containing a bath of coating slurry. A vacuum is then applied to the partially immersed substrate. The intensity of the vacuum and its application time is sufficient to draw the coating slurry upwardly from the bath into each of a plurality of channels located in the interior of the hollow substrate. After removing the substrate from the bath it is rotated 180null. A blast of pressurized air is applied at an intensity and for a time sufficient to distribute the coating slurry within the channels of the substrate to form a uniform coating profile therein.

Abstract translation: 将催化剂组合物施加到中空基板的内部。 通过将基材浸入含有涂布浆液浴的容器中将组合物涂布在基材上。 然后将真空施加到部分浸渍的基底上。 真空的强度及其施加时间足以将涂布浆从浴中向上拉入位于中空基板内部的多个通道中的每一个。 从浴中取出基材后，旋转180°。 以强度和一段时间施加压缩空气的鼓风，足以将涂料浆料分布在基材的通道内以在其中形成均匀的涂层轮廓。

公开(公告)号：US20020162504A1

公开(公告)日：2002-11-07

申请号：US10090317

申请日：2002-03-04

Inventor： Bernd Kreuzer

IPC: B05C003/00

CPC classification number: B65G49/0463 ,  B05C3/10

Abstract: The invention relates to a method for introducing and removing workpieces, especially vehicle bodies, into or from a treatment area (20) by rotational movements, whereby the treatment area serves for treating surfaces of the workpieces (1). A workpiece (1) is detachably fixed at a holding frame (2) which is moved together with at least one workpiece that is situated thereon at an essentially constant speed and by a continuous translation. The workpiece (1) is rotated around a rotational axle (6) at least at the beginning and end of the treatment area (20) and simultaneously with the translation movement. The rotational axle (6) is orientated vertically in relation to the moving direction of the holding frame (2) and is lifted and lowered during rotation.

Abstract translation: 本发明涉及一种通过旋转运动将工件，特别是车身引入和移出处理区域（20）的方法，由此处理区域用于处理工件（1）的表面。 工件（1）可拆卸地固定在保持框架（2）上，该保持框架（2）与位于其上的至少一个工件一起以基本恒定的速度和连续平移运动。 至少在处理区域（20）的开始和结束处，工件（1）围绕旋转轴（6）旋转，并与平移运动同时旋转。 旋转轴（6）相对于保持框架（2）的移动方向垂直取向，并且在旋转期间被提升和降低。

公开(公告)号：US20020144653A1

公开(公告)日：2002-10-10

申请号：US09790095

申请日：2001-02-22

Applicant: Xerox Corporation

Inventor： Steven D. Bush ,  Raphael A. Marcello ,  Richard A. Vangrol ,  James R. Lee ,  Eugene A. Swain

IPC: B05C003/00 ,  B05D001/18

CPC classification number: B05C3/09 ,  B05D1/18 ,  G03G5/0525

Abstract: An apparatus including: a tank with a closed base end and an open top end, and adapted to contain a coating formulation; and a receiver member with at least a cone shape, where the base of the cone is attached to the interior and to the base end of the tank and adapted to receive an article for coating.

Abstract translation: 一种装置，包括：具有封闭的基端和敞开的顶端的罐，并且适于容纳涂料配方; 以及具有至少锥形的接收器构件，其中锥体的底部附接到罐的内部和底部并且适于接收用于涂覆的物品。

公开(公告)号：US20020127875A1

公开(公告)日：2002-09-12

申请号：US10092980

申请日：2002-03-06

Applicant: Applied Materials, Inc.

Inventor： Timothy Weidman ,  Eric (Bram) Britcher ,  Todd Balisky

IPC: H01L021/31 ,  H01L021/469 ,  B05C003/00 ,  B05C019/02

CPC classification number: H01L21/02126 ,  C23C16/30 ,  C23C16/325 ,  C23C16/401 ,  C23C16/4486 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/312 ,  H01L21/3122 ,  H01L21/3124 ,  H01L21/3125 ,  H01L21/31633 ,  H01L21/31695 ,  H01L21/76801 ,  H01L21/76807

Abstract: A method for forming a low k dielectric constant material over a substrate. According to one embodiment, the method includes combining, in a mixing apparatus fluidly coupled to a solution applicator, an organo silicate glass (OSG) precursor, a solvent and a surfactant with water and an acid catalyst to form a coating solution; aging the coating solution in the mixing apparatus to form an aged coating solution; transporting the aged coating solution to the solution applicator; and then applying the aged coating solution to the substrate with the applicator.

Abstract translation: 一种在衬底上形成低k介电常数材料的方法。 根据一个实施方案，该方法包括在流体耦合到溶液施加器的混合设备中组合有机硅酸盐玻璃（OSG）前体，溶剂和表面活性剂与水和酸催化剂以形成涂布溶液; 在混合装置中老化涂层溶液以形成老化涂层溶液; 将老化的涂布溶液输送到溶液涂布器; 然后用涂抹器将老化的涂布溶液涂布到基材上。

公开(公告)号：US20020017237A1

公开(公告)日：2002-02-14

申请号：US09907522

申请日：2001-07-16

Applicant: Semitool, Inc.

Inventor： Paul Z. Wirth ,  Steven L. Peace

IPC: B05C013/00 ,  B05C013/02 ,  B05C021/00 ,  H01L021/31 ,  H01L021/469 ,  B25J001/00 ,  B65G049/07 ,  B05C003/00 ,  B05C019/02

CPC classification number: B08B3/04 ,  H01L21/32134 ,  H01L21/67017 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/6708 ,  H01L21/67086 ,  H01L21/6715 ,  Y10S118/90 ,  Y10S438/906 ,  Y10S438/913

Abstract: A system for processing a workpiece includes a base having a bowl or recess for holding a liquid. A process reactor or head holds a workpiece between an upper rotor and a lower rotor. A head lifter lowers the head holding the workpiece into contact with the liquid. The head spins the workpiece during or after contact with the liquid. The upper and lower rotors have side openings for loading and unloading a workpiece into the head. The rotors are axially moveable to align the side openings.

Abstract translation: 用于处理工件的系统包括具有用于保持液体的碗或凹部的底座。 工艺反应器或头部将工件保持在上转子和下转子之间。 头部升降器降低了将工件保持与液体接触的头部。 头部在与液体接触期间或之后旋转工件。 上下转子具有用于将工件装载和卸载到头部中的侧开口。 转子可轴向移动以对准侧开口。

公开(公告)号：US20010050046A1

公开(公告)日：2001-12-13

申请号：US09753579

申请日：2001-01-04

Inventor： Hidenobu Nishida ,  Makoto Sakai

IPC: B05C003/00

CPC classification number: B65G49/0459

Abstract: A plurality of baths for dipping and the like is arranged in series so that these baths contact one another, and a conveyor 2 is linearly arranged above the dipping bath in one plane. A workpiece 1 is tact-conveyed on the conveyor 2 in a floor conveyor position. The workpiece 1 is stopped at each bath for dipping and the like, wherein when the workpiece 1 is rotated horizontally about 180null to change its position to an overhead conveyor position, it is immersed in the corresponding bath for dipping and the like for dipping treatment.

Abstract translation: 多个用于浸渍的浴等被串联布置，使得这些浴彼此接触，并且传送器2在一个平面中的浸渍浴上方线性地布置。 工件1在地板输送机位置上在输送机2上被传送。 工件1在每个浸渍槽等停止，其中当工件1水平旋转180°以将其位置改变到顶部输送机位置时，将其浸入相应的浸渍槽中以进行浸渍处理 。