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17 条记录 (耗时 0.03 秒)

    Sputter-deposited nickel layer
    2.
    发明授权
    Sputter-deposited nickel layer 失效
    溅镀镍层

    公开(公告)号：US5876861A

    公开(公告)日：1999-03-02

    申请号：US650437

    申请日：1996-05-20

    申请人： Ichiharu Kondo ,  Takao Yoneyama ,  Masami Yamaoka ,  Osamu Takenaka

    发明人： Ichiharu Kondo ,  Takao Yoneyama ,  Masami Yamaoka ,  Osamu Takenaka

    IPC分类号： C30B28/12 ,  C23C14/02 ,  C23C14/14 ,  C23C14/16 ,  C23C14/18 ,  C23C14/34 ,  C30B29/02 ,  H01L21/28 ,  H01L21/285 ,  H01L29/45 ,  B32B15/04

    CPC分类号： C23C14/025 ,  C23C14/16 ,  C23C14/165 ,  C23C14/18 ,  H01L29/456 ,  Y10T428/12674 ,  Y10T428/12889 ,  Y10T428/12944 ,  Y10T428/26

    摘要： Disclosed is a nickel layer formed on a substrate by sputtering, in which nickel layer a percent ratio of an X-ray diffraction peak intensity of the (200) plane of the nickel layer to that of the (111) plane of the nickel layer is not less than 10%. This nickel layer has a reduced stress, and therefore, lessens a bending of a substrate. The nickel layer is formed by a process for sputtering nickel on a substrate, comprising supplying an argon gas into a vacuum chamber, adjusting a pressure of the argon gas in the vacuum chamber to a predetermined value, ionizing the argon gas, bombarding a target containing nickel with the ionized argon gas, to sputter nickel atoms, and depositing the sputtered nickel atoms onto the substrate, wherein the predetermined pressure of the argon gas is not lower than 12 mTorr.

    摘要翻译： 公开了通过溅射在基板上形成的镍层，镍层的镍层的（200）面的X射线衍射峰强度与镍层的（111）面的X射线衍射峰强度的百分比为 不低于10％。 该镍层具有减小的应力，因此减小了基板的弯曲。 镍层通过在基板上溅射镍的方法形成，包括将氩气供应到真空室中，将真空室中的氩气压力调节至预定值，电离氩气，轰击含有 镍与电离氩气溅射镍原子，并将溅射的镍原子沉积到衬底上，其中氩气的预定压力不低于12mTorr。

    Method of forming electrodes of semiconductor device
    3.
    发明授权
    Method of forming electrodes of semiconductor device 失效
    形成半导体器件电极的方法

    公开(公告)号：US5360765A

    公开(公告)日：1994-11-01

    申请号：US914623

    申请日：1992-07-17

    申请人： Ichiharu Kondo ,  Takao Yoneyama ,  Masami Yamaoka

    发明人： Ichiharu Kondo ,  Takao Yoneyama ,  Masami Yamaoka

    IPC分类号： H01L21/285 ,  H01L29/08

    CPC分类号： H01L29/7802 ,  H01L21/28518 ,  H01L29/456 ,  H01L29/66712 ,  Y10S438/906

    摘要： A method for forming electrodes with strong adhesion strength for a semiconductor device is provided. The adhesion strength between a Si substrate and a Ti film is made higher than the pulling stress of a Ni film. Before an electrode is formed using sputtering process, the natural oxide film grown on a semiconductor substrate is removed using an Ar reverse sputtering while the top surface of the silicon substrate is converted to an amorphous through a bombardment and introduction of Ar. While Ti is deposited, a Si-Ti amorphous layer is formed in the Si/Ti interface. In this case, the amount of Ar atoms is controlled less than 4.0.times.10.sup.14 atoms/cm.sup.2. The Ar amount also can be controlled by adjusting the conditions such as the output or cathodic voltage of Ar reverse sputtering and decreasing the absolute value of Ar in the amorphous Si layer. Also the Ar amount can be controlled by diffusing Ar atoms into the substrate at more than about 300.degree. C. during Ti film deposition to diverse the Ar distribution. As a result argon atoms which concentrates at the interface do not affect with respect to the Si-Ti amorphous layer, whereby the bonding strength of the amorphous layer is maintained. Therefore, the strong adhesion strength between Si and Ti can provide a sufficient durability against the film stress of the Ni film.

    摘要翻译： 提供了一种用于形成用于半导体器件的具有强粘合强度的电极的方法。 使Si衬底和Ti膜之间的粘合强度高于Ni膜的拉伸应力。 在使用溅射法形成电极之前，使用Ar反溅射除去在半导体衬底上生长的天然氧化物膜，同时通过轰击和引入Ar将硅衬底的顶表面转化为无定形。 当沉积Ti时，在Si / Ti界面中形成Si-Ti非晶层。 在这种情况下，Ar原子的量控制在4.0×1014原子/ cm2以下。 Ar量也可以通过调节Ar逆溅射的输出或阴极电压等条件来降低非晶硅层中的绝对值Ar来控制。 此外，Ar量可以通过在Ti膜沉积期间将Ar原子扩散到基底中超过约300℃来控制，以使Ar分布变得多样化。 结果，在界面处浓缩的氩原子相对于Si-Ti非晶层不会受到影响，由此保持非晶层的结合强度。 因此，Si和Ti之间的强粘合强度可以提供足够的抗Ni膜的膜应力的耐久性。

    Method and apparatus for detecting metal wipe damages of plane bearing
    4.
    发明授权
    Method and apparatus for detecting metal wipe damages of plane bearing 失效
    用于检测平面轴承金属擦拭损伤的方法和装置

    公开(公告)号：US4481819A

    公开(公告)日：1984-11-13

    申请号：US465183

    申请日：1983-02-09

    申请人： Takao Yoneyama ,  Ichiya Satoh ,  Sanshiro Obara ,  Tomoaki Inoue ,  Tsuguaki Koga

    发明人： Takao Yoneyama ,  Ichiya Satoh ,  Sanshiro Obara ,  Tomoaki Inoue ,  Tsuguaki Koga

    IPC分类号： F16C17/24 ,  G01H17/00 ,  G01N29/14 ,  G01N29/04

    CPC分类号： G01N29/14

    摘要： A method and apparatus for detecting metal wipe damages of plane bearings with the metal wipe generating an ultrasonic signal as an acoustic emission signal when it occurs. The ultrasonic signal has a periodic appearance therefore, the metal wipe damages, can be detected by monitoring the periodic nature of the ultrasonic signal. The ultrasonic signal is received by a transducer fixed to the plane bearing with the periodic nature of the received ultrasonic signal being computed by a processing unit so as to provide a output signal of the occurrence of a metal wipe when the received ultrasonic signal is periodic.

    摘要翻译： 用金属擦拭物检测平面轴承的金属擦拭损伤的方法和装置，当发生超声信号时产生超声波信号作为声发射信号。 因此，通过监视超声波信号的周期性，可以检测出超声信号具有周期性外观，金属擦拭损伤。 所述超声波信号由固定于所述平面轴承的换能器接收，所述接收的超声波信号的周期性质由处理单元计算，以便当所接收的超声波信号为周期性时提供金属擦拭物的发生的输出信号。

    Rotating machinery diagnosis system with acoustic emission technique
    5.
    发明授权
    Rotating machinery diagnosis system with acoustic emission technique 失效
    旋转机械诊断系统采用声发射技术

    公开(公告)号：US4669315A

    公开(公告)日：1987-06-02

    申请号：US884897

    申请日：1986-07-14

    申请人： Ichiya Sato ,  Takao Yoneyama

    发明人： Ichiya Sato ,  Takao Yoneyama

    IPC分类号： G01M99/00 ,  G01H1/00 ,  G01N29/14 ,  G01N29/04

    CPC分类号： G01N29/4454 ,  G01H1/003 ,  G01N29/14 ,  G01N2291/2693

    摘要： Disclosed is a rotating machinery diagnosis system with an AE technique, which comprises: an AE sensor mounted on a rotary machine for sensing an acoustic signal of the rotary machine; envelope detector means for obtaining an envelope signal from the acoustic signal from the AE sensor; waveform-feature processor means for performing signal processing so as to detect a feature of waveform of an output waveform signal from the envelope detector means; feature decision means for judging whether the feature of waveform belongs to a continuous type or a burst type and/or to a rotation-synchronous type or a rotation-asynchronous type on the basis of an output signal from the waveform-feature processor means; and diagnostic output means for outputting and displaying an output signal from the feature decision means, whereby it is possible to perform judgement simultaneously as to a plurality of kinds of abnormality.

    摘要翻译： 公开了一种具有AE技术的旋转机械诊断系统，其包括：安装在旋转机器上的用于感测旋转机器的声信号的AE传感器; 包络检测器装置，用于从来自AE传感器的声信号获得包络信号; 波形特征处理器装置，用于执行信号处理，以便检测来自包络检测器装置的输出波形信号波形的特征; 特征判定装置，用于根据来自波形特征处理器装置的输出信号判断波形的特征是属于连续型还是突发型，和/或旋转同步型或旋转异步型; 以及用于输出和显示来自特征判定装置的输出信号的诊断输出装置，由此可以同时执行关于多种异常的判断。

    Tablet type coordinate input apparatus using elastic wave
    6.
    发明授权
    Tablet type coordinate input apparatus using elastic wave 失效
    平板式坐标输入装置使用弹性波

    公开(公告)号：US4665282A

    公开(公告)日：1987-05-12

    申请号：US758463

    申请日：1985-07-24

    申请人： Ichiya Sato ,  Takao Yoneyama ,  Masanori Tanabe ,  Kanji Kawakami ,  Hisao Okada ,  Soji Sasaki ,  Shigeru Inose ,  Mareo Suto ,  Hideo Uzuhashi

    发明人： Ichiya Sato ,  Takao Yoneyama ,  Masanori Tanabe ,  Kanji Kawakami ,  Hisao Okada ,  Soji Sasaki ,  Shigeru Inose ,  Mareo Suto ,  Hideo Uzuhashi

    IPC分类号： G06F3/033 ,  G06F3/043 ,  G08C21/00

    CPC分类号： G06F3/0433

    摘要： A tablet type coordinate input apparatus comprises a flat medium for propagating a longitudinal elastic wave, longitudinal elastic wave detecting elements disposed on part of the end-adjacent side surfaces or of the front surface of the flat medium, a longitudinal elastic wave input member having an end portion terminating in a sharp-pointed end and brought into pressure engagement at that end with any desired position on the surface of the flat medium to radiate the longitudinal elastic wave from that end, an amplifier circuit amplifying electrical signals indicative of the elastic wave detected by the detecting elements, a comparator circuit comparing the signals amplified by the amplifier circuit with a predetermined threshold voltage thereby generating delay pulse signals corresponding to the propagation times of the longitudinal elastic wave, a counter circuit counting the lengths of time elapsed from the time of radiation of the longitudinal elastic wave toward the flat medium as a result of pressure engagement of the input member therewith to the time of generation of the delay pulse signals, and a computing circuit computing the coordinates on the basis of the time signals applied from the counter circuit.

    摘要翻译： 平板式坐标输入装置包括用于传播纵向弹性波的平坦介质，设置在平坦介质的端部相邻侧表面或前表面的一部分上的纵向弹性波检测元件，纵向弹性波输入构件，具有 端部终止于尖锐的端部，并在该端部与平坦介质的表面上的任何期望位置进行压力接合，以从该端射出纵向弹性波，放大器电路放大指示检测到的弹性波的电信号 通过检测元件，比较器电路将由放大器电路放大的信号与预定阈值电压进行比较，从而产生对应于纵向弹性波的传播时间的延迟脉冲信号;计数电路对从 纵向弹性波向平坦介质辐射 由此输入构件与其之间的压力接合产生延迟脉冲信号的时间，以及计算电路根据从计数器电路施加的时间信号计算坐标。

    Method and apparatus for detecting rubbing in a rotary machine
    9.
    发明授权
    Method and apparatus for detecting rubbing in a rotary machine 失效
    用于检测旋转机器中的摩擦的方法和装置

    公开(公告)号：US4478082A

    公开(公告)日：1984-10-23

    申请号：US408949

    申请日：1982-08-17

    申请人： Ichiya Sato ,  Takao Yoneyama ,  Tsuguaki Koga ,  Kazuo Ikeuchi ,  Katsukuni Hisano

    发明人： Ichiya Sato ,  Takao Yoneyama ,  Tsuguaki Koga ,  Kazuo Ikeuchi ,  Katsukuni Hisano

    IPC分类号： G01M13/04 ,  G01H1/00 ,  G01H1/04 ,  G01H17/00 ,  G01M99/00 ,  G01N29/12 ,  G01M13/00

    CPC分类号： G01N29/12 ,  G01H1/003 ,  G01N2291/014 ,  G01N2291/101 ,  G01N2291/2693

    摘要： A method and apparatus for detecting the occurrence of rubbing in a rotary machine, in which at least one acoustic sensor is mounted on at least the rotor part or the stator part of the rotary machine, and the output signal from the acoustic sensor is detected and then filtered to extract a frequency component having a frequency substantially equal to the rotational frequency of the rotary machine, so as to detect the occurrence of rubbing in the rotary machine as early as possible and also to locate the source of the rubbing. Even when the occurrence of abnormal metal-to-metal contact at a bearing of the rotary machine is detected, it is discriminated from rubbing so that the occurrence of the rubbing can be reliably detected.

    摘要翻译： 一种在旋转机器中检测摩擦发生的方法和装置，其中至少一个声传感器安装在至少旋转机器的转子部分或定子部分上，并且检测来自声传感器的输出信号， 然后过滤以提取频率基本上等于旋转机的旋转频率的频率分量，以便尽可能早地检测旋转机器中的摩擦的发生并且还可以定位摩擦源。 即使检测到在旋转机械的轴承处发生异常金属对金属的接触，也可以将其与摩擦进行区别，从而能够可靠地检测摩擦的发生。