Ultrafast laser generating system and method thereof
    5.
    发明授权
    Ultrafast laser generating system and method thereof 有权
    超快激光发生系统及其方法

    公开(公告)号:US08774239B2

    公开(公告)日:2014-07-08

    申请号:US13372841

    申请日:2012-02-14

    IPC分类号: H01S3/10 H04B10/17

    摘要: An ultrafast laser generating system comprises a laser signal generator, a laser signal amplifier and a beam splitting element. The laser signal generator is configured to generate a first nanosecond pulse laser. The laser amplifier is configured to amplify the first nanosecond pulse laser from the laser signal generator so as to generate a second nanosecond pulse laser, which includes a picosecond pulse laser. The beam splitting element is configured to receive the second nanosecond pulse laser and split the picosecond pulse laser from the second nanosecond pulse laser.

    摘要翻译: 超快激光发生系统包括激光信号发生器,激光信号放大器和分束元件。 激光信号发生器被配置为产生第一纳秒脉冲激光器。 激光放大器被配置为放大来自激光信号发生器的第一纳秒脉冲激光器,以便产生包括皮秒脉冲激光器的第二纳秒脉冲激光器。 分束元件被配置为接收第二纳秒脉冲激光器并从第二纳秒脉冲激光器分离皮秒脉冲激光器。

    Micro-electromechanical system device having electrical insulating structure and manufacturing methods
    7.
    发明授权
    Micro-electromechanical system device having electrical insulating structure and manufacturing methods 有权
    具有电绝缘结构和制造方法的微机电系统装置

    公开(公告)号:US08695426B2

    公开(公告)日:2014-04-15

    申请号:US13220068

    申请日:2011-08-29

    IPC分类号: G01C19/56

    摘要: The disclosure relates to a micro-electromechanical system (MEMS) device having an electrical insulating structure. The MEMS device includes at least one moving part, at least one anchor, at least one spring and an insulating layer. The spring is connected to the anchor and to the moving part. The insulating layer is disposed in the moving part and the anchor. Each of the moving part and the anchor is divided into two conductive portions by the insulating layer. Whereby, the electrical signals of different moving parts are transmitted through the insulated electrical paths which are not electrically connected.

    摘要翻译: 本公开涉及具有电绝缘结构的微机电系统(MEMS)装置。 MEMS器件包括至少一个移动部件,至少一个锚固件,至少一个弹簧和绝缘层。 弹簧连接到锚固件和移动部件。 绝缘层设置在移动部分和锚中。 移动部分和锚固体中的每一个被绝缘层分成两个导电部分。 由此,不同运动部件的电信号通过未电气连接的绝缘电路传输。

    MICRO-ELECTROMECHANICAL SYSTEM DEVICE HAVING ELECTRICAL INSULATING STRUCTURE AND MANUFACTURING METHODS
    8.
    发明申请
    MICRO-ELECTROMECHANICAL SYSTEM DEVICE HAVING ELECTRICAL INSULATING STRUCTURE AND MANUFACTURING METHODS 有权
    具有电气绝缘结构和制造方法的微电子系统装置

    公开(公告)号:US20120160027A1

    公开(公告)日:2012-06-28

    申请号:US13220068

    申请日:2011-08-29

    IPC分类号: G01C19/02 H01L21/02

    摘要: The disclosure relates to a micro-electromechanical system (MEMS) device having an electrical insulating structure. The MEMS device includes at least one moving part, at least one anchor, at least one spring and an insulating layer. The spring is connected to the anchor and to the moving part. The insulating layer is disposed in the moving part and the anchor. Each of the moving part and the anchor is divided into two conductive portions by the insulating layer. Whereby, the electrical signals of different moving parts are transmitted through the insulated electrical paths which are not electrically connected.

    摘要翻译: 本公开涉及具有电绝缘结构的微机电系统(MEMS)装置。 MEMS器件包括至少一个移动部件,至少一个锚固件,至少一个弹簧和绝缘层。 弹簧连接到锚固件和移动部件。 绝缘层设置在移动部分和锚中。 移动部分和锚固体中的每一个被绝缘层分成两个导电部分。 由此,不同运动部件的电信号通过未电气连接的绝缘电路传输。

    Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same
    9.
    发明授权
    Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same 有权
    将微机电系统装置与电路芯片集成的装置及其制造方法

    公开(公告)号:US09227841B2

    公开(公告)日:2016-01-05

    申请号:US14274118

    申请日:2014-05-09

    摘要: One embodiment discloses an apparatus integrating a microelectromechanical system device with a circuit chip which includes a circuit chip, a microelectromechanical system device, a sealing ring, and a lid. The circuit chip comprises a substrate and a plurality of metal bonding areas. The substrate has an active surface with electrical circuit area, and the metal bonding areas are disposed on the active surface and electrically connected to the electrical circuits. The microelectromechanical system device comprises a plurality of bases and at least one sensing element. The bases are connected to at least one of the metal bonding areas. The at least one sensing element is elastically connected to the bases. The sealing ring surrounds the bases, and is connected to at least one of the metal bonding areas. The lid is opposite to the active surface of the circuit chip, and is connected to the sealing ring to have a hermetic chamber which seals the sensing element and the active surface of the circuit chip.

    摘要翻译: 一个实施例公开了一种将微机电系统装置与包括电路芯片,微机电系统装置,密封环和盖的电路芯片集成的装置。 电路芯片包括基板和多个金属接合区域。 基板具有具有电路面积的有源表面,并且金属接合区域设置在有源表面上并电连接到电路。 微机电系统装置包括多个基座和至少一个感测元件。 基底连接至至少一个金属接合区域。 至少一个感测元件弹性地连接到基座。 所述密封环围绕所述基部,并且与所述金属接合区域中的至少一个连接。 盖与电路芯片的有效表面相对,并连接到密封环,以具有密封感测元件和电路芯片的有效表面的密封室。

    APPARATUS INTEGRATING MICROELECTROMECHANICAL SYSTEM DEVICE WITH CIRCUIT CHIP AND METHODS FOR FABRICATING THE SAME
    10.
    发明申请
    APPARATUS INTEGRATING MICROELECTROMECHANICAL SYSTEM DEVICE WITH CIRCUIT CHIP AND METHODS FOR FABRICATING THE SAME 有权
    具有电路芯片的装置集成微电子系统装置及其制造方法

    公开(公告)号:US20120001276A1

    公开(公告)日:2012-01-05

    申请号:US13173119

    申请日:2011-06-30

    IPC分类号: H01L29/84 H01L21/02

    摘要: One embodiment discloses an apparatus integrating a microelectromechanical system device with a circuit chip which comprises a circuit chip, a microelectromechanical system device, a sealing ring, and a lid. The circuit chip comprises a substrate and a plurality of metal bonding areas. The substrate has an active surface with electrical circuit area, and the metal bonding areas are disposed on the active surface and electrically connected to the electrical circuits. The microelectromechanical system device comprises a plurality of bases and at least one sensing element. The bases are connected to at least one of the metal bonding areas. The at least one sensing element is elastically connected to the bases. The sealing ring surrounds the bases, and is connected to at least one of the metal bonding areas. The lid is opposite to the active surface of the circuit chip, and is connected to the sealing ring to have a hermetic chamber which seals the sensing element and the active surface of the circuit chip.

    摘要翻译: 一个实施例公开了一种将微机电系统装置与包括电路芯片,微机电系统装置,密封环和盖子的电路芯片集成的装置。 电路芯片包括基板和多个金属接合区域。 基板具有具有电路面积的有源表面,并且金属接合区域设置在有源表面上并电连接到电路。 微机电系统装置包括多个基座和至少一个感测元件。 基底连接至至少一个金属接合区域。 至少一个感测元件弹性地连接到基座。 所述密封环围绕所述基部,并且与所述金属接合区域中的至少一个连接。 盖与电路芯片的有效表面相对,并连接到密封环,以具有密封感测元件和电路芯片的有效表面的密封室。