Semiconductor integrated circuits including optoelectronic device for changing optical phase
    1.
    发明授权
    Semiconductor integrated circuits including optoelectronic device for changing optical phase 有权
    包括用于改变光学相位的光电器件的半导体集成电路

    公开(公告)号:US08422834B2

    公开(公告)日:2013-04-16

    申请号:US12746167

    申请日:2008-06-03

    CPC classification number: G02F1/218 G02F2001/212 G02F2201/302

    Abstract: Provided is a semiconductor integrated circuit. The semiconductor integrated circuit includes a semiconductor pattern disposed on a substrate and including an optical waveguide part and a pair of recessed portions. The optical waveguide part has a thickness ranging from about 0.05 μm to about 0.5 μm. The recessed portions are disposed on both sides of the optical waveguide part and have a thinner thickness than the optical waveguide part. A first doped region and a second doped region are disposed in the recessed portions, respectively. The first and second doped regions are doped with a first conductive type dopant and a second conductive type dopant, respectively. An intrinsic region is formed in at least the optical waveguide part to contact the first and second doped regions.

    Abstract translation: 提供了一种半导体集成电路。 半导体集成电路包括设置在基板上并且包括光波导部分和一对凹部的半导体图案。 光波导部分的厚度范围为约0.05μm至约0.5μm。 凹部设置在光波导部分的两侧,并且具有比光波导部分更薄的厚度。 第一掺杂区域和第二掺杂区域分别设置在凹部中。 第一和第二掺杂区域分别掺杂有第一导电型掺杂剂和第二导电型掺杂剂。 在至少光波导部分中形成本征区域以接触第一和第二掺杂区域。

    SEMICONDUCTOR INTEGRATED CIRCUITS INCLUDING OPTOELECTRONIC DEVICE FOR CHANGING OPTICAL PHASE
    2.
    发明申请
    SEMICONDUCTOR INTEGRATED CIRCUITS INCLUDING OPTOELECTRONIC DEVICE FOR CHANGING OPTICAL PHASE 有权
    半导体集成电路,包括用于改变光学相位的光电器件

    公开(公告)号:US20100278477A1

    公开(公告)日:2010-11-04

    申请号:US12746167

    申请日:2008-06-03

    CPC classification number: G02F1/218 G02F2001/212 G02F2201/302

    Abstract: Provided is a semiconductor integrated circuit. The semiconductor integrated circuit includes a semiconductor pattern disposed on a substrate and including an optical waveguide part and a pair of recessed portions. The optical waveguide part has a thickness ranging from about 0.05 m to about 0.5 μm. The recessed portions are disposed on both sides of the optical waveguide part and have a thinner thickness than the optical waveguide part. A first doped region and a second doped region are disposed in the recessed portions, respectively. The first and second doped regions are doped with a first conductive type dopant and a second conductive type dopant, respectively. An intrinsic region is formed in at least the optical waveguide part to contact the first and second doped regions.

    Abstract translation: 提供了一种半导体集成电路。 半导体集成电路包括设置在基板上并且包括光波导部分和一对凹部的半导体图案。 光波导部分的厚度范围为约0.05μm至约0.5μm。 凹部设置在光波导部分的两侧,并且具有比光波导部分更薄的厚度。 第一掺杂区域和第二掺杂区域分别设置在凹部中。 第一和第二掺杂区域分别掺杂有第一导电型掺杂剂和第二导电型掺杂剂。 在至少光波导部分中形成本征区域以接触第一和第二掺杂区域。

    SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
    4.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME 有权
    半导体器件及其形成方法

    公开(公告)号:US20100301448A1

    公开(公告)日:2010-12-02

    申请号:US12847974

    申请日:2010-07-30

    CPC classification number: H01L21/76267 H01L21/76283

    Abstract: Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.

    Abstract translation: 提供半导体及其形成方法。 该方法包括在衬底中局部形成掩埋绝缘层。 蚀刻衬底以形成露出掩埋绝缘层的开口,并且在掩埋绝缘层上形成从衬底至少一个方向间隔开的硅图案。 形成第一绝缘层以包围硅图案。

    METHOD OF FORMING OPTICAL WAVEGUIDE
    5.
    发明申请
    METHOD OF FORMING OPTICAL WAVEGUIDE 有权
    形成光波导的方法

    公开(公告)号:US20100144075A1

    公开(公告)日:2010-06-10

    申请号:US12491443

    申请日:2009-06-25

    CPC classification number: G02B6/136 G02B6/132

    Abstract: Provided is a method of forming optical waveguide. The method includes forming a trench on a semiconductor substrate to define an active portion, and partially oxidizing the active portion. An non-oxidized portion of the active portion is included in a core through which an optical signal passes, and an oxidized portion of the active portion is included in a cladding.

    Abstract translation: 提供一种形成光波导的方法。 该方法包括在半导体衬底上形成沟槽以限定有源部分,并部分氧化活性部分。 有源部分的非氧化部分包括在光信号通过的芯中,有源部分的氧化部分包含在包层中。

    Waveguide structure
    6.
    发明授权
    Waveguide structure 失效
    波导结构

    公开(公告)号:US07693384B2

    公开(公告)日:2010-04-06

    申请号:US12111884

    申请日:2008-04-29

    CPC classification number: G02B6/12007

    Abstract: A waveguide structure is provided. The waveguide structure includes: a slot channel waveguide including first and second patterns, which are spaced apart from each other to define a slot; a first upper layer covering at least a portion of the slot channel waveguide; and a second upper layer covering the remaining portion of the slot channel waveguide. A thermo-optic coefficient (TOC) of the channel waveguide times a TOC of the second upper layer is a negative number.

    Abstract translation: 提供了一种波导结构。 波导结构包括:缝隙通道波导,包括第一和第二图案,它们彼此间隔开以限定狭槽; 覆盖所述槽道波导的至少一部分的第一上层; 以及覆盖槽道波导的剩余部分的第二上层。 通道波导的热光系数(TOC)乘以第二上层的TOC是负数。

    GAS SENSING APPARATUS AND METHOD OF SENSING GAS USING THE SAME
    8.
    发明申请
    GAS SENSING APPARATUS AND METHOD OF SENSING GAS USING THE SAME 有权
    气体感测装置和使用该气体的气体感测方法

    公开(公告)号:US20090153864A1

    公开(公告)日:2009-06-18

    申请号:US12111864

    申请日:2008-04-29

    CPC classification number: G01N21/3504

    Abstract: Provided are a gas sensing apparatus and a gas sensing method using the apparatus. The gas sensing apparatus includes a detection chamber, a light source, a light sensor, a gas source, and a controller. The light source is disposed at one end of the detection chamber, and a light sensor is disposed at the other end of the detection chamber. The gas source provides gas to the detection chamber. The controller controls the light source and the light sensor. The light source includes a laser supplying laser light, and a light scanner reflecting and scanning the laser light in the detection chamber. The controller includes a phase sensitive detector electrically connected to the light sensor.

    Abstract translation: 提供了一种使用该装置的气体感测装置和气体感测方法。 气体感测装置包括检测室,光源,光传感器,气体源和控制器。 光源设置在检测室的一端,光检测器设置在检测室的另一端。 气体源向检测室提供气体。 控制器控制光源和光传感器。 光源包括提供激光的激光和在检测室中反射和扫描激光的光扫描器。 控制器包括电连接到光传感器的相敏检测器。

    WAVEGUIDE STRUCTURE AND ARRAYED WAVEGUIDE GRATING STRUCTURE
    10.
    发明申请
    WAVEGUIDE STRUCTURE AND ARRAYED WAVEGUIDE GRATING STRUCTURE 有权
    波导结构和阵列波导光栅结构

    公开(公告)号:US20090252457A1

    公开(公告)日:2009-10-08

    申请号:US12199517

    申请日:2008-08-27

    CPC classification number: G02B6/12011 G02B2006/12119

    Abstract: Provided are a waveguide structure and an arrayed waveguide grating structure. The arrayed waveguide grating structure includes an input star coupler, an output star coupler, and a plurality of arrayed waveguides optically connecting the input star coupler and the output star coupler. Each of the arrayed waveguides includes at least one section having a high confinement factor and at least two sections having a relatively low confinement factor. The sections of the arrayed waveguides having a high confinement factor have the same structure.

    Abstract translation: 提供了一种波导结构和阵列波导光栅结构。 阵列波导光栅结构包括输入星形耦合器,输出星形耦合器以及光学地连接输入星形耦合器和输出星形耦合器的多个阵列波导。 每个阵列波导包括具有高约束因子的至少一个部分和具有相对较低约束因子的至少两个部分。 具有高约束因子的阵列波导的部分具有相同的结构。

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