Wavelength-stabilized microcrystal laser
    1.
    发明授权
    Wavelength-stabilized microcrystal laser 有权
    波长稳定的微晶激光器

    公开(公告)号:US08948220B2

    公开(公告)日:2015-02-03

    申请号:US13718795

    申请日:2012-12-18

    申请人: Coherent GmbH

    摘要: A microcrystal laser assembly including a gain-crystal includes a frame having a high thermal conductivity. The frame has a base with two spaced apart portions extending from the base. The gain-crystal has a resonator output minor on one surface thereof. The gain-crystal is supported on the spaced-apart portions of the frame in the space therebetween. Another resonator minor is supported in that space, spaced apart from the output mirror, on a pedestal attached to the base of the frame. The pedestal and the frame have different CTE. Varying the frame temperature varies the spacing between the resonator minors depending on the CTE difference between the pedestal and the frame.

    摘要翻译: 包括增益晶体的微晶激光器组件包括具有高导热性的框架。 框架具有从基部延伸的两个间隔开的部分的基部。 增益晶体在其一个表面上具有较小的谐振器输出。 增益晶体被支撑在框架的间隔开的部分中。 在连接到框架底座的基座上,另一个谐振器辅助部件被支撑在与输出反射镜间隔开的空间中。 基座和框架具有不同的CTE。 改变框架温度根据基座和框架之间的CTE差异来改变谐振器未成形器之间的间距。

    AMORPHOUS SILICON CRYSTALLIZATION USING COMBINED BEAMS FROM MULTIPLE OSCILLATORS
    3.
    发明申请
    AMORPHOUS SILICON CRYSTALLIZATION USING COMBINED BEAMS FROM MULTIPLE OSCILLATORS 审中-公开
    使用多个振荡器组合的非晶硅结晶

    公开(公告)号:US20120260847A1

    公开(公告)日:2012-10-18

    申请号:US13222956

    申请日:2011-08-31

    IPC分类号: C30B13/24

    摘要: In a silicon crystallization method, a pulse is delivered from each of two excimer lasers. The duration of one of the pulses is extended in a pulse-duration extender to a duration significantly longer than that of that of the other. The extended-duration and other pulses are delivered along a common path. The other pulse temporally overlaps the extended-duration pulse after delivery of the extended-duration pulse begins. The silicon is preheated by the extended-duration before being melted by the combined pulses during the temporal overlap period.

    摘要翻译: 在硅结晶方法中,从两个准分子激光器中的每一个发射脉冲。 其中一个脉冲的持续时间在脉冲持续时间延长器中延伸至比另一脉冲持续时间显着更长的持续时间。 延长时间和其他脉冲沿公共路径传送。 在扩展持续时间脉冲的传送开始之后,另一脉冲与延长持续时间脉冲暂时重叠。 在时间重叠期间,通过组合脉冲熔化硅之前预热硅延长的持续时间。

    Device for spectroscopy using charged analytes
    4.
    发明授权
    Device for spectroscopy using charged analytes 有权
    使用带电分析物的光谱仪器

    公开(公告)号:US07385210B2

    公开(公告)日:2008-06-10

    申请号:US11471426

    申请日:2006-06-20

    IPC分类号: H01J49/00 H01J49/08 B01D59/44

    CPC分类号: G01N27/622

    摘要: A device for spectroscopy using charged analytes has an electron generator, which sends electrons through membrane into a charging chamber. The thermal strain of the membrane may be lowered significantly if a material is selected for the membrane which contains at least one component from the group of oxides, nitrides, and carbides with at least one of the elements B, Al, C, Si, and Ti or polysilicon.

    摘要翻译: 使用带电分析物的光谱仪器具有电子发生器,其通过膜将电子发送到充电室。 如果为包含至少一种元素的氧化物,氮化物和碳化物的组分的膜选择材料,则膜的热应变可以显着降低,其中元素B,Al,C,Si和 Ti或多晶硅。

    SHORT-PULSED COMPACT MOPA
    6.
    发明申请
    SHORT-PULSED COMPACT MOPA 有权
    短脉冲MOPA

    公开(公告)号:US20140241386A1

    公开(公告)日:2014-08-28

    申请号:US13778431

    申请日:2013-02-27

    申请人: COHERENT GMBH

    IPC分类号: H01S3/10 H01S3/16 H01S3/11

    摘要: A master oscillator power amplifier (MOPA) system includes an oscillator having a neodymium-doped gadolinium vanadate gain-medium and delivering seed-pulses. A length of single mode fiber is used to broaden the spectrum of the seed pulse. An amplifier having a neodymium-doped yttrium vanadate gain-medium amplifies the spectrally broadened seed-pulses. The gain-spectrum of the amplifier partially overlaps the broadened pulse-spectrum, providing spectral selection of the seed-pulses in addition to amplification. This provides amplified output-pulses having a duration about one-third that of the corresponding seed-pulses.

    摘要翻译: 主振荡器功率放大器(MOPA)系统包括具有钕掺杂的钒酸钆增益介质并输送种子脉冲的振荡器。 使用单模光纤的长度来扩大种子脉冲的光谱。 具有钕掺杂钇钒酸盐增益介质的放大器放大光谱扩展的种子脉冲。 放大器的增益谱与扩展的脉冲频谱部分重叠,除了放大之外,还提供种子脉冲的频谱选择。 这提供了放大的输出脉冲,其持续时间约为相应种子脉冲的三分之一。

    GAS PURIFIER FOR AN EXCIMER LASER
    8.
    发明申请
    GAS PURIFIER FOR AN EXCIMER LASER 审中-公开
    用于激光激光的气体净化器

    公开(公告)号:US20130034118A1

    公开(公告)日:2013-02-07

    申请号:US13198484

    申请日:2011-08-04

    IPC分类号: H01S3/22

    CPC分类号: H01S3/036 H01S3/2253

    摘要: An excimer laser includes a laser housing containing a lasing-gas mixture including a halogen. Contaminants including particulate matter and a metal halide vapor are generated in the lasing-gas mixture during operation of the laser. A gas-cleaning arrangement extracts lasing-gas mixture from the housing and passes the lasing-gas mixture through an electrode assembly. A repeatedly pulsed gas discharge is created in the electrode assembly by driving the electrode assembly with repeated high-power short-duration pulses. The pulsed discharge causes disintegration of the metal halide vapor and electrostatic trapping in the electrode assembly of the particulate matter and products of the metal halide disintegration.

    摘要翻译: 准分子激光器包括含有包含卤素的激光气体混合物的激光器壳体。 在激光器的操作期间,在激光 - 气体混合物中产生包括颗粒物质和金属卤化物蒸气的污染物。 气体清洁装置从壳体中提取激光气体混合物,并将激光气体混合物通过电极组件。 通过用重复的大功率短脉冲脉冲驱动电极组件,在电极组件中产生反复脉冲的气体放电。 脉冲放电会导致金属卤化物蒸气的分解和颗粒物质的电极组件中的静电捕获以及金属卤化物的分解产物。

    Electrodes for generating a stable discharge in gas laser systems
    9.
    发明授权
    Electrodes for generating a stable discharge in gas laser systems 有权
    用于在气体激光系统中产生稳定放电的电极

    公开(公告)号:US08192790B2

    公开(公告)日:2012-06-05

    申请号:US12792625

    申请日:2010-06-02

    摘要: Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.

    摘要翻译: 通过利用包括能够用作阳极和阴极之一的表面部分的电极以便对气体放电激光系统的放电室中的气体混合物通电,在气体激光器系统的放电室中使电弧最小化, 肩部位于表面部分的任一侧并暴露于气体混合物,以及由电绝缘材料制成的涂层,其中涂层通过冷喷涂法附着到肩部。

    HIGH-PRECISION SYNCHRONIZATION OF PULSED GAS-DISCHARGE LASERS
    10.
    发明申请
    HIGH-PRECISION SYNCHRONIZATION OF PULSED GAS-DISCHARGE LASERS 有权
    脉冲排放激光器的高精度同步

    公开(公告)号:US20120033689A1

    公开(公告)日:2012-02-09

    申请号:US12852864

    申请日:2010-08-09

    IPC分类号: H01S3/10

    摘要: Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.

    摘要翻译: 两个准分子激光器具有单独的脉冲电路,每个脉冲电路包括存储电容器,其被充电然后通过脉冲变压器放电以产生电脉冲,其被传送到激光器以产生光脉冲。 产生电脉冲和产生光脉冲之间的时间取决于电容器的充电电压。 电容器在彼此断开时被充电。 电容脉冲的产生通过在将电容器充电之后的短时间内将电容器连接在一起来同步​​,以均衡充电电压。 电容器在放电之前彼此断开。