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公开(公告)号：US07521752B2
公开(公告)日：2009-04-21
申请号：US11384269
申请日：2006-03-21
IPC分类号： H01L27/108 , H01L29/94
CPC分类号： H01L27/088 , H01L21/823412 , H01L21/823437 , H01L21/84 , H01L27/1203 , H01L29/41733 , H01L29/66795 , H01L29/7848 , H01L29/785 , H01L29/78618
摘要： It is possible to reliably implant an impurity into an impurity forming region, and to form a self-aligned silicides on the entire portion of the source and drain regions. There are provided: a first semiconductor layer of a first conductivity type in a substantially a rectangular solid shape formed on a substrate; a gate electrode formed on a pair of first side portions of the first semiconductor layer facing to each other with a gate insulating film being placed between the gate electrode and the first side portions; a second semiconductor layer of the first conductivity type connected to bottom portions of a pair of second side portions of the first semiconductor layer placed in a substantially perpendicular direction with respect to the first side portions, the second semiconductor layer extending along the substantially perpendicular direction; a first impurity region of a second conductivity type formed in the second semiconductor layer; second impurity regions formed on the pair of side portions of the first semiconductor layer and connected to the first impurity region; and a channel region formed between the second impurity regions of the first semiconductor layer.
摘要翻译： 可以将杂质可靠地注入到杂质形成区域中，并且在源极和漏极区域的整个部分上形成自对准的硅化物。 提供：形成在基板上的基本为矩形的实心形状的第一导电类型的第一半导体层; 形成在所述第一半导体层的一对第一侧部分上的栅电极，栅极绝缘膜位于所述栅电极和所述第一侧部之间，所述栅极绝缘膜彼此面对; 所述第一导电类型的第二半导体层连接到所述第一半导体层的一对第二侧部的与所述第一侧部大致垂直的方向上的第二侧部的底部，所述第二半导体层沿着大致垂直的方向延伸; 形成在第二半导体层中的第二导电类型的第一杂质区; 第二杂质区，形成在第一半导体层的一对侧部并连接到第一杂质区; 以及形成在第一半导体层的第二杂质区之间的沟道区。
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公开(公告)号：US20080227241A1
公开(公告)日：2008-09-18
申请号：US12043327
申请日：2008-03-06
IPC分类号： H01L21/84
CPC分类号： H01L29/785 , H01L21/823807 , H01L21/845 , H01L27/1203 , H01L27/1207 , H01L27/1211 , H01L29/045 , H01L29/66795
摘要： A semiconductor device fabrication method for forming on a wafer-bonded substrate p- and n-type FinFETs each having a channel plane exhibiting high carrier mobility is disclosed. First, prepare two semiconductor wafers. Each wafer has a surface of {100} crystalline orientation and a direction. These wafers are surface-bonded together so that the directions of upper and lower wafers cross each other at a rotation angle, thereby providing a “hybrid” crystal-oriented substrate. On this substrate, form semiconductor regions, one of which is identical in direction to the upper wafer, and the other of which is equal in direction to the lower wafer. In the one region, form a pFinFET having {100} channel plane. In the other region, form an nFinFET having its channel direction in parallel or perpendicular to that of the pFinFET. A CMOS FinFET structure is thus obtained.
摘要翻译： 公开了一种半导体器件制造方法，用于在晶片结合的衬底上形成各自具有表现出高载流子迁移率的沟道平面的p型和n型FinFET。 首先，准备两个半导体晶圆。 每个晶片具有{100}晶体取向和<110>方向的表面。 这些晶片被表面粘合在一起，使得上下晶片的<110>方向以旋转角彼此交叉，从而提供“混合”的晶体取向基板。 在该衬底上，形成半导体区域，其中一个在<110>方向上与上晶片相同，另一个在<110>方向与下晶片相等。 在一个区域中，形成具有{100}通道平面的pFinFET。 在另一区域，形成其通道方向平行或垂直于pFinFET的nFinFET。 由此获得CMOS FinFET结构。
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公开(公告)号：US20080150040A1
公开(公告)日：2008-06-26
申请号：US12034822
申请日：2008-02-21
IPC分类号： H01L29/78
CPC分类号： H01L29/785 , H01L29/66643 , H01L29/66795 , H01L29/7839 , H01L29/78621
摘要： An field effect transistor includes a first semiconductor region, a gate electrode insulatively disposed over the first semiconductor region, source and drain electrodes between which the first semiconductor region is sandwiched, and second semiconductor regions each formed between the first semiconductor region and one of the source and drain electrodes, and having impurity concentration higher than that of the first semiconductor region, the source electrode being offset to the gate electrode in a direction in which the source electrode and the drain electrode are separated from each other with respect to a channel direction, and one of the second semiconductor regions having a thickness not more than a thickness with which the one of second semiconductor regions is completely depleted in the channel direction being in thermal equilibrium with the source electrode therewith.
摘要翻译： 场效应晶体管包括第一半导体区域，绝缘地设置在第一半导体区域上的栅极电极，夹在第一半导体区域之间的源极和漏极电极以及形成在第一半导体区域和源极之一之间的第二半导体区域 和漏电极，其杂质浓度高于第一半导体区域，源电极在源电极和漏电极相对于沟道方向彼此分离的方向上偏移到栅电极， 并且所述第二半导体区域中的一个具有不大于所述第二半导体区域中的所述第二半导体区域在所述沟道方向上完全耗尽的厚度的厚度与所述源极电极处于热平衡。
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公开(公告)号：US07358550B2
公开(公告)日：2008-04-15
申请号：US11081348
申请日：2005-03-16
IPC分类号： H01L29/76
CPC分类号： H01L29/785 , H01L29/66643 , H01L29/66795 , H01L29/7839 , H01L29/78621
摘要： An field effect transistor includes a first semiconductor region, a gate electrode insulatively disposed over the first semiconductor region, source and drain electrodes between which the first semiconductor region is sandwiched, and second semiconductor regions each formed between the first semiconductor region and one of the source and drain electrodes, and having impurity concentration higher than that of the first semiconductor region, the source electrode being offset to the gate electrode in a direction in which the source electrode and the drain electrode are separated from each other with respect to a channel direction, and one of the second semiconductor regions having a thickness not more than a thickness with which the one of second semiconductor regions is completely depleted in the channel direction being in thermal equilibrium with the source electrode therewith.
摘要翻译： 场效应晶体管包括第一半导体区域，绝缘地设置在第一半导体区域上的栅极电极，夹在第一半导体区域之间的源极和漏极电极以及形成在第一半导体区域和源极之一之间的第二半导体区域 和漏电极，其杂质浓度高于第一半导体区域，源电极在源电极和漏电极相对于沟道方向彼此分离的方向上偏移到栅电极， 并且所述第二半导体区域中的一个具有不大于所述第二半导体区域中的所述第二半导体区域在所述沟道方向上完全耗尽的厚度的厚度与所述源极电极处于热平衡。
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公开(公告)号：US20060220131A1
公开(公告)日：2006-10-05
申请号：US11384269
申请日：2006-03-21
IPC分类号： H01L21/8234 , H01L27/12 , H01L21/336 , H01L27/01 , H01L31/0392
CPC分类号： H01L27/088 , H01L21/823412 , H01L21/823437 , H01L21/84 , H01L27/1203 , H01L29/41733 , H01L29/66795 , H01L29/7848 , H01L29/785 , H01L29/78618
摘要： It is possible to reliably implant an impurity into an impurity forming region, and to form a self-aligned silicides on the entire portion of the source and drain regions. There are provided: a first semiconductor layer of a first conductivity type in a substantially a rectangular solid shape formed on a substrate; a gate electrode formed on a pair of first side portions of the first semiconductor layer facing to each other with a gate insulating film being placed between the gate electrode and the first side portions; a second semiconductor layer of the first conductivity type connected to bottom portions of a pair of second side portions of the first semiconductor layer placed in a substantially perpendicular direction with respect to the first side portions, the second semiconductor layer extending along the substantially perpendicular direction; a first impurity region of a second conductivity type formed in the second semiconductor layer; second impurity regions formed on the pair of side portions of the first semiconductor layer and connected to the first impurity region; and a channel region formed between the second impurity regions of the first semiconductor layer.
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公开(公告)号：US07479674B2
公开(公告)日：2009-01-20
申请号：US12034822
申请日：2008-02-21
IPC分类号： H01L29/76
CPC分类号： H01L29/785 , H01L29/66643 , H01L29/66795 , H01L29/7839 , H01L29/78621
摘要： An field effect transistor includes a first semiconductor region, a gate electrode insulatively disposed over the first semiconductor region, source and drain electrodes between which the first semiconductor region is sandwiched, and second semiconductor regions each formed between the first semiconductor region and one of the source and drain electrodes, and having impurity concentration higher than that of the first semiconductor region, the source electrode being offset to the gate electrode in a direction in which the source electrode and the drain electrode are separated from each other with respect to a channel direction, and one of the second semiconductor regions having a thickness not more than a thickness with which the one of second semiconductor regions is completely depleted in the channel direction being in thermal equilibrium with the source electrode therewith.
摘要翻译： 场效应晶体管包括第一半导体区域，绝缘地设置在第一半导体区域上的栅极电极，夹在第一半导体区域之间的源极和漏极电极以及形成在第一半导体区域和源极之一之间的第二半导体区域 和漏电极，其杂质浓度高于第一半导体区域，源电极在源电极和漏电极相对于沟道方向彼此分离的方向上偏移到栅电极， 并且所述第二半导体区域中的一个具有不大于所述第二半导体区域中的所述第二半导体区域在所述沟道方向上完全耗尽的厚度的厚度与所述源极电极处于热平衡。
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公开(公告)号：US20050212055A1
公开(公告)日：2005-09-29
申请号：US11081348
申请日：2005-03-16
IPC分类号： H01L29/417 , H01L21/00 , H01L21/336 , H01L29/76 , H01L29/772 , H01L29/78 , H01L29/786
CPC分类号： H01L29/785 , H01L29/66643 , H01L29/66795 , H01L29/7839 , H01L29/78621
摘要： An field effect transistor includes a first semiconductor region, a gate electrode insulatively disposed over the first semiconductor region, source and drain electrodes between which the first semiconductor region is sandwiched, and second semiconductor regions each formed between the first semiconductor region and one of the source and drain electrodes, and having impurity concentration higher than that of the first semiconductor region, the source electrode being offset to the gate electrode in a direction in which the source electrode and the drain electrode are separated from each other with respect to a channel direction, and one of the second semiconductor regions having a thickness not more than a thickness with which the one of second semiconductor regions is completely depleted in the channel direction being in thermal equilibrium with the source electrode therewith.
摘要翻译： 场效应晶体管包括第一半导体区域，绝缘地设置在第一半导体区域上的栅极电极，夹在第一半导体区域之间的源极和漏极电极以及形成在第一半导体区域和源极之一之间的第二半导体区域 和漏电极，其杂质浓度高于第一半导体区域，源电极在源电极和漏电极相对于沟道方向彼此分离的方向上偏移到栅电极， 并且所述第二半导体区域中的一个具有不大于所述第二半导体区域中的所述第二半导体区域在所述沟道方向上完全耗尽的厚度的厚度与所述源极电极处于热平衡。
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公开(公告)号：US20060199310A1
公开(公告)日：2006-09-07
申请号：US11366552
申请日：2006-03-03
申请人： Yukio Nakabayashi , Junji Koga
发明人： Yukio Nakabayashi , Junji Koga
CPC分类号： H01L25/0657 , H01L21/76834 , H01L21/76852 , H01L21/8221 , H01L21/823807 , H01L21/84 , H01L23/057 , H01L23/13 , H01L24/48 , H01L25/105 , H01L25/50 , H01L27/0688 , H01L27/1203 , H01L29/7842 , H01L29/7849 , H01L29/78603 , H01L2224/48091 , H01L2224/48227 , H01L2225/0651 , H01L2225/06541 , H01L2225/06582 , H01L2225/1052 , H01L2924/00014 , H01L2924/01079 , H01L2924/01322 , H01L2924/12032 , H01L2924/12044 , H01L2924/13091 , H01L2924/14 , H01L2924/15311 , H01L2924/16152 , H01L2924/1627 , H01L2924/3511 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要： A semiconductor integrated circuit includes a substrate having a main surface to which a first stress is applied; a first channel conductive field effect transistor placed in a first region of the main surface of the substrate, the carrier mobility of a channel of the first channel conductive field effect transistor being improved by the first stress; and a second channel conductive field effect transistor placed in a second region of the main surface of the substrate, and receiving a second stress at a channel thereof, the second stress being opposite to the first stress, the carrier mobility of the channel of the second channel conductive field effect transistor being improved by the second stress, and the second region being independent from the first region.
摘要翻译： 半导体集成电路包括具有施加第一应力的主表面的基板; 放置在基板的主表面的第一区域中的第一沟道导电场效应晶体管，通过第一应力改善第一沟道导电场效应晶体管的沟道的载流子迁移率; 以及放置在所述基板的主表面的第二区域中的第二沟道导电场效应晶体管，并且在其沟道处接收第二应力，所述第二应力与所述第一应力相反，所述第二应变的沟道的载流子迁移率 沟道导电场效应晶体管被第二应力改善，第二区域独立于第一区域。
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公开(公告)号：US20120146053A1
公开(公告)日：2012-06-14
申请号：US13237697
申请日：2011-09-20
IPC分类号： H01L29/161 , H01L21/336 , H01L29/78
CPC分类号： H01L29/785 , H01L29/66795 , H01L29/7843
摘要： A semiconductor device according to an embodiment includes a semiconductor substrate, a gate insulating film formed on the semiconductor substrate, a gate electrode formed on the gate insulating film, first gate sidewalls formed on both sides of the gate electrode, and a source/drain semiconductor layer formed on the semiconductor substrate to sandwich the first gate sidewalls with the gate electrode. Further, second gate sidewalls are provided on the first gate sidewalls and the source/drain semiconductor layer at both sides of the gate electrode, wherein the boundary of each of the second gate sidewalls with each of the first gate sidewalls is terminated at the side surface of the gate electrode, and each of the second gate sidewalls has a smaller Young's modulus and a lower dielectric constant than each of the first gate sidewalls.
摘要翻译： 根据实施例的半导体器件包括半导体衬底，形成在半导体衬底上的栅极绝缘膜，形成在栅极绝缘膜上的栅电极，形成在栅电极两侧的第一栅极侧壁和源极/漏极半导体 层，形成在半导体衬底上，以与栅电极夹住第一栅极侧壁。 此外，第二栅极侧壁设置在栅电极两侧的第一栅极侧壁和源极/漏极半导体层上，其中每个第二栅极侧壁与每个第一栅极侧壁的边界在侧表面终止 并且每个第二栅极侧壁具有比每个第一栅极侧壁更小的杨氏模量和更低的介电常数。
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公开(公告)号：US08932915B2
公开(公告)日：2015-01-13
申请号：US13082103
申请日：2011-04-07
IPC分类号： H01L29/772 , H01L21/336 , B82Y10/00 , H01L21/84 , H01L27/06 , H01L27/115 , H01L27/12 , H01L29/04 , H01L29/06 , H01L29/66 , H01L29/775 , H01L29/78 , H01L29/792 , H01L21/8238 , H01L27/092
CPC分类号： H01L29/66765 , B82Y10/00 , H01L21/823821 , H01L21/84 , H01L21/845 , H01L27/0688 , H01L27/092 , H01L27/11578 , H01L27/11582 , H01L27/1203 , H01L27/1211 , H01L29/04 , H01L29/0673 , H01L29/66439 , H01L29/66666 , H01L29/66833 , H01L29/775 , H01L29/7827 , H01L29/7843 , H01L29/7847 , H01L29/78669 , H01L29/78678 , H01L29/792
摘要： A semiconductor device manufacturing method of an embodiment includes the steps of: forming a first insulating layer on a semiconductor substrate; forming on the first insulating layer an amorphous or polycrystalline semiconductor layer having a narrow portion; forming on the semiconductor layer a second insulating layer having a thermal expansion coefficient larger than that of the semiconductor layer; performing thermal treatment; removing the second insulating layer; forming a gate insulating film on the side faces of the narrow portion; forming a gate electrode on the gate insulating film; and forming a source-drain region in the semiconductor layer.
摘要翻译： 实施例的半导体器件制造方法包括以下步骤：在半导体衬底上形成第一绝缘层; 在第一绝缘层上形成具有窄部分的非晶或多晶半导体层; 在所述半导体层上形成具有大于所述半导体层的热膨胀系数的热膨胀系数的第二绝缘层; 进行热处理; 去除所述第二绝缘层; 在所述窄部的侧面上形成栅极绝缘膜; 在栅极绝缘膜上形成栅电极; 以及在所述半导体层中形成源 - 漏区。
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