摘要:
An interlayer cross-linked smectite is produced by a method which includes the steps of preparing a smectite suspension containing a dissolved water-soluble macromolecular compound, adding a cationic hydroxide oligomer to the suspension thereby subjecting the exchangeable cation in the smectite to ion exchange, allowing the resultant smectite suspension to stand at a fixed temperature for a fixed time thereby allowing the cationic hydroxide oligomer of the smectite to age, separating a solid smectite from the resultant suspension, and heating the separated solid smectite. The interlayer interval of the produced smectite can be controlled by adjusting the amount of the cationic hydroxide oligomer.
摘要:
A method of forming a Cu wiring in a trench or hole formed in a substrate is provided. The method includes forming a barrier film on the surface of the trench or hole, forming a Ru film on the barrier film, and embedding Cu in the trench or hole by forming a Cu film on the Ru film using PVD while annealing the substrate such that migration of copper into the trench or hole occurs.
摘要:
A semiconductor device manufacturing method includes: modifying a surface of a burying recess, of which surface is hydrophobic and which is formed in a dielectric film, to a hydrophilic state by supplying a plasma containing H ions and H radicals or a plasma containing NHx (x being 1, 2 or 3) ions and NHx radicals to the dielectric film formed on a substrate and containing silicon, carbon, hydrogen and oxygen, a bottom portion of the burying recess being exposed with a lower conductive layer; and directly forming an adhesion film formed of a Ru film on the hydrophilic surface of the recess. The method further includes burying copper forming a conductive path in the recess.
摘要:
A method of forming a Cu wiring in a trench or hole formed in a substrate is provided. The method includes forming a barrier film on the surface of the trench or hole, forming a Ru film on the barrier film, and embedding Cu in the trench or hole by forming a Cu film on the Ru film using PVD while annealing the substrate such that migration of copper into the trench or hole occurs.
摘要:
A microporous separating material is produced by a method which comprises preparing a mixture of (1) macromolecular quaternary ammonium salt having a quaternary amine linked to a water-soluble macromolecular compound and possessing basicity, (2) a polymer of a polyoxyethylene alkylvinyl monomer and a vinyl monomer possessing basicity, or (3) a polymer of a halogenide of a quaternary amine, i.e. a basic macromolecular compound, and at least one water-soluble macromolecular substance selected from the group consisting of cellulose, polyvinyl alcohol, polyethylene oxide, and polyacrylamide with a smectite type mineral, mixing the aforementioned mixture with an inorganic substance in a water-soluble state, drying the resulting mixture, and firing the dried mixture.
摘要:
Finely porous clay having crystal layers separated by intervals of at least 20 .ANG. and having a smectite type mineral as a main component thereof. This finely porous clay is manufactured by mixing the smectite type mineral with water, a water-soluble polymer, and an inorganic substance and drying or heating the resultant mixture.
摘要:
The present invention provides a method of producing a CuZnAlZr oxide catalyst consisting of reacting an aqueous NaOH solution and aqueous Na2CO3 solution with a mixture of aqueous solutions of each nitrate of Cu, Zn, Al, and Zr, producing a precipitate by coprecipitation, aging, filtering, washing and drying this precipitate to prepare a catalyst precursor consisting of a CuZnAlZr layered double hydroxide, and then obtaining a CuZnAlZr oxide by calcining this precursor in an air ambient atmosphere, a CuZnAlZr oxide catalyst, a CuZnZrCe oxide catalyst, a CoCuZnAl oxide catalyst for producing hydrogen by oxidative steam reforming a methanol, and methods of producing hydrogen gas consisting of converting methanol to hydrogen gas by oxidative steam reforming in the presence of air and steam using these oxide catalysts.
摘要翻译:本发明提供了一种生产CuZnAlZr氧化物催化剂的方法,该催化剂由NaOH水溶液和Na 2 CO 3水溶液与硝酸铵的水溶液 Cu,Zn,Al和Zr,通过共沉淀,老化,过滤,洗涤和干燥沉淀产生沉淀,制备由CuZnAlZr层状双氢氧化物组成的催化剂前体,然后通过在空气中煅烧该前体获得CuZnAlZr氧化物 环境气氛,CuZnAlZr氧化物催化剂,CuZnZrCe氧化物催化剂,通过氧化蒸汽重整甲醇生产氢的CoCuZnAl氧化物催化剂,以及在空气存在下通过氧化蒸汽重整将甲醇转化为氢气的氢气生产方法,以及 使用这些氧化物催化剂的蒸汽。
摘要:
The present invention relates to an active oxygen developing substance composed of an aluminosilicate obtained by heating hydrogarnet as a precursor substance at 700° C. or higher; an aluminosilicate catalyst supporting cobalt oxide, produced by supporting cobalt oxide on the surface of the aluminosilicate; a method for manufacturing these; and applications of these as oxidation catalysts, solid electrolytes, oxygen occlusion carriers, and so forth.
摘要:
Selective separation and recovery of gaseous components of hot waste gas of combustion containing carbon dioxide is attained by causing the hot waste gas to contact an adsorbent containing as a substantial main component thereof an inorganic solid substance exhibiting surface basicity and inducing adsorption of the gaseous components of the hot waste gas on the adsorbent and then selectively separating the adsorbed gaseous components by virtue of differences in retention time among the gaseous components on the adsorbent.
摘要:
Separation of nitrogen and carbon dioxide is accomplished by a method using as a separating material one member selected from the group consisting of sepiolite in the unmodified form, sepiolite which has been heat-treated, and sepiolite which has had part or the whole of the exchangeable cation thereof replaced with zinc ion and which has been subsequently subjected to a heat treatment.