公开(公告)号：US20120135158A1

公开(公告)日：2012-05-31

申请号：US13322117

申请日：2010-05-25

申请人： Erik Freer ,  James M. Hamilton ,  David P. Stumbo ,  Kenji Komiya ,  Akihide Shibata

发明人： Erik Freer ,  James M. Hamilton ,  David P. Stumbo ,  Kenji Komiya ,  Akihide Shibata

IPC分类号： B05D5/00 ,  B05C9/12 ,  B05D3/14 ,  B82Y30/00

CPC分类号： C25D13/02 ,  B82Y10/00 ,  B82Y40/00 ,  C25D13/22 ,  C25D17/12 ,  H01L21/02603 ,  H01L21/326 ,  H01L21/67703 ,  H01L29/0665 ,  H01L29/0673 ,  Y10S977/89 ,  Y10S977/936

摘要： Methods, systems, and apparatuses for nanowire deposition are provided. A deposition system includes an enclosed flow channel, an inlet port, and an electrical signal source. The inlet port provides a suspension that includes nanowires into the channel. The electrical signal source is coupled to an electrode pair in the channel to generate an electric field to associate at least one nanowire from the suspension with the electrode pair. The deposition system may include various further features, including being configured to receive multiple solution types, having various electrode geometries, having a rotatable flow channel, having additional electrical conductors, and further aspects.

摘要翻译： 提供了纳米线沉积的方法，系统和装置。 沉积系统包括封闭的流动通道，入口端口和电信号源。 入口端口提供了包括纳米线进入通道的悬浮液。 电信号源耦合到通道中的电极对以产生电场，以将至少一个来自悬架的纳米线与电极对相关联。 沉积系统可以包括各种其它特征，包括被配置为接收具有各种电极几何形状的多种溶液类型，具有可旋转的流动通道，具有附加的电导体以及其它方面。

公开(公告)号：US20110284380A1

公开(公告)日：2011-11-24

申请号：US13113680

申请日：2011-05-23

申请人： Samuel MARTIN ,  Xiangfeng Duan ,  Katsumasa Fujii ,  James M. Hamilton ,  Hiroshi Iwata ,  Francisco Leon ,  Jeffrey Miller ,  Tetsu Negishi ,  Hiroshi Ohki ,  J. Wallace Parce ,  Cheri X.Y. Pereira ,  Paul John Schuele ,  Akihide Shibata ,  David P. Stumbo ,  Yasunobu Okada

发明人： Samuel MARTIN ,  Xiangfeng Duan ,  Katsumasa Fujii ,  James M. Hamilton ,  Hiroshi Iwata ,  Francisco Leon ,  Jeffrey Miller ,  Tetsu Negishi ,  Hiroshi Ohki ,  J. Wallace Parce ,  Cheri X.Y. Pereira ,  Paul John Schuele ,  Akihide Shibata ,  David P. Stumbo ,  Yasunobu Okada

IPC分类号： C25D15/00 ,  B82Y30/00

CPC分类号： H01L29/0665 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01L29/0673 ,  Y10S977/883

摘要： The present invention provides methods and systems for nanowire alignment and deposition. Energizing (e.g., an alternating current electric field) is used to align and associate nanowires with electrodes. By modulating the energizing, the nanowires are coupled to the electrodes such that they remain in place during subsequent wash and drying steps. The invention also provides methods for transferring nanowires from one substrate to another in order to prepare various device substrates. The present invention also provides methods for monitoring and controlling the number of nanowires deposited at a particular electrode pair, as well as methods for manipulating nanowires in solution.

摘要翻译： 本发明提供了用于纳米线对准和沉积的方法和系统。 使用通电（例如，交流电场）来使纳米线与电极对准和关联。 通过调节激励，纳米线耦合到电极，使得它们在随后的洗涤和干燥步骤期间保持在适当的位置。 本发明还提供了将纳米线从一个衬底转移到另一个衬底以便制备各种器件衬底的方法。 本发明还提供了用于监测和控制在特定电极对上沉积的纳米线的数量的方法，以及用于操纵溶液中的纳米线的方法。

公开(公告)号：US08252164B2

公开(公告)日：2012-08-28

申请号：US13113680

申请日：2011-05-23

申请人： Samuel Martin ,  Xiangfeng Duan ,  Katsumasa Fujii ,  James M. Hamilton ,  Hiroshi Iwata ,  Francisco Leon ,  Jeffrey Miller ,  Tetsu Negishi ,  Hiroshi Ohki ,  J. Wallace Parce ,  Cheri X. Y. Pereira ,  Paul John Schuele ,  Akihide Shibata ,  David P. Stumbo ,  Yasunobu Okada

发明人： Samuel Martin ,  Xiangfeng Duan ,  Katsumasa Fujii ,  James M. Hamilton ,  Hiroshi Iwata ,  Francisco Leon ,  Jeffrey Miller ,  Tetsu Negishi ,  Hiroshi Ohki ,  J. Wallace Parce ,  Cheri X. Y. Pereira ,  Paul John Schuele ,  Akihide Shibata ,  David P. Stumbo ,  Yasunobu Okada

IPC分类号： C25D13/02

CPC分类号： H01L29/0665 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01L29/0673 ,  Y10S977/883

摘要： The present invention provides methods and systems for nanowire alignment and deposition. Energizing (e.g., an alternating current electric field) is used to align and associate nanowires with electrodes. By modulating the energizing, the nanowires are coupled to the electrodes such that they remain in place during subsequent wash and drying steps. The invention also provides methods for transferring nanowires from one substrate to another in order to prepare various device substrates. The present invention also provides methods for monitoring and controlling the number of nanowires deposited at a particular electrode pair, as well as methods for manipulating nanowires in solution.

摘要翻译： 本发明提供了用于纳米线对准和沉积的方法和系统。 使用通电（例如，交流电场）来使纳米线与电极对准和关联。 通过调节激励，纳米线耦合到电极，使得它们在随后的洗涤和干燥步骤期间保持在适当的位置。 本发明还提供了将纳米线从一个衬底转移到另一个衬底以便制备各种器件衬底的方法。 本发明还提供了用于监测和控制在特定电极对上沉积的纳米线的数量的方法，以及用于操纵溶液中的纳米线的方法。

公开(公告)号：US07968474B2

公开(公告)日：2011-06-28

申请号：US11979949

申请日：2007-11-09

申请人： Samuel Martin ,  Xiangfeng Duan ,  Katsumasa Fujii ,  James M. Hamilton ,  Hiroshi Iwata ,  Francisco Leon ,  Jeffrey Miller ,  Tetsu Negishi ,  Hiroshi Ohki ,  J. Wallace Parce ,  Cheri X. Y. Pereira ,  Paul John Schuele ,  Akihide Shibata ,  David P. Stumbo ,  Yasunobu Okada

发明人： Samuel Martin ,  Xiangfeng Duan ,  Katsumasa Fujii ,  James M. Hamilton ,  Hiroshi Iwata ,  Francisco Leon ,  Jeffrey Miller ,  Tetsu Negishi ,  Hiroshi Ohki ,  J. Wallace Parce ,  Cheri X. Y. Pereira ,  Paul John Schuele ,  Akihide Shibata ,  David P. Stumbo ,  Yasunobu Okada

IPC分类号： H01L21/71

CPC分类号： H01L29/0665 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01L29/0673 ,  Y10S977/883

摘要： The present invention provides methods and systems for nanowire alignment and deposition. Energizing (e.g., an alternating current electric field) is used to align and associate nanowires with electrodes. By modulating the energizing, the nanowires are coupled to the electrodes such that they remain in place during subsequent wash and drying steps. The invention also provides methods for transferring nanowires from one substrate to another in order to prepare various device substrates. The present invention also provides methods for monitoring and controlling the number of nanowires deposited at a particular electrode pair, as well as methods for manipulating nanowires in solution.

摘要翻译： 本发明提供了用于纳米线对准和沉积的方法和系统。 使用通电（例如，交流电场）来使纳米线与电极对准和关联。 通过调节激励，纳米线耦合到电极，使得它们在随后的洗涤和干燥步骤期间保持在适当的位置。 本发明还提供了将纳米线从一个衬底转移到另一个衬底以便制备各种器件衬底的方法。 本发明还提供了用于监测和控制在特定电极对上沉积的纳米线的数量的方法，以及用于操纵溶液中的纳米线的方法。

公开(公告)号：US20080224123A1

公开(公告)日：2008-09-18

申请号：US11979949

申请日：2007-11-09

申请人： Samuel Martin ,  Xiangfeng Duan ,  Katsumasa Fujii ,  James M. Hamilton ,  Hiroshi Iwata ,  Francisco Leon ,  Jeffrey Miller ,  Tetsu Negishi ,  Hiroshi Ohki ,  J. Wallace Parce ,  Cheri X.Y. Pereira ,  Paul John Schuele ,  Akihide Shibata ,  David P. Stumbo ,  Yasunobu Okada

发明人： Samuel Martin ,  Xiangfeng Duan ,  Katsumasa Fujii ,  James M. Hamilton ,  Hiroshi Iwata ,  Francisco Leon ,  Jeffrey Miller ,  Tetsu Negishi ,  Hiroshi Ohki ,  J. Wallace Parce ,  Cheri X.Y. Pereira ,  Paul John Schuele ,  Akihide Shibata ,  David P. Stumbo ,  Yasunobu Okada

IPC分类号： H01L31/00 ,  H01L21/326

CPC分类号： H01L29/0665 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01L29/0673 ,  Y10S977/883

摘要： The present invention provides methods and systems for nanowire alignment and deposition. Energizing (e.g., an alternating current electric field) is used to align and associate nanowires with electrodes. By modulating the energizing, the nanowires are coupled to the electrodes such that they remain in place during subsequent wash and drying steps. The invention also provides methods for transferring nanowires from one substrate to another in order to prepare various device substrates. The present invention also provides methods for monitoring and controlling the number of nanowires deposited at a particular electrode pair, as well as methods for manipulating nanowires in solution.

摘要翻译： 本发明提供了用于纳米线对准和沉积的方法和系统。 使用通电（例如，交流电场）来使纳米线与电极对准和关联。 通过调节激励，纳米线耦合到电极，使得它们在随后的洗涤和干燥步骤期间保持在适当的位置。 本发明还提供了将纳米线从一个衬底转移到另一个衬底以便制备各种器件衬底的方法。 本发明还提供了用于监测和控制在特定电极对上沉积的纳米线的数量的方法，以及用于操纵溶液中的纳米线的方法。

公开(公告)号：US07339184B2

公开(公告)日：2008-03-04

申请号：US11117707

申请日：2005-04-29

申请人： Linda T. Romano ,  Jian Chen ,  Xiangfeng Duan ,  Robert S. Dubrow ,  Stephen A. Empedocles ,  Jay L. Goldman ,  James M. Hamilton ,  David L. Heald ,  Francesco Lemmi ,  Chunming Niu ,  Yaoling Pan ,  George Pontis ,  Vijendra Sahi ,  Erik C. Scher ,  David P. Stumbo ,  Jeffery A. Whiteford

发明人： Linda T. Romano ,  Jian Chen ,  Xiangfeng Duan ,  Robert S. Dubrow ,  Stephen A. Empedocles ,  Jay L. Goldman ,  James M. Hamilton ,  David L. Heald ,  Francesco Lemmi ,  Chunming Niu ,  Yaoling Pan ,  George Pontis ,  Vijendra Sahi ,  Erik C. Scher ,  David P. Stumbo ,  Jeffery A. Whiteford

IPC分类号： H01L29/00

CPC分类号： C30B29/605 ,  B82Y10/00 ,  C30B11/12 ,  H01L21/02439 ,  H01L21/02513 ,  H01L21/02521 ,  H01L21/02532 ,  H01L21/02603 ,  H01L21/02606 ,  H01L21/02639 ,  H01L21/02645 ,  H01L21/02653 ,  H01L29/0673 ,  H01L29/0676 ,  H01L29/068 ,  H01L29/125 ,  H01L29/66469 ,  H01L29/775 ,  H01L29/78684 ,  H01L29/7869 ,  H01L29/78696 ,  H01L51/0048 ,  Y10S977/762 ,  Y10S977/938 ,  Y10T428/139 ,  Y10T428/2902 ,  Y10T428/2949

摘要： The present invention is directed to methods to harvest, integrate and exploit nanomaterials, and particularly elongated nanowire materials. The invention provides methods for harvesting nanowires that include selectively etching a sacrificial layer placed on a nanowire growth substrate to remove nanowires. The invention also provides methods for integrating nanowires into electronic devices that include placing an outer surface of a cylinder in contact with a fluid suspension of nanowires and rolling the nanowire coated cylinder to deposit nanowires onto a surface. Methods are also provided to deposit nanowires using an ink-jet printer or an aperture to align nanowires. Additional aspects of the invention provide methods for preventing gate shorts in nanowire based transistors. Additional methods for harvesting and integrating nanowires are provided.

摘要翻译： 本发明涉及收获，整合和利用纳米材料，特别是细长的纳米线材料的方法。 本发明提供了收获纳米线的方法，其包括选择性地蚀刻放置在纳米线生长衬底上以去除纳米线的牺牲层。 本发明还提供了将纳米线整合到电子器件中的方法，包括将圆筒的外表面与纳米线的流体悬浮液接触并滚动纳米线涂覆的圆筒以将纳米线沉积到表面上。 还提供了使用喷墨打印机或孔径以纳米线排列纳米线的方法。 本发明的另外的方面提供了用于防止基于纳米线的晶体管中的栅极短路的方法。 提供了收获和集成纳米线的其他方法。

公开(公告)号：US07741197B1

公开(公告)日：2010-06-22

申请号：US11643025

申请日：2006-12-20

申请人： Xiangfeng Duan ,  Paul Bernatis ,  Alice Fischer-Colbrie ,  James M. Hamilton ,  Francesco Lemmi ,  Yaoling Pan ,  J. Wallace Parce ,  Cheri X. Y. Pereira ,  David P. Stumbo

发明人： Xiangfeng Duan ,  Paul Bernatis ,  Alice Fischer-Colbrie ,  James M. Hamilton ,  Francesco Lemmi ,  Yaoling Pan ,  J. Wallace Parce ,  Cheri X. Y. Pereira ,  David P. Stumbo

IPC分类号： H01L21/20 ,  H01L21/36

CPC分类号： H01L21/02639 ,  B82Y30/00 ,  H01L21/02521 ,  H01L21/02603 ,  H01L21/02606 ,  H01L21/02628 ,  Y10S977/70 ,  Y10S977/742

摘要： The present invention is directed to methods to harvest, integrate and exploit nanomaterials, and particularly elongated nanowire materials. The invention provides methods for harvesting nanowires that include selectively etching a sacrificial layer placed on a nanowire growth substrate to remove nanowires. The invention also provides methods for integrating nanowires into electronic devices that include placing an outer surface of a cylinder in contact with a fluid suspension of nanowires and rolling the nanowire coated cylinder to deposit nanowires onto a surface. Methods are also provided to deposit nanowires using an ink-jet printer or an aperture to align nanowires. Additional aspects of the invention provide methods for preventing gate shorts in nanowire based transistors. Additional methods for harvesting and integrating nanowires are provided.

摘要翻译： 本发明涉及收获，整合和利用纳米材料，特别是细长的纳米线材料的方法。 本发明提供了收获纳米线的方法，其包括选择性地蚀刻放置在纳米线生长衬底上以去除纳米线的牺牲层。 本发明还提供了将纳米线整合到电子器件中的方法，其包括将圆筒的外表面与纳米线的流体悬浮液接触并滚动纳米线涂覆的圆筒以将纳米线沉积到表面上。 还提供了使用喷墨打印机或孔径以纳米线排列纳米线的方法。 本发明的另外的方面提供了用于防止基于纳米线的晶体管中的栅极短路的方法。 提供了收获和集成纳米线的其他方法。

公开(公告)号：US08558311B2

公开(公告)日：2013-10-15

申请号：US11761534

申请日：2007-06-12

申请人： Robert S. Dubrow ,  Jeffrey Miller ,  David P. Stumbo

发明人： Robert S. Dubrow ,  Jeffrey Miller ,  David P. Stumbo

IPC分类号： H01L29/72

CPC分类号： H01B7/0009 ,  B82Y99/00 ,  H01B3/004 ,  H01G4/018 ,  H01G4/20 ,  Y10T428/249924

摘要： A dielectric material is disclosed comprising a plurality of substantially longitudinally oriented wires which are coupled together, wherein each of the wires includes a conductive core comprising a first material and one or more insulating shell layers comprising a compositionally different second material disposed about the core. In one embodiment, a dielectric layer is disclosed comprising a substrate comprising an insulating material having a plurality of nanoscale pores defined therein having a pore diameter less than about 100 nm, and a conductive material disposed within the nanoscale pores. Methods are also disclosed to create a dielectric material layer comprising, for example, providing a plurality of wires, wherein each of the wires includes a core comprising a first material and one or more insulating layers comprising a compositionally different second material disposed about the core; substantially longitudinally orienting said plurality of wires along their long axes; coupling the wires together; and depositing an insulating coating on at least one of a top and/or a bottom end of the wires.

摘要翻译： 公开了一种介电材料，其包括耦合在一起的多个基本上纵向定向的导线，其中每个导线包括导电芯，该导电芯包括第一材料和一个或多个绝缘壳层，所述绝缘壳层包括围绕芯布置的组成不同的第二材料。 在一个实施例中，公开了一种介电层，其包括基底，该基底包括绝缘材料，该绝缘材料具有限定在其中的孔径小于约100nm的多个纳米级孔，以及设置在纳米尺度孔内的导电材料。 还公开了形成电介质材料层的方法，该电介质材料层包括例如提供多条电线，其中每条电线包括包含第一材料和一个或多个绝缘层的芯，该绝缘层包括围绕芯设置的组成不同的第二材料; 沿其长轴基本纵向地定向所述多根电线; 将电线连接在一起; 以及在所述电线的顶端和/或底端中的至少一个上沉积绝缘涂层。

公开(公告)号：US07745498B2

公开(公告)日：2010-06-29

申请号：US11399307

申请日：2006-04-06

申请人： Cheri X. Y. Pereira ,  Francesco Lemmi ,  David P. Stumbo

发明人： Cheri X. Y. Pereira ,  Francesco Lemmi ,  David P. Stumbo

IPC分类号： B01F3/12

CPC分类号： C30B33/005 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y30/00 ,  C30B29/06 ,  C30B29/08 ,  C30B29/40 ,  C30B29/48 ,  C30B29/602 ,  H01L31/022466 ,  Y10T428/24372 ,  Y10T428/24405 ,  Y10T428/249921

摘要： Nanowire dispersion compositions (and uses thereof) are disclosed comprising a plurality of inorganic nanowires suspended in an aqueous or non-aqueous solution comprising at least one low molecular weight and/or low HLB (Hydrophile-Lipophile Balance) value dispersant. Methods of further improving the dispersability of a plurality of inorganic nanowires in an aqueous or non-aqueous solution comprise, for example, oxidizing the surface of the nanowires prior to dispersing the nanowires in the aqueous or non-aqueous solution.

摘要翻译： 公开了纳米线分散体组合物（及其用途），其包含悬浮在包含至少一种低分子量和/或低HLB（亲水亲油平衡值）分散剂的水性或非水溶液中的多种无机纳米线。 在水性或非水溶液中分散纳米线之前，进一步提高多种无机纳米线在水溶液或非水溶液中的分散性的方法包括例如氧化纳米线的表面。

公开(公告)号：US07569503B2

公开(公告)日：2009-08-04

申请号：US11271488

申请日：2005-11-10

申请人： Yaoling Pan ,  David P. Stumbo

发明人： Yaoling Pan ,  David P. Stumbo

IPC分类号： H01L21/00

CPC分类号： H01L29/0665 ,  B82Y10/00 ,  B82Y40/00 ,  H01L29/0673 ,  H01L29/0676 ,  H01L29/068 ,  H01L29/66439 ,  H01L29/66469 ,  H01L29/66742 ,  H01L29/66772 ,  H01L29/7606 ,  H01L29/78696 ,  Y10S977/901 ,  Y10S977/963

摘要： Embodiments of the present invention are provided for improved contact doping and annealing systems and processes. In embodiments, a plasma ion immersion implantation (PIII) process is used for contact doping of nanowires and other nanoelement based thin film devices. According to further embodiments of the present invention, pulsed laser annealing using laser energy at relatively low laser fluences below about 100 mJ/cm2 (e.g., less than about 50 mJ/cm2, e.g., between about 2 and 18 mJ/cm2) is used to anneal nanowire and other nanoelement-based devices on substrates, such as low temperature flexible substrates, e.g., plastic substrates.

摘要翻译： 提供本发明的实施例用于改进的接触掺杂和退火系统和工艺。 在实施例中，等离子体离子浸没注入（PIII）工艺用于纳米线和其它基于纳米元件的薄膜器件的接触掺杂。 根据本发明的另外的实施例，使用使用低于约100mJ / cm 2（例如，小于约50mJ / cm 2，例如约2至18mJ / cm 2）的相对低的激​​光能量密度的激光能量的脉冲激光退火 以在基底上退火纳米线和其它基于纳米元件的器件，例如低温柔性衬底，例如塑料衬底。