Method for preparing porous SOG film
    1.
    发明授权
    Method for preparing porous SOG film 有权
    多孔SOG薄膜的制备方法

    公开(公告)号:US06919106B2

    公开(公告)日:2005-07-19

    申请号:US09926671

    申请日:2001-04-03

    摘要: A porous SOG film is formed by preparing an organic silane solution containing an organic silane, water and an alcohol, subjecting the organic silane to acid hydrolysis or alkali hydrolysis and then heat-treating the resulting reaction system in the presence of a surfactant to thus form a porous SiO2 film to use for an interlayer insulating film. Alternatively, a porous SOG film is formed by repeating the foregoing step at least one time; or by forming a hydrophobic film on the porous SiO2 film prepared by the foregoing step by the CVD or sputtering technique to thus cap the surface of the porous film; or repeating the porous film-forming and capping steps at least one time. Moreover, after the preparation of the foregoing porous SiO2 film, it is subjected to either of the oxygen plasma-treatment, electron beam-irradiation treatment and UV light-irradiation treatment to remove the unreacted OH groups remaining on the porous film and to thus form a porous SOG film. Further, the foregoing heat-treatment is carried out in the following two stages: in the first stage, the porous film is treated at a temperature capable of mainly removing the water and the alcohol through evaporation thereof; and in the second stage, the porous SiO2 film is treated at a temperature (350 to 450° C.) sufficient for covering at least the inner walls of the holes with the hydrophobic moieties of the surfactant.

    摘要翻译: 通过制备含有有机硅烷,水和醇的有机硅烷溶液,使有机硅烷进行酸水解或碱水解,然后在表面活性剂存在下对所得反应体系进行热处理,从而形成多孔SOG膜 用于层间绝缘膜的多孔SiO 2膜。 或者,通过至少一次重复上述步骤形成多孔SOG膜; 或者通过CVD或溅射技术在上述步骤制备的多孔SiO 2膜上形成疏水膜,从而覆盖多孔膜的表面; 或至少一次重复多孔成膜和封盖步骤。 此外,在制备上述多孔SiO 2膜之后,对其进行氧等离子体处理,电子束照射处理和UV光照射处理,以除去未反应的OH基团 并在多孔膜上形成多孔的SOG膜。 此外,上述热处理在以下两个阶段进行:在第一阶段中,多孔膜在能够主要通过蒸发除去水和醇的温度下进行处理; 并且在第二阶段中,多孔SiO 2膜在足以用表面活性剂的疏水部分覆盖孔的至少内壁的温度(350-450℃)下进行处理。

    Graphite nanofibers, electron-emitting source and method for preparing the same, display element equipped with the electron-emitting source as well as lithium ion secondary battery
    2.
    发明授权
    Graphite nanofibers, electron-emitting source and method for preparing the same, display element equipped with the electron-emitting source as well as lithium ion secondary battery 有权
    石墨纳米纤维,电子发射源及其制备方法,配备电子发射源的显示元件以及锂离子二次电池

    公开(公告)号:US06812634B2

    公开(公告)日:2004-11-02

    申请号:US09775497

    申请日:2001-02-05

    IPC分类号: H01J162

    摘要: A graphite nanofiber material herein provided has a cylindrical structure in which graphene sheets each having an ice-cream cone-like shape whose tip is cut off are put in layers through catalytic metal particles; or a structure in which small pieces of graphene sheets having a shape adapted for the facial shape of a catalytic metal particle are put on top of each other through the catalytic metal particles. The catalytic metal comprises Fe, Co or an alloy including at least one of these metals. The material can be used for producing an electron-emitting source, a display element, which is designed in such a manner that only a desired portion of a luminous body emits light, a negative electrode carbonaceous material for batteries and a lithium ion secondary battery. The electron-emitting source (a cold cathode ray source) has a high electron emission density and an ability of emitting electrons at a low electric field, which have never or less been attained by the carbon nanotube. The negative electrode carbonaceous material for batteries has a high quantity of doped lithium and ensures high charging and discharging efficiencies. Moreover, the lithium ion secondary battery has a sufficiently long cycle life, a fast charging ability and high charging and discharging capacities.

    摘要翻译: 本文提供的石墨纳米纤维材料具有圆柱形结构,其中每个具有切割尖端的冰淇淋锥形的石墨烯片通过催化金属颗粒层叠; 或者通过催化金属颗粒将具有适于催化金属颗粒的面形状的适合形状的小块石墨烯片放置在彼此的结构。 催化金属包括Fe,Co或包含这些金属中的至少一种的合金。 该材料可用于制造电子发射源,显示元件,其设计成只有发光体的所需部分发光,用于电池的负极碳质材料和锂离子二次电池。 电子发射源(冷阴极射线源)具有高的电子发射密度和在低电场下发射电子的能力,这些电子从来没有或通过碳纳米管获得。 用于电池的负极碳质材料具有大量掺杂的锂,并且确保高充电和放电效率。 此外,锂离子二次电池具有足够长的循环寿命,快速充电能力和高充电和放电能力。

    Cathode substrate and its manufacturing method
    3.
    发明申请
    Cathode substrate and its manufacturing method 审中-公开
    阴极基板及其制造方法

    公开(公告)号:US20050230750A1

    公开(公告)日:2005-10-20

    申请号:US11066562

    申请日:2005-02-28

    摘要: A cathode substrate according to the present invention comprises a cathode electrode layer(12), insulator layer(14) and gate electrode layer(15) formed sequentially on a substrate to be processed (11). The insulator layer includes a hole (14a) formed there through. A gate aperture (16) is formed through the gate electrode layer. An emitter (E) is then provided at the bottom of the hole (14a). In this case, the gate aperture comprises a plurality of openings (16a), the total area of which is smaller than the area of top opening of the hole in the insulator layer. The openings are arranged densely at a position opposite to the emitter and just above the hole of the insulator layer.

    摘要翻译: 根据本发明的阴极基板包括依次形成在待处理基板(11)上的阴极电极层(12),绝缘体层(14)和栅电极层(15)。 绝缘体层包括形成在其上的孔(14a)。 通过栅电极层形成栅极孔(16)。 然后在孔(14a)的底部设置发射器(E)。 在这种情况下,栅极孔包括多个开口(16a),其总面积小于绝缘体层中孔的顶部开口面积。 这些开口密集地布置在与发射极相对的位置,并刚好在绝缘体层的孔的正上方。

    CATHODE SUBSTRATE HAVING CATHODE ELECTRODE LAYER, INSULATOR LAYER, AND GATE ELECTRODE LAYER FORMED THEREON
    5.
    发明申请
    CATHODE SUBSTRATE HAVING CATHODE ELECTRODE LAYER, INSULATOR LAYER, AND GATE ELECTRODE LAYER FORMED THEREON 审中-公开
    具有阴极电极层,绝缘体层和形成电极层的阴极基底

    公开(公告)号:US20090325452A1

    公开(公告)日:2009-12-31

    申请号:US12538354

    申请日:2009-08-10

    IPC分类号: H01J9/12

    摘要: A cathode substrate according to the present invention comprises a cathode electrode layer (12), insulator layer (14) and gate electrode layer (15) formed sequentially on a substrate to be processed (11). The insulator layer includes a hole (14a) formed therethrough. A gate aperture (16) is formed through the gate electrode layer. An emitter (E) is then provided at the bottom of the hole (14a). In this case, the gate aperture comprises a plurality of openings (16a), the total area of which is smaller than the area of top opening of the hole in the insulator layer. The openings are arranged densely at a position opposite to the emitter and just above the hole of the insulator layer.

    摘要翻译: 根据本发明的阴极基板包括在待处理基板(11)上依次形成的阴极电极层(12),绝缘体层(14)和栅极电极层(15)。 绝缘体层包括穿过其形成的孔(14a)。 通过栅电极层形成栅极孔(16)。 然后在孔(14a)的底部设置发射器(E)。 在这种情况下,栅极孔包括多个开口(16a),其总面积小于绝缘体层中孔的顶部开口面积。 这些开口密集地布置在与发射极相对的位置,并刚好在绝缘体层的孔的正上方。

    Method for forming a carbon nanotube and a plasma CVD apparatus for carrying out the method
    6.
    发明申请
    Method for forming a carbon nanotube and a plasma CVD apparatus for carrying out the method 审中-公开
    用于形成碳纳米管的方法和用于实施该方法的等离子体CVD装置

    公开(公告)号:US20060078680A1

    公开(公告)日:2006-04-13

    申请号:US11122232

    申请日:2005-05-05

    IPC分类号: D01F9/12 C23C16/26 C23C16/00

    摘要: In forming a carbon nanotube on the surface of a substrate surface by the plasma CVD method in accordance with the prior art, since the substrate is heated by plasma, it is difficult to suitably control the temperature of substrate and thus impossible to form the carbon nanotube at a low temperature. According to the present invention there is provided a method for forming a carbon nanotube comprising steps of introducing a carbon included feedstock gas into a vacuum chamber; generating plasma so that a substrate is not exposed to plasma during a vapor phase growth of the carbon nanotube on a substrate surface; heating the substrate to a predetermined temperature by using a heater; and promoting the growth of the carbon nanotube on the substrate surface with it being contacted by the feedstock gas decomposed by plasma.

    摘要翻译: 在根据现有技术的等离子体CVD方法在基板表面的表面上形成碳纳米管时,由于基板被等离子体加热,因此难以适当地控制基板的温度,因此难以形成碳纳米管 在低温下。 根据本发明,提供一种形成碳纳米管的方法,包括将含碳原料气体引入真空室的步骤; 产生等离子体,使得在碳纳米管在基板表面上的气相生长期间基板不暴露于等离子体; 通过使用加热器将基板加热到预定温度; 以及促进碳纳米管在基板表面上的生长,并与被等离子体分解的原料气接触。

    TEST ELEMENT, TEST KIT, TEST DEVICE, AND TEST METHOD
    7.
    发明申请
    TEST ELEMENT, TEST KIT, TEST DEVICE, AND TEST METHOD 审中-公开
    测试元件,测试套件,测试设备和测试方法

    公开(公告)号:US20120064559A1

    公开(公告)日:2012-03-15

    申请号:US13207690

    申请日:2011-08-11

    IPC分类号: C12Q1/28 C12Q1/26 C12M1/34

    摘要: According to one embodiment, a test element includes a base, a pair of optical element units, an optical waveguide unit, a detection unit and a holding unit. The base has transparency. The pair of optical element units are arranged away from each other on a major surface of the base. The optical waveguide unit is provided on the major surface of the base. The detection unit is provided on a major surface of the optical waveguide unit of between the optical element units. The major surface of the optical waveguide unit is an opposite side which touches the base. The holding unit is in a frame shape, and one end of the holding unit being is provided to protrude from a major surface of the detection unit. The detection unit includes a color former and a film-formed body holding the color former.

    摘要翻译: 根据一个实施例,测试元件包括基座,一对光学元件单元,光波导单元,检测单元和保持单元。 基地有透明度。 一对光学元件单元在基座的主表面上彼此远离布置。 光波导单元设置在基座的主表面上。 检测单元设置在光学元件单元之间的光波导单元的主表面上。 光波导单元的主表面是与基座接触的相对侧。 保持单元是框架形状,并且保持单元的一端设置成从检测单元的主表面突出。 检测单元包括着色剂和保持着色剂的成膜体。

    OPTICAL GLUCOSE SENSOR CHIP AND METHOD OF MANUFACTURING THE SAME
    8.
    发明申请
    OPTICAL GLUCOSE SENSOR CHIP AND METHOD OF MANUFACTURING THE SAME 失效
    光学葡萄糖传感器芯片及其制造方法

    公开(公告)号:US20100221408A1

    公开(公告)日:2010-09-02

    申请号:US12771343

    申请日:2010-04-30

    IPC分类号: B05D3/00

    摘要: An optical glucose sensor chip includes a substrate, a pair of optical elements formed on a surface of the substrate for introducing light into the substrate and for emitting the light from the substrate, and a glucose sensing membrane formed on the surface of the substrate at a position between the optical elements. The sensing membrane includes a color reagent substrate, a first enzyme which oxidizes or reduces glucose, a second enzyme that generates a material which makes the color reagent substrate exhibit color by a reaction with a product obtained by oxidation or reduction of glucose, a nonionic cellulose derivative, and an ionic polymer into which a buffer is incorporated. At least one of the first and second enzymes is coated with the ionic polymer, and the color reagent substrate. The first and second enzymes, the buffer and the ionic polymer are supported by the nonionic cellulose derivative.

    摘要翻译: 光学葡萄糖传感器芯片包括:基板,形成在基板的表面上的一对光学元件,用于将光引入基板并从基板发射光;以及葡萄糖感测膜,其形成在基板的表面上 光学元件之间的位置。 检测膜包括着色试剂底物,氧化或降低葡萄糖的第一种酶,产生通过与通过氧化或还原葡萄糖获得的产物的反应而使着色试剂底物显色的第二种酶,非离子型纤维素 衍生物和其中加入缓冲剂的离子聚合物。 第一和第二酶中的至少一种用离子聚合物和着色剂底物涂覆。 第一和第二酶,缓冲液和离子聚合物由非离子纤维素衍生物负载。

    OPTICAL GLUCOSE SENSOR CHIP AND METHOD OF MANUFACTURING THE SAME
    10.
    发明申请
    OPTICAL GLUCOSE SENSOR CHIP AND METHOD OF MANUFACTURING THE SAME 审中-公开
    光学葡萄糖传感器芯片及其制造方法

    公开(公告)号:US20080020454A1

    公开(公告)日:2008-01-24

    申请号:US11780033

    申请日:2007-07-19

    IPC分类号: C12M1/00

    摘要: An optical glucose sensor chip includes a substrate, a pair of optical elements formed on a surface of the substrate for introducing light into the substrate and for emitting the light from the substrate, and a glucose sensing membrane formed on the surface of the substrate at a position between the optical elements. The sensing membrane includes a color reagent substrate, a first enzyme which oxidizes or reduces glucose, a second enzyme that generates a material which makes the color reagent substrate exhibit color by a reaction with a product obtained by oxidation or reduction of glucose, a nonionic cellulose derivative, and an ionic polymer into which a buffer is incorporated. At least one of the first and second enzymes is coated with the ionic polymer, and the color reagent substrate. The first and second enzymes, the buffer and the ionic polymer are supported by the nonionic cellulose derivative.

    摘要翻译: 光学葡萄糖传感器芯片包括:基板,形成在基板的表面上的一对光学元件,用于将光引入基板并从基板发射光;以及葡萄糖感测膜,其形成在基板的表面上 光学元件之间的位置。 检测膜包括着色试剂底物,氧化或降低葡萄糖的第一种酶,产生通过与通过氧化或还原葡萄糖获得的产物的反应而使着色试剂底物显色的第二种酶,非离子型纤维素 衍生物和其中加入缓冲剂的离子聚合物。 第一和第二酶中的至少一种用离子聚合物和着色剂底物涂覆。 第一和第二酶,缓冲液和离子聚合物由非离子纤维素衍生物负载。