Reduced metal design rules for power devices
    2.
    发明授权
    Reduced metal design rules for power devices 有权
    减少功率器件的金属设计规则

    公开(公告)号:US07517810B2

    公开(公告)日:2009-04-14

    申请号:US11441843

    申请日:2006-05-26

    IPC分类号: H01L21/302

    CPC分类号: H01L21/32134 H01L21/32136

    摘要: A process for etching a thick aluminum contact layer of a semiconductor wafer comprises the formation of a wet etch photoresist mask and the opening of a window in the mask, followed by a wet etch of a first portion of the thickness of the contact layer exposed by the window and the inherent under cutting of the contact layer under the mask window. A dry etch is next carried out, using the same window as a mask, to cut the remaining web of the contact layer under the window. An etch stop layer of Ti or TiN can be formed within the body of the contact layer to define the depth of the initial wet etch into the contact layer.

    摘要翻译: 用于蚀刻半导体晶片的厚铝接触层的方法包括形成湿蚀刻光刻胶掩模和在掩模中打开窗口,随后湿式蚀刻暴露于接触层的厚度的第一部分 窗口和掩模窗下方的接触层固有的切割下。 接下来,使用与掩模相同的窗口进行干法蚀刻,以在窗下方切割接触层的剩余网。 可以在接触层的主体内形成Ti或TiN的蚀刻停止层,以限定初始湿蚀刻到接触层中的深度。

    Top drain fet with integrated body short
    6.
    发明授权
    Top drain fet with integrated body short 有权
    顶部排水胎,整体身体短

    公开(公告)号:US07456470B2

    公开(公告)日:2008-11-25

    申请号:US11238207

    申请日:2005-09-29

    申请人: David Paul Jones

    发明人: David Paul Jones

    IPC分类号: H01L27/108

    摘要: A top drain MOSgated device has its drain on the top of semiconductor die and its source on the bottom of the die substrate. Parallel spaced trenches extend from the die top surface through a drift region, a channel region and terminate on the substrate region. The bottoms of each trench receive a silicide conductor to short the substrate source to channel regions. The silicide conductors are then insulated at their top surfaces and gate electrodes are placed in the same trenches as those receiving the channel/source short.

    摘要翻译: 顶漏MOS器件的漏极位于半导体管芯的顶部,其源极在管芯基板的底部。 平行隔开的沟槽从模具顶表面延伸穿过漂移区域,沟道区域并终止在衬底区域上。 每个沟槽的底部接收硅化物导体以将衬底源短路至沟道区。 然后,硅化物导体在其顶表面处被绝缘,并且栅电极被放置在与接收沟道/源短的沟槽相同的沟槽中。

    Buck converter power package
    8.
    发明授权
    Buck converter power package 有权
    降压转换器电源封装

    公开(公告)号:US08860194B2

    公开(公告)日:2014-10-14

    申请号:US13666854

    申请日:2012-11-01

    IPC分类号: H01L23/495

    摘要: One exemplary disclosed embodiment comprises a semiconductor package including a vertical conduction control transistor and a vertical conduction sync transistor. The vertical conduction control transistor may include a control source, a control gate, and a control drain that are all accessible from a bottom surface, thereby enabling electrical and direct surface mounting to a support surface. The vertical conduction sync transistor may include a sync drain on a top surface, which may be connected to a conductive clip that is coupled to the support surface. The conductive clip may also be thermally coupled to the control transistor. Accordingly, all terminals of the transistors are readily accessible through the support surface, and a power circuit, such as a buck converter power phase, may be implemented through traces of the support surface. Optionally, a driver IC may be integrated into the package, and a heatsink may be attached to the conductive clip.

    摘要翻译: 一个示例性的公开的实施例包括包括垂直导通控制晶体管和垂直导通同步晶体管的半导体封装。 垂直传导控制晶体管可以包括控制源,控制栅极和控制漏极,其都可从底表面接近,从而使电和直接表面安装到支撑表面。 垂直导通同步晶体管可以包括顶表面上的同步漏极,其可以连接到耦合到支撑表面的导电夹子。 导电夹子也可以热耦合到控制晶体管。 因此,晶体管的所有端子容易通过支撑表面接近,并且诸如降压转换器电源相的功率电路可以通过支撑表面的迹线来实现。 可选地,驱动器IC可以集成到封装中,并且散热器可以附接到导电夹子。