Gantry-type XY stage
    1.
    发明申请
    Gantry-type XY stage 失效
    龙门式XY台

    公开(公告)号:US20060023206A1

    公开(公告)日:2006-02-02

    申请号:US10974753

    申请日:2004-10-28

    IPC分类号: G01N21/01

    摘要: Nine vibration isolating mounts are disposed on a pedestal, and a granite plate is placed thereon. A pair of guide bases are disposed on the granite plate, and disposed thereon are a pair of posts made of CFRP for movements in a Y-direction relative to the granite plate. A beam made of CFRP is extended between the pair of posts. Further, a movement base is disposed for movement in an X-direction relative to the beam, and a laser optical unit is mounted on the movement base.

    摘要翻译: 九个防振安装座设置在基座上,花岗岩板放置在其上。 一对导向基座设置在花岗岩板上,并且设置有一对由相对于花岗岩板沿Y方向运动的CFRP制成的柱。 由CFRP制成的梁在两对柱之间延伸。 此外,移动基座设置成相对于光束在X方向上移动,并且激光光学单元安装在移动基座上。

    Gantry-type XY stage
    6.
    发明授权
    Gantry-type XY stage 失效
    龙门式XY台

    公开(公告)号:US07239161B2

    公开(公告)日:2007-07-03

    申请号:US10974753

    申请日:2004-10-28

    IPC分类号: G01R31/02

    摘要: Nine vibration isolating mounts are disposed on a pedestal, and a granite plate is placed thereon. A pair of guide bases are disposed on the granite plate, and disposed thereon are a pair of posts made of CFRP for movements in a Y-direction relative to the granite plate. A beam made of CFRP is extended between the pair of posts. Further, a movement base is disposed for movement in an X-direction relative to the beam, and a laser optical unit is mounted on the movement base.

    摘要翻译: 九个防振安装座设置在基座上,花岗岩板放置在其上。 一对导向基座设置在花岗岩板上,并且设置有一对由相对于花岗岩板沿Y方向运动的CFRP制成的柱。 由CFRP制成的梁在两对柱之间延伸。 此外,移动基座设置成相对于光束在X方向上移动,并且激光光学单元安装在移动基座上。